JP3267822B2 - Applicator for coating liquid on substrate - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process for manufacturing a liquid crystal display device (LCD), a semiconductor device, various electronic parts, and the like. The present invention relates to a coating liquid application apparatus that applies a coating liquid to a substrate surface to form an insulating film, a conductive film, and the like.

[0002]

2. Description of the Related Art As a method of applying a coating solution to a substrate,
Spin coating method, blade coating method, spray coating method,
There is a roll coat method and the like. Of these coating methods, the spin coating method is currently widely used in LCD and semiconductor device manufacturing processes.

[0003]

However, the spin coating method has the following problems in combination with recent trends such as an increase in the size of a substrate to be coated and an increase in the use of a rectangular substrate. That is, the spin coating method is essentially wasteful in terms of effective use of the used coating liquid, and the use efficiency of the coating liquid is low (about 5%). In addition, for example, in the LCD, the size of the glass substrate is increased, but in the spin coating method, since the substrate to be coated is rotated in a horizontal posture in a coating process, the apparatus becomes larger as the size of the substrate increases, and the installation space becomes larger. Has to increase. Further, when the substrate to be coated is a square substrate, turbulence in airflow is more likely to occur on the surface of the substrate when the substrate is rotated than when a circular substrate is used. Due to the increase in the linear velocity difference between inside and outside of the substrate, the change in the state of the coating liquid becomes more remarkable as compared with the small substrate. For this reason, it is difficult to ensure coating quality such as uniformity of the thickness of the coating liquid film, and there is a problem that the coating quality is reduced.

The present invention has been made in view of the above circumstances, and when applying a coating liquid to a substrate, for example, a glass substrate for LCD, the coating liquid is effectively used to reduce the amount of the coating liquid used. It is also possible to reduce the installation space by reducing the size of the apparatus, and to improve the coating quality without lowering the coating quality such as uniformity of the coating liquid film thickness. An object of the present invention is to provide a coating liquid application device. In addition, in addition to the above, a coating liquid coating apparatus for a substrate capable of preventing or minimizing the generation of an ineffective area in which the thickness of a coating liquid film is out of an allowable range on a coating surface of the substrate. The purpose is to provide.

[0005]

According to the first aspect of the present invention, an apparatus for applying a coating liquid to a substrate includes a substrate holding means for holding a substrate to be coated in a vertical posture or an inclined posture, and A coating liquid tank for supplying a coating liquid to the coating surface of the held coating substrate, and a linear moving means for relatively linearly moving the coating liquid tank and the coating substrate held by the substrate holding means And an extended member provided on the coating end side and having an end surface which abuts or faces at least a part of the lower end surface of the substrate to be coated held by the substrate holding means. The coating liquid tank has a cylindrical shape that is closed at both ends and extends in the width direction of the substrate to be coated held by the substrate holding means. A coating liquid outflow passage composed of a fine hole or a slit-shaped narrow groove nozzle is formed in the width direction. The front end surface of the front wall portion is disposed horizontally in a non-contact and close proximity to the surface to be coated of the substrate to be coated held by the substrate holding means, and the upper end of the front end surface of the front wall portion is formed on the substrate. Assuming that the gap between the coating surface of the substrate to be coated held by the holding means and the front end face of the front wall portion is infinitely extended upward, it flows out through the coating liquid outflow passage and flows out of the gap. Is formed so as to be located at a position higher than a reaching height position when the coating liquid flowing into the gap rises at least in the gap by the capillary action. The coating liquid tank is held so as to be relatively movable in the vertical direction with respect to the substrate to be coated while maintaining a gap between the front end surface of the front wall portion and the surface of the substrate to be coated.

According to the second aspect of the present invention, the upper end of the front end face of the front wall of the coating solution tank is located between the surface of the substrate to be coated held by the substrate holding means and the front end face of the front wall. The height of the coating liquid when the coating liquid flowing out through the coating liquid outflow passage and flowing into the gap ascends the gap at least by the capillary action when it is assumed that the gap is infinitely extended upward and the coating liquid It is formed so as to be located between the outlet end and the front end face side outlet. The other configuration is the same as that of the first aspect.

According to a third aspect of the present invention, in the coating liquid application apparatus according to the first or second aspect, a front wall is formed on the extending member, and the front wall and the front wall of the coating liquid tank are formed. Between the front wall and the front wall of the front wall, between the front wall of the substrate to be coated and the front wall of the front wall held by the substrate holding means. A continuous gap was formed from the gap. A liquid reservoir formed in a gap between the surface to be coated of the substrate to be coated held by the substrate holding means and the front end of the front wall of the coating liquid tank is formed on the front end of the front wall at the end of coating. Until reaching the front wall surface of at least the extension member, relatively passing through the lower end of the coating surface of the substrate to be coated in a state regulated by the lower end of,
Control means for controlling the linear motion means is provided so that the relative movement between the coating liquid tank and the substrate to be coated is continued, and the coating surface of the coating substrate held by the substrate holding means and the coating surface are provided at the coating end side. At least a portion of the coating liquid in the liquid pool formed in the gap between the front wall of the liquid tank and the front end of the coating liquid tank is formed between the front wall of the extending member and the front end of the front wall of the coating liquid tank. It was held in the gap between them.

According to a fourth aspect of the present invention, in the coating solution applying apparatus according to the third aspect, the size of the gap between the front wall surface of the extending member and the front end surface of the front wall portion of the coating solution tank is The front wall surface of the extending member is attached to the substrate holding means so that the size of the gap between the surface to be coated of the substrate held by the substrate holding means and the front end face of the front wall of the coating liquid tank is equal to that of the substrate holding means. The substrate is formed in the same plane as the surface to be coated of the substrate to be coated.

According to a fifth aspect of the present invention, in the coating solution coating apparatus according to the third or fourth aspect, the coating surface of the coating substrate held by the substrate holding means and the front wall portion of the coating liquid tank. When at least a part of the coating liquid in the liquid pool formed in the gap between the front end face is held in the gap between the front wall face of the extending member and the front end face of the front wall portion of the coating liquid tank, The portion of the front wall of the extension member, which is in contact with the coating liquid in the liquid pool, is formed of a material having a wettability lower than the wettability of the coating surface of the substrate to be coated with the coating liquid, or the surface is treated. .

According to a sixth aspect of the present invention, in the coating solution applying apparatus according to the third or fourth aspect, the coating surface of the substrate held by the substrate holding means and the front wall portion of the coating solution tank are provided. When at least a part of the coating liquid in the liquid pool formed in the gap between the front end face is held in the gap between the front wall face of the extending member and the front end face of the front wall portion of the coating liquid tank, , The portion of the front wall of the extension member, which is in contact with the coating liquid in the liquid pool, has a wettability better than the wettability of the coating surface of the substrate to be coated with the coating liquid or equivalent to the wettability of the coating surface of the substrate to be coated. It is formed or surface-treated with a material having wettability.

According to a seventh aspect of the present invention, in the coating solution applying apparatus according to any one of the first to sixth aspects, the end surface of the extending member is provided below the substrate to be coated held by the substrate holding means. The part that comes into contact with or faces the end face,
The substrate is formed or surface-treated with a material having a wettability worse than the wettability of the surface of the substrate to be coated with the coating liquid.

[0012]

In the apparatus for applying a coating solution to a substrate according to the first aspect of the present invention, the coating solution injected into the coating solution tank passes through the coating solution outflow passage formed in the front wall portion and flows out of the tank. And flows into the gap between the surface to be coated of the substrate to be coated held in the vertical position or the inclined position by the substrate holding means and the front end surface of the front wall portion. At this time, the coating liquid that has flowed into the gap descends at least through the gap to the lower end of the front end face by the capillary action, but does not fall down by a capillary action or the like at a position below it, and the coating liquid that has flowed into the gap. Downward flow will be regulated at the lower end of the front end face,
The coating liquid in the gap does not flow downward beyond the lower end of the front end face. On the other hand, the coating liquid flowing into the gap flows upward by at least capillary action, but the upper end of the front end face of the front wall portion of the coating liquid tank assumes that the gap extends infinitely upward. Since the coating liquid flowing into the gap is located at least above the reaching height position when the coating liquid rises in the gap by the capillary action, the band-shaped coating liquid liquid extending in the width direction of the substrate to be coated is provided in the gap. A pool is formed, and a space without the coating liquid is formed above the liquid pool. In this state, while maintaining a gap between the front end face of the front wall portion and the surface to be coated of the substrate to be coated, the coating solution tank and the coating solution tank are arranged in the vertical direction of the substrate to be coated, that is, the direction orthogonal to the width direction of the substrate. The coating substrate is moved relatively linearly by the linear motion means, for example, when the coating liquid tank is moved downward while the coating substrate is stationary, the coating liquid is applied to the coating liquid surface of the coating substrate. You. The application liquid in the liquid pool in the gap is consumed by being applied to the surface to be applied, and an amount of the application liquid corresponding to the consumption amount passes through the application liquid outflow passage from the inside of the application liquid tank. Therefore, the amount of the coating liquid in the liquid pool in the gap is always kept constant during the application of the coating liquid to the surface to be coated.

The coating liquid is applied to the substrate as described above. The thickness of the coating liquid film applied to the surface to be coated using this coating apparatus depends on the size of the gap, the coating liquid, and the like. In addition to the flow characteristics and physical properties, the wettability of the surface to be coated of the substrate to be coated and / or the front end surface of the front wall of the coating liquid tank, for example, the gap formed in the direction orthogonal to the width direction of the substrate to be coated It is determined by the relative moving speed between the upper end of the liquid pool of the applied coating liquid and the substrate to be coated.

Here, the coating liquid is applied to the surface to be coated while the substrate to be coated is held in a vertical posture or an inclined posture by the substrate holding means. Therefore, for example, if the substrate to be coated is held on the substrate holding means by vacuum suction, and if an abnormal situation such as a power failure occurs and the holding force of the substrate holding means is lost or reduced, the coated substrate is There is a danger that it will fall or slip and be damaged. Further, when the thickness of the substrate to be coated is increased, a problem may occur in the stability of holding the substrate to be coated by the substrate holding means.

However, in this coating apparatus, an extension member is provided on the coating end side, and the end surface of the extension member contacts at least a part of the lower end surface of the substrate to be coated held by the substrate holding means. Alternatively, the substrate to be coated is supported by the extension member even if the holding power of the substrate holding unit is lost or reduced due to a power failure or the like due to the opposing and close proximity. Therefore, there is less danger that the substrate to be coated will fall or slip and be damaged. Further, even when the thickness of the substrate to be coated is increased, the problem of the stability of holding the substrate to be coated by the substrate holding means is solved by the auxiliary support of the substrate to be coated by the extension member. .

