WO2011033866A1 - Coating device and coating method - Google Patents

Coating device and coating method Download PDF

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Publication number
WO2011033866A1
WO2011033866A1 PCT/JP2010/062795 JP2010062795W WO2011033866A1 WO 2011033866 A1 WO2011033866 A1 WO 2011033866A1 JP 2010062795 W JP2010062795 W JP 2010062795W WO 2011033866 A1 WO2011033866 A1 WO 2011033866A1
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WO
WIPO (PCT)
Prior art keywords
solution
ink tank
tank
ink
flow rate
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Application number
PCT/JP2010/062795
Other languages
French (fr)
Japanese (ja)
Inventor
健一 向井
唯史 塩崎
宏晃 新畑
勇夫 一尾
俊幸 佐々木
昭宏 重山
Original Assignee
シャープ株式会社
芝浦メカトロニクス株式会社
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Application filed by シャープ株式会社, 芝浦メカトロニクス株式会社 filed Critical シャープ株式会社
Priority to JP2011531845A priority Critical patent/JP5258972B2/en
Publication of WO2011033866A1 publication Critical patent/WO2011033866A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/21—Ink jet for multi-colour printing
    • B41J2/2107—Ink jet for multi-colour printing characterised by the ink properties
    • B41J2/2114—Ejecting specialized liquids, e.g. transparent or processing liquids

Definitions

  • the present invention relates to a coating apparatus and a coating method, and more particularly to a coating apparatus and a coating method for coating a solution on a substrate by an inkjet method. Furthermore, the present invention relates to a coating apparatus and a coating method for forming an alignment film or the like of a liquid crystal panel by an ink jet method. Note that this application claims priority based on Japanese Patent Application No. 2009-216867 filed on September 18, 2009, the entire contents of which are incorporated herein by reference. .
  • a liquid crystal panel which is a component of a liquid crystal display device, has a structure in which a pair of substrates are opposed to each other with a predetermined gap secured. A liquid crystal layer containing liquid crystal molecules is sealed in the gap between the substrates. In addition, an alignment film for aligning liquid crystal molecules is formed on the surfaces of both substrates on the liquid crystal layer side.
  • This alignment film is formed by applying a solution containing polyimide onto the surface of the substrate.
  • a solution containing polyimide onto the surface of the substrate.
  • an inkjet method has been proposed in addition to the spin coating method and the spray method (for example, Patent Documents 1 and 2).
  • the alignment film is applied by discharging a coating liquid (for example, a polyimide solution) from the inkjet coating apparatus onto the surface of the substrate.
  • a coating liquid for example, a polyimide solution
  • a coating liquid is supplied from the ink tank to the head of the ink jet coating apparatus. If there is only one ink tank, the ink tank must be replaced when the coating liquid in the ink tank runs out. During the replacement of the ink tank, the coating process for forming the alignment film cannot be executed, so that the throughput for forming the alignment film is reduced.
  • FIG. 1 is a diagram showing a configuration of an ink jet coating apparatus 1000 studied by the present inventors.
  • an inkjet head 110 having a nozzle 111 for discharging a coating liquid (for example, a polyimide solution) onto a substrate 190.
  • a coating liquid for example, a polyimide solution
  • the coating liquid is discharged from the nozzle 111 of the inkjet head 110, and an alignment film is formed on the surface of the substrate 190.
  • the coating liquid supplied to the inkjet head 110 is stored in the first ink tank 121 and the second ink tank 122.
  • the first ink tank 121 and the second ink tank 122 are pressurized tanks, and are connected to the intermediate tank 125 via ink pipes 131 and 132, respectively.
  • the supply tank (intermediate tank) 125 is connected to the inkjet head 110 via an ink pipe 137.
  • the ink pipes 131 and 132 are provided with flow rate adjustment valves (electromagnetic valves) 133 and 134, respectively.
  • the coating liquid is supplied from the supply tank 125 to the inkjet head 110, so that the first ink tank 121 or the second ink tank is reduced if the amount of the coating liquid stored in the supply tank 125 decreases. From 122, the supply liquid can be replenished to the supply tank 125.
  • the application liquid in the first ink tank 121 runs out, the application liquid can be replenished from the second ink tank 122, so that the first ink tank 121 can be replaced during that time. .
  • the application liquid in the second ink tank 122 runs out, the application liquid can be replenished from the first ink tank 121, so that the second ink tank 122 is replaced during that time. be able to. Therefore, in the ink jet coating apparatus 1000, the coating process for forming the alignment film can be continued even during the replacement of the ink tank, so that the problem of a decrease in throughput can be avoided.
  • the present inventor has found that the following problems occur in the inkjet coating apparatus 1000. That is, while the coating liquid is being supplied from the first ink tank 121 to the supply tank 125, the coating liquid in the second ink tank 122 and the ink pipe 132 may be in a state that does not flow for several hours (a neglected state). There is. At that time, if the solvent is volatilized from the coating liquid in the second ink tank 122, there is a possibility that a change in concentration or a change in viscosity may occur. When switching from the first ink tank 121 to the second ink tank 122, the concentration and viscosity are changed. There is a possibility that the changed coating liquid may be supplied to the supply tank 125. If such an application liquid is ejected by the inkjet head 110 to form an alignment film, the quality and yield may be adversely affected.
  • the present invention has been made in view of such a point, and a main object thereof is to provide a coating apparatus and a coating method capable of stably performing a coating process even when an ink tank is replaced. .
  • the coating apparatus is a coating apparatus that applies a solution to a substrate by an inkjet method, an inkjet head including a nozzle that discharges the solution to the substrate, a supply tank that supplies the solution to the inkjet head,
  • the supply tank includes a first ink tank and a second ink tank for replenishing the solution, and the supply tank is connected to a common ink pipe, and the common ink pipe is connected to the common ink pipe via the first ink pipe.
  • the first ink tank is connected to the second ink tank via a second ink pipe, and the first ink pipe adjusts the flow rate of the solution from the first ink tank.
  • a second flow rate adjusting valve for adjusting the flow rate of the solution from the second ink tank in the second ink pipe.
  • An adjustment valve is provided, and the first flow rate adjustment valve and the second flow rate adjustment valve are connected to a control device that controls each of the first flow rate adjustment valve and the second flow rate adjustment valve.
  • the supply tank is replenished with the solution from the first ink tank by controlling the first flow rate adjustment valve, and the control device controls the second flow rate adjustment valve to control the second ink tank.
  • the controller temporarily stops replenishing the solution from the first ink tank when replenishing the supply tank with the solution from the first ink tank.
  • the first flow rate adjustment valve is controlled to limit the flow rate
  • the second flow rate adjustment valve is controlled to replenish the supply tank with the solution from the second ink tank.
  • the controller when the controller refills the supply tank with the solution from the second ink tank, the controller temporarily interrupts replenishment of the solution from the second ink tank or reduces the flow rate.
  • the second flow rate adjustment valve is controlled so as to be restricted, and the first flow rate adjustment valve is controlled so as to replenish the supply tank with the solution from the first ink tank.
  • the first ink tank and the second ink tank are pressurized tanks in which the solution is stored.
  • a stage unit that holds the substrate is further provided, the substrate is a glass substrate for a liquid crystal panel, and the solution is a polyimide solution.
  • An application method is an application method in which a solution is applied to a substrate by an inkjet method, and includes a step of discharging the solution to the substrate using a nozzle and a step of supplying the solution to the nozzle.
  • the step of supplying the solution to the nozzle includes a step (a) of replenishing the supply tank connected to the nozzle from the first ink tank or the second ink tank, and a step of supplying the solution from the supply tank to the nozzle.
  • a step (b) of delivering the solution wherein the step (a) temporarily moves the second ink from the first ink tank to the supply tank; and And (a-2) moving the solution from the ink tank to the supply tank.
  • the time T1 for moving the solution in the step (a-1) and the time T2 for moving the solution in the step (a-2) have a relationship of T1> T2. It is characterized by.
  • the step (a-2) is executed at least once, the step of replacing the first ink tank is performed in a state where the solution remains in the second ink tank.
  • the step (a) further includes a step (a-3) of moving the solution from the second ink tank to the supply tank, and temporarily from the first ink tank. And (a-4) moving the solution to the supply tank.
  • the time T3 for moving the solution in the step (a-3) and the time T4 for moving the solution in the step (a-4) have a relationship of T3> T4. It is characterized by.
  • the step of replacing the second ink tank is performed in a state where the solution remains in the first ink tank.
  • the first ink tank and the second ink tank are pressurized tanks in which the solution is stored, and the step (a-1) includes the first ink tank and the supply tank. Is performed by controlling a solenoid valve provided in the first ink pipe connecting the two.
  • Another coating method is a coating method in which a solution is applied to a substrate by an inkjet method, a step of discharging the solution to the substrate using a nozzle, and a step of supplying the solution to the nozzle
  • the step of supplying the solution to the nozzle comprises: replenishing the supply tank connected to the nozzle from the first ink tank or the second ink tank (a); A step (b) of delivering the solution to a nozzle, wherein the step (a) moves the solution from the first ink tank to the supply tank, and temporarily from the second ink tank, Performing the step (1) of moving the solution to the supply tank; and at least moving the solution temporarily in the step (1)
  • the second ink tank is replaced with the solution remaining in the second ink tank, and the solution is moved from the second ink tank to the supply tank.
  • the substrate is a glass substrate for a liquid crystal panel, and an alignment film is formed in a step of discharging to the substrate.
  • a thin film for example, an alignment film
  • FIG. It is a figure for demonstrating the structure of the inkjet coating apparatus 1000.
  • FIG. It is a figure for demonstrating the structure of the coating device 100 which concerns on embodiment of this invention.
  • (A) And (b) is a figure for demonstrating the operation
  • FIG. It is a figure which shows typically an example of a structure of the coating device 100 which concerns on embodiment of this invention.
  • (A) And (b) is process drawing explaining the coating method which concerns on embodiment of this invention.
  • FIG. 2 schematically shows the configuration of the coating apparatus 100 of the present embodiment.
  • the coating apparatus 100 of the present embodiment is an apparatus (inkjet coating apparatus) that applies a solution to a substrate by an inkjet method.
  • the coating apparatus 100 of this embodiment includes a head unit 10 including a nozzle 12 that discharges a solution (droplet) to a substrate 90, and a tank unit 20 that supplies the solution to the head unit 10.
  • the head unit 10 includes a head (inkjet head) 11 in which nozzles 12 for discharging a solution are formed on a substrate 90.
  • the tank unit 20 includes a supply tank 25 that supplies a solution to the inkjet head 11, and a first ink tank 21 and a second ink tank 22 that replenish the supply tank 25 with the solution.
  • the inkjet head 11 is formed with one or a plurality of nozzles 12, and the example shown in FIG. 2 shows a structure in which two heads 11 are accommodated in a head cover 13.
  • the solution (application liquid) discharged from the nozzle 12 is, for example, a polyimide solution.
  • the first ink tank 21 and the second ink tank 22 of the present embodiment are pressurized tanks in which the solution (polyimide solution) is stored.
  • the solution discharged from the nozzle 12 is applied to the surface of a substrate (for example, a glass substrate) 90 placed on the stage 52.
  • the stage 52 can move in the horizontal direction (arrow 51), but the inkjet head 11 can also be configured to be movable.
  • the solution discharged from the nozzle 12 is supplied from the supply tank 25 of the tank unit 20.
  • the solution in the supply tank 25 decreases, the solution is replenished from the first ink tank 21 or the second ink tank 22.
  • the ink tank (21 or 22) is replaced with a new one.
  • the supply tank 25 of this embodiment is connected to the inkjet head 11 via an ink pipe 37.
  • the supply tank 25 is connected to a common ink pipe 35.
  • the common ink pipe 35 is connected to the first ink tank 21 and the second ink tank 22 at two branches (31, 32). Specifically, the common ink pipe 35 is connected to the first ink tank 21 via the first ink pipe 31 and is connected to the second ink tank 22 via the second ink pipe 32.
  • the first ink pipe 31 is provided with a first flow rate adjustment valve 33 for adjusting the flow rate of the solution from the first ink tank 21.
  • the second ink pipe 32 is provided with a second flow rate adjustment valve 34 that adjusts the flow rate of the solution from the second ink tank 22.
  • the first flow rate adjustment valve 33 and the second flow rate adjustment valve 34 are connected to the control device 60.
  • the first flow rate adjustment valve 33 and the second flow rate adjustment valve 34 of the present embodiment are electromagnetic valves, respectively, and the control device 60 can control the first flow rate adjustment valve 33 and the second flow rate adjustment valve 34, respectively. is there.
