WO2011029884A1 - Dispositif de lecture d'un capteur de mesure optique spectralement sélectif et dispositif de mesure - Google Patents

Dispositif de lecture d'un capteur de mesure optique spectralement sélectif et dispositif de mesure Download PDF

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Publication number
WO2011029884A1
WO2011029884A1 PCT/EP2010/063261 EP2010063261W WO2011029884A1 WO 2011029884 A1 WO2011029884 A1 WO 2011029884A1 EP 2010063261 W EP2010063261 W EP 2010063261W WO 2011029884 A1 WO2011029884 A1 WO 2011029884A1
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WIPO (PCT)
Prior art keywords
outputs
grating
measuring
transmission characteristics
sensor
Prior art date
Application number
PCT/EP2010/063261
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German (de)
English (en)
Inventor
Thorbjörn BUCK
Mathias Müller
Original Assignee
Technische Universität München
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Technische Universität München filed Critical Technische Universität München
Priority to EP10752800A priority Critical patent/EP2475971A1/fr
Publication of WO2011029884A1 publication Critical patent/WO2011029884A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1809—Echelle gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1895—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using fiber Bragg gratings or gratings integrated in a waveguide
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes

Definitions

  • the invention relates to a device for reading at least one spectrally selective measuring sensor, which is formed in a light guide arrangement, comprising:
  • a spectrally selective grating arrangement by means of which an input signal, which is applied to the measuring input and which is assigned to the measuring sensor, can be distributed to the outputs assigned to the respective sensor,
  • An evaluation unit downstream of the detectors which determines a ratio of the detected by the detectors intensities.
  • the invention further relates to a measuring device which comprises the device for reading out a spectrally selective measuring transducer.
  • a measuring device which comprises the device for reading out a spectrally selective measuring transducer.
  • a device for reading a spectrally selective sensor is known from the publication SANO, Y. and YOSHINO, T. , Fast Optical Wavelength Interrogator Employing Arrayed Waveguide Grating for Distributed Fiber Bragg Grating Sensors, Journal of Lightwave Technology, Vol. 1, January 2003.
  • the Input signal spectrally dissected by means of a waveguide grating and distributed to outputs, each of which is assigned a photodetector.
  • the input signal comes to lie between transmission characteristics of the waveguide grating, which are assigned to the individual outputs.
  • the spectrum of the light reflected by the fiber Bragg grating changes. Accordingly, the spectral position of the input signal, that of the waveguide grating, changes to the corresponding one
  • a disadvantage of the known measuring device is the small range of ambient conditions detectable by the measuring device. With the known measuring device, a wavelength change of about 1 nm can be detected. This typically corresponds to a temperature range of 100 K or a strain range of 1000 ⁇ / m. However, in many applications larger measuring ranges are required. From the publication XIAO, G. et al, Miniaturized Optical Fiber Bragg Grating Sensor Interrogator Based on Echelle Diffractive Grattings in: Microwave and Optical Technology Letters, Vol. 3, March 2007, there is also known a measuring device in which, instead of a waveguide grating, an Echelle grating is used for the distribution of the input signals to the outputs. In this measuring device is the temperature response of the echelle grating is used to determine the spectral position of the input signals.
  • the invention has the object to provide a device for reading at least one spectrally selective sensor with extended measuring range.
  • This object is achieved in that the transmission characteristics associated with the outputs partially overlap at a transmission value above a base value of the transmission characteristics set equal to one tenth.
  • the transmission value should be related to the power. Furthermore, below the tenth of the
  • Transmission characteristics to understand that value at which the transmission characteristics has only one tenth of the transmission value in the maximum of the respective transmission characteristic. This is the value at which the transmission has fallen by -10 dB from the transmission maximum.
  • the available measuring range is determined by the range in which the input signal falls within the range of two adjacent outputs. With a small spectral width of the input signal, therefore, the more the available transmission characteristics of the grid arrangement overlap, the greater the available measuring range. However, the transmission characteristics must not be congruent, since otherwise no change in the ratio of the measured intensities occurs. The transmission characteristics may therefore only partially overlap. Since the measuring range is greater, the more the transmission characteristics overlap, in another embodiment, the base value is set equal to the half-value.
  • the half-value should be understood here as the value at which the half-width of the respective transmission characteristics is determined. As a rule, this is the value at which the transmission value is reduced by -3 dB compared with the maximum value of the transmission characteristic.
  • the partial overlap of the transmission characteristics is accomplished by selecting the spatial distance between the outputs smaller than the base width of a defocused diffraction image of a diffraction order of the grating array.