In the apparatus for applying a coating solution to a substrate according to the second aspect of the present invention, the coating surface of the substrate to be applied flows out of the coating solution tank through a coating solution outflow passage in a front wall portion to the outside of the tank. The coating liquid that has flowed into the gap between the front end face and the front end face of the front wall portion descends at least through the gap to the lower end of the front end face by capillary action, but does not descend by capillary action or the like at a position below it, and the gap The downward flow of the coating liquid flowing into the inside is regulated at the lower end of the front end face, and the coating liquid in the gap does not flow downward beyond the lower end of the front end face. on the other hand,
The upward flow of the coating liquid flowing into the gap does not flow due to capillary action or the like at a position above the upper end of the front end surface of the front wall portion, and is restricted at the upper end of the front end surface.
Therefore, a band-like liquid pool of the coating liquid extending in the width direction of the substrate is formed in the gap between the coating surface of the substrate to be coated and the front end surface of the front wall of the coating liquid tank. The application of the coating liquid to the coating liquid surface of the substrate to be coated is performed in the same manner as the coating apparatus according to the first aspect of the present invention. The thickness of the applied coating liquid film is determined by the relative moving speed between the coating liquid tank and the substrate to be applied. In addition, the extension member performs the same operation as that of the coating apparatus according to the first aspect of the present invention.

Further, the coating liquid is applied toward the coating end of the coating surface of the coating substrate, and the coating surface of the coating substrate and the front end surface of the front wall of the coating liquid tank are arranged on the coating end side. The lower end (the lower end of the front end surface of the front wall portion) of the liquid reservoir formed in the gap between the substrates reaches the end of the surface to be coated of the substrate to be coated, and further passes through the terminal end of the surface to be coated. Until the upper end or the upper end of the front end face of the front wall of the coating liquid tank is displaced from the end of the coating surface, the gap between the coated surface of the substrate to be coated and the front end face of the front wall of the coating liquid tank is maintained. Let us consider a case in which the coating liquid tank is moved relatively to the substrate to be coated in the vertical direction. In this case, as the front end surface of the front wall portion of the coating liquid tank gradually departs from the end (lower end) of the coating surface of the coating substrate, the gap is broken. Then, a part of the coating liquid held in the gradually destroyed gap flows down from the lower end of the substrate to be coated or the lower end of the front end face of the front wall of the coating liquid tank. In addition, since the movement of the coating liquid in the liquid pool is suppressed at the lower end of the substrate to be coated, a problem occurs in the relative moving speed between the upper end of the liquid pool and the surface to be coated of the substrate to be coated, or A part of the coating liquid in the liquid pool may protrude beyond the upper end of the front end surface of the front wall portion from the gap between the surface to be coated and the front end surface of the front wall portion of the coating liquid tank. As a result, an ineffective area where the thickness of the coating liquid film is out of an allowable range is generated in the vicinity of the coating end of the coating surface of the coating substrate,
There is a problem that the effective area of the substrate to be coated is reduced.

However, in the coating apparatus according to the third aspect of the present invention, the extending member is disposed such that the end face is in contact with or close to at least a part of the lower end face of the substrate to be coated on the coating end side. Front face of the front wall of the coating liquid tank faces a portion sequentially displaced from the end (lower end) of the surface of the substrate to be coated, and the front wall of the extension member and the front end of the front wall. A continuous gap is formed from the gap between the coated surface of the coated substrate and the front end surface of the front wall portion. The coating liquid in the liquid pool formed in the gap between the surface to be coated of the substrate to be coated and the front end of the front wall of the coating liquid tank is filled with the front end of the front wall at the surface to be coated of the substrate to be coated. Between the front wall surface of the extension member and the front end surface of the front wall portion with the lower end of the liquid reservoir still being regulated by the lower end of the front end surface of the front wall portion as it gradually comes off from the terminal end (lower end) of the front wall portion. Are sequentially transferred and held in the gaps. Therefore, the influence of the coating liquid in the liquid pool formed in the gap from the lower end of the substrate to be coated is eliminated or reduced, and the lower end of the liquid pool (lower end of the front end surface of the front wall portion of the coating liquid tank) is formed on the substrate to be coated. When the front end face of the front wall of the coating liquid tank gradually deviates from the end of the coating surface of the substrate to be coated, even when relatively passing through the terminal end (lower end) of the coating surface of the substrate. Also, a part of the coating liquid in the liquid pool does not flow down from the lower end of the substrate to be coated or the lower end of the front end face of the front wall of the coating liquid tank. Further, the movement of the coating liquid in the liquid pool is not suppressed at the lower end of the substrate to be coated. Therefore, a problem may occur in the relative movement speed between the upper end of the liquid reservoir in the gap and the surface to be coated of the substrate to be coated, or the gap between the surface to be coated of the substrate to be coated and the front end surface of the front wall of the coating solution tank. It does not occur that a part of the liquid pool protrudes beyond the upper end of the front end face of the front wall portion from the upper surface. And, for example, at the time when the lower end of the front end surface of the front wall portion of the coating liquid tank is disengaged from the lower end of the front wall surface of the extending member, at the latest, the upper end of the liquid reservoir formed in the gap is the upper surface of the application surface of the application substrate. If the front surface of the extension member is formed so as to be separated from the terminal end (lower end) and the extension member is disposed on the application terminal side, the liquid pools up to the terminal end of the application surface of the substrate to be applied. The upper end of the coating liquid moves relative to the surface of the substrate to be coated within an allowable speed range, and the upper end of the liquid pool is regulated by the upper end of the front end surface of the front wall of the coating liquid tank. The liquid will be applied. As a result, the problem that the film thickness of the coating liquid film is out of an allowable range and an ineffective area is generated in the vicinity of the application end of the application surface of the application substrate does not occur, or the ineffective area is minimized. Will be done.

In the coating apparatus according to the fourth aspect of the present invention, the front wall surface of the extending member is formed below the surface to be coated of the substrate to be coated and in the same plane as the surface to be coated, and the surface to be coated is extended as it is. Since the application of the application liquid is performed on the application end side in the same state as that performed, the above operation of the invention according to claim 3 is most effectively achieved.

In the coating apparatus according to the fifth aspect of the present invention, the portion of the front wall surface of the extension member that comes into contact with the coating liquid in the liquid pool formed in the gap is formed by applying the coating liquid to the coating substrate. It is formed or surface-treated with a material having a wettability worse than the surface wettability, for example, a fluororesin.
For this reason, since the coating liquid is less likely to adhere to the front wall surface of the extension member, the lower end of the front end surface of the front wall portion of the coating liquid tank relatively passes through the lower end of the coating surface of the substrate to be coated, Further, when the lower end of the front end surface of the front wall gradually deviates from the lower end of the surface to be coated, there is a possibility that a force remaining at the lower end of the substrate to be applied to suppress the movement of the application liquid in the liquid pool in the gap may remain. However, compared to the case where the front wall surface of the extension member is not formed so as to face the front end surface of the front wall portion of the coating liquid tank with a gap, the vicinity of the coating end of the coating surface of the substrate to be coated is smaller than that of the coating member. The occurrence of an ineffective area where the thickness of the coating liquid film is out of the allowable range can be significantly reduced. In this coating apparatus, the coating liquid adhering to the front wall surface of the extending member is not in a film state but in a droplet state, so that the adhering coating liquid can be easily removed from the front wall surface of the extending member. And its cleaning work is simplified.

On the other hand, in the coating apparatus according to the present invention, the portion of the front wall of the extending member that comes into contact with the coating liquid in the liquid pool formed in the gap is formed on the substrate to be coated with the coating liquid. It is formed or surface-treated with a material having a wettability equal to or higher than the wettability of the surface to be coated. For this reason, the coating liquid easily adheres to the front wall surface of the extension member at a level equal to or greater than the coating surface of the substrate to be coated, and the lower end of the front end surface of the front wall of the coating liquid tank is coated. When the lower end of the front end face of the front wall portion gradually moves away from the lower end of the application surface, the movement of the application liquid in the liquid pool in the gap is caused by the lower end of the application substrate. Is not suppressed. Therefore, the problem that the thickness of the coating liquid film in the vicinity of the coating end of the coating surface of the coating substrate is out of the allowable range and an ineffective area is generated does not occur, or the ineffective area is minimized. . However, since the coating liquid adheres to the front wall surface of the extension member in a film state in the same manner as the coating surface of the substrate to be coated, it is necessary to devise a technique for cleaning the front wall surface of the extension member.

In the coating apparatus according to the present invention, the portion of the end surface of the extension member which is in contact with or in proximity to the lower end surface of the substrate to be coated is formed on the surface of the substrate to be coated with the coating liquid. It is formed or surface-treated with a material having a wettability worse than the wettability, for example, a fluororesin. For this reason, for example, the lower end of the liquid reservoir (the lower end of the front end surface of the front wall portion) formed in the gap between the surface to be applied of the substrate to be applied and the front end surface of the front wall portion of the coating liquid tank is formed of the substrate to be applied. When the application liquid is applied to a position before reaching the terminal end (lower end) of the application surface, and then the application liquid tank is moved relative to the application surface in a direction to increase the gap, or When the lower end of the liquid pool formed in the gap reaches the end of the coating surface of the substrate to be coated and the coating liquid tank is further continuously moved relative to the coating surface, the liquid Part of the coating liquid flowing down from the pool on the surface to be coated of the substrate to be coated, or part of the coating liquid applied to the end of the surface to be coated of the substrate to be coated, extends to the lower end surface of the substrate to be coated. The flow into the gap between the opposed end faces of the installation member is suppressed. Therefore, the possibility that the lower end surface of the substrate to be coated is stained by the coating liquid is eliminated or reduced.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 to 4 show one embodiment of the invention according to claim 1, FIG. 1 is a longitudinal sectional view showing the structure of a main part of a coating solution coating apparatus for a substrate, and FIG. , Its front view,
FIG. 3 is a top view of the portion, and FIG. 4 is a partially enlarged longitudinal sectional view showing a state during the application.