  • the control device 60 replenishes the supply tank 25 with the solution from the first ink tank 21 by controlling the first flow rate adjustment valve 33. Specifically, the first flow rate adjustment valve 33 is changed from the closed state to the open state by the control device 60, and the solution is introduced from the first ink tank 21 to the supply tank 25. Further, the control device 60 replenishes the supply tank 25 with the solution from the second ink tank 22 by controlling the second flow rate adjustment valve 34. Specifically, the second flow rate adjustment valve 34 is changed from the closed state to the open state by the control device 60, and the solution is introduced from the second ink tank 22 to the supply tank 25.
  • the first flow rate adjustment valve 33 is set so as to interrupt the replenishment of the solution from the first ink tank 21 at least once.
  • the second flow rate adjusting valve 34 is controlled so that the solution is supplied from the second ink tank 22 to the supply tank 25.
  • 3A and 3B are block diagrams for explaining the operation of solution supply (ink supply) in the coating apparatus 100 of the present embodiment.
  • the solution is replenished from the first ink tank 21 to the supply tank 25 corresponding to the consumption of the solution in the supply tank 25 (arrow 41).
  • the solution in the first ink tank 21 is exhausted and then switched to the second ink tank 22, the solution in the second ink tank 22 has not been flowing for several hours, for example (becomes left unattended). Therefore, the solvent of the solution may volatilize, causing a change in concentration or a change in viscosity.
  • the supply tank 25 is replenished from the first ink tank 21, the replenishment of the solution from the first ink tank 21 is temporarily interrupted, and the second ink tank.
  • the supply tank 25 is replenished with the solution from 22 (arrow 42).
  • the solution is sent from the second ink tank 22 to the supply tank 25 every predetermined time (for example, every 10 minutes).
  • the solution may be denatured (change in concentration / viscosity). It can be determined using whether it comes or not.
  • the solution when supplying a solution to the nozzle 12, the solution is replenished from the first ink tank 21 or the second ink tank 22 to the supply tank 25, and the solution is sent from the supply tank 25 to the nozzle 12.
  • the solution can be continuously discharged from the nozzle 12. That is, since there are a plurality of ink tanks for replenishing the solution in the supply tank 25, the solution can be replenished to the supply tank 25 by another ink tank even when one of the ink tanks is replaced. Is possible. Therefore, in the configuration of the present embodiment, the application process by ejection from the nozzle 12 can be continued even if the ink tank needs to be replaced.
  • the step of moving the solution from the first ink tank 21 to the supply tank 25 (see FIG. 3A) is being executed, the step of moving the solution from the second ink tank 22 to the supply tank 25 (FIG. 3). 3 (b)). Therefore, when the first ink tank 21 is replaced, even if the solution supply source is switched from the first ink tank 21 to the second ink tank 22, the solution in the second ink tank 22 flows at least once. Therefore, it is possible to suppress the change in the concentration and the viscosity of the solution in the second ink tank 22 from occurring. As a result, even when the ink tank is replaced, the coating process can be performed stably, and thus a thin film (for example, an alignment film) can be satisfactorily formed while suppressing deterioration in quality or yield. It becomes.
  • a thin film for example, an alignment film
  • the step of moving the solution from the first ink tank 21 to the supply tank 25 (see FIG. 3A)
  • the step of moving the solution from the second ink tank 22 to the supply tank 25 (see FIG. 3B). It is sufficient to determine how many times to be executed corresponding to the upper limit (for example, 10 minutes) of the standing time for the solution (coating liquid) existing in the second ink tank 22 and the second ink pipe 32.
  • the solution is supplied from the second ink tank 22 to the supply tank 25 according to the set number of substrates 90 to be processed (for example, every time one substrate is applied). You may perform the step which moves.
  • an appropriate execution time (for example, 10 minutes) of the step of moving the solution from the second ink tank 22 to the supply tank 25 may be appropriately selected in consideration of process conditions and the like. That's fine.
  • the point is to use the second ink tank 22 to flow the solution for a part of time while the first ink tank 21 is in use. Therefore, when the replenishment of the solution from the first ink tank 21 is interrupted, the amount of delivery from the first ink tank 21 is adjusted to the first flow rate without stopping the delivery from the first ink tank 21 completely. It is also possible to adjust the second flow rate adjustment valve 34 after adjusting with the valve 33 and to send out the solution from the second ink tank 22.
  • the same steps as those for the first ink tank 21 are executed for the second ink tank 22. That is, while the step of moving the solution from the second ink tank 22 to the supply tank 25 is being executed, the step of moving the solution from the first ink tank 21 that has been replaced to a new one to the supply tank 25 is executed. Next, when the storage amount of the solution in the second ink tank 22 decreases, the supply of the first ink tank 21 and the solution from the second ink tank 22 again with the solution remaining in the first ink tank 21. The source is switched, and then the second ink tank 22 is replaced. Thereafter, ink replenishment is repeatedly performed in the same manner.
  • FIG. 3A when the movement of the solution shown in FIG. 3A is the main supply and the supply of the solution shown in FIG. 3B is a temporary supply (sub-supply), FIG.
  • the solution transfer time T1 shown in a) and the solution transfer time T2 shown in FIG. 3B are controlled so as to satisfy the relationship of T1> T2.
  • the movement shown in FIG. 3B when the movement of the solution shown in FIG. 3B is the main supply and the supply of the solution shown in FIG. 3A is a temporary supply (sub-supply), the movement shown in FIG.
  • the solution transfer time T3 shown in FIG. 3A and the solution transfer time T4 shown in FIG. 3A are controlled so as to satisfy the relationship of T3> T4.
  • two ink tanks (21, 22) have been described as an example.
  • the technique of the present embodiment can also be applied to ink replenishment using three or more ink tanks.
  • the first ink tank 21 and the second ink tank 22 are pressurized tanks.
  • a flow pump is provided in the coating apparatus 100, and the first ink tank 21 and the second ink tank 22 are provided by the flow pump.
  • the solution may be fluidized.
  • the control device 60 that controls the first flow rate adjustment valve 33 and the second flow rate adjustment valve 34 is, for example, an MPU (micro processor unit), and the control device 60 is constructed by a personal computer (PC). May be.
  • the control device 60 can be configured to have a built-in program for executing the ink replenishment step of the present embodiment.
  • FIG. 4 is a diagram schematically showing an example of the configuration of the inkjet coating apparatus 100 of the present embodiment.
  • the head unit 10 shown in FIG. 4 includes an inkjet head 11 having nozzles 12 for discharging a solution on a substrate.
  • the head 11 has a surface (discharge surface) on which a solution (droplet) is discharged from the nozzle 12.
  • One head 11 is formed with one or a plurality of nozzles 12. In the example shown in FIG. 4, two heads 11 are formed in the head unit 10.
  • the inkjet head 11 in the head unit 10 can discharge a solution (coating liquid) from the nozzle 12.
  • a solution (coating solution) to be used is, for example, a polyimide solution.
  • the solution to be used is changed depending on the film (functional film) formed on the substrate 90.
  • the film (functional film) formed on the substrate 90 include a resist film, a conductive film, and an insulating film, and a necessary solution for the film is used.
  • the head unit 10 is connected to the tank unit 20, and a solution (coating liquid) is supplied from the tank unit 20 to the head unit 10.
  • the tank unit 20 includes the supply tank 25 that supplies the solution to the inkjet head 11, and the first ink tank 21 and the second ink tank 22 that replenish the supply tank 25 with the solution.
  • the substrate 90 formed with the solution from the nozzle 12 is placed on the stage 52 of the stage unit 50.
  • the stage 52 is provided with lift pins 54 for the substrate 90, and the substrate 90 can be moved by the lift pins 54.
  • the stage unit 50 includes a stage moving mechanism 55 that can move while the substrate 90 is placed on the stage 52.
  • the substrate 90 can be moved directly below the nozzles 12 of the inkjet head 11 by the stage moving mechanism 55 (see arrow 51).
  • the substrate 90 is, for example, a glass substrate, and the substrate 90 in the present embodiment is a glass substrate for a liquid crystal panel.
  • the substrate 90 may be a mother glass before being cut out to the dimensions of the liquid crystal panel, or may be a glass having the size of the liquid crystal panel after being cut out.
  • the substrate 90 may be an array substrate on which a thin film transistor (TFT) is manufactured (or an intermediate product), or a CF substrate on which a color filter (CF) is formed (or an intermediate product). It may be.
  • TFT thin film transistor
  • CF color filter
  • the substrate 90 may be a glass substrate, a resin substrate, or another thin plate such as a wafer.
  • the substrate 90 is not limited to the liquid crystal panel 90, and may be a thin substrate for manufacturing a PDP, an organic EL panel, other flat panel displays, or electronic devices.
  • a wiping portion 57 for example, an elastic blade for wiping the nozzle 12 of the head 11 is provided.
  • the wiping portion 57 removes a coating liquid (for example, a polyimide solution) remaining on the ejection surface of the inkjet head 11 by wiping. More specifically, if the solution (coating liquid) remains on the discharge surface of the nozzle 12 of the inkjet head 11, the liquid surface of the discharge port (orifice) of the nozzle 12 becomes uneven. The discharged liquid droplet becomes unstable. Therefore, when the previous coating process is completed, the wiping of the nozzle 12 is performed before the next coating process is performed.
  • the wiping portion 57 is not limited to an elastic blade, and a water absorbent sheet that can absorb the coating liquid can also be used.
  • the wiping portion 57 of this embodiment is connected to the stage moving mechanism 55 and can be moved by the stage moving mechanism 55. It is also possible to execute the solution flow (arrow 42) step shown in FIG. 3B in accordance with the wiping operation.
  • the head unit 10 and the stage unit 50 are installed in a clean room with a filter.
  • the coating process of the inkjet coating apparatus 100 can be controlled by a computer (for example, a personal computer) 62 disposed outside the clean room.
  • control device 60 of the present embodiment can also be constructed by a computer 62.
  • the computer 62 stores the ink replenishment step program of this embodiment, and the solution flow step (for example, see FIGS. 3A and 3B) can be executed by the ink replenishment program. it can. Since such a program can be exchanged through a communication line (for example, a LAN line or an Internet line), it may not be stored in the computer 62. Further, such a program can be stored in a storage medium (for example, a semiconductor memory, an optical recording disk, a hard disk, etc.) and moved.
  • a storage medium for example, a semiconductor memory, an optical recording disk, a hard disk, etc.
  • FIGS. 5A and 5B are process diagrams for explaining the coating method of the present embodiment.
  • a substrate 90 to be coated is placed on the stage 52.
  • the ink jet head 11 is wiped using a wiping portion 57 for wiping the nozzle 12, and a solution (coating liquid) remaining on the ejection surface of the nozzle 12 is obtained. Wipe off.
  • a functional film for example, an alignment film made of polyimide
  • the substrate 90 disposed on the stage 52 is moved (see arrow 51) to form a functional film in a predetermined region.
  • the functional film may be formed by moving the inkjet head 11 without being limited to the method of moving the substrate 90.
  • the next film forming process is executed after the formation of the functional film by the ink jet head 11, the state shown in FIG. 5A is obtained again, and then shown in FIG. 5B. The coating process is executed.
  • the step of discharging the solution (coating solution) 16 to the substrate 90 using the nozzle 12 and the step of supplying the solution 16 to the nozzle 12 are executed.
  • the step of supplying the solution to the nozzle 12 includes the step (a) of replenishing the supply tank 25 connected to the nozzle 12 from the first ink tank 21 or the second ink tank 22, and the nozzle from the supply tank 25. And (b) delivering the solution. Further, when the solution is supplied from the first ink tank 21 or the second ink tank 22 to the supply tank 25, the step of moving the solution from the first ink tank 21 to the supply tank 25 (arrow in FIG. 3A). 41) and the step of moving the solution from the second ink tank 22 to the supply tank 25 (see arrow 42 in FIG. 3B) is performed between the steps.
  • the solution can be continuously replenished while the first ink tank 21 and the second ink tank 22 are exchanged. Therefore, the application process does not have to be interrupted when replacing the ink tank, and a decrease in throughput can be suppressed. Furthermore, even when the first ink tank 21 is replaced, even if the first ink tank 21 is switched to the second ink tank 22, the solution in the second ink tank 22 flows at least once. It can suppress that the density
  • a thin film for example, an alignment film
  • JP-A-2002-52731 JP-A-2002-52731.
  • the technique disclosed in this publication relates to an ink jet plotter in a textile printing operation in which a figure or pattern is drawn on a cloth or the like.
  • This ink jet plotter has two ink tanks for replenishing ink in an intermediate tank.
  • the solution in one of the ink tanks (22) is made to flow to suppress the change in the concentration or viscosity of the solution, thereby stably applying the solution.
  • the technical idea that the process can be performed is not disclosed, and the inkjet plotter disclosed in the publication is essentially different from the embodiment of the present invention.
  • ink is replenished alternately from two ink tanks to an intermediate tank.
  • this is used as it is for forming an alignment film
  • the following problems arise. That is, when ink is simply replenished from two tanks alternately, the timing of tank replacement is difficult.
