WO2011030156A3 - Collection of electromagnetic radiation emitted from particle-irradiated samples - Google Patents

Collection of electromagnetic radiation emitted from particle-irradiated samples Download PDF

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Publication number
WO2011030156A3
WO2011030156A3 PCT/GB2010/051513 GB2010051513W WO2011030156A3 WO 2011030156 A3 WO2011030156 A3 WO 2011030156A3 GB 2010051513 W GB2010051513 W GB 2010051513W WO 2011030156 A3 WO2011030156 A3 WO 2011030156A3
Authority
WO
WIPO (PCT)
Prior art keywords
electromagnetic radiation
external surface
sample
radiation emitted
collection
Prior art date
Application number
PCT/GB2010/051513
Other languages
French (fr)
Other versions
WO2011030156A2 (en
Inventor
Thomas Walther
Original Assignee
University Of Sheffield
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University Of Sheffield filed Critical University Of Sheffield
Publication of WO2011030156A2 publication Critical patent/WO2011030156A2/en
Publication of WO2011030156A3 publication Critical patent/WO2011030156A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Apparatus for collecting electromagnetic radiation emitted from a sample irradiated with charged particles is disclosed. The apparatus comprises: a solid body of material at least substantially transparent to electromagnetic radiation having wavelengths in at least one range, the body having an external surface and being adapted to locate or enable location of a sample with respect to the body such that at least a portion of the electromagnetic radiation emitted from the sample when irradiated with charged particles enters the body and is incident on the external surface from within the body; reflecting means arranged to reflect, from the external surface and back into the body, at least emitted radiation having wavelengths within said one range incident upon the external surface from within the body; and conduit means arranged to collect electromagnetic radiation emitted into the body from a sample and reflected back into the body from the external surface, and convey the collected electromagnetic radiation away from the body. Corresponding sample holders, measurement systems, and measurement methods are also disclosed.
PCT/GB2010/051513 2009-09-10 2010-09-10 Collection of electromagnetic radiation emitted from particle-irradiated samples WO2011030156A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0915875.9 2009-09-10
GB0915875A GB2478900A (en) 2009-09-10 2009-09-10 Collection of electromagnetic radiation emitted from particle irradiated samples

Publications (2)

Publication Number Publication Date
WO2011030156A2 WO2011030156A2 (en) 2011-03-17
WO2011030156A3 true WO2011030156A3 (en) 2011-05-05

Family

ID=41228120

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2010/051513 WO2011030156A2 (en) 2009-09-10 2010-09-10 Collection of electromagnetic radiation emitted from particle-irradiated samples

Country Status (2)

Country Link
GB (1) GB2478900A (en)
WO (1) WO2011030156A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2573796B1 (en) 2011-09-22 2014-05-07 Carl Zeiss Microscopy Limited Particle beam system having a hollow light guide
US20130141803A1 (en) * 2011-12-01 2013-06-06 Gatan, Inc. Apparatus for collection of cathodoluminescence signals
KR101457109B1 (en) * 2012-10-04 2014-11-03 서울대학교산학협력단 Apparatus for collecting light for an electron microscope
US10119916B2 (en) * 2016-11-11 2018-11-06 B&W Tek Llc Light delivery and collection device for measuring Raman scattering of a sample
JP7141874B2 (en) * 2017-09-29 2022-09-26 株式会社堀場製作所 Luminescence lighting device
EP3462475A3 (en) * 2017-09-29 2019-11-20 Horiba, Ltd. Luminescence collecting device
JP7072458B2 (en) * 2018-07-12 2022-05-20 株式会社堀場製作所 Luminescence analyzer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06300663A (en) * 1993-04-14 1994-10-28 Japan Aviation Electron Ind Ltd Total scattering measuring equipment for x-ray region
WO2010104919A2 (en) * 2009-03-13 2010-09-16 Osram Sylvania Inc. Ehid lamp having integrated field applicator and optical coupler

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT306804B (en) 1971-10-05 1973-04-25 Oesterr Studien Atomenergie Cathodoluminescence device for scanning electron microscopes
US4479714A (en) 1981-04-14 1984-10-30 Lehrer Leo K Reflection densitometer with ellipsoid reflection surface
DE3500903A1 (en) * 1985-01-12 1986-07-17 Fa. Carl Zeiss, 7920 Heidenheim DETECTOR FOR REVERSE SCREW ELECTRONES
DE3729846A1 (en) 1987-09-05 1989-03-23 Zeiss Carl Fa CATHODOLUMINESCENCE DETECTOR
US4929041A (en) 1989-01-09 1990-05-29 Johnston Pump/General Valve, Inc. Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture
US5264704A (en) 1992-11-17 1993-11-23 National University Of Singapore High efficiency cathodoluminescence detector with high discrimination against backscattered electrons
US5468967A (en) 1994-08-26 1995-11-21 National University Of Singapore Double reflection cathodoluminescence detector with extremely high discrimination against backscattered electrons
US6721049B1 (en) 2000-03-22 2004-04-13 The United States Of America As Represented By The Secretary Of The Army Device for efficient light collection from a sample
US7872236B2 (en) * 2007-01-30 2011-01-18 Hermes Microvision, Inc. Charged particle detection devices
US7781733B2 (en) * 2007-05-16 2010-08-24 International Business Machines Corporation In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06300663A (en) * 1993-04-14 1994-10-28 Japan Aviation Electron Ind Ltd Total scattering measuring equipment for x-ray region
WO2010104919A2 (en) * 2009-03-13 2010-09-16 Osram Sylvania Inc. Ehid lamp having integrated field applicator and optical coupler

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PETER SAUNDERS ET AL: "In situ measurement of catalyst tube emissivity by means of a portable solid integrating sphere reflectometer; Measurement of catalyst tube emissivity", MEASUREMENT SCIENCE AND TECHNOLOGY, IOP, BRISTOL, GB, vol. 12, no. 5, 1 May 2001 (2001-05-01), pages 622 - 626, XP020063177, ISSN: 0957-0233, DOI: DOI:10.1088/0957-0233/12/5/309 *

Also Published As

Publication number Publication date
GB0915875D0 (en) 2009-10-14
WO2011030156A2 (en) 2011-03-17
GB2478900A (en) 2011-09-28

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