In this coating apparatus, a substrate 10 on which a coating liquid is to be coated is fixed by means such as vacuum suction and the like, and a substrate holding table (stage) 12 for holding the substrate 10 in a vertical position, and a substrate holding both ends closed. A coating liquid tank 14 having a cylindrical shape and extending in the width direction of 10 is provided. In the front wall portion 16 of the coating liquid tank 14, a coating liquid outflow passage 18 is formed in the width direction so as to penetrate therethrough and incline upward to the front end side. The coating liquid outflow passage 18 is formed by a collection of a large number of linear thin tubes, a large number of micro holes (the numbers do not necessarily need to match as long as at least the inlet and the outlet are in communication, ) Or one or a plurality of slit-shaped narrow groove nozzles. The coating liquid tank 14 has a front end face 20 formed so that a part of the front wall portion 16 projects forward and extends in the entire width direction, and the front end face 20 and the coating surface of the substrate 10 held by the stage 12 are formed. The front end face 20 is disposed in a horizontal direction such that the front end face 20 is not in contact with and is close to the coating surface of the substrate 10 so that a gap 22 having a dimension G is formed.
The front end face 20 of the coating liquid tank 14 does not necessarily need to be formed over the entire length according to the application. And the coating liquid tank
The front end surface 20 of the front wall portion 16 of 14 has a coating liquid outflow path at its lower end.
It is formed so as to be located at a height between the front end face-side outlet 24 and the inlet 26 on the opposite side. Also, the coating solution tank 14
Is the arrow a while maintaining the gap 22 of the dimension G between the front end face 20 and the coating surface of the substrate 10 held on the stage 12.
As shown in (1), it is supported by a linear drive mechanism (not shown) so that it can be moved linearly in the vertical direction, that is, in the downward direction perpendicular to the width direction of the substrate 10. Also, the substrate 10
A drive mechanism for moving the stage 12 or the coating solution tank 14 in the direction in which the gap 22 widens may be provided so that the stage 12 can be easily held on the stage 12 and can be easily removed from the stage 12. In this case, a detector for measuring the dimension G of the gap 22 may be provided.

Further, the coating end side (the lower end side of the stage 12)
Is provided with an extension member 28. The extension member 28 includes
An end face 30 is formed which is in contact with at least a part of the lower end face of the substrate 10 held by the stage 12 or in close proximity thereto. The extension member 28 is fixed to the stage 12 by, for example, a screw or the like (not shown). Further, as shown in FIG. 1, the extension member 28 may be formed integrally with the stage without forming the extension member 28 separately from the stage 12.
When the extension member 28 is fixed to the stage 12, or
In the case where the extension member is formed integrally with the stage, in order to hold the substrate 10 on the stage 12 so that the lower end thereof abuts or approaches the end surface 30 of the extension member 28, for example,
In a state where the substrate 10 is positioned with respect to the extension member 28, the substrate 10 must be transferred and mounted on the surface of the stage 12, and there is a problem that the operation of loading the substrate 10 on the stage 12 is difficult. . As means for solving such operational difficulties, the extension member 28 can be separated separately from the stage 12 and, for example, the extension member 28 is moved upward from the lower position to the rear surface 34 of the stage 12. And the vertical surface 36 of the extending member 28 is slidably moved by a driving device (not shown). After the substrate 10 is held on the stage 12, the extending member 28 is You may make it move until it abuts or approaches the lower end face of 10, and stops it.

The extension member 28 has a front wall surface 32 which faces the front end surface 20 of the front wall portion 16 of the coating solution tank 14 and forms a gap between the front end surface 20 of the front wall portion 16. It is shaped. The gap is formed so as to be continuous from the gap 22 between the coating surface of the substrate 10 held on the stage 12 and the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 on the coating end side. .
In this embodiment, the front wall 32 of the extension member 28 is
The front surface 32 of the extension member 28 and the coating solution tank 14 are formed so as to be in the same plane as the surface to be coated of the substrate 10 held by the
The dimension of the gap between the front end face 20 of the front wall portion 16 of the
Is equal to the dimension G of the gap 22 between the surface to be coated and the front end face 20 of the front wall portion 16. And the coating liquid tank
14 controls the linear drive mechanism by a control device (not shown) so that the lower end of the front end face 20 of the front wall 16 passes through the end (lower end) of the coating surface of the substrate 10 at least on the coating end side. Until the front wall 32 of the extension member 28 is reached,
It can be moved continuously in the vertical direction indicated by arrow a.

Although not shown in FIGS. 1, 3 and 4, the coating solution tank 14 is provided with a pressurized, depressurized, and atmospheric pressure in the tank as shown in FIG. A pressure setting system 40 for releasing the coating liquid to the atmosphere and a coating liquid supply system 42 for supplying the coating liquid into the tank are provided. In FIG. 2, reference numerals 44 and 50 denote switching valves, reference numeral 46 denotes a pipeline communicating with a pressure regulator (not shown), and reference numeral 48 denotes a pipeline communicating with the atmosphere. Further, the coating liquid tank 14 is provided with a detector 52 for detecting the level of the coating liquid 38 injected into the tank.

Then, the coating liquid 38 is supplied from the coating liquid supply system 42 into the coating liquid tank 14, and the level of the coating liquid is between the inlet 26 of the coating liquid outflow passage 18 and the lower end of the front end face 20 of the front wall 16. The coating liquid 38 is injected into the coating liquid tank 14 while detecting the coating liquid level with the detector 52 so that the coating liquid is positioned at the height of, that is, within the range D in FIG. At this time, due to a pressure increase in the coating liquid tank 14 accompanying the coating liquid supply, the coating liquid previously supplied to the coating liquid tank 14 flows out of the tank through the coating liquid outflow path 18,
In order to avoid such inconvenience, the switching valve 44 of the pressure setting system 40 is operated to keep the inside of the coating solution tank 14 open to the atmosphere, for example. When a predetermined amount of the coating liquid 38 is injected into the coating liquid tank 14, the coating liquid 38 rises to the position of the front end face side outlet 24 of the coating liquid outflow passage 18 by capillary action or the like.
At this time, even if a predetermined amount of the coating liquid 38 is injected into the coating liquid tank 14, the coating liquid 38 is forcibly discharged from the outlet 24 through the coating liquid outflow passage 18 so as not to occur. The pressure in the liquid tank 14 is set by the pressure setting system 40, for example, so as to be continuously opened to the atmosphere.

The coating liquid 38 is discharged from the front end face side of the coating liquid outflow passage 18.
When the space 22 having the dimension G is formed between the surface to be coated of the substrate 10 and the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 when the position is raised to the position 24, the coating is performed in the space 22. The coating liquid 38 flows from the inside of the liquid tank 14 through the coating liquid outflow passage 18, and the coating liquid flows in the gap 22 by capillary action or the like, and the front end face of the front wall 16
The flow of the coating liquid is regulated at the lower end of 20, and a band-shaped liquid reservoir 54 is formed in the width direction of the substrate 10. The liquid reservoir 54 is always in communication with the coating liquid 38 in the coating liquid tank 14 through the coating liquid outflow passage 18.

As a method for first forming the band-shaped liquid reservoir 54 in the gap 22 having the dimension G at the coating start position,
After the inside of the coating solution tank 14 is pressurized by the pressure setting system 40 to forcibly form a part of the liquid reservoir 54, the coating solution is forced through the coating solution outflow passage 18 in the coating solution tank 14. A method of forming a band-like liquid pool 54 under such a pressure that the liquid does not flow out of the tank, for example, to open to the atmosphere, and then applying the inside of the coating liquid tank 14 from the beginning until the band-like liquid pool 54 is formed. As the pressure state,
A method of forming the liquid pool 54 forcibly, or a method of forming the liquid pool 54 without opening the coating liquid tank 14 to the atmosphere until the band-shaped liquid pool 54 is formed from the beginning. and so on. Any of these methods may be used, but in any case, after the band-shaped liquid reservoir 54 is formed at the latest, the inside of the coating liquid tank 14 is moved to the front end face 20 of the front wall portion 16. The pressure is such that the coating liquid does not flow out from the lower end of the coating liquid, and the coating liquid 38 is supplied from the coating liquid tank 14 to the gap 22 having the dimension G during the coating process described below,
For example, it is kept open to the atmosphere.

Here, the front end surface of the front wall portion 16 of the coating solution tank 14
The dimension G of the gap 22 between the substrate 20 and the surface to be coated of the substrate 10 depends on the coating quality.
For example, the moving speed of the upper end of the liquid pool 54 in the coating liquid tank 14 or the gap 22, the fluidity and physical properties of the coating liquid 38, the wettability of the surface to be coated of the substrate 10 and / or the front end surface 20 of the front wall 16, etc. Take into account and use efficiency of the coating liquid, liquid pool in the gap 22
Taking into consideration the retention stability of 54, etc., it is selected within the range where the capillary action is exhibited. In addition, the dimensions of the coating liquid outflow passage 18 prevent the coating liquid 38 in the coating liquid tank 14 from flowing into the gap 22 by capillary action or the like, and forming a band-shaped liquid pool 54 in the gap 22 by capillary action or the like. It is set within a range that does not exist and within a range where a good coating liquid film can be formed including at the start of coating.

On the other hand, the front end face 20 of the front wall 16 of the coating liquid tank 14
The front wall surface 21 is formed in such a shape that the coating liquid in the liquid pool 54 does not flow into the gap formed between the front wall surface 21 and the coating surface of the substrate 10 by capillary action or the like. Then, depending on the amount of the coating liquid 38 in the coating liquid tank 14, the characteristics of the coating liquid 38, the surface condition of the coating surface of the substrate 10 or the front end face 20 of the front wall portion 16, the size G of the gap 22, etc. If there is a possibility that the coating liquid in the liquid pool 54 may flow out from the lower end of the front end surface 20 of the wall portion 16 or the like, the front end surface
20 The coating liquid in the liquid pool 54 does not flow out from the lower end, etc., and
The coating liquid in the coating liquid tank 14 through the coating liquid outflow passage 18 to the gap 22
So that 38 is supplied by capillary action or the like.
Is determined. Accordingly, the lower end of the liquid pool 54 in the gap 22 is regulated by the lower end of the front end face 20 of the front wall portion 16, and the coating liquid in the liquid pool 54 does not flow down from the gap 22.

The front end face 20 of the front wall 16 of the coating liquid tank 14
Is the dimension G between the front end face 20 and the surface to be coated of the substrate 10.
Assuming that the gap 22 of is extended infinitely upward,
A gap 22 passes through a coating solution outflow passage 18 formed in the front wall 16.
The coating liquid is formed so as to be located above a reaching height position when the application liquid flowing into the gap 22 rises in the gap 22 by a capillary action or the like. Therefore, the coating liquid 38 is placed in the coating liquid tank 14,
When the liquid level is injected so as to be at a height between the inlet 26 of the coating liquid outflow passage 18 and the lower end of the front end surface 20, the coating liquid flows from the coating liquid tank 14 to the gap 22 through the coating liquid outflow passage 18. The liquid pool 54 formed in the gap 22 by the flowing coating liquid has its lower end located at the lower end of the front end face 20 as described above, and its upper end is located lower than the upper end of the front end face 20. 22, puddle 54
Above, a space 56 free of the application liquid is formed.