  • the ink (solution) of the two ink tanks is mixed in the intermediate tank, the surface of the substrate is used when applying to a large substrate using an alignment film coating solution (for example, polyimide solution). In this case, there may be a problem that the state of the alignment film varies.
  • an alignment film coating solution for example, polyimide solution
  • the main supply (replenishment) of the solution is performed from the first tank 21 and the replenishment from the second tank 22 is temporarily performed.
  • the solution in the piping 32 connected to the 2nd tank 22 especially the 2nd tank 22 solidifies by volatilization of a solvent. That is, by temporarily supplying the solution from the second tank 22, before the solution in the pipe 32 of the second tank 22 is solidified (or the change in the concentration and viscosity of the solution due to the volatilization of the solvent becomes significant.
  • the solution in the pipe 32 is sent to the supply tank 25. Therefore, by suppressing the change in the state of the solution in the pipe 32 (that is, the coating solution for the alignment film) and preventing solidification, it is possible to suppress the variation in the state of the alignment film in the plane of the large substrate. Can do.
  • the charge of the main supply is switched to the second tank 22 and the first tank 21 is replaced during that time.
  • the main supply becomes the second tank 22
  • the main supply (replenishment) of the solution is performed from the second tank 22, and the solution is not solidified from the first tank 21 after the replacement.
  • the solution is temporarily replenished from the first tank 21 to the supply tank 25.
  • the second tank 22 becomes empty, the charge of main supply is switched to the first tank 21 again, and the second tank 22 is replaced during that time. It is also possible to clean the piping when replacing the tank.
  • the present invention it is possible to provide a coating apparatus and a coating method capable of stably performing a coating process even when an ink tank is replaced.

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  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Disclosed is a coating device that can stably execute a coating step even if an ink tank is exchanged. The coating device (100) coats by means of an inkjet method, and a supply tank (25) that supplies a solution to an inkjet head (11) is connected to a first ink tank (21) with a common ink ductwork (35) and a first ink ductwork (31) therebetween, and is connected to a second ink tank (22) with the common ink ductwork (35) and a second ink ductwork (32) therebetween. When the supply tank (25) is replenished with the solution from the first ink tank (21), a control device (60) connected to a first flow-rate adjustment valve (33) and a second flow-rate adjustment valve (34) temporarily controls the first flow-rate adjustment valve (33) so as to interrupt the replenishing or to control the flow rate of the solution from the first ink tank (21), and the second flow-rate adjustment valve (34) so as to replenish the supply tank (25) with the solution from the second ink tank (22).

Description

塗布装置および塗布方法Coating apparatus and coating method
　本発明は、塗布装置および塗布方法に関し、特に、基板に溶液をインクジェット方式によって塗布する塗布装置および塗布方法に関する。さらには、本発明は、液晶パネルの配向膜などをインクジェット方式によって形成する塗布装置および塗布方法に関する。
　なお、本出願は２００９年９月１８日に出願された日本国特許出願２００９－２１６８６７号に基づく優先権を主張しており、その出願の全内容は本明細書中に参照として組み入れられている。 The present invention relates to a coating apparatus and a coating method, and more particularly to a coating apparatus and a coating method for coating a solution on a substrate by an inkjet method. Furthermore, the present invention relates to a coating apparatus and a coating method for forming an alignment film or the like of a liquid crystal panel by an ink jet method.
Note that this application claims priority based on Japanese Patent Application No. 2009-216867 filed on September 18, 2009, the entire contents of which are incorporated herein by reference. .
　液晶表示装置の構成部品である液晶パネルは、一対の基板を所定のギャップを確保した状態で対向させた構造を有している。この基板間のギャップには、液晶分子を含む液晶層が封入されている。また、両基板の液晶層側の表面には、液晶分子を配向させる配向膜が形成されている。 A liquid crystal panel, which is a component of a liquid crystal display device, has a structure in which a pair of substrates are opposed to each other with a predetermined gap secured. A liquid crystal layer containing liquid crystal molecules is sealed in the gap between the substrates. In addition, an alignment film for aligning liquid crystal molecules is formed on the surfaces of both substrates on the liquid crystal layer side.
　この配向膜は、ポリイミドを含んだ溶液を基板の表面に塗布することによって形成される。ポリイミド溶液を基板に塗布する方法としては、スピンコート法およびスプレー法の他に、インクジェット法が提案されている（例えば、特許文献１、２など）。 This alignment film is formed by applying a solution containing polyimide onto the surface of the substrate. As a method for applying the polyimide solution to the substrate, an inkjet method has been proposed in addition to the spin coating method and the spray method (for example, Patent Documents 1 and 2).
特開２００７－２６４５９７号公報JP 2007-264597 A 特開２００６－２４８１０２号公報JP 2006-248102 A
　インクジェット法によって配向膜を形成する場合、インクジェット塗布装置から塗布液（例えば、ポリイミド溶液）を基板の表面に吐出することによって配向膜の塗布が行われる。このインクジェット塗布装置のヘッドには、インクタンクから塗布液が供給されるが、インクタンクが一つしかないと、当該インクタンクの塗布液が無くなった時に、インクタンクの交換をしなければならない。インクタンクの交換中は、配向膜を形成する塗布工程を実行することができないので、配向膜形成のスループットが低下してしまうことになる。 When the alignment film is formed by the inkjet method, the alignment film is applied by discharging a coating liquid (for example, a polyimide solution) from the inkjet coating apparatus onto the surface of the substrate. A coating liquid is supplied from the ink tank to the head of the ink jet coating apparatus. If there is only one ink tank, the ink tank must be replaced when the coating liquid in the ink tank runs out. During the replacement of the ink tank, the coating process for forming the alignment film cannot be executed, so that the throughput for forming the alignment film is reduced.
　そのような不具合が生じないように、本願発明者は、加圧インクタンクを２つ設けたインクジェット塗布装置の動作について検討した。図１は、本願発明者が検討したインクジェット塗布装置１０００の構成を示す図である。 In order to prevent such a problem from occurring, the present inventor examined the operation of an ink jet coating apparatus provided with two pressurized ink tanks. FIG. 1 is a diagram showing a configuration of an ink jet coating apparatus 1000 studied by the present inventors.
　図１に示したインクジェット塗布装置１０００には、基板１９０に塗布液（例えば、ポリイミド溶液）を吐出するノズル１１１を有するインクジェットヘッド１１０が設けられている。ここで、インクジェットヘッド１１０のノズル１１１から塗布液が吐出され、基板１９０の表面に配向膜が形成されていく。 1 is provided with an inkjet head 110 having a nozzle 111 for discharging a coating liquid (for example, a polyimide solution) onto a substrate 190. The inkjet coating apparatus 1000 shown in FIG. Here, the coating liquid is discharged from the nozzle 111 of the inkjet head 110, and an alignment film is formed on the surface of the substrate 190.
　インクジェットヘッド１１０に供給される塗布液は、第１インクタンク１２１および第２インクタンク１２２に貯蔵されている。第１インクタンク１２１および第２インクタンク１２２は、加圧タンクであり、それぞれ、インク配管１３１および１３２を介して、中間タンク１２５に接続されている。そして、供給タンク（中間タンク）１２５は、インク配管１３７を介してインクジェットヘッド１１０に接続されている。なお、インク配管１３１および１３２には、それぞれ、流量調整弁（電磁弁）１３３および１３４が取り付けられている。 The coating liquid supplied to the inkjet head 110 is stored in the first ink tank 121 and the second ink tank 122. The first ink tank 121 and the second ink tank 122 are pressurized tanks, and are connected to the intermediate tank 125 via ink pipes 131 and 132, respectively. The supply tank (intermediate tank) 125 is connected to the inkjet head 110 via an ink pipe 137. The ink pipes 131 and 132 are provided with flow rate adjustment valves (electromagnetic valves) 133 and 134, respectively.
　図示したインクジェット塗布装置１０００では、供給タンク１２５からインクジェットヘッド１１０に塗布液を供給するので、供給タンク１２５に貯蔵されている塗布液の量が少なくなれば、第１インクタンク１２１または第２インクタンク１２２から、供給タンク１２５に塗布液を補充することができる。 In the illustrated inkjet coating apparatus 1000, the coating liquid is supplied from the supply tank 125 to the inkjet head 110, so that the first ink tank 121 or the second ink tank is reduced if the amount of the coating liquid stored in the supply tank 125 decreases. From 122, the supply liquid can be replenished to the supply tank 125.
　さらには、第１インクタンク１２１の塗布液がなくなった時は、第２インクタンク１２２から塗布液の補充を行うことができるので、その間に、第１インクタンク１２１の交換を実行することができる。同様に、第２インクタンク１２２の塗布液がなくなった時は、今度は、第１インクタンク１２１から塗布液の補充を行うことができるので、その間に、第２インクタンク１２２の交換を実行することができる。したがって、インクジェット塗布装置１０００では、インクタンクの交換中であっても、配向膜を形成する塗布工程を続けることができるので、スループットの低下の問題を回避することができる。 Furthermore, when the application liquid in the first ink tank 121 runs out, the application liquid can be replenished from the second ink tank 122, so that the first ink tank 121 can be replaced during that time. . Similarly, when the application liquid in the second ink tank 122 runs out, the application liquid can be replenished from the first ink tank 121, so that the second ink tank 122 is replaced during that time. be able to. Therefore, in the ink jet coating apparatus 1000, the coating process for forming the alignment film can be continued even during the replacement of the ink tank, so that the problem of a decrease in throughput can be avoided.
　しかしながら、本願発明者は、インクジェット塗布装置１０００には次のような問題が生じることを見出した。すなわち、第１インクタンク１２１から塗布液を供給タンク１２５に供給している間、第２インクタンク１２２およびインク配管１３２内にある塗布液は、数時間流動しない状態（放置状態）になる可能性がある。その際に、第２インクタンク１２２の塗布液から溶媒が揮発すると、濃度変化または粘度変化が起きる可能性があり、第１インクタンク１２１から第２インクタンク１２２へと切り換える時に、その濃度・粘度変化を起こした塗布液が供給タンク１２５に供給されてしまうおそれがある。そして、そのような塗布液をインクジェットヘッド１１０が吐出して、配向膜を形成したとすれば、品質や歩留まりに悪影響を及ぼす可能性がある。 However, the present inventor has found that the following problems occur in the inkjet coating apparatus 1000. That is, while the coating liquid is being supplied from the first ink tank 121 to the supply tank 125, the coating liquid in the second ink tank 122 and the ink pipe 132 may be in a state that does not flow for several hours (a neglected state). There is. At that time, if the solvent is volatilized from the coating liquid in the second ink tank 122, there is a possibility that a change in concentration or a change in viscosity may occur. When switching from the first ink tank 121 to the second ink tank 122, the concentration and viscosity are changed. There is a possibility that the changed coating liquid may be supplied to the supply tank 125. If such an application liquid is ejected by the inkjet head 110 to form an alignment film, the quality and yield may be adversely affected.
　本発明はかかる点に鑑みてなされたものであり、その主な目的は、インクタンクを交換する際においても安定して塗布工程を実行することができる塗布装置および塗布方法を提供することにある。 The present invention has been made in view of such a point, and a main object thereof is to provide a coating apparatus and a coating method capable of stably performing a coating process even when an ink tank is replaced. .