  • Base width is to be understood as the width of the diffraction image in which the intensity of the diffraction image is equal to the respective base value.
  • the transmission characteristics result from convolution of the
  • Diffraction pattern with the acceptance profiles of the outputs should be understood to mean the spatial distribution of the transmission of the outputs which is dependent on the angle of entry.
  • the folding must therefore take place in the general case about the location and the entrance angle. With a weak angle dependence of the acceptance profile in the entrance angle range, the folding over the entry angle can be replaced by integration over the entry angle or the angular dependence can be disregarded.
  • An advantage of this embodiment is that one and the same diffraction order is assigned to the outputs, so that no variation of the intensities in different diffraction orders has to be taken into account.
  • the partial overlap of the transmission characteristics is achieved by assigning the outputs to diffraction patterns of different orders of diffraction and by comparing the outputs with respect to the spectral characteristics. Middle of the respective diffraction image are offset by different distances.
  • a reflection grating for the grating arrangement, which requires less space than a waveguide grating and also offers the possibility of providing a larger number of grating elements than is the case with a waveguide grating. In this way, secondary maxima of the diffraction image can be effectively suppressed so that the transmission characteristics have monotonically falling edges starting from the transmission maximum.
  • reflection grating is designed as an imaging concave reflection grating, additional focusing or collimating optical elements can be dispensed with.
  • the outputs are preferably arranged along a focal line, for example along the so-called Rowland circle, so that the diffraction patterns of light entering via an input in the grating arrangement are substantially focused on the outputs.
  • the imaging reflection grating is generally an Echelle grating in which the incident light is reflected off the narrow sides of the facets.
  • Such a reflection grating can be operated in a high order, for example in an order above the tenth order, as a result of which, due to the high angle dispersion of high orders, a high local dispersion results along the entry surfaces of the outputs.
  • For the effective suppression of the secondary maxima also contributes a large number of facets.
  • the spectral position of an input signal assigned to the sensor can be determined by evaluating the ratio of the intensities measured in the two outputs. Since the measuring range is covered by no more than two outputs, the changes in the measuring signals generated by detectors are slower than if the measuring range has more than two outputs. In this respect, the necessary bandwidth of the amplifier downstream of the detectors amplifier circuit can be chosen smaller, so that a larger amplification of the detector signals supplied by the detectors is possible.
  • active cooling of the grid arrangement can be provided.
  • the grid arrangement can be integrated together with the detectors in a semiconductor chip.
  • the various embodiments of the device can be used for a measuring device which uses at least one spectrally selective sensor in an optical waveguide arrangement.
  • the measuring device is able to read several sensors.
  • the sensor is preferably fiber Bragg gratings, which are arranged along a light guide.
  • the input signal generated by the sensors preferably has a spectral half width which is more than half smaller than the spectral half width of the associated transmission characteristics. In this way, the steepness of the characteristic is preserved.
  • Figure 1 is a functional diagram of a measuring device in which a plurality of arranged in a light guide sensors are read;
  • Figure 2 is an illustration of a device for reading the
  • FIG. 3 is an illustration showing the occurrence of a
  • Figure 4 is an illustration of the measuring principle
  • Figure 5 is a diagram showing another way to
  • FIG. 1 shows a functional diagram of a measuring device 1, which is set up to read out fiber Bragg gratings 3 formed in an optical fiber 2. According to Figure 1, this is a total of n fiber Bragg grating 3.
  • the optical fiber 2 is connected via a fiber coupler 4 and another optical fiber 5 to a light source 6, which may be a so-called superluminescent diode.
  • the light source 6 acts on in the Optical fiber 2 arranged fiber Bragg gratings 3 with light. These are generally light in the infrared wavelength range, in particular light in the range of 980 nm or in the range of 1550 nm.
  • the individual fiber Bragg gratings 3 reflect the incident light at different wavelengths up to ⁇ ⁇ .
  • the light reflected by the fiber Bragg grating 3 passes through the fiber coupler 4 into an optical fiber 7, through which the light reflected back from the fiber Bragg gratings 3 is guided to an input 8 of a read-out device 9.
  • the reflected back from the fiber Bragg gratings 3 signals, which are input to the
  • Input 8 occur are distributed by a grid assembly 10 to outputs 11.
  • two outputs 11 are assigned to a fiber Bragg grating 3.
  • the transmission from the input 8 to one of the outputs 11 takes place in accordance with transmission characteristics 12 of the grating arrangement 10 whose transmission maxima 13 are offset from the central wavelength to ⁇ ⁇ in spectral terms.
  • the ambient conditions in particular the temperature or the extension of the optical fiber 2 at the location of one of the fiber Bragg gratings 3 changes, the associated central wavelength of the light reflected back from the fiber Bragg grating 3 also changes.