As shown in FIG. 4, the surface of the substrate 10 held on the stage 12 and the front wall 16
In a state where a band-shaped liquid pool 54 of the coating liquid extending in the width direction of the substrate 10 is formed in the gap 22 between the front end face 20 and the coating liquid tank 14 from the stop position on the coating start end side, the front wall is removed. Part 16
A gap 22 having a dimension G between the front end face 20 of the
With the control device controlling the linear drive mechanism to move the substrate 10 linearly in the vertical direction of the substrate 10 as shown by the arrow a, that is, in the downward direction orthogonal to the width direction of the substrate 10 while maintaining Is started to be applied to the surface to be coated. The coating liquid in the liquid pool 54 formed in the gap 22 is
The coating liquid is consumed by being applied to the surface of the substrate 10 to be coated.
It is supplied from inside to the gap 22 through the coating liquid outflow passage 18.

On the application start end side, the coating liquid tank is formed such that the upper end of the liquid reservoir 54 formed in the gap 22 is located below the upper end of the coating surface of the substrate 10 held by the stage 12.
Stopping at the application start end position, not only in the case of applying the application liquid on the application surface by starting the movement of the application liquid tank 14 in the vertical direction of the substrate 10 from that position, for example, held on the stage The upper end of the surface to be coated of the substrate 10 is positioned at the height of the coating liquid when the coating liquid flowing into the gap 22 and the front end face side outlet 24 of the coating liquid outflow passage 18 rises in the gap 22 by capillary action or the like. And the front end face of the front wall portion 16
The application liquid tank 14 is positioned and stopped so that a gap 22 having a dimension G is formed between the substrate 20 and the surface to be coated of the substrate 10 held on the stage 12, and from that position in the vertical direction of the substrate 10. The movement of the application liquid tank 14 may be started to start the operation of applying the application liquid to the surface to be applied. Also in this case, during the application of the application liquid to the application surface of the substrate 10, the application liquid pool 54 formed in the gap 22 is formed.
The lower end is located at the lower end of the front end face 20 of the front wall section 16 of the coating liquid tank 14, the upper end is located below the upper end of the front end face 20 of the front wall section 16, and is above the liquid pool 54 of the gap 22. Thus, a space 56 free of the coating liquid is formed.

The length of the stage 12 in the vertical direction is made shorter than the length of the substrate 10 in the vertical direction, that is, in the direction orthogonal to the width direction of the substrate 10. And is held on the stage 12 in a state of protruding from the upper end side. In this case, the substrate 10 is, for example, L
When the substrate is a transparent substrate such as a glass substrate for a CD, the application surface of the substrate 10 and the coating liquid are applied to the application starting end side from the opposite side of the application surface of the transparent substrate 10 projecting from the upper end side of the stage 12. It can be confirmed that a band-shaped liquid reservoir 54 was formed in the gap 22 between the front end face 20 of the front wall portion 16 of the tank 14 and the width direction of the substrate 10.
Can be moved downward to perform the coating operation.
For this reason, the application to the application surface of the substrate 10 is performed more reliably. Note that a detector may be provided for the confirmation.

On the other hand, on the coating end side, the substrate 10 is
The lower end portion is held on the stage 12 so as to protrude from the lower end side of the stage 12. In this case, the coating liquid flows down from the lower end of the substrate 10 while the coating liquid is being applied to the surface to be coated of the substrate 10 or after the coating is completed, and the flowing coating liquid extends with the lower end surface of the substrate 10. Installation members
It is possible to prevent inconveniences such as intrusion between the front surface of the stage 12 and the opposite side (rear side) of the substrate 10 from the front surface of the stage 12 due to a gap between the end surface 30 of the substrate 28 and the like.

In this embodiment, the substrate 10 is held on the stage 12 with the upper and lower ends of the substrate 10 protruding from the upper and lower edges of the stage 12, respectively. It is a matter of course that the present invention is not limited to a suitable holding form. Further, in the coating apparatus shown in FIG. 1, the front wall surface 32 is arranged in the same plane as the coating surface of the substrate 10 held on the stage 12, that is, the coating surface of the substrate 10 is directed downward. Although the extension member 28 is configured and arranged so that the front wall surface 32 is formed by the extended plane, the present invention is not limited to such a configuration. However, when the front wall surface of the extension member is arranged so as to protrude forward from the surface to be coated of the substrate 10 held by the stage 12 by a dimension equal to or greater than the dimension G of the gap 22, the application end On the side, the range until the lower end of the front end face 20 of the front wall portion 16 of the coating liquid tank 14 reaches the upper end of the front wall surface of the extending member is the movable range of the coating liquid tank 14, and the coating area is restricted. The Rukoto.

In the above example shown in FIG.
Although the substrate 10 is held in a vertical posture by 12, the substrate is moved forward (to the left in FIG. 1) or backward (to FIG. 1).
It may be held in a posture inclined at an appropriate angle to the upper right direction. In the above example, the substrate
Although the coating liquid tank 14 is moved downward with the stationary state of the substrate 10, the substrate and the coating liquid tank may be moved relatively in the vertical direction of the substrate, and the coating liquid tank may be moved. A configuration in which the substrate held on the stage is moved upward in a stationary state may be employed.

In order to apply a coating liquid to the surface to be coated of the substrate 10 using the coating apparatus having the above-described configuration, first, the substrate 10 is fixed to the stage 12 by vacuum suction or the like. On this occasion,
In the case where the extension member 28 is integrally fixed to the stage 12 or is integrally formed with the stage 12, for example,
With the substrate 10 positioned with respect to the extension member 28, the substrate 10 is transferred and mounted on the stage 12 surface, and the lower end surface of the substrate 10 abuts or is close to the end surface 30 of the extension member 28 on the coating end side. In this state, the substrate 10 is held on the stage 12. Also, the extension member 28 can be separated from the stage 12 separately, and the extension member 28 is moved upward from the lower position to the rear of the stage 12.
When the configuration is such that the substrate 34 can be moved while sliding on the vertical surface 36 of the extension member 28, the substrate 10
After holding the extension member 28, the end surface 30 of the extension member 28 is
Is moved until it comes into contact with or close to the lower end face of the camera.

Then, the coating liquid tank 14 into which a predetermined amount of the coating liquid 38 has been injected is placed on the coating surface of the substrate 10 and the front end face 20 of the front wall 16.
Is moved toward the substrate 10 from a position away from the substrate 10, for example, in a horizontal direction so as to approach the substrate 10 so that a gap 22 having a dimension G is formed between the substrate 10 and the substrate 10. In this case, even if a predetermined amount of the coating liquid 38 is previously injected into the coating liquid tank 14, the pressure in the coating liquid tank 14 is increased by the pressure setting system 40.
If the pressure is set so that the 38 does not flow out of the tank, for example, if it is kept open to the atmosphere, the coating liquid 38 will not flow out of the coating liquid tank 14 through the coating liquid outflow passage 18. Of course, after a gap 22 having a dimension G is formed between the front end face 20 of the front wall portion 16 of the coating liquid tank 14 and the coating surface of the substrate 10, a predetermined amount of the coating liquid 38 is poured into the coating liquid tank 14. You may make it inject | pour.

Next, the inside of the coating solution tank 14 is pressurized by the pressure setting system 40, and a gap is formed from the inside of the coating solution tank 14 through the coating solution outflow passage 18.
After the coating liquid flows out to 22 and a part of the liquid pool 54 is formed in the gap 22, the inside of the coating liquid tank 14 is opened to the atmosphere so that the coating liquid does not flow out of the tank. Band-shaped pool
Form 54. Alternatively, after the gap 22 is formed, the inside of the application liquid tank 14 may be pressurized until a band-shaped liquid reservoir 54 is formed, or after the gap 22 is formed, the inside of the application liquid tank 14 is opened to the atmosphere. The band-shaped liquid reservoir 54 may be formed. Further, the coating liquid in the liquid pool 54 does not flow out from the lower end of the front end face 20 of the front wall portion 16 of the coating liquid tank 14, and the coating liquid in the coating liquid tank 14 passes through the coating liquid outflow passage 18 to the gap 22. With only the pressure in the tank such that the liquid 38 is supplied by capillary action or the like, or by a combination of the pressure in the tank and pressurization, opening to the atmosphere, etc.
A band-shaped liquid reservoir 54 may be formed. Others
The band-shaped liquid pool 54 may be formed in the gap 22 by any method, but in any case, after the band-shaped liquid pool 54 is formed in the gap 22, the coating liquid in the liquid pool 54 It is necessary to adjust the inside of the coating liquid tank 14 to a pressure at which the coating liquid 38 is supplied from the coating liquid tank 14 to the gap 22 during the coating process described later without flowing out from the gap 22.
Keep the inside open to the atmosphere.

When a band-like liquid pool 54 is formed in the gap 22,
The coating is performed in the vertical direction of the substrate 10 (in the direction of arrow a in FIG. 1) while maintaining a gap 22 having a dimension G between the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 and the surface to be coated of the substrate 10. The liquid tank 14 is moved. Then, with the movement of the coating liquid tank 14, the upper end of the liquid pool 54 in the gap 22 starts to move on the coating surface of the substrate 10, and the coating liquid is applied to the coating surface of the substrate 10 as shown in FIG. Being a coating liquid film
58 begins to form. Further, the coating liquid tank 14 moves downward, so that the liquid pool 54 is formed in the gap 22 between the coating surface of the substrate 10 and the front end surface 20 of the front wall 16 of the coating liquid tank 14.
The upper end of the liquid pool 54 moves downward in a state where the coating liquid-free space 56 is formed above, and the amount of the coating liquid in the liquid pool 54 in the gap 22 is applied to the surface to be coated and consumed. Is supplied to the gap 22 by capillary action or the like from the inside of the coating liquid tank 14 through the coating liquid outflow path 18, and the amount of the coating liquid in the liquid pool 54 in the gap 22 is kept constant while the substrate 10 The application liquid is applied to the surface to be applied. Then, the application liquid tank 14 is moved to a position where the upper end of the liquid pool 54 in the gap 22 is at least deviated from the required application area, for example, near the lower end of the substrate 10 indicated by a two-dot chain line, and then stopped.