　本発明に係る塗布装置は、基板に溶液をインクジェット方式によって塗布する塗布装置であり、前記基板に前記溶液を吐出するノズルを含むインクジェットヘッドと、前記インクジェットヘッドに前記溶液を供給する供給タンクと、前記供給タンクに前記溶液を補充する第１インクタンクおよび第２インクタンクとを備え、前記供給タンクは、共通インク配管に接続されており、前記共通インク配管は、第１インク配管を介して前記第１インクタンクに接続され、かつ、第２インク配管を介して前記第２インクタンクに接続されており、前記第１インク配管には、前記第１インクタンクからの溶液の流量を調整する第１流量調整弁が設けられており、かつ、前記第２インク配管には、前記第２インクタンクからの溶液の流量を調整する第２流量調整弁が設けられており、前記第１流量調整弁および第２流量調整弁は、当該第１及び第２流量調整弁のそれぞれを制御する制御装置に接続されており、前記制御装置は、前記第１流量調整弁を制御することにより、前記第１インクタンクから溶液を前記供給タンクに補充し、そして、前記制御装置は、前記第２流量調整弁を制御することにより、前記第２インクタンクから溶液を前記供給タンクに補充し、しかも、前記制御装置は、前記第１インクタンクから溶液を前記供給タンクに補充する際に、一時的に、前記第１インクタンクからの溶液の補充を中断または流量を制限するように前記第１流量調整弁を制御し、かつ、前記第２インクタンクから溶液を前記供給タンクに補充するように前記第２流量調整弁を制御する。
　ある好適な実施形態において、さらに、前記制御装置は、前記第２インクタンクから溶液を前記供給タンクに補充する際に、一時的に、前記第２インクタンクからの溶液の補充を中断または流量を制限するように前記第２流量調整弁を制御し、かつ、前記第１インクタンクから溶液を前記供給タンクに補充するように前記第１流量調整弁を制御する。
　ある好適な実施形態において、前記第１インクタンクおよび前記第２インクタンクは、前記溶液が貯蔵された加圧タンクである。
　ある好適な実施形態では、さらに、前記基板を保持するステージユニットを備え、前記基板は、液晶パネル用のガラス基板であり、前記溶液は、ポリイミド液である。
　本発明に係る塗布方法は、基板に溶液をインクジェット方式によって塗布する塗布方法であり、ノズルを用いて前記基板に対して溶液を吐出する工程と、前記ノズルに前記溶液を供給する工程とを含み、前記ノズルに前記溶液を供給する工程は、前記ノズルに接続された供給タンクに、第１インクタンクまたは第２インクタンクから前記溶液を補充する工程（ａ）と、前記供給タンクから前記ノズルに前記溶液を送り出す工程（ｂ）とを含み、前記工程（ａ）は、前記第１インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－１）と、一時的に、前記第２インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－２）とを含む。
　ある好適な実施形態において、前記ステップ（ａ－１）において前記溶液を移動させる時間Ｔ１と、前記ステップ（ａ－２）において前記溶液を移動させる時間Ｔ２とが、Ｔ１＞Ｔ２の関係であることを特徴とする。
　ある好適な実施形態では、前記ステップ（ａ－２）を少なくとも一回実行した後、前記第２インクタンク内に前記溶液が残っている状態で、前記第１インクタンクを交換する工程を実行する。
　ある好適な実施形態において、前記工程（ａ）は、さらに、前記第２インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－３）と、一時的に、前記第１インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－４）とを含む。
　ある好適な実施形態において、前記ステップ（ａ－３）において前記溶液を移動させる時間Ｔ３と、前記ステップ（ａ－４）において前記溶液を移動させる時間Ｔ４とが、Ｔ３＞Ｔ４の関係であることを特徴とする。
　ある好適な実施形態では、前記ステップ（ａ－４）を少なくとも一回実行した後、前記第１インクタンク内に前記溶液が残っている状態で、前記第２インクタンクを交換する工程を実行する。
　ある好適な実施形態において、前記第１インクタンクおよび前記第２インクタンクは、前記溶液が貯蔵された加圧タンクであり、前記ステップ（ａ－１）は、前記第１インクタンクと前記供給タンクとを接続する第１インク配管に設けられた電磁弁を制御することによって実行される。
　本発明に係る他の塗布方法は、基板に溶液をインクジェット方式によって塗布する塗布方法であり、ノズルを用いて前記基板に対して溶液を吐出する工程と、前記ノズルに前記溶液を供給する工程とを含み、前記ノズルに前記溶液を供給する工程は、前記ノズルに接続された供給タンクに、第１インクタンクまたは第２インクタンクから前記溶液を補充する工程（ａ）と、前記供給タンクから前記ノズルに前記溶液を送り出す工程（ｂ）とを含み、前記工程（ａ）は、前記第１インクタンクから、前記供給タンクに前記溶液を移動させるとともに、一時的に、前記第２インクタンクから、前記供給タンクに前記溶液を移動させることを実行するステップ（１）と、前記ステップ（１）における前記一時的に溶液を移動させることを少なくとも一回実行した後、前記第２インクタンク内に前記溶液が残っている状態で、前記第１インクタンクを交換するステップ（２）と、前記第２インクタンクから、前記供給タンクに前記溶液を移動させるとともに、一時的に、前記第１インクタンクから、前記供給タンクに前記溶液を移動させることを実行するステップ（３）と、前記ステップ（３）における前記一時的に溶液を移動させることを少なくとも一回実行した後、前記第１インクタンク内に前記溶液が残っている状態で、前記第２インクタンクを交換するステップ（４）を実行する。
　ある好適な実施形態において、前記基板は、液晶パネル用のガラス基板であり、前記基板に対して吐出する工程において、配向膜が形成される。 The coating apparatus according to the present invention is a coating apparatus that applies a solution to a substrate by an inkjet method, an inkjet head including a nozzle that discharges the solution to the substrate, a supply tank that supplies the solution to the inkjet head, The supply tank includes a first ink tank and a second ink tank for replenishing the solution, and the supply tank is connected to a common ink pipe, and the common ink pipe is connected to the common ink pipe via the first ink pipe. The first ink tank is connected to the second ink tank via a second ink pipe, and the first ink pipe adjusts the flow rate of the solution from the first ink tank. And a second flow rate adjusting valve for adjusting the flow rate of the solution from the second ink tank in the second ink pipe. An adjustment valve is provided, and the first flow rate adjustment valve and the second flow rate adjustment valve are connected to a control device that controls each of the first flow rate adjustment valve and the second flow rate adjustment valve. The supply tank is replenished with the solution from the first ink tank by controlling the first flow rate adjustment valve, and the control device controls the second flow rate adjustment valve to control the second ink tank. And the controller temporarily stops replenishing the solution from the first ink tank when replenishing the supply tank with the solution from the first ink tank. Alternatively, the first flow rate adjustment valve is controlled to limit the flow rate, and the second flow rate adjustment valve is controlled to replenish the supply tank with the solution from the second ink tank.
In a preferred embodiment, when the controller refills the supply tank with the solution from the second ink tank, the controller temporarily interrupts replenishment of the solution from the second ink tank or reduces the flow rate. The second flow rate adjustment valve is controlled so as to be restricted, and the first flow rate adjustment valve is controlled so as to replenish the supply tank with the solution from the first ink tank.
In a preferred embodiment, the first ink tank and the second ink tank are pressurized tanks in which the solution is stored.
In a preferable embodiment, a stage unit that holds the substrate is further provided, the substrate is a glass substrate for a liquid crystal panel, and the solution is a polyimide solution.
An application method according to the present invention is an application method in which a solution is applied to a substrate by an inkjet method, and includes a step of discharging the solution to the substrate using a nozzle and a step of supplying the solution to the nozzle. The step of supplying the solution to the nozzle includes a step (a) of replenishing the supply tank connected to the nozzle from the first ink tank or the second ink tank, and a step of supplying the solution from the supply tank to the nozzle. A step (b) of delivering the solution, wherein the step (a) temporarily moves the second ink from the first ink tank to the supply tank; and And (a-2) moving the solution from the ink tank to the supply tank.
In a preferred embodiment, the time T1 for moving the solution in the step (a-1) and the time T2 for moving the solution in the step (a-2) have a relationship of T1> T2. It is characterized by.
In a preferred embodiment, after the step (a-2) is executed at least once, the step of replacing the first ink tank is performed in a state where the solution remains in the second ink tank. .
In a preferred embodiment, the step (a) further includes a step (a-3) of moving the solution from the second ink tank to the supply tank, and temporarily from the first ink tank. And (a-4) moving the solution to the supply tank.
In a preferred embodiment, the time T3 for moving the solution in the step (a-3) and the time T4 for moving the solution in the step (a-4) have a relationship of T3> T4. It is characterized by.
In a preferred embodiment, after the step (a-4) is executed at least once, the step of replacing the second ink tank is performed in a state where the solution remains in the first ink tank. .
In a preferred embodiment, the first ink tank and the second ink tank are pressurized tanks in which the solution is stored, and the step (a-1) includes the first ink tank and the supply tank. Is performed by controlling a solenoid valve provided in the first ink pipe connecting the two.
Another coating method according to the present invention is a coating method in which a solution is applied to a substrate by an inkjet method, a step of discharging the solution to the substrate using a nozzle, and a step of supplying the solution to the nozzle The step of supplying the solution to the nozzle comprises: replenishing the supply tank connected to the nozzle from the first ink tank or the second ink tank (a); A step (b) of delivering the solution to a nozzle, wherein the step (a) moves the solution from the first ink tank to the supply tank, and temporarily from the second ink tank, Performing the step (1) of moving the solution to the supply tank; and at least moving the solution temporarily in the step (1) The second ink tank is replaced with the solution remaining in the second ink tank, and the solution is moved from the second ink tank to the supply tank. And (3) executing temporarily moving the solution from the first ink tank to the supply tank, and at least moving the solution temporarily in the step (3). After performing once, the step (4) of replacing the second ink tank is performed in a state where the solution remains in the first ink tank.
In a preferred embodiment, the substrate is a glass substrate for a liquid crystal panel, and an alignment film is formed in a step of discharging to the substrate.
　本発明によれば、ノズルに接続された供給タンクに、第１インクタンクまたは第２インクタンクから溶液を補充する際に、第１インクタンクから供給タンクに溶液を移動させるステップと、一時的に、第２インクタンクから供給タンクに溶液を移動させるステップとを行う。したがって、第１インクタンクの交換時に、第２インクタンクへと切り換えても、第２インクタンクの溶液は少なくとも一回は流動しているので、それゆえに、第２インクタンクにおける溶液の濃度変化や粘度変化が生じることを抑制することができる。その結果、インクタンクを交換する際においても安定して塗布工程を実行することができ、したがって、薄膜（例えば、配向膜）を良好に形成することが可能となる。 According to the present invention, when the supply tank connected to the nozzle is replenished with the solution from the first ink tank or the second ink tank, the step of moving the solution from the first ink tank to the supply tank; And moving the solution from the second ink tank to the supply tank. Accordingly, even when switching to the second ink tank when replacing the first ink tank, the solution in the second ink tank flows at least once. Therefore, the concentration change of the solution in the second ink tank is It can suppress that a viscosity change arises. As a result, the application process can be stably performed even when the ink tank is replaced, and thus a thin film (for example, an alignment film) can be formed satisfactorily.
インクジェット塗布装置１０００の構成を説明するための図である。It is a figure for demonstrating the structure of the inkjet coating apparatus 1000. FIG. 本発明の実施形態に係る塗布装置１００の構成を説明するための図である。It is a figure for demonstrating the structure of the coating device 100 which concerns on embodiment of this invention. （ａ）および（ｂ）は、塗布装置１００におけるインク供給の動作を説明するための図である。(A) And (b) is a figure for demonstrating the operation | movement of the ink supply in the coating device 100. FIG. 本発明の実施形態に係る塗布装置１００の構成の一例を模式的に示す図である。It is a figure which shows typically an example of a structure of the coating device 100 which concerns on embodiment of this invention. （ａ）および（ｂ）は、本発明の実施形態に係る塗布方法について説明する工程図である。(A) And (b) is process drawing explaining the coating method which concerns on embodiment of this invention.
　以下、図面を参照しながら、本発明の実施形態を説明する。以下の図面においては、説明の簡潔化のために、実質的に同一の機能を有する構成要素を同一の参照符号で示す。なお、本発明は以下の実施形態に限定されない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, components having substantially the same function are denoted by the same reference numerals for the sake of brevity. In addition, this invention is not limited to the following embodiment.
　図２は、本実施形態の塗布装置１００の構成を模式的に示している。本実施形態の塗布装置１００は、基板に溶液をインクジェット方式によって塗布する装置（インクジェット塗布装置）である。 FIG. 2 schematically shows the configuration of the coating apparatus 100 of the present embodiment. The coating apparatus 100 of the present embodiment is an apparatus (inkjet coating apparatus) that applies a solution to a substrate by an inkjet method.
　本実施形態の塗布装置１００は、基板９０に溶液（液滴）を吐出するノズル１２を含むヘッドユニット１０と、ヘッドユニット１０に溶液を供給するタンクユニット２０とから構成されている。ヘッドユニット１０は、基板９０に溶液を吐出するノズル１２が形成されたヘッド（インクジェットヘッド）１１を備えている。タンクユニット２０は、インクジェットヘッド１１に溶液を供給する供給タンク２５と、供給タンク２５に溶液を補充する第１インクタンク２１および第２インクタンク２２とから構成されている。 The coating apparatus 100 of this embodiment includes a head unit 10 including a nozzle 12 that discharges a solution (droplet) to a substrate 90, and a tank unit 20 that supplies the solution to the head unit 10. The head unit 10 includes a head (inkjet head) 11 in which nozzles 12 for discharging a solution are formed on a substrate 90. The tank unit 20 includes a supply tank 25 that supplies a solution to the inkjet head 11, and a first ink tank 21 and a second ink tank 22 that replenish the supply tank 25 with the solution.