  • the central wavelength of the light reflected by a fiber Bragg grating is equal to the wavelength of the respective intensity maximum of the back-reflected light.
  • the intensity of the light appearing at the outputs 11 also changes.
  • the outputs 11 of the grid assembly 10 are connected to optical fibers 14 which lead to detectors 15.
  • the detectors 15 may be, for example, photodiodes, which convert the incident light into a detector signal 16.
  • the detector signals 16 are amplified by the detectors 15 downstream amplifiers 17 and converted into measuring signals 18.
  • the measurement signals 18 are fed to an evaluation unit 19, in the computing units 20, the analog measurement signals 18 convert into digital signals and the ratio of a Fiber Bragg grating 3 associated measurement signals 18 calculate.
  • the logarithmic ratio of the measurement signals 18, which corresponds to the logarithmic ratio of the intensities of the light appearing at the outputs 11, can then be output as an output signal 21 from the evaluation unit 19.
  • FIG. 2 shows further details of the grating arrangement 10.
  • the grating arrangement 10 shown in FIG. 2 has an imaging, concave echelle grating 22 which distributes input signals present at the input 8 to outputs 11.
  • the input 8 is via a light guide 23 with a
  • the input 8 is formed by the exit surface of the optical waveguide 23, while the exits 11 are formed by the entry surfaces of the optical waveguides 25.
  • the light 27 entering at the entrance 8 strikes the echelle grating 22, which has a multiplicity of facets 28, each having a narrow side 29 and a broad side 30, which are arranged along an elliptical baseline.
  • the incident light 27 is predominantly reflected at the narrow sides 29 of the facets 28.
  • the light 31 reflected at the narrow sides 29 of the facets 28 reaches the outputs 11, which are arranged along a focal line 32.
  • the focal line 32 may follow a so-called Rowland circle.
  • the imaging concave echelle grating 22 focuses the input 8 onto diffraction patterns that lie along the focal line 32.
  • the outputs 11 are formed by the light guides 25, the outputs 11 have acceptance profiles 33 shown in FIG. In the case of a single-mode optical waveguide 25, the acceptance profiles 33 are approximately bell-shaped or corresponding to one over the entry surface of the light guides 25
  • the acceptance profiles 33 formed along the focal line 32 are combined with a diffraction pattern 34 whose position along the focal line 32 depends on the spectral composition of the input signal generated by one of the fiber Bragg gratings 3.
  • the transmission characteristics 12 thus result from a convolution of the diffraction pattern 34 with the acceptance profiles 33
  • Intensity maxima 13 of the transmission characteristics 12 result when an intensity maximum 35 of an acceptance profile 33 coincides with an intensity maximum 36 of a diffraction image 34.
  • the diffraction image 34 is a diffraction image resulting when a monochromatic input signal is applied to the input 8.
  • the acceptance profiles reflect the transmissivity of the outputs 11 as a function of the location x along the focal line 32.
  • the angular dependence of the transmissivity of the outputs 11 would also have to be taken into account so that the convolution of the diffraction patterns 34 with the acceptance profiles has to be carried out not only with respect to the location but also via the entrance angle.
  • the acceptance profiles 33 and the diffraction patterns 34 may be considered as profiles that result when integrated over the entrance angle. This is permissible if the acceptance profile shows only a small dependence on the entry angle over the entry angle range.
  • the transmission characteristics 12 are the transmission profiles of the grating arrangement 10 with respect to the outputs 11.
  • the output signal 21, which is equal to the logarithmic ratio of the intensity th of the light fed into the outputs 11, has in a region of overlap 38 usually a monotonously rising or falling course. From the output signal 21 can therefore be in principle closed to the spectral position of the input signal and thus to the environmental conditions at the location of the associated fiber Bragg grating 3.
  • the overlap area 38 is the larger the further the transmission characteristics 12 overlap.
  • the degree of overlap depends firstly on the spatial distance of the acceptance profiles 33 along the focal line 32 and secondly on the spatial width of the diffraction image 34. Since the distance between the optical fibers 25 can not be reduced arbitrarily, the diffraction image 34 must have a sufficient spatial width.
  • the spatial width of the diffraction image 34 can also be increased by arranging the outputs 11 in the propagation direction before or after the focal line 32, so that the diffraction image 34 is defocused. The defocus may also be due to aberrations caused by geometry deviations of the echelle grating 22.
  • the baseline of the echelle grating 22 may deviate from the shape of an ellipse so that different regions of the echelle grating 22 image the input 8 differently.