As described above, since the coating liquid tank 14 moves from near the upper end to near the lower end of the substrate 10, the coating liquid in the liquid pool 54 comes into contact with the area of the substrate 10 to be coated on which the coating is required. As shown in FIG. 4, the application liquid is applied to the application surface of the substrate 10 to form an application liquid film 58.

When the application liquid tank 14 stops at a position near the lower end of the substrate 10 and the application of the application liquid to the application surface of the substrate 10 is completed, the substrate 10 is removed from the stage 12. At this time, if the coating liquid tank 14 is moved away from the stage 12, for example, in the horizontal direction, or if the stage 12 is moved away from the coating liquid tank 14, for example, in the horizontal direction, the removal of the substrate 10 becomes easy. When the applied substrate 10 is removed from the stage 12, the process returns to the first step for applying the application liquid to the next substrate 10.

As described above, a substrate on which a coating liquid film is formed in a region where a coating is required on the surface to be coated can be obtained. In this coating apparatus, as described above, the substrate 10
The substrate 10 is held on the stage 12 by vacuum suction or the like in a state where the end surface 30 of the extension member 28 is in contact with or opposed to the lower end surface of the extension member 28. The risk of falling or slipping and being damaged can be reduced, and even when the thickness of the substrate 10 is increased, the substrate 10 is supported by the extension member 28 in an auxiliary manner, The problem of the stability of holding the substrate 10 by the stage 12 is also eliminated.

When the coating liquid tank 14 is moved in a direction away from the stage 12, the coating liquid in the liquid pool 54 in the gap 22 becomes
The gap 22 is widened and the liquid pool 54 is destroyed, and adheres to the surface to be coated and the front end surface 20 of the front wall portion 16 and flows down,
It cannot be used for subsequent coating. Therefore, before separating the coating liquid tank 14 from the stage 12, the pressure setting system
The pressure inside the coating liquid tank 14 is reduced by 40, and the liquid pool in the gap 22 is collected.
The coating liquid of 54 is flowed back through the coating liquid outflow passage 18 to
It may be collected within 14. At the time of this collection,
The front end face 20 of the front wall portion 16 of the coating liquid tank 14, at least the range from the front end face side outlet 24 of the coating liquid outflow passage 18 to the upper end of the front end face 20 is not deviated from the lower end side of the substrate 10, and the front end face It is necessary to keep a state in which a gap 22 is formed between the substrate 20 and the application surface of the substrate 10.

In the coating solution tank 14 of the coating apparatus shown in FIGS. 1 to 4, the gap 22 formed by the surface to be coated of the substrate 10 and the front end face 20 of the front wall 16 is constant over the entire front end face 20. However, the shape of the front end face of the front wall portion of the coating liquid tank is not limited to the size shown in the above embodiment. Examples are shown in FIGS.

The coating liquid tank 64 of the coating apparatus shown in the partially enlarged longitudinal sectional view of FIG. 5 has a front end face of a front wall 66 having a lower front end face 70a and a front end recessed rearward from the lower front end face 70a. The upper surface 70b is formed on a stepped surface. The substrate 10 held on the stage 12 and the lower front end face 70a of the front wall 66
G of the lower gap 72a formed between the surface and the surface to be coated.
Is the same as the dimension of the gap 22 G in the coating apparatus shown in FIGS. 1-4, the dimension G ₁ of the upper gap 72b formed between the front face top 70b and the coated surface is lower gap 72a
Is larger than the dimension G. The front end side outlet 74 of the coating liquid outflow passage 68 is formed so as to be located at the boundary between the lower front end face 70a and the upper front end face 70b of the front wall 66.
Further, the lower end of the lower front end portion 70a of the front wall portion 66 is formed so as to be located at a height between the front end side exit 74 of the coating liquid outflow passage 68 and the entrance 76 on the opposite side. when the upper end of the front face top 70b of the wall portion 66, it is assumed that is infinitely extended upper gap 72b dimension G ₁ upward between the coated surface of the front end face upper 70b and the substrate 10, front wall portion The coating liquid flowing into the upper gap 72b through the coating liquid outflow passage 68 formed in 66 is formed so as to be located above the reaching height position when the coating liquid rises in the upper gap 72b by capillary action or the like. I have. Accordingly, when the coating liquid 38 is injected into the coating liquid tank 64 such that the liquid level is between the inlet 76 of the coating liquid outflow passage 68 and the lower end of the lower front end surface 70a, the coating liquid The lower end is located at the lower end of the lower front end face 70a, and the upper end is located at the upper end of the upper front end face 70b and the front end face of the coating liquid outflow path 68 due to the coating liquid flowing into the gaps 72a and 72b through the coating liquid outflow passage 68 from above. Side exit 74
A liquid pool 78 located between and will be formed,
In the upper gap 72b, a space above the liquid pool 78, where there is no coating liquid
80 will be formed. The coating liquid 38 may be injected into the coating liquid tank 64 before or during the positioning operation of the coating liquid tank 64 in the state shown in FIG.

In FIG. 5, only the coating start side is shown and the coating end side is not shown. However, the coating apparatus shown in FIG. 5 is similar to the coating apparatus shown in FIGS. In addition, an extension member 28 is provided on the application end side.

Then, the coating liquid tank 64 is moved from the coating start position shown in FIG. 5 to the space between the lower front end surface 70 a and the upper front end surface 70 b of the front wall 66 and the surface to be coated of the substrate 10 held on the stage 12. the top gap 72 of the lower gap 72a and dimensions G ₁ dimension G in
While keeping b, for example, as shown by the arrow a, in the vertical direction of the substrate 10, that is, in the downward direction orthogonal to the width direction of the substrate 10, by controlling the linear drive mechanism by the control device and linearly moving, In the same manner as the coating device shown in FIGS. 1 to 4,
The application of the application liquid to the application surface of the substrate 10 is started. Then, the liquid pool 78 formed in the gaps 72a, 72b
Is consumed by being applied to the surface to be coated of the substrate 10 along with the movement of the coating solution tank 64, and an amount of the coating solution corresponding to the consumption amount flows out of the coating solution tank 64. The air is supplied to the gaps 72a and 72b through the path 68.

FIG. 6 is a partially enlarged longitudinal sectional view showing another example of the configuration of the coating liquid tank having the same operation and effect as the coating liquid tank 64 shown in FIG. The coating liquid tank 84 has a front wall 86
The front end of the lower end 90a from the lower end thereof to a position slightly past the front end side exit 94 of the coating liquid outflow passage 88, and the front end from the position slightly past the front end side exit 94 to the upper end. An upper surface 90b of the front end surface recessed rearward from the lower surface 90a is formed on a stepped surface.
Are opened in a lower gap 92a between the lower front end face 90a and the surface to be coated of the substrate 10. The other configuration is the same as that of the coating liquid tank 64 shown in FIG. That is, the lower gap 92a between the lower front end face 90a of the front wall 86 and the surface to be coated of the substrate 10
Is the lower clearance in the coating solution tank 64 shown in FIG.
72a is identical to the dimension G of the dimensions G ₂ of the upper gap 92b between the front surface upper 90b and the coated surface is greater than the dimension G of the lower gap 92a. Further, the lower end of the lower front end portion 90a of the front wall portion 86 is formed so as to be located at a height between the front end surface side exit 94 of the coating liquid outflow passage 88 and the entrance 96 on the opposite side. the upper end of the front face top 90b of the wall portion 86, the upper gap 92b coating liquid when it is assumed that the upper gap 92b dimension G ₂ and indefinitely to extend upward by capillary action and the like
It is formed so as to be located above the reaching height position when ascending inside. Then, the coating liquid 38 is placed in the coating liquid tank 84.
When a predetermined amount is injected, the lower end is positioned at the lower end of the front end face lower portion 90a, and the upper end is positioned at the front end by the coating liquid flowing from the coating liquid tank 84 through the coating liquid outflow passage 88 into the gaps 92a and 92b. Upper end of upper surface 90b and front end side exit 94 of coating liquid outflow passage 88
Will be formed between the liquid pool 98 and
In the upper gap 92b, the space above the liquid pool 98, where there is no coating liquid
100 will be formed. The injection of the coating liquid 38 into the coating liquid tank 84 may be performed before positioning the coating liquid tank 84 in the state shown in FIG. 6 or during the positioning operation. The operation of applying the coating liquid to the substrate 10 is performed in exactly the same manner as in the coating apparatuses shown in FIGS. 1 to 4 and 5, respectively.

In FIG. 6, as in FIG. 5, only the coating start end is shown and the coating end is not shown.
In the coating device shown in FIG. 6, an extension member 28 is provided on the terminal side of the coating, similarly to the coating device shown in FIGS.

In the embodiment shown in FIGS. 5 and 6, the front end surfaces of the front wall portions 66 and 86 of the coating solution tanks 64 and 84 are connected to the lower front end surface 70.
a, 90a and upper front end faces 70b, 90b recessed from the lower front end faces 70a, 90a, and are formed on the stepped surface of the substrate 10 held on the stage 12 and the upper front end face 70b,
The gaps 72b and 92b between the surface to be coated and the surface to be coated and the lower front end surface
Although it is configured to be formed wider than the gaps 72a and 92a between 70a and 90a, it is not limited only to such a configuration. For example, the front end face may be formed not only of the front end face upper portion and the front end face lower portion but also of two or more portions, each of which has a different width from the coated surface of the substrate, or Alternatively, a configuration may be adopted in which a shape in which the width with respect to the surface to be applied becomes wider toward the upper end side of the front end surface is further added. In addition, various configurations can be adopted as the front end surface. Further, in the above-described embodiment according to FIGS. 1 to 4 and FIGS.
The front wall portions 16, 66, 86 of 4, 64, 84 have upper portions projecting forward to form a front end face 20, lower front end faces 70a, 90a and upper front end faces 70b, 90b, respectively. An intermediate portion of the portion may project forward to form a front end face, a lower front end face, and an upper front end face, respectively.

FIGS. 7 to 10 show one embodiment of the second aspect of the present invention. FIG. 7 is a longitudinal sectional view showing the structure of a main part of a coating liquid coating apparatus for a substrate, and FIG. FIG. 9 is a top view of the portion, and FIG. 10 is a partially enlarged longitudinal sectional view showing a state during the application. In these drawings, the components denoted by the same reference numerals as those used in FIGS. 1 to 4 are as described above, and the description thereof will be omitted.