　インクジェットヘッド１１には、１つ又は複数のノズル１２が形成されており、図２に示した例では、２個のヘッド１１がヘッドカバー１３に収納された構造を示している。ノズル１２から吐出される溶液（塗布液）は、例えば、ポリイミド溶液である。また、本実施形態の第１インクタンク２１および第２インクタンク２２は、その溶液（ポリイミド溶液）が貯蔵された加圧タンクである。本実施形態の塗布装置１００を用いて薄膜（例えば、配向膜）を形成する場合、ノズル１２から吐出される溶液は、ステージ５２上に載置された基板（例えば、ガラス基板）９０の表面に塗布される。ステージ５２は、水平方向（矢印５１）に移動可能であるが、インクジェットヘッド１１を移動可能なように構成することも可能である。 The inkjet head 11 is formed with one or a plurality of nozzles 12, and the example shown in FIG. 2 shows a structure in which two heads 11 are accommodated in a head cover 13. The solution (application liquid) discharged from the nozzle 12 is, for example, a polyimide solution. Further, the first ink tank 21 and the second ink tank 22 of the present embodiment are pressurized tanks in which the solution (polyimide solution) is stored. When forming a thin film (for example, an alignment film) using the coating apparatus 100 of this embodiment, the solution discharged from the nozzle 12 is applied to the surface of a substrate (for example, a glass substrate) 90 placed on the stage 52. Applied. The stage 52 can move in the horizontal direction (arrow 51), but the inkjet head 11 can also be configured to be movable.
　ノズル１２から吐出される溶液は、タンクユニット２０の供給タンク２５から供給される。そして、供給タンク２５内の溶液が少なくなると、第１インクタンク２１または第２インクタンク２２から溶液が補充される。さらに、第１インクタンク２１および第２インクタンク２２の何れか一方の溶液が空になると、そのインクタンク（２１または２２）は、新しいものと交換されることになる。 The solution discharged from the nozzle 12 is supplied from the supply tank 25 of the tank unit 20. When the solution in the supply tank 25 decreases, the solution is replenished from the first ink tank 21 or the second ink tank 22. Furthermore, when either one of the first ink tank 21 and the second ink tank 22 is emptied, the ink tank (21 or 22) is replaced with a new one.
　本実施形態の供給タンク２５は、インク配管３７を介してインクジェットヘッド１１に接続されている。また、供給タンク２５は、共通インク配管３５に接続されている。共通インク配管３５は、二股（３１、３２）にわかれて、第１インクタンク２１および第２インクタンク２２に接続される。具体的には、共通インク配管３５は、第１インク配管３１を介して第１インクタンク２１に接続されるとともに、第２インク配管３２を介して第２インクタンク２２に接続されている。 The supply tank 25 of this embodiment is connected to the inkjet head 11 via an ink pipe 37. The supply tank 25 is connected to a common ink pipe 35. The common ink pipe 35 is connected to the first ink tank 21 and the second ink tank 22 at two branches (31, 32). Specifically, the common ink pipe 35 is connected to the first ink tank 21 via the first ink pipe 31 and is connected to the second ink tank 22 via the second ink pipe 32.
　第１インク配管３１には、第１インクタンク２１からの溶液の流量を調整する第１流量調整弁３３が設けられている。また、第２インク配管３２には、第２インクタンク２２からの溶液の流量を調整する第２流量調整弁３４が設けられている。第１流量調整弁３３および第２流量調整弁３４は、制御装置６０に接続されている。本実施形態の第１流量調整弁３３および第２流量調整弁３４はそれぞれ電磁弁であり、制御装置６０は、第１流量調整弁３３および第２流量調整弁３４をそれぞれ制御することが可能である。 The first ink pipe 31 is provided with a first flow rate adjustment valve 33 for adjusting the flow rate of the solution from the first ink tank 21. The second ink pipe 32 is provided with a second flow rate adjustment valve 34 that adjusts the flow rate of the solution from the second ink tank 22. The first flow rate adjustment valve 33 and the second flow rate adjustment valve 34 are connected to the control device 60. The first flow rate adjustment valve 33 and the second flow rate adjustment valve 34 of the present embodiment are electromagnetic valves, respectively, and the control device 60 can control the first flow rate adjustment valve 33 and the second flow rate adjustment valve 34, respectively. is there.
　制御装置６０は、第１流量調整弁３３を制御することにより、第１インクタンク２１から溶液を供給タンク２５に補充する。具体的には、制御装置６０によって第１流量調整弁３３が閉状態から開状態に変更されて、第１インクタンク２１から供給タンク２５に溶液が導入される。また、制御装置６０は、第２流量調整弁３４を制御することにより、第２インクタンク２２から溶液を供給タンク２５に補充する。具体的には、制御装置６０によって第２流量調整弁３４が閉状態から開状態に変更されて、第２インクタンク２２から供給タンク２５に溶液が導入される。 The control device 60 replenishes the supply tank 25 with the solution from the first ink tank 21 by controlling the first flow rate adjustment valve 33. Specifically, the first flow rate adjustment valve 33 is changed from the closed state to the open state by the control device 60, and the solution is introduced from the first ink tank 21 to the supply tank 25. Further, the control device 60 replenishes the supply tank 25 with the solution from the second ink tank 22 by controlling the second flow rate adjustment valve 34. Specifically, the second flow rate adjustment valve 34 is changed from the closed state to the open state by the control device 60, and the solution is introduced from the second ink tank 22 to the supply tank 25.
　本実施形態の構成では、第１インクタンク２１から供給タンク２５に溶液を補充する際に、少なくとも一回、第１インクタンク２１からの溶液の補充を中断するように第１流量調整弁３３を制御し、かつ、第２インクタンク２２から供給タンク２５に溶液を補充するように第２流量調整弁３４を制御する。 In the configuration of this embodiment, when the solution is replenished from the first ink tank 21 to the supply tank 25, the first flow rate adjustment valve 33 is set so as to interrupt the replenishment of the solution from the first ink tank 21 at least once. The second flow rate adjusting valve 34 is controlled so that the solution is supplied from the second ink tank 22 to the supply tank 25.
　さらに、図３（ａ）および（ｂ）を参照しながら詳述する。図３（ａ）および（ｂ）は、本実施形態の塗布装置１００における溶液供給（インク供給）の動作を説明するためのブロック図である。 Further details will be described with reference to FIGS. 3 (a) and 3 (b). 3A and 3B are block diagrams for explaining the operation of solution supply (ink supply) in the coating apparatus 100 of the present embodiment.
　まず、図３（ａ）に示すように、供給タンク２５内の溶液の消費に対応して、第１インクタンク２１から供給タンク２５に溶液を補充していく（矢印４１）。ここで、第１インクタンク２１内の溶液が無くなってから、第２インクタンク２２に切り換えると、第２インクタンク２２内の溶液は、例えば数時間流動していないがゆえに（放置状態になっているがゆえに）、当該溶液の溶媒が揮発して、濃度変化または粘度変化を起こしている可能性がある。 First, as shown in FIG. 3A, the solution is replenished from the first ink tank 21 to the supply tank 25 corresponding to the consumption of the solution in the supply tank 25 (arrow 41). Here, when the solution in the first ink tank 21 is exhausted and then switched to the second ink tank 22, the solution in the second ink tank 22 has not been flowing for several hours, for example (becomes left unattended). Therefore, the solvent of the solution may volatilize, causing a change in concentration or a change in viscosity.
　そこで、図３（ｂ）に示すように、第１インクタンク２１から供給タンク２５に補充する際に、一時的に、第１インクタンク２１からの溶液の補充を中断して、第２インクタンク２２から供給タンク２５に溶液を補充する（矢印４２）。ここでは、第１インクタンク２１を使用している際に、所定時間毎（例えば、１０分毎）に、第２インクタンク２２から供給タンク２５に溶液を送り出す。この所定時間は、第２インクタンク２２および第２インク配管３２内に存在する溶液（塗布液）が、何分以上放置すると、溶液の変性（濃度／粘度の変化）が生じる可能性が出てくるかを指標にして決定すればよい。 Therefore, as shown in FIG. 3B, when the supply tank 25 is replenished from the first ink tank 21, the replenishment of the solution from the first ink tank 21 is temporarily interrupted, and the second ink tank. The supply tank 25 is replenished with the solution from 22 (arrow 42). Here, when the first ink tank 21 is used, the solution is sent from the second ink tank 22 to the supply tank 25 every predetermined time (for example, every 10 minutes). During this predetermined time, if the solution (coating liquid) existing in the second ink tank 22 and the second ink pipe 32 is left for several minutes or more, the solution may be denatured (change in concentration / viscosity). It can be determined using whether it comes or not.
　本実施形態によれば、ノズル１２に溶液を供給する場合において、第１インクタンク２１または第２インクタンク２２から供給タンク２５に溶液を補充し、その供給タンク２５からノズル１２に溶液を送り出すので、ノズル１２から溶液を連続して吐出することができる。すなわち、供給タンク２５に溶液を補充するインクタンクが複数存在しているので、そのうちの一つのインクタンクを交換している際にも、他のインクタンクによって溶液を供給タンク２５に補充することが可能である。それゆえに、本実施形態の構成では、インクタンクの交換が必要であっても、ノズル１２からの吐出による塗布工程を続けることができる。 According to this embodiment, when supplying a solution to the nozzle 12, the solution is replenished from the first ink tank 21 or the second ink tank 22 to the supply tank 25, and the solution is sent from the supply tank 25 to the nozzle 12. The solution can be continuously discharged from the nozzle 12. That is, since there are a plurality of ink tanks for replenishing the solution in the supply tank 25, the solution can be replenished to the supply tank 25 by another ink tank even when one of the ink tanks is replaced. Is possible. Therefore, in the configuration of the present embodiment, the application process by ejection from the nozzle 12 can be continued even if the ink tank needs to be replaced.
　さらに、第１インクタンク２１から供給タンク２５に溶液を移動させるステップ（図３（ａ）参照）を実行している間に、第２インクタンク２２から供給タンク２５に溶液を移動させるステップ（図３（ｂ）参照）を実行する。したがって、第１インクタンク２１の交換時に、第１インクタンク２１から第２インクタンク２２へと溶液の供給源を切り換えても、第２インクタンク２２の溶液は少なくとも一回は流動しているので、それゆえに、第２インクタンク２２における溶液の濃度変化や粘度変化が生じることを抑制することができる。その結果、インクタンクを交換する際においても安定して塗布工程を実行することができ、したがって、品質低下または歩留まり低下を抑制しながら、薄膜（例えば、配向膜）を良好に形成することが可能となる。 Further, while the step of moving the solution from the first ink tank 21 to the supply tank 25 (see FIG. 3A) is being executed, the step of moving the solution from the second ink tank 22 to the supply tank 25 (FIG. 3). 3 (b)). Therefore, when the first ink tank 21 is replaced, even if the solution supply source is switched from the first ink tank 21 to the second ink tank 22, the solution in the second ink tank 22 flows at least once. Therefore, it is possible to suppress the change in the concentration and the viscosity of the solution in the second ink tank 22 from occurring. As a result, even when the ink tank is replaced, the coating process can be performed stably, and thus a thin film (for example, an alignment film) can be satisfactorily formed while suppressing deterioration in quality or yield. It becomes.
　なお、第１インクタンク２１から供給タンク２５に溶液を移動させるステップ（図３（ａ）参照）において、第２インクタンク２２から供給タンク２５に溶液を移動させるステップ（図３（ｂ）参照）を何回実行すればよいかは、第２インクタンク２２および第２インク配管３２内に存在する溶液（塗布液）についての放置時間の上限（例えば１０分）に対応して決定すればよい。また、もちろん、放置によって溶液の変性が生じない時間内であれば、基板９０の設定処理枚数（例えば、基板１枚の塗布終了毎）に応じて、第２インクタンク２２から供給タンク２５に溶液を移動させるステップを実行しても構わない。さらに、第２インクタンク２２から供給タンク２５に溶液を移動させるステップ（図３（ｂ）参照）の実行時間（例えば、１０分）も、プロセス条件などを考慮して適宜好適なものを採用すればよい。 In the step of moving the solution from the first ink tank 21 to the supply tank 25 (see FIG. 3A), the step of moving the solution from the second ink tank 22 to the supply tank 25 (see FIG. 3B). It is sufficient to determine how many times to be executed corresponding to the upper limit (for example, 10 minutes) of the standing time for the solution (coating liquid) existing in the second ink tank 22 and the second ink pipe 32. Of course, if the solution is not denatured by standing, the solution is supplied from the second ink tank 22 to the supply tank 25 according to the set number of substrates 90 to be processed (for example, every time one substrate is applied). You may perform the step which moves. Further, an appropriate execution time (for example, 10 minutes) of the step of moving the solution from the second ink tank 22 to the supply tank 25 (see FIG. 3B) may be appropriately selected in consideration of process conditions and the like. That's fine.