  • Such phase apportioning likewise leads to defocused diffraction patterns 34.
  • echelle grating 22 has a large number of facets, since in this case the secondary maxima are relatively weak. In this way, starting from the transmission maximum, monotonously rising or monotonically falling edges of the transmission characteristics 12 are ensured. For this reason, echelle grating 22 typically has more than fifty facets 28. If the transmission characteristics 12 in spectral
  • Width of the input signal 37 is considerably smaller than the spectral width of the transmission characteristics 12. As a rule, therefore, the spectral half-width of the input signal 37 will be less than half of the spectral half-width of the transmission characteristics.
  • the spectral location of the transmission characteristics 12 is chosen so that the transmission characteristics 12 overlap one tenth of the transmission value at the transmission maximum 13.
  • the overlap can also be selected such that the transmission characteristics 12 overlap above the half value used to determine the half-width.
  • the spectral half width of the input signal 37 should be smaller than half the spectral half width of the transmission characteristics 12.
  • the acceptance profiles 33 can, as shown in FIG. 5, be offset in opposite directions relative to the location of the transmission maxima 40 by less than half the base width of the respective diffraction pattern 39. In the embodiment shown in FIG. 5, for example, that of FIG
  • Diffraction order k assigned acceptance profile 33 offset by Ax k relative to the transmission maximum 40 of the diffraction order k associated diffraction pattern 39.
  • the acceptance profile 33 associated with the diffraction order k + 1 is offset by Ax k + 1 with respect to the transmission maximum 40 of the diffraction pattern 39 assigned to the diffraction order k + 1.
  • transmissivity oncharacteristics 12 which is a local distance
  • Ax k + Ax k + I corresponding spectral distance A ⁇ k + ⁇ + ⁇ have.
  • overlapping areas with a spectral width of 3 nm to 4 nm can be created.
  • the measuring range of the measuring device 1 compared to the prior art is significantly expanded.
  • the read-out device 9 can be formed on an integrated semiconductor chip.
  • an echelette grating may also be used in which the light is reflected at the broad sides of the facets.
  • the read-out device 9 described here is realized by means of an echelle grating 22.
  • the AWG can be a half-sided AWG with mirrored terminations of the individual light guides.
  • the input ports 24 and the output ports 26 are on the same side of the filter assembly 10 as in the embodiment shown in Figure 2.
  • the AWG may also be a full AWG with the input ports and output ports typically on opposite sides lie.
  • the overlap of the transmission characteristics 12 may also be accomplished by defocusing the diffraction patterns 34 when using an AWG.
  • the outputs 11 are arranged away from the foci in the free-jet areas or arranged in different diffraction orders.
  • a polarization-rotating component in the waveguides of the read-out device 9 the birefringence in the waveguide substrate caused by material anisotropies, material stresses or temperature changes can be reduced.
  • Birefringence in the AWG can degrade the measurement accuracy by using an AWG instead of the Echelle grating 22.
  • This polarization-rotating component can be realized, for example, by a ⁇ / 2 plate or by a geometric variation of the waveguide geometry.
  • care should also be taken that the crosstalk between non-adjoining waveguides ( non-adjacent channel crosstalk) is as small as possible; This quantity indicates how much light appears at the outputs 11 at a wavelength outside the channel-specific transmission characteristic. This size should be as small as possible to keep the basic smoking as low as possible.
  • AWGs and Echelle grids 22 have a temperature dependent
  • the substrate should be chosen such that the coefficient of thermal expansion of the substrate compensates for the coefficient of thermal expansion and the thermo-optic effect in the waveguide structure relative to the shift in transmission characteristics.
  • the photodiodes can be incorporated directly into the read-out device 9 in the case of certain semiconductor materials during the manufacturing process.
  • Example material systems are material compositions based on InP.
  • the light source 6 can be integrated into the read-out device 9.
  • Optical amplifiers can also be integrated into read-out device 9 in the case of certain semiconductor materials during the production process.
  • Exemplary material systems are material compositions based on InP.
  • the optical amplifiers allow, even with weak light sources or high attenuations to achieve a sufficiently high signal-to-noise ratio in the light detection behind the grid assembly 10.
  • the optical amplifiers are usually arranged between input 8 and outputs 11.
  • optical modulators may be incorporated directly into the readout device 9 in certain semiconductor materials during the manufacturing process.
  • Exemplary material systems are in turn material compositions based on InP.
  • WDM wavelength-division multiplexing
  • a wavelength-division multiplexing (WDM) -based measuring device 1 can become a measuring device with a combined wavelength / time-multiplexing method.
  • the use of optical modulators allows many of the fiber
  • Bragg gratings formed