This coating apparatus differs from the coating apparatus shown in FIGS. 1 to 4 in the upper end position of the front end face 110 of the front wall 106 of the coating liquid tank 104. That is, in the coating liquid tank 104 of the coating apparatus, the gap 112 having the dimension G between the front end face 110 and the surface to be coated of the substrate 10 is formed on the front wall portion 106 when it is assumed that the gap 112 extends infinitely upward. Between the reaching height position when the coating liquid flowing into the gap 112 through the coating liquid outflow passage 108 and flowing into the gap 112 by capillary action or the like and the front end face side outlet 114 of the coating liquid outflow passage 108 It is configured such that the upper end of the front end face 110 of the front wall portion 106 is located. The lower end of the front wall portion 106 of the coating liquid tank 104 has a height between the front end side outlet 114 of the coating liquid outflow passage 108 and the opposite inlet 116 as in the apparatus shown in FIGS. 1 to 4. It is formed so that it may be located. Therefore, the coating liquid 38 is placed in the coating liquid tank 104 such that the liquid surface is located at a height between the inlet 116 of the coating liquid outflow passage 108 and the lower end of the front end face 110, that is, the range D in FIG. The liquid reservoir 118 formed in the gap 112 by the coating liquid flowing into the gap 112 through the coating liquid outflow passage 108 from the coating liquid tank 104 when the liquid is injected so as to be positioned inside the coating liquid tank 104 has a front end face.
It is located at the lower end of 110, and the upper end is located at the upper end of front end face 110 of front wall 106. The other configuration is the same as that of the coating apparatus shown in FIGS. 1 to 4, and thus the description thereof is omitted. However, the coating apparatus is also coated with this coating apparatus similarly to the coating apparatus shown in FIGS. 1 to 4. On the end side, a front wall surface that forms a gap between the end surface 30 that abuts or is opposed to the lower end surface of the substrate 10 held by the stage 12 and the front end surface 110 of the front wall portion 106 of the coating liquid tank 104 An extension member 28 having 32 is provided.

The operation of applying a coating liquid to the surface of the substrate 10 to be coated using the coating apparatus shown in FIGS.
4 is performed in the same manner as when the coating apparatus shown in FIG. 4 is used. As shown in FIG. 10, a coating liquid film 120 is formed on the coating surface of the substrate 10.

On the application start end side, the upper end of the liquid reservoir 118 formed in the gap 112 (the upper end of the front end face 110 of the front wall 106 of the application liquid tank 104) is coated on the substrate 10 held on the stage 12. So that it is located below the top of the surface
The application liquid is stopped at the application start position, and is not limited to the case where the application liquid on the application surface is applied by starting the movement of the application liquid tank 104 in the vertical direction of the substrate 10 from that position. The upper end of the coating surface of the substrate 10 is
Of the front end face 110 of the front wall section 106 of the coating liquid tank 104 so as to be located between the front end face side outlet 114 of the coating liquid tank 104 and the front wall section 1.
The coating liquid tank 104 is positioned and stopped so that a gap 112 having a dimension G is formed between the front end face 110 of the substrate 06 and the surface to be coated of the substrate 10 held on the stage 12.
The movement of the application liquid tank 104 in the vertical direction of 0 may be started, and the operation of applying the application liquid to the application surface may be started.
Also in this case, during the application of the application liquid on the application surface of the substrate 10, the application liquid reservoir 118 formed in the gap 112 has a lower end formed by the front wall 106 of the application liquid tank 104. Is located at the lower end of the front end surface 110, and the upper end is located at the front wall portion 106.
Is located at the upper end of the front end face 110.

The coating solution tank 104 of the coating apparatus shown in FIGS. 7 to 10 is provided with a gap 112 formed by the coating surface of the substrate 10 held on the stage 12 and the front end surface 110 of the front wall 106. Is configured to have a constant dimension G over the entire front end surface 110 of the front wall portion 106, but the shape of the front end surface of the front wall portion of the coating liquid tank is not limited to the illustrated example.

In each of the coating apparatuses shown in FIGS. 1 to 4, 5, 6 and 7 to 10, the front walls 16, 66, 86 of the coating liquid tanks 14, 64, 84, 104 are provided. , 106 are provided with inlets 26, 76, 9 opposite to the front end side outlets 24, 74, 94, 114, respectively.
6, 116 are inclined so that they are located below. Further, the front wall portions 16, 66, 86, 106 of the coating liquid tanks 14, 64, 84, 104 are:
Front end side outlets 24, 74, 9 of coating liquid outflow passages 18, 68, 88, 108
The lower end of the front end face 20, the lower front end face 70a, 90a or the lower end of the front end face 110 is formed at the height between 4, 114 and the entrance 26, 76, 96, 116 on the opposite side. Then, the front end surfaces of the front wall portions 16, 66, 86, 106 of the coating liquid tanks 14, 64, 84, 104
20, so that the surface of the coating liquid is located at a height between the lower end of the front end face 70a, 90a or the lower end of the front end face 110 and the inlets 26, 76, 96, 116 of the coating liquid outflow passages 18, 68, 88, 108. , Coating liquid tanks 14, 64,
The application liquid 38 is injected into the substrates 84 and 104 to apply the application liquid to the application surface of the substrate 10. However, the manner of forming the coating liquid outflow path, the positional relationship between the lower end of the front end face of the front wall of the coating liquid tank and the front end side exit of the coating liquid outflow path and the inlet on the opposite side, and the liquid injected into the coating liquid tank The condition of the liquid level of the coating liquid to be applied is not limited to the contents of the above-described embodiment.

That is, the coating liquid outflow passage may be formed in a horizontal direction so that the front end face side outlet and the opposite side inlet are located at the same height, or the front end face side outlet may be formed. You may make it incline so that the entrance of the opposite side may be located upwards. Further, the lower end of the front end face of the front wall portion of the coating solution tank may be formed so as to be located lower than the inlet on the opposite side of the outlet on the front end face side of the coating solution outflow passage. Furthermore, the amount of the coating liquid to be injected into the coating liquid tank only needs to be positioned above the inlet on the opposite side to the outlet on the front end face side of the coating liquid outflow passage. However, in any case, in the application completion process, the pressure in the application liquid tank is set to an appropriate value according to the state at that time. In the process of applying the coating liquid to the coating surface of the substrate, a gap formed between the coating surface of the substrate and the front end surface of the front wall portion of the coating liquid tank is filled with a space having no coating liquid thereon. A liquid pool is formed in a state where the coating liquid is formed, or a liquid pool of the coating liquid is formed in the entire area of the gap, and the coating liquid in the liquid pool is prevented from flowing out from the gap. And the conditions are set so that the object of the present invention is achieved, such that the application liquid is supplied to the gap in accordance with the amount consumed by the application.

In each of the coating apparatuses shown in FIGS. 1 to 4, FIG. 5, FIG. 6, and FIGS. 7 to 10, when the coating liquid is applied to a transparent substrate 10 such as a glass substrate, From the side opposite to the surface to be coated, the surface to be coated of the substrate 10 and the front walls 16, 66, 8 of the coating solution tanks 14, 64, 84, 104
Band-shaped liquid reservoirs 54, 78, 98, 118 are formed in gaps 22, 72a, 72b, 92a, 92b, 112 between front end surfaces 20, 70a, 70b, 90a, 90b, 110 of 6, 106. The length of the stage 12 in the vertical direction so that the substrate 10
In the direction perpendicular to the width direction, that is, shorter than the length in the vertical direction, the substrate 10 is held on the stage 12 in a state where the upper end portion protrudes from the upper end side of the stage 12. The configuration in which the liquid pool can be observed from the side opposite to the surface to be coated is not limited to the contents of the above embodiment. For example, without reducing the length of the stage in the vertical direction to a direction perpendicular to the width direction of the substrate 10, that is, the length in the vertical direction, the substrate is placed on the stage, and the upper end portion of the substrate protrudes from the upper edge of the stage. You may make it hold | maintain. Further, a through-hole having a size in a range corresponding to the application end position from the application start end position of the application surface of the substrate may be formed on the stage, or the application start end position of the application surface of the substrate may be A through hole may be formed in the stage in a corresponding range. Further, at least a necessary portion of the stage may be formed of a transparent material such as transparent glass. In addition, various forms can be adopted.

In the coating apparatus according to each of the above-described embodiments, as described above, the coating liquid is applied to the coating surface of the substrate at the coating start end side so that the coating liquid can be more reliably applied to the coating surface of the substrate. After confirming that a band-shaped liquid pool has been formed in the gap between the front end surface of the liquid tank and the front end surface of the liquid tank, it is possible to start applying the coating liquid to the surface of the substrate to be coated. However, assuming that a band-like liquid reservoir is formed in the gap between the coating surface of the substrate and the front end surface of the front wall of the coating liquid tank on the coating start end side, for example, After forming a gap of a predetermined size between the surface and the front end face of the front wall portion of the coating liquid tank, at a point in time when a preset time has elapsed, it is assumed that a band-like liquid reservoir has been formed in the gap, and thereafter Move the coating liquid tank to start applying the coating liquid on the surface to be coated of the substrate Unishi also, no problem. In this case, the above-mentioned various configurations for observing the liquid pool from the side opposite to the coated surface of the transparent substrate become unnecessary.

There is also a means for confirming that a band-shaped liquid pool is formed at the coating start position even when the substrate is opaque. For example, in a coating liquid tank in the coating liquid coating apparatus having the configuration shown in FIGS. 1 to 4, a through hole that penetrates at least a part of the width direction in the front-rear direction is formed at an upper portion thereof, and a front end of the through hole is formed. Side, a transparent body such as a transparent glass plate is fitted so as to close the opening surface, and a part of the front end face of the front wall is formed by the front wall surface of the transparent body. , At least a part of the upper end of the liquid pool in the gap can be confirmed. Note that such a configuration can be effectively used even when the substrate is transparent. Also, as in the configuration of such a coating liquid tank and the coating apparatus shown in FIGS. 1 to 4, the length of the stage 12 in the vertical direction is set in the direction orthogonal to the width direction of the substrate 10, that is, in the vertical direction. Shorten the board 10
When combined with a configuration in which the upper end portion is held on the stage 12 while projecting from the upper end side of the stage 12, when the substrate is transparent,
For example, it is possible to adopt a configuration in which an illumination system is arranged on the opposite side of the coated surface of the substrate, and the liquid pool in the gap can be observed through a transparent body that forms a part of the front end surface of the front wall of the coating liquid tank. . Of course, in this case, as a configuration of the stage, various forms such as a through hole formed in the stage can be adopted.