　加えて、第１インクタンク２１の使用中において一部の時間だけ第２インクタンク２２を使用して溶液を流動させることがポイントである。したがって、第１インクタンク２１からの溶液の補充を中断する場合には、第１インクタンク２１からの送り出しを完全に停止しなくても、第１インクタンク２１からの送り出し量を第１流量調整弁３３で調整した上で、第２流量調整弁３４を調整して、第２インクタンク２２から溶液の送り出しを実行することも可能である。 In addition, the point is to use the second ink tank 22 to flow the solution for a part of time while the first ink tank 21 is in use. Therefore, when the replenishment of the solution from the first ink tank 21 is interrupted, the amount of delivery from the first ink tank 21 is adjusted to the first flow rate without stopping the delivery from the first ink tank 21 completely. It is also possible to adjust the second flow rate adjustment valve 34 after adjusting with the valve 33 and to send out the solution from the second ink tank 22.
　第２インクタンク２２の流動（図３（ｂ）の矢印４２参照）を少なくとも一回実行しつつ、第１インクタンク２１から供給タンク２５への補充（図３（ａ）の矢印４１参照）を続けていく。その後、第１インクタンク２１内の溶液の貯蔵量が少なくなったら、第２インクタンク２２内に溶液が残っている状態で、第１インクタンク２１から第２インクタンク２２へと溶液の供給源を切り換えて、次いで、第１インクタンク２１を交換する。 While the flow of the second ink tank 22 (see arrow 42 in FIG. 3B) is executed at least once, replenishment from the first ink tank 21 to the supply tank 25 (see arrow 41 in FIG. 3A) is performed. Continues to. Thereafter, when the storage amount of the solution in the first ink tank 21 decreases, the solution supply source from the first ink tank 21 to the second ink tank 22 with the solution remaining in the second ink tank 22. Then, the first ink tank 21 is replaced.
　その後は、第２インクタンク２２について、上述の第１インクタンク２１と同様のステップを実行していく。すなわち、第２インクタンク２２から供給タンク２５に溶液を移動させるステップを実行している間に、交換して新しくなった第１インクタンク２１から供給タンク２５に溶液を移動させるステップを実行する。次いで、第２インクタンク２２内の溶液の貯蔵量が少なくなったら、第１インクタンク２１内に溶液が残っている状態で、再び、第２インクタンク２２から第１インクタンク２１と溶液の供給源を切り換えて、次いで、第２インクタンク２２を交換する。以下、インク補充は同様にして繰り返し実行されていく。 Thereafter, the same steps as those for the first ink tank 21 are executed for the second ink tank 22. That is, while the step of moving the solution from the second ink tank 22 to the supply tank 25 is being executed, the step of moving the solution from the first ink tank 21 that has been replaced to a new one to the supply tank 25 is executed. Next, when the storage amount of the solution in the second ink tank 22 decreases, the supply of the first ink tank 21 and the solution from the second ink tank 22 again with the solution remaining in the first ink tank 21. The source is switched, and then the second ink tank 22 is replaced. Thereafter, ink replenishment is repeatedly performed in the same manner.
　本実施形態においては、図３（ａ）に示した溶液の移動がメイン供給であって、図３（ｂ）に示した溶液の供給が一時的な供給（サブ供給）の場合、図３（ａ）に示した溶液移動の時間Ｔ１と、図３（ｂ）に示した溶液移動の時間Ｔ２とは、Ｔ１＞Ｔ２の関係となるように制御する。逆に、図３（ｂ）に示した溶液の移動がメイン供給であって、図３（ａ）に示した溶液の供給が一時的な供給（サブ供給）の場合、図３（ｂ）に示した溶液移動の時間Ｔ３と、図３（ａ）に示した溶液移動の時間Ｔ４とは、Ｔ３＞Ｔ４の関係となるように制御する。なお、本実施形態では、２つのインクタンク（２１、２２）を例にして説明したが、本実施形態の技術は、３つ以上のインクタンクを用いたインク補充にも応用できるものである。 In the present embodiment, when the movement of the solution shown in FIG. 3A is the main supply and the supply of the solution shown in FIG. 3B is a temporary supply (sub-supply), FIG. The solution transfer time T1 shown in a) and the solution transfer time T2 shown in FIG. 3B are controlled so as to satisfy the relationship of T1> T2. On the contrary, when the movement of the solution shown in FIG. 3B is the main supply and the supply of the solution shown in FIG. 3A is a temporary supply (sub-supply), the movement shown in FIG. The solution transfer time T3 shown in FIG. 3A and the solution transfer time T4 shown in FIG. 3A are controlled so as to satisfy the relationship of T3> T4. In the present embodiment, two ink tanks (21, 22) have been described as an example. However, the technique of the present embodiment can also be applied to ink replenishment using three or more ink tanks.
　本実施形態では、第１インクタンク２１および第２インクタンク２２は、加圧タンクであるが、塗布装置１００に流動ポンプを設けて、その流動ポンプによって第１インクタンク２１および第２インクタンク２２の溶液の流動を行っても構わない。また、第１流量調整弁３３および第２流量調整弁３４を制御する制御装置６０は、例えば、ＭＰＵ（マイクロ・プロセッサ・ユニット）であり、そして、制御装置６０は、パーソナルコンピュータ（ＰＣ）によって構築されていてもよい。また、制御装置６０は、本実施形態のインク補充ステップを実行するためのプログラムが内蔵された形態にすることも可能である。 In the present embodiment, the first ink tank 21 and the second ink tank 22 are pressurized tanks. However, a flow pump is provided in the coating apparatus 100, and the first ink tank 21 and the second ink tank 22 are provided by the flow pump. The solution may be fluidized. The control device 60 that controls the first flow rate adjustment valve 33 and the second flow rate adjustment valve 34 is, for example, an MPU (micro processor unit), and the control device 60 is constructed by a personal computer (PC). May be. In addition, the control device 60 can be configured to have a built-in program for executing the ink replenishment step of the present embodiment.
　次に、図４を参照しながら、本実施形態の塗布装置１００の構成の一例をさらに説明する。図４は、本実施形態のインクジェット塗布装置１００の構成の一例を模式的に示す図である。 Next, an example of the configuration of the coating apparatus 100 of the present embodiment will be further described with reference to FIG. FIG. 4 is a diagram schematically showing an example of the configuration of the inkjet coating apparatus 100 of the present embodiment.
　図４に示したヘッドユニット１０は、基板に溶液を吐出するノズル１２が形成されたインクジェットヘッド１１を備えている。ヘッド１１は、ノズル１２から溶液（液滴）が吐出される面（吐出面）を有している。１個のヘッド１１には、１つ又は複数のノズル１２が形成されており、図４に示した例では、ヘッドユニット１０に２個のヘッド１１が形成されている。 The head unit 10 shown in FIG. 4 includes an inkjet head 11 having nozzles 12 for discharging a solution on a substrate. The head 11 has a surface (discharge surface) on which a solution (droplet) is discharged from the nozzle 12. One head 11 is formed with one or a plurality of nozzles 12. In the example shown in FIG. 4, two heads 11 are formed in the head unit 10.
　ヘッドユニット１０におけるインクジェットヘッド１１は、ノズル１２から溶液（塗布液）を吐出することができる。基板９０の上に配向膜を形成する場合、使用する溶液（塗布液）は、例えば、ポリイミド液である。なお、基板９０の上に形成する膜（機能膜）によって、使用する溶液は変更される。基板９０上に形成される膜（機能膜）としては、例えば、レジスト膜、導電膜、絶縁膜などが挙げられ、その膜に対して必要な溶液が使用されることになる。 The inkjet head 11 in the head unit 10 can discharge a solution (coating liquid) from the nozzle 12. When forming an alignment film on the substrate 90, a solution (coating solution) to be used is, for example, a polyimide solution. The solution to be used is changed depending on the film (functional film) formed on the substrate 90. Examples of the film (functional film) formed on the substrate 90 include a resist film, a conductive film, and an insulating film, and a necessary solution for the film is used.
　ヘッドユニット１０は、タンクユニット２０と接続されており、タンクユニット２０からヘッドユニット１０に溶液（塗布液）が供給される。タンクユニット２０は、上述したように、インクジェットヘッド１１に溶液を供給する供給タンク２５と、供給タンク２５に溶液を補充する第１インクタンク２１および第２インクタンク２２とを含んでいる。 The head unit 10 is connected to the tank unit 20, and a solution (coating liquid) is supplied from the tank unit 20 to the head unit 10. As described above, the tank unit 20 includes the supply tank 25 that supplies the solution to the inkjet head 11, and the first ink tank 21 and the second ink tank 22 that replenish the supply tank 25 with the solution.
　ノズル１２からの溶液で成膜される基板９０は、ステージユニット５０のステージ５２の上に載置される。ステージ５２には、基板９０のためのリフトピン５４が設けられており、リフトピン５４によって基板９０を移動することができる。また、ステージユニット５０は、基板９０をステージ５２に載置した状態で移動可能なステージ移動機構５５を備えている。ステージ移動機構５５によって、インクジェットヘッド１１のノズル１２の直下に基板９０を移動させることができる（矢印５１参照）。 The substrate 90 formed with the solution from the nozzle 12 is placed on the stage 52 of the stage unit 50. The stage 52 is provided with lift pins 54 for the substrate 90, and the substrate 90 can be moved by the lift pins 54. The stage unit 50 includes a stage moving mechanism 55 that can move while the substrate 90 is placed on the stage 52. The substrate 90 can be moved directly below the nozzles 12 of the inkjet head 11 by the stage moving mechanism 55 (see arrow 51).
　基板９０は、例えば、ガラス基板であり、本実施形態における基板９０は、液晶パネル用のガラス基板である。また、基板９０は、液晶パネルの寸法に切り出す前のマザーガラスであってもよいし、切り出した後の液晶パネルのサイズのガラスであってもよい。さらに、基板９０は、薄膜トランジスタ（ＴＦＴ）が作製されるアレイ基板（またはその作製途中のもの）であってもよいし、カラーフィルタ（ＣＦ）が形成されるＣＦ基板（またはその作製途中のもの）であってもよい。なお、基板９０は、ガラス基板の他、樹脂基板や、ウェハのような他の薄板であっても構わない。加えて、液晶パネル用の基板９０に限らず、ＰＤＰ、有機ＥＬパネル、その他フラットパネルディスプレイまたは電子デバイスを製作する上での薄型の基板であってもよい。 The substrate 90 is, for example, a glass substrate, and the substrate 90 in the present embodiment is a glass substrate for a liquid crystal panel. The substrate 90 may be a mother glass before being cut out to the dimensions of the liquid crystal panel, or may be a glass having the size of the liquid crystal panel after being cut out. Further, the substrate 90 may be an array substrate on which a thin film transistor (TFT) is manufactured (or an intermediate product), or a CF substrate on which a color filter (CF) is formed (or an intermediate product). It may be. The substrate 90 may be a glass substrate, a resin substrate, or another thin plate such as a wafer. In addition, the substrate 90 is not limited to the liquid crystal panel 90, and may be a thin substrate for manufacturing a PDP, an organic EL panel, other flat panel displays, or electronic devices.
　この例では、ヘッド１１のノズル１２をワイピングする拭取り部５７（例えば、弾性体ブレード）が設けられている。拭取り部５７は、インクジェットヘッド１１の吐出面に残存する塗布液（例えば、ポリイミド溶液）をワイピングすることによって取り除くものである。さらに説明すると、インクジェットヘッド１１のノズル１２の吐出面に、溶液（塗布液）が残留していると、ノズル１２の吐出口（オリフィス）の液面が不均一になり、その結果、ノズル１２から吐出される液滴が安定しなくなる。それゆえ、前回の塗布工程が終了したら、次の塗布工程を実行する前に、ノズル１２のワイピングが実行される。なお、拭取り部５７は、弾性体ブレードに限らず、塗布液を吸収可能な吸水シートを用いることも可能である。本実施形態の拭取り部５７は、ステージ移動機構５５に連結されており、ステージ移動機構５５によって移動可能となっている。なお、ワイピング動作の時にあわせて、図３（ｂ）に示した溶液流動（矢印４２）のステップを実行させることも可能である。 In this example, a wiping portion 57 (for example, an elastic blade) for wiping the nozzle 12 of the head 11 is provided. The wiping portion 57 removes a coating liquid (for example, a polyimide solution) remaining on the ejection surface of the inkjet head 11 by wiping. More specifically, if the solution (coating liquid) remains on the discharge surface of the nozzle 12 of the inkjet head 11, the liquid surface of the discharge port (orifice) of the nozzle 12 becomes uneven. The discharged liquid droplet becomes unstable. Therefore, when the previous coating process is completed, the wiping of the nozzle 12 is performed before the next coating process is performed. The wiping portion 57 is not limited to an elastic blade, and a water absorbent sheet that can absorb the coating liquid can also be used. The wiping portion 57 of this embodiment is connected to the stage moving mechanism 55 and can be moved by the stage moving mechanism 55. It is also possible to execute the solution flow (arrow 42) step shown in FIG. 3B in accordance with the wiping operation.