By the way, in the application liquid application apparatus shown in FIGS. 1 to 4, if the extension member 28 is not disposed on the application end side, the application surface of the substrate 10 held on the stage 12 is A gap 22 having a dimension G is maintained between the front end face 20 of the front wall portion 16 of the coating liquid tank 14 and the coating liquid tank 14 is moved in the direction of arrow a while holding the liquid pool 54 in the gap 22. , Substrate 10
The coating liquid is applied to the surface to be coated of the substrate 10, and the lower end of the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 is positioned at the terminal end of the coating surface of the substrate 10 (lower end) as shown in FIG. ) And further, as shown in FIG. 12, the lower end of the front end face 20 of the front wall portion 16 of the coating liquid tank 14 passes through the end of the surface of the substrate 10 to be coated. It is assumed that the application liquid is applied to the surface of the substrate 10 until the front end 20 of the front wall 16 of the liquid tank 14 reaches the end of the surface of the substrate 10.

First, as shown in FIG. 11, until the lower end of the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 reaches the lower end of the surface to be coated of the substrate 10, the liquid pool formed in the gap 22 is formed. The upper end of 54 moves in the direction of the arrow a at a speed equivalent to the moving speed of the coating solution tank 14 with the movement of the coating solution tank 14 in the direction of the arrow a.
The lower end of the front end face 20 of the front wall 16 of the coating solution tank 14 is
After reaching the lower end of the surface to be coated, the coating liquid tank
As the front end surface 20 of the front wall portion 16 of the substrate 14 gradually comes off the lower end of the surface to be coated of the substrate 10, the gap 22 is destroyed, and the liquid pool held in the gradually destroyed gap 22
A part of the coating liquid 54 flows down from the lower end of the substrate 10 or the lower end of the front end face 20 of the front wall 16 of the coating liquid tank 14. In addition, a part of the application liquid in the liquid pool 54 formed in the gap 22 is suppressed from moving at the lower end of the substrate 10, and therefore, the upper end of the liquid pool 54 in the gap 22 is moved by the application liquid tank 14. Also, it does not move on the coating surface of the substrate 10 together with the coating liquid tank 14, or its moving speed is lower than the moving speed of the coating liquid tank 14. As a result, the thickness of the coating liquid film 58 becomes thinner near the coating end of the substrate 10, and a part of the coating liquid in the liquid pool 54 flows from the gap 22 to the front of the coating liquid tank 14 as shown in FIG. Protruding beyond the upper end of the front end face 20 of the wall 16 occurs. Then, in the vicinity of the application end of the application surface of the substrate 10, an ineffective area where the thickness of the application liquid film is out of an allowable range is generated.

However, in the coating apparatus shown in FIGS. 1 to 4, an extension member 28 having a front wall surface 32 facing the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 is provided on the coating terminal side. The front wall surface 32 is disposed so as to be continuous from the surface to be coated of the substrate 10. For this reason, as shown in FIG. 13, the front end face 20 of the front wall 16 of the coating liquid tank 14 is located on the coating end side.
Even if it comes off from the lower end of the coating surface of the substrate 10, the front wall surface 32 of the extension member 28 faces the front end surface 20 of the front wall portion 16 of the coating liquid tank 14,
Between the front wall surface 32 of the extension member 28 and the front end surface 20 of the front wall portion 16, the gap 22 between the coated surface of the substrate 10 and the front end surface 20 of the front wall portion 16 of the coating solution tank 14 is continuous. A gap 122 having the same dimension G as the dimension G of the gap 22 is formed. Therefore, the coating liquid in the liquid pool 54 formed in the gap 22 between the surface to be coated of the substrate 10 and the front end face 20 of the front wall part 16 of the coating liquid tank 14 has the front end face 20 of the front wall part 16 Even when moving away from the lower end of the coating surface of the substrate 10, the movement is not suppressed at the lower end of the substrate 10, and the front end surface 20 of the front wall portion 16 of the coating liquid tank 14 Even if the gap 22 is broken through the lower end of the surface, the liquid pool 54 continues to be in contact with the front wall surface 32 of the extension member 28 and the coating liquid tank.
A gap 122 formed between the front end surface 20 of the front wall portion 16 of FIG.
Will be retained. As a result, as shown in FIG. 12, a part of the coating liquid in the liquid pool 54 protrudes beyond the upper end of the front end face 20 of the front wall 16 of the coating liquid tank 14 from the gap 22. Absent. And FIG.
As shown in FIG. 5, if the coating liquid tank 14 is moved in the direction of the arrow a until the upper end of the liquid pool 54 reaches the end of the coating surface of the substrate 10, the coating liquid is moved to the end of the coating surface of the substrate 10. Is applied, and a coating liquid film 58 having a uniform thickness is formed up to the end of the application surface of the substrate 10.

In the coating apparatus shown in FIGS. 1 to 4 and FIG. 13, the front wall surface 32 of the extension member 28 is arranged in the same plane as the coating surface of the substrate 10 held on the stage 12. In other words, the front wall surface 32 of the extension member 28 is constituted by a plane extending the application surface of the substrate 10, and such an embodiment is the best, but the extension member is not necessarily
The front wall surface 32 of the substrate 28 and the surface to be coated of the substrate 10 need not be arranged on the same plane. In the above description, as shown in FIG. 13, the liquid pool 54 formed in the gap 122 between the front wall surface 32 of the extension member 28 and the front end surface 20 of the front wall portion 16 of the coating liquid tank 14.
The coating liquid tank 14 is moved in the direction of arrow a until the upper end of the coating liquid reaches the end of the coating surface of the substrate 10 to apply the coating liquid. Front end face 20
If the coating liquid is applied until the lower end of the substrate 10 passes at least the end of the coating surface of the substrate 10, the movement of the coating liquid in the liquid pool 54 at the lower end of the substrate 10 causes the coating liquid film to move to the coating liquid film. Can be reduced.

In the description with reference to FIG. 13, the case where the coating apparatus shown in FIGS. 1 to 4 is used is taken as an example, but each coating apparatus shown in FIGS. 5, 6 and 7 to 10 is used. In this case, it is needless to say that the same operation and effect can be obtained.

As described above, in order to eliminate the problem of the thickness of the coating liquid film near the terminal end of the coating surface of the substrate 10,
As shown in FIG. 14, a partially enlarged longitudinal sectional view of the application terminal side of the application liquid application apparatus, at least the front wall 132
Is formed of a material having better wettability than the wettability of the coating surface of the substrate 10 with respect to the coating liquid or wettability equivalent to the wettability of the coating surface of the substrate 10, or a film formed by surface treatment. It would be preferable to form them.
However, in this case, the coating liquid easily adheres to the front wall 132 of the extension member 128 at a level equal to or greater than the surface to be coated of the substrate 10, and the coating liquid is applied to the front wall 132 of the extension member 128. Since it adheres in a film state, it is necessary to devise a technique for cleaning the front wall surface 132 of the extension member 128.

On the other hand, at least the front wall 132 of the extension member 128
Is formed from a material having a wettability worse than the wettability of the surface of the substrate 10 to be coated with the coating liquid, for example, a fluororesin, or a coating formed by a surface treatment. Compared to the case where a material having wettability equal to or more than the wettability of the coating surface of the substrate 10 is used, the degree of the problem of the thickness of the coating liquid film near the end of the coating surface of the substrate 10 is slightly larger. However, as compared with the case where the extension member is not provided on the application end side, the above degree is smaller. Then, the coating liquid hardly adheres to the front wall surface 132 of the extending member 128, and the coating liquid that adheres to the front wall surface 132 of the extending member 128 is not in a film state but in a droplet state. The adhering coating liquid can be easily removed from the front wall 132 of the 128, and the cleaning operation can be simplified.

In the coating liquid application apparatus shown in FIG. 15 which is a partially enlarged vertical sectional view on the application end side, at least the lower end surface of the substrate 10 held on the stage 12 of the extension member 138 is brought into contact with or close to the lower end surface. The portion 144 forming the end surface 140 is formed of a material having a wettability lower than the wettability of the coating surface of the substrate 10 with the coating liquid, for example, a fluororesin, or a film formed by a surface treatment. For this reason, the substrate
A liquid reservoir 54 formed in the gap 22 between the surface to be coated 10 and the front end surface 20 of the front wall 16 of the coating liquid tank 14 (the embodiment shown in FIGS. End face and end face 1 of extension member 138
When passing through the contact or proximity position with 40, or after removing the substrate 10 from the stage 12 after the completion of coating, for example, when moving the coating solution tank 14 with respect to the stage 12 in the horizontal direction to separate it from the stage 12, etc. Thus, the danger that a part of the coating liquid flowing down from the liquid pool 54 on the coating surface of the substrate 10 flows into the gap between the lower end surface of the substrate 10 and the end surface 140 of the extending member 138 can be reduced. . Therefore, the possibility that the lower end surface of the substrate 10 is contaminated by the coating liquid is eliminated or reduced. The portion forming the end surface 140 of the extension member 138
When 144 is made of a fluororesin or the like, the substrate 10
When it is a glass substrate for use, it also contributes to prevention of breakage such as chipping of the substrate 10.

[0074]

According to the first aspect of the present invention, when the coating liquid is applied to the substrate using the coating liquid coating apparatus according to the present invention,
The effective use of the coating liquid is achieved, the amount of the coating liquid used is reduced, and the coating quality such as the film thickness uniformity of the coating liquid film is improved. In addition, this coating device is small and requires little installation space. In particular, it is advantageous when, for example, a coating liquid is applied to a glass substrate for LCD, which tends to increase in size in recent years, and has a simple configuration. Also, the application step can be performed relatively easily. Further, when this coating apparatus is used, no contamination of the coating liquid occurs, and there is no scattering of the coating liquid on the substrate surface as in a spinning apparatus. Further, in this coating apparatus, since the coating liquid is applied in a non-contact manner on the surface to be coated of the substrate to be coated, an effective portion of the substrate, for example, a portion forming a display area in a glass substrate for LCD is scratched. There is no risk of quality deterioration. Further, with this coating apparatus, a thin coating liquid film can be formed on the substrate surface, and the thickness unevenness can be minimized. In this coating apparatus, there is no danger of damage due to dropping or sliding down of the substrate held by the substrate holding means, and when the thickness of the substrate to be coated is increased, the substrate to be coated by the substrate holding means is used. Also has excellent retention stability.

When the coating apparatus according to the second aspect of the present invention is used, the same effect as the above-described effect according to the first aspect of the present invention can be obtained.

The use of the coating apparatus according to the third aspect of the present invention prevents the occurrence of an ineffective area where the thickness of the coating liquid film is out of the allowable range on the coating end side of the coating surface of the substrate. This can be prevented or minimized as much as possible, and the substrate can be used as efficiently as possible. In addition, in particular, as in the coating apparatus according to the second aspect of the present invention, the liquid pool in the gap between the coating surface of the substrate to be coated and the front end surface of the front wall of the coating liquid tank on the coating end side. In a coating device with a configuration in which the coating liquid easily protrudes from the upper end of the front end face of the front wall portion, the coating liquid is effectively prevented from protruding, thereby preventing a problem in the thickness of the coating liquid film near the end of coating on the surface to be coated. Or as little as possible.

When the coating apparatus according to the fourth aspect of the present invention is used, the above effects of the third aspect of the invention can be obtained in the best possible form.

The use of the coating apparatus according to the fifth aspect of the present invention simplifies the work of cleaning the front wall surface of the extension member.

When the coating apparatus according to the sixth aspect of the present invention is used, the thickness of the coating liquid film in the vicinity of the coating end of the coating surface of the coating substrate is out of the allowable range, and an ineffective area is generated. Or the ineffective area can be minimized.

The use of the coating apparatus according to the present invention makes it possible to prevent the lower end surface of the substrate to be coated from being stained by the coating liquid.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing one embodiment of the invention according to claim 1 and showing a configuration of a main part of an application liquid applying apparatus for a substrate.

FIG. 2 is a front view of the device shown in FIG.

FIG. 3 is a top view of the device shown in FIG.

FIG. 4 is a partially enlarged longitudinal sectional view of the apparatus shown in FIG. 1, showing a state in which coating is being performed;

FIG. 5 is a partially enlarged longitudinal sectional view showing another embodiment of the invention according to claim 1;

FIG. 6 is a partially enlarged longitudinal sectional view showing still another embodiment of the invention according to claim 1.

FIG. 7 is a longitudinal sectional view showing one embodiment of the invention according to claim 2 and showing a configuration of a main part of a coating liquid applying apparatus for a substrate.

8 is a front view of the device shown in FIG.

9 is a top view of the device shown in FIG.

FIG. 10 is a partially enlarged longitudinal sectional view of the apparatus shown in FIG. 7, showing a state during application.

FIG. 11 is a partially enlarged longitudinal sectional view for explaining a problem in a case where an extension member is not provided on the coating end side in an apparatus similar to the configuration shown in FIGS. 1 to 4;

FIG. 12 is also a partially enlarged longitudinal sectional view.

FIG. 13 is a partially enlarged longitudinal sectional view for explaining the operation of the coating liquid application apparatus shown in FIGS. 1 to 4;

FIG. 14 is a partially enlarged longitudinal sectional view showing one embodiment of the invention according to claims 5 and 6;

FIG. 15 is a partially enlarged longitudinal sectional view showing one embodiment of the invention according to claim 7;

[Explanation of symbols]

 10 Substrate 12 Stage 14, 64, 84, 104 Coating tank 16, 66, 86, 106 Front wall 18, 68, 88, 108 Coating liquid outflow passage 20, 110 Front end face of front wall 22, 112 Gap 28, 128, 138 Extension member 30, 140 End surface of extension member 32, 132 Front wall of extension member 38 Coating solution 54, 78, 98, 118 Liquid reservoir 58, 120 Coating film 70a, 90a Front wall Lower front end face 70b, 90b Upper front end face of front wall 72a, 92a Lower gap 72b, 92b Upper gap 134 Portion forming front wall of extension member 144 Portion forming end surface of extension member

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ identification code FI H01L 21/30 H01L 21/30 (58) Investigated field (Int.Cl. ⁷ , DB name) B05C 3 / 18,3 / 08 B05C 5/02 B05D 1/26 G02F 1/13 101 G02F 1/1333 505 G03F 7/16 501 H01L 21/30

Claims (7)

(57) [Claims] 1. A substrate holding means for holding a substrate to be coated in a vertical position or an inclined position; and a tubular shape having both ends closed and extending in the width direction of the substrate to be coated held by the substrate holding means. A coating solution outflow passage composed of a large number of thin tubes, a large number of micro holes, or slit-shaped narrow groove nozzles is formed in the front wall portion so as to penetrate the front wall portion in a width direction, and a front end face of the front wall portion is provided with substrate holding means. The upper surface of the front end face of the front wall portion is disposed horizontally in a non-contacting and non-contact manner with the surface to be coated of the substrate to be coated held by the substrate holding means. Assuming that the gap between the surface and the front end face of the front wall portion is infinitely extended upward, the coating solution flowing out through the coating solution outflow passage formed in the front wall portion and flowing into the gap is At least when going up in the gap by capillary action It is formed so as to be located above the top height position, and moves relative to the substrate to be coated in the vertical direction while maintaining a gap between the front end surface of the front wall portion and the surface to be coated of the substrate to be coated. A coating liquid tank arbitrarily held; linear moving means for relatively linearly moving the coating liquid tank and the substrate to be coated held by the substrate holding means; An extended member having an end surface that abuts or opposes at least a part of the lower end surface of the substrate to be coated held by the substrate holding means, and when the coating solution is injected into the coating solution tank. In a gap between the surface to be coated of the substrate to be coated held by the substrate holding means and the front end surface of the front wall of the coating solution tank, a pool of the coating solution flowing out through the coating solution outflow path is formed. Is formed, and a space without coating liquid is formed above the liquid pool. While the end and the surface to be coated of the substrate to be moved relatively move, the amount of the coating liquid in the liquid pool in the gap is applied to the surface to be coated of the substrate to be coated and consumed according to the amount consumed. Coating liquid is supplied through a coating liquid outflow path,
Apparatus for applying coating liquid to substrates. 2. A substrate holding means for holding a substrate to be coated in a vertical position or an inclined position; and a tubular shape having both ends closed and extending in the width direction of the substrate to be coated held by the substrate holding means. A coating solution outflow passage composed of a large number of thin tubes, a large number of micro holes, or slit-shaped narrow groove nozzles is formed in the front wall portion so as to penetrate the front wall portion in a width direction, and a front end face of the front wall portion is provided with substrate holding means. The upper surface of the front end face of the front wall portion is disposed horizontally in a non-contacting and non-contact manner with the surface to be coated of the substrate to be coated held by the substrate holding means. Assuming that the gap between the surface and the front end face of the front wall portion is extended infinitely upward, the coating liquid flowing out through the coating liquid outflow path and flowing into the gap is at least in the gap by capillary action. Height position and paint It is formed so as to be located between the front end face side outlet of the liquid outflow passage and the vertical direction with respect to the substrate to be coated while keeping a gap between the front end face of the front wall portion and the surface to be coated of the substrate to be coated. A coating liquid tank held relatively movably with respect to the substrate; a linear moving means for relatively linearly moving the coating liquid tank and the substrate to be coated held by the substrate holding means; An extending member having an end surface which is disposed and is in contact with or opposed to at least a part of a lower end surface of the substrate to be coated held by the substrate holding means; and a coating solution in the coating solution tank. Is injected into the gap between the coating surface of the substrate held by the substrate holding means and the front end surface of the front wall portion of the coating liquid tank, the coating liquid flowing out through the coating liquid outflow path. A liquid pool is formed, and the upper end of the liquid pool is regulated by the upper end of the front end face of the front wall. In this state, while the upper end of the liquid reservoir and the surface to be coated of the substrate to be applied relatively move, the amount of the application liquid in the liquid reservoir in the gap is applied to the surface to be applied of the substrate to be applied and consumed. A coating liquid coating apparatus for coating a substrate, wherein the coating liquid in the coating liquid tank is supplied through a coating liquid outflow path in response to the supply of the coating liquid. 3. An extended member faces a front end face of a front wall of a coating liquid tank, and is provided between a front end face of the front wall and a surface to be coated of a substrate held by substrate holding means. A front wall configured to form a continuous gap from a gap between the front wall and the front end surface; and a coating surface of the substrate to be coated held by the substrate holding means and the coating on the coating end side. A liquid reservoir formed in a gap between the front wall of the liquid tank and the front end of the liquid tank relatively passes through the lower end of the surface of the substrate to be coated while being regulated by the lower end of the front end of the front wall. Control means for controlling the linear motion means so as to continue the relative movement between the coating solution tank and the substrate to be applied at least until the front wall surface of the extending member is reached. Between the surface of the substrate to be coated held by the holding means and the front end surface of the front wall of the coating solution tank; At least a part of the application liquid in the liquid pool formed in the gap between,
3. The apparatus for applying a coating liquid to a substrate according to claim 1, wherein the apparatus is held in a gap between the front wall surface of the extending member and a front end surface of a front wall of the coating liquid tank. 4. The size of the gap between the front wall surface of the extension member and the front end surface of the front wall portion of the coating liquid tank is determined by the distance between the coating surface of the coating substrate held by the substrate holding means and the coating liquid tank. The front wall surface of the extension member is formed in the same plane as the surface to be coated of the substrate to be coated held by the substrate holding means so as to be equal to the size of the gap between the front wall surface and the front end surface. Item 4. An apparatus for applying a coating liquid to a substrate according to Item 3. 5. At least a part of a coating liquid in a liquid reservoir formed in a gap between a coating surface of a coating substrate held by a substrate holding means and a front end surface of a front wall portion of a coating liquid tank, When held in the gap between the front wall surface of the extending member and the front end surface of the front wall portion of the coating liquid tank, a portion of the front wall surface of the extending member that comes into contact with the coating liquid in the liquid pool forms the coating liquid. The coating liquid coating apparatus according to claim 3 or 4, wherein the coating liquid coating apparatus is formed of a material having a wettability worse than a wettability of a coated surface of the substrate to be coated with the substrate. 6. At least a part of a coating liquid in a liquid reservoir formed in a gap between a coating surface of a coating substrate held by a substrate holding means and a front end surface of a front wall portion of a coating liquid tank, When held in the gap between the front wall surface of the extending member and the front end surface of the front wall portion of the coating liquid tank, a portion of the front wall surface of the extending member that comes into contact with the coating liquid in the liquid pool forms the coating liquid. The surface of the substrate to be coated is formed of a material having a wettability better than that of the surface to be coated of the substrate to be coated or a wettability equivalent to the wettability of the surface to be coated of the substrate to be coated, or the surface is treated. For applying coating liquid to substrates. 7. A portion of the end surface of the extension member which abuts or is opposed to and close to the lower end surface of the substrate held by the substrate holding means, the wettability of the surface of the substrate to be coated with the coating liquid. The coating liquid coating apparatus according to any one of claims 1 to 6, wherein the coating liquid coating apparatus is formed of a material having worse wettability or surface-treated.