　また、本実施形態では、ヘッドユニット１０とステージユニット５０とは、フィルタ付きのクリーンルーム内に設置されている。また、インクジェット塗布装置１００の塗布工程は、クリーンルームの外に配置されたコンピュータ（例えば、パーソナルコンピュータ）６２によって制御することができる。 In this embodiment, the head unit 10 and the stage unit 50 are installed in a clean room with a filter. In addition, the coating process of the inkjet coating apparatus 100 can be controlled by a computer (for example, a personal computer) 62 disposed outside the clean room.
　加えて、本実施形態の制御装置６０は、コンピュータ６２によって構築することも可能である。その場合、コンピュータ６２には、本実施形態のインク補充ステップのプログラムが格納されており、そのインク補充プログラムによって溶液流動ステップ（例えば、図３（ａ）及び（ｂ）参照）を実行することができる。そのようなプログラムは、通信回線（例えば、ＬＡＮ回線、インターネット回線）を通じて、やり取りすることも可能であるので、コンピュータ６２内に格納しておかなくてもよい場合もある。また、そのようなプログラムを記憶媒体（例えば、半導体メモリ、光記録ディスク、ハードディスクなど）に格納して、移動させることも可能である。 In addition, the control device 60 of the present embodiment can also be constructed by a computer 62. In this case, the computer 62 stores the ink replenishment step program of this embodiment, and the solution flow step (for example, see FIGS. 3A and 3B) can be executed by the ink replenishment program. it can. Since such a program can be exchanged through a communication line (for example, a LAN line or an Internet line), it may not be stored in the computer 62. Further, such a program can be stored in a storage medium (for example, a semiconductor memory, an optical recording disk, a hard disk, etc.) and moved.
　次に、図５（ａ）および（ｂ）を参照しながら、本実施形態の塗布方法について説明する。図５（ａ）および（ｂ）は、本実施形態の塗布方法を説明するための工程図である。 Next, the coating method of this embodiment will be described with reference to FIGS. 5 (a) and 5 (b). FIGS. 5A and 5B are process diagrams for explaining the coating method of the present embodiment.
　まず、図５（ａ）に示すように、これから塗布を実行する基板９０をステージ５２の上に配置する。この基板９０を準備した状態で、必要であれば、ノズル１２をワイピングする拭取り部５７を用いてインクジェットヘッド１１のワイピングを行って、ノズル１２の吐出面に残留している溶液（塗布液）の拭き取りを行う。 First, as shown in FIG. 5A, a substrate 90 to be coated is placed on the stage 52. In the state in which the substrate 90 is prepared, if necessary, the ink jet head 11 is wiped using a wiping portion 57 for wiping the nozzle 12, and a solution (coating liquid) remaining on the ejection surface of the nozzle 12 is obtained. Wipe off.
　次に、図５（ｂ）に示すように、インクジェットヘッド１１のノズル１２から溶液１６を吐出することによって、基板９０上に機能膜（例えば、ポリイミドからなる配向膜）を形成する。具体的には、ステージ５２上に配置された基板９０を移動させて（矢印５１参照）、所定領域に機能膜を形成していく。なお、基板９０を移動させる手法に限らず、インクジェットヘッド１１を移動させて、機能膜を形成しても構わない。また、インクジェットヘッド１１による機能膜の形成が完了した後に、次の成膜工程を実行する場合には、再び、図５（ａ）に示した状態になり、次いで、図５（ｂ）に示した塗布工程が実行される。 Next, as shown in FIG. 5B, a functional film (for example, an alignment film made of polyimide) is formed on the substrate 90 by discharging the solution 16 from the nozzle 12 of the inkjet head 11. Specifically, the substrate 90 disposed on the stage 52 is moved (see arrow 51) to form a functional film in a predetermined region. Note that the functional film may be formed by moving the inkjet head 11 without being limited to the method of moving the substrate 90. Further, when the next film forming process is executed after the formation of the functional film by the ink jet head 11, the state shown in FIG. 5A is obtained again, and then shown in FIG. 5B. The coating process is executed.
　本実施形態の塗布方法によれば、ノズル１２を用いて基板９０に溶液（塗布液）１６を吐出する工程と、ノズル１２に溶液１６を供給する工程とを実行する。そして、ノズル１２に溶液を供給する工程は、ノズル１２に接続された供給タンク２５に、第１インクタンク２１または第２インクタンク２２から溶液を補充する工程（ａ）と、供給タンク２５からノズルに溶液を送り出す工程（ｂ）とを含む。さらに、第１インクタンク２１または第２インクタンク２２から溶液を供給タンク２５に補充する際には、第１インクタンク２１から供給タンク２５に溶液を移動させるステップ（図３（ａ）中の矢印４１参照）と、そのステップの間に、第２インクタンク２２から供給タンク２５に溶液を移動させるステップ（図３（ｂ）中の矢印４２参照）とを行う。 According to the coating method of this embodiment, the step of discharging the solution (coating solution) 16 to the substrate 90 using the nozzle 12 and the step of supplying the solution 16 to the nozzle 12 are executed. The step of supplying the solution to the nozzle 12 includes the step (a) of replenishing the supply tank 25 connected to the nozzle 12 from the first ink tank 21 or the second ink tank 22, and the nozzle from the supply tank 25. And (b) delivering the solution. Further, when the solution is supplied from the first ink tank 21 or the second ink tank 22 to the supply tank 25, the step of moving the solution from the first ink tank 21 to the supply tank 25 (arrow in FIG. 3A). 41) and the step of moving the solution from the second ink tank 22 to the supply tank 25 (see arrow 42 in FIG. 3B) is performed between the steps.
　したがって、図５（ａ）及び（ｂ）の工程を繰り返し実行しても、第１インクタンク２１と第２インクタンク２２とを交換しながら溶液を補充し続けることができる。それゆえ、インクタンクを交換する時に塗布工程を中断しなくてもよく、スループットの低下を抑制することができる。さらには、第１インクタンク２１の交換時に、第２インクタンク２２へと切り換えても、第２インクタンク２２の溶液は少なくとも一回は流動しているので、それゆえに、第２インクタンク２２における溶液の濃度変化や粘度変化が生じることを抑制することができる。その結果、インクタンクを交換する際においても安定して塗布工程を実行することができ、したがって、薄膜（例えば、配向膜）を良好に形成することが可能となる。具体的には、配向膜の歩留まりの低下を抑制することができ、ひいては、液晶パネルの製造コストの増大を抑制することができる。 Therefore, even if the steps of FIGS. 5A and 5B are repeatedly executed, the solution can be continuously replenished while the first ink tank 21 and the second ink tank 22 are exchanged. Therefore, the application process does not have to be interrupted when replacing the ink tank, and a decrease in throughput can be suppressed. Furthermore, even when the first ink tank 21 is replaced, even if the first ink tank 21 is switched to the second ink tank 22, the solution in the second ink tank 22 flows at least once. It can suppress that the density | concentration change and viscosity change of a solution arise. As a result, the application process can be stably performed even when the ink tank is replaced, and thus a thin film (for example, an alignment film) can be formed satisfactorily. Specifically, a decrease in the yield of the alignment film can be suppressed, and consequently an increase in manufacturing cost of the liquid crystal panel can be suppressed.
　以上、本発明を好適な実施形態により説明してきたが、こうした記述は限定事項ではなく、勿論、種々の改変が可能である。 As mentioned above, although this invention has been demonstrated by suitable embodiment, such description is not a limitation matter and, of course, various modifications are possible.
　なお、本発明の実施形態の技術内容と本質的に構成を異にするが、関連する技術として、特開２００２－５２７３１号公報に開示された技術がある。同公報に開示された技術は、布等に図形・模様などを描く捺染作業におけるインクジェットプロッタに関し、このインクジェットプロッタは、中間タンクにインクを補充する２つのインクタンクを持っている。しかしながら、同公報には、配向膜などを形成する場合において、一方のインクタンク（２２）の溶液を流動させることによって、溶液の濃度変化や粘度変化が生じることを抑制して、安定して塗布工程を実行することができるという技術的思想は開示されていないものであり、同公報のインクジェットプロッタと、本発明の実施形態のものとは本質的に異なるものである。 Although the configuration is essentially different from the technical contents of the embodiment of the present invention, as a related technology, there is a technology disclosed in JP-A-2002-52731. The technique disclosed in this publication relates to an ink jet plotter in a textile printing operation in which a figure or pattern is drawn on a cloth or the like. This ink jet plotter has two ink tanks for replenishing ink in an intermediate tank. However, in this publication, when an alignment film or the like is formed, the solution in one of the ink tanks (22) is made to flow to suppress the change in the concentration or viscosity of the solution, thereby stably applying the solution. The technical idea that the process can be performed is not disclosed, and the inkjet plotter disclosed in the publication is essentially different from the embodiment of the present invention.
　さらに付言すると、同公報には２つのインクタンクから交互に中間タンクにインクを補充することが開示されているが、これをそのまま、配向膜の形成に転用すると次のような問題が生じる。すなわち、単純に２つのタンクから交互にインクを補充する場合には、タンク交換のタイミングが難しい。さらには、２つのインクタンクのインク（溶液）が中間タンク内で混合されてしまうので、配向膜の塗布液（例えば、ポリイミド溶液）を用いて大型の基板に塗布する場合には、基板の面内で配向膜の状態にバラツキが生じてしまうという不具合が生じ得る。 Further, it is disclosed in the same publication that ink is replenished alternately from two ink tanks to an intermediate tank. However, if this is used as it is for forming an alignment film, the following problems arise. That is, when ink is simply replenished from two tanks alternately, the timing of tank replacement is difficult. Furthermore, since the ink (solution) of the two ink tanks is mixed in the intermediate tank, the surface of the substrate is used when applying to a large substrate using an alignment film coating solution (for example, polyimide solution). In this case, there may be a problem that the state of the alignment film varies.
　一方、本発明の実施形態に係る技術においては、第１フェーズでは、第１タンク２１から溶液のメイン供給（補充）を行い、一時的に、第２タンク２２からの補充を行う。これにより、第２タンク２２、特に第２タンク２２に繋がる配管３２内の溶液が、溶媒の揮発によって固化してしまうことを防ぐことができる。すなわち、一時的に第２タンク２２から溶液の供給を行うことで、第２タンク２２の配管３２内の溶液が固化する前に（あるいは、溶媒の揮発による溶液の濃度・粘度変化が顕著になる前に）、配管３２内の溶液が供給タンク２５に送付される。したがって、配管３２内の溶液（すなわち、配向膜の塗布液）の状態の変化を抑え、固化を防ぐことができることによって、大型基板の面内で配向膜の状態にバラツキが生じることを抑制することができる。 On the other hand, in the technology according to the embodiment of the present invention, in the first phase, the main supply (replenishment) of the solution is performed from the first tank 21 and the replenishment from the second tank 22 is temporarily performed. Thereby, it can prevent that the solution in the piping 32 connected to the 2nd tank 22, especially the 2nd tank 22 solidifies by volatilization of a solvent. That is, by temporarily supplying the solution from the second tank 22, before the solution in the pipe 32 of the second tank 22 is solidified (or the change in the concentration and viscosity of the solution due to the volatilization of the solvent becomes significant. Before), the solution in the pipe 32 is sent to the supply tank 25. Therefore, by suppressing the change in the state of the solution in the pipe 32 (that is, the coating solution for the alignment film) and preventing solidification, it is possible to suppress the variation in the state of the alignment film in the plane of the large substrate. Can do.
　さらに、続いての第２フェーズでは、溶液のメイン供給を担当した第１タンク２１が先に空になるので、メイン供給の担当を第２タンク２２に切り換え、その間に第１タンク２１を取り替える。メイン供給が第２タンク２２になってからは、第３フェーズとして、第２タンク２２から溶液のメイン供給（補充）を行い、交換が終了した第１タンク２１からは溶液が固化しないように、一時的に、第１タンク２１から供給タンク２５に溶液の補充を行う。その後の第４フェーズでは、第２タンク２２が空になるので、メイン供給の担当を再び第１タンク２１に切り換え、その間に第２タンク２２を取り替える。なお、タンク交換時に配管を洗浄することも可能である。 Further, in the subsequent second phase, since the first tank 21 responsible for the main supply of the solution is first emptied, the charge of the main supply is switched to the second tank 22 and the first tank 21 is replaced during that time. After the main supply becomes the second tank 22, as the third phase, the main supply (replenishment) of the solution is performed from the second tank 22, and the solution is not solidified from the first tank 21 after the replacement. The solution is temporarily replenished from the first tank 21 to the supply tank 25. In the subsequent fourth phase, since the second tank 22 becomes empty, the charge of main supply is switched to the first tank 21 again, and the second tank 22 is replaced during that time. It is also possible to clean the piping when replacing the tank.
　本発明によれば、インクタンクを交換する際においても安定して塗布工程を実行することができる塗布装置および塗布方法を提供することができる。 According to the present invention, it is possible to provide a coating apparatus and a coating method capable of stably performing a coating process even when an ink tank is replaced.
 １０ ヘッドユニット
 １１ ヘッド（インクジェットヘッド）
 １２ ノズル
 １３ ヘッドカバー
 １６ 溶液（塗布液）
 ２０ タンクユニット
 ２１ 第１インクタンク
 ２２ 第２インクタンク
 ２５ 供給タンク
 ３１ 第１インク配管
 ３２ 第２インク配管
 ３３ 第１流量調整弁
 ３４ 第２流量調整弁
 ３５ 共通インク配管
 ３７ インク配管
 ５０ ステージユニット
 ５２ ステージ
 ５４ リフトピン
 ５５ ステージ移動機構
 ５７ 拭取り部
 ６０ 制御装置
 ６２ コンピュータ
 ９０ 基板
１００ 塗布装置（インクジェット塗布装置）
１０００ インクジェット塗布装置 10 head unit 11 head (inkjet head)
12 Nozzle 13 Head cover 16 Solution (Coating solution)
20 Tank unit 21 First ink tank 22 Second ink tank 25 Supply tank 31 First ink pipe 32 Second ink pipe 33 First flow adjustment valve 34 Second flow adjustment valve 35 Common ink pipe 37 Ink pipe 50 Stage unit 52 Stage 54 lift pin 55 stage moving mechanism 57 wiping unit 60 control device 62 computer 90 substrate 100 coating device (inkjet coating device)
1000 Inkjet coating device

Claims (13)

  1. 　基板に溶液をインクジェット方式によって塗布する塗布装置であって、
    　前記基板に前記溶液を吐出するノズルを含むインクジェットヘッドと、
    　前記インクジェットヘッドに前記溶液を供給する供給タンクと、
    　前記供給タンクに前記溶液を補充する第１インクタンクおよび第２インクタンクと
    　を備え、
    　前記供給タンクは、共通インク配管に接続されており、
    　前記共通インク配管 は、第１インク配管を介して前記第１インクタンクに接続され、かつ、第２インク配管を介して前記第２インクタンクに接続されており、
    　前記第１インク配管には、前記第１インクタンクからの溶液の流量を調整する第１流量調整弁が設けられており、かつ、前記第２インク配管には、前記第２インクタンクからの溶液の流量を調整する第２流量調整弁が設けられており、
    　前記第１流量調整弁および第２流量調整弁は、当該第１及び第２流量調整弁のそれぞれを制御する制御装置に接続されており、
    　前記制御装置は、前記第１流量調整弁を制御することにより、前記第１インクタンクから溶液を前記供給タンクに補充し、そして、
    　前記制御装置は、前記第２流量調整弁を制御することにより、前記第２インクタンクから溶液を前記供給タンクに補充し、しかも、
    　前記制御装置は、
          前記第１インクタンクから溶液を前記供給タンクに補充する際に、一時的に、前記第１インクタンクからの溶液の補充を中断または流量を制限するように前記第１流量調整弁を制御し、かつ、前記第２インクタンクから溶液を前記供給タンクに補充するように前記第２流量調整弁を制御することを特徴とする、塗布装置。     An application apparatus for applying a solution to a substrate by an inkjet method,
    An inkjet head including a nozzle that discharges the solution onto the substrate;
    A supply tank for supplying the solution to the inkjet head;
    A first ink tank and a second ink tank for replenishing the solution to the supply tank;
    The supply tank is connected to a common ink pipe;
    The common ink pipe is connected to the first ink tank via a first ink pipe, and is connected to the second ink tank via a second ink pipe;
    The first ink pipe is provided with a first flow rate adjusting valve for adjusting the flow rate of the solution from the first ink tank, and the second ink pipe has a solution from the second ink tank. A second flow rate adjustment valve for adjusting the flow rate of
    The first flow rate adjustment valve and the second flow rate adjustment valve are connected to a control device that controls each of the first and second flow rate adjustment valves,
    The controller replenishes the supply tank with the solution from the first ink tank by controlling the first flow rate regulating valve; and
    The controller replenishes the supply tank with the solution from the second ink tank by controlling the second flow rate adjustment valve;
    The control device includes:
    When replenishing the supply tank with the solution from the first ink tank, temporarily controlling the first flow rate adjusting valve so as to interrupt or limit the replenishment of the solution from the first ink tank; The coating apparatus controls the second flow rate adjustment valve so as to replenish the supply tank with the solution from the second ink tank.
  2. 　さらに、前記制御装置は、
          前記第２インクタンクから溶液を前記供給タンクに補充する際に、一時的に、前記第２インクタンクからの溶液の補充を中断または流量を制限するように前記第２流量調整弁を制御し、かつ、前記第１インクタンクから溶液を前記供給タンクに補充するように前記第１流量調整弁を制御することを特徴とする、請求項１に記載の塗布装置。     Further, the control device includes:
    When replenishing the supply tank with the solution from the second ink tank, temporarily controlling the second flow rate adjustment valve so as to interrupt or limit the flow rate of the solution from the second ink tank; 2. The coating apparatus according to claim 1, wherein the first flow rate adjusting valve is controlled so as to replenish the supply tank with a solution from the first ink tank.
  3. 　前記第１インクタンクおよび前記第２インクタンクは、前記溶液が貯蔵された加圧タンクである、請求項１または２に記載の塗布装置。 The coating device according to claim 1 or 2, wherein the first ink tank and the second ink tank are pressurized tanks in which the solution is stored.
  4. 　さらに、前記基板を保持するステージユニットを備え、
    　前記基板は、液晶パネル用のガラス基板であり、
    　前記溶液は、ポリイミド液である、請求項１から３の何れか一つに記載の塗布装置。     Furthermore, a stage unit for holding the substrate is provided,
    The substrate is a glass substrate for a liquid crystal panel,
    The coating apparatus according to claim 1, wherein the solution is a polyimide liquid.
  5. 　基板に溶液をインクジェット方式によって塗布する塗布方法であって、
    　ノズルを用いて前記基板に対して溶液を吐出する工程と、
    　前記ノズルに前記溶液を供給する工程と
    　を含み、
    　前記ノズルに前記溶液を供給する工程は、
          前記ノズルに接続された供給タンクに、第１インクタンクまたは第２インクタンクから前記溶液を補充する工程（ａ）と、
          前記供給タンクから前記ノズルに前記溶液を送り出す工程（ｂ）と
    　を含み、
    　前記工程（ａ）は、
          前記第１インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－１）と、
          一時的に、前記第２インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－２）と
    　を含むことを特徴とする、塗布方法。     An application method for applying a solution to a substrate by an inkjet method,
    Discharging the solution to the substrate using a nozzle;
    Supplying the solution to the nozzle,
    Supplying the solution to the nozzle comprises:
    Replenishing the supply tank connected to the nozzle from the first ink tank or the second ink tank with the solution (a);
    And (b) delivering the solution from the supply tank to the nozzle,
    The step (a)
    Moving the solution from the first ink tank to the supply tank (a-1);
    A step (a-2) of temporarily moving the solution from the second ink tank to the supply tank.
  6. 　前記ステップ（ａ－１）において前記溶液を移動させる時間Ｔ１と、前記ステップ（ａ－２）において前記溶液を移動させる時間Ｔ２とが、Ｔ１＞Ｔ２の関係であることを特徴とする、請求項５に記載の塗布方法。 The time T1 for moving the solution in the step (a-1) and the time T2 for moving the solution in the step (a-2) have a relationship of T1> T2. 5. The coating method according to 5.
  7. 　前記ステップ（ａ－２）を少なくとも一回実行した後、前記第２インクタンク内に前記溶液が残っている状態で、前記第１インクタンクを交換する工程を実行する、請求項５に記載の塗布方法。 6. The step of replacing the first ink tank is performed in a state where the solution remains in the second ink tank after the step (a-2) is performed at least once. Application method.
  8. 　前記工程（ａ）は、さらに、
          前記第２インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－３）と、
          一時的に、前記第１インクタンクから、前記供給タンクに前記溶液を移動させるステップ（ａ－４）と
    　を含むことを特徴とする、請求項５に記載の塗布方法。     The step (a) further includes:
    Moving the solution from the second ink tank to the supply tank (a-3);
    The coating method according to claim 5, further comprising a step (a-4) of temporarily moving the solution from the first ink tank to the supply tank.
  9. 　前記ステップ（ａ－３）において前記溶液を移動させる時間Ｔ３と、前記ステップ（ａ－４）において前記溶液を移動させる時間Ｔ４とが、Ｔ３＞Ｔ４の関係であることを特徴とする、請求項８に記載の塗布方法。 The time T3 during which the solution is moved in the step (a-3) and the time T4 during which the solution is moved in the step (a-4) have a relationship of T3> T4. 8. The coating method according to 8.
  10. 　前記ステップ（ａ－４）を少なくとも一回実行した後、前記第１インクタンク内に前記溶液が残っている状態で、前記第２インクタンクを交換する工程を実行する、請求項８に記載の塗布方法。 9. The step of replacing the second ink tank is performed in a state where the solution remains in the first ink tank after performing the step (a-4) at least once. Application method.
  11. 　前記第１インクタンクおよび前記第２インクタンクは、前記溶液が貯蔵された加圧タンクであり、
    　前記ステップ（ａ－１）は、前記第１インクタンクと前記供給タンクとを接続する第１インク配管に設けられた電磁弁を制御することによって実行される、請求項５から１０の何れか一つに記載の塗布方法。     The first ink tank and the second ink tank are pressurized tanks in which the solution is stored,
    The step (a-1) is executed by controlling an electromagnetic valve provided in a first ink pipe connecting the first ink tank and the supply tank. The coating method as described in one.
  12. 　基板に溶液をインクジェット方式によって塗布する塗布方法であって、
    　ノズルを用いて前記基板に対して溶液を吐出する工程と、
    　前記ノズルに前記溶液を供給する工程と
    　を含み、
    　前記ノズルに前記溶液を供給する工程は、
          前記ノズルに接続された供給タンクに、第１インクタンクまたは第２インクタンクから前記溶液を補充する工程（ａ）と、
          前記供給タンクから前記ノズルに前記溶液を送り出す工程（ｂ）と
    　を含み、
    　前記工程（ａ）は、
          前記第１インクタンクから、前記供給タンクに前記溶液を移動させるとともに、一時的に、前記第２インクタンクから、前記供給タンクに前記溶液を移動させることを実行するステップ（１）と、
    　前記ステップ（１）における前記一時的に溶液を移動させることを少なくとも一回実行した後、前記第２インクタンク内に前記溶液が残っている状態で、前記第１インクタンクを交換するステップ（２）と、
          前記第２インクタンクから、前記供給タンクに前記溶液を移動させるとともに、一時的に、前記第１インクタンクから、前記供給タンクに前記溶液を移動させることを実行するステップ（３）と、
          前記ステップ（３）における前記一時的に溶液を移動させることを少なくとも一回実行した後、前記第１インクタンク内に前記溶液が残っている状態で、前記第２インクタンクを交換するステップ（４）を実行する、塗布方法。     An application method for applying a solution to a substrate by an inkjet method,
    Discharging the solution to the substrate using a nozzle;
    Supplying the solution to the nozzle,
    Supplying the solution to the nozzle comprises:
    Replenishing the supply tank connected to the nozzle from the first ink tank or the second ink tank (a);
    And (b) delivering the solution from the supply tank to the nozzle,
    The step (a)
    A step (1) of moving the solution from the first ink tank to the supply tank and temporarily moving the solution from the second ink tank to the supply tank;
    Step (2) of replacing the first ink tank in a state where the solution remains in the second ink tank after executing the temporary movement of the solution in the step (1) at least once. )When,
    A step (3) of moving the solution from the second ink tank to the supply tank and temporarily moving the solution from the first ink tank to the supply tank;
    Step (4) of replacing the second ink tank with the solution remaining in the first ink tank after the temporary movement of the solution in Step (3) is executed at least once. ) To perform the coating method.
  13. 　前記基板は、液晶パネル用のガラス基板であり、
    　前記基板に対して吐出する工程において、配向膜が形成される、請求項５から１２の何れか一つに記載の塗布方法。     The substrate is a glass substrate for a liquid crystal panel,
    The coating method according to claim 5, wherein an alignment film is formed in the step of discharging to the substrate.
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JP2007261237A (en) * 2006-03-30 2007-10-11 Canon Finetech Inc Ink supply system of ink-jet recording apparatus
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JP5470395B2 (en) * 2009-09-18 2014-04-16 シャープ株式会社 Coating apparatus and coating method
JP2014078317A (en) * 2012-10-08 2014-05-01 Toyota Motor Corp Method of manufacturing battery and paste coating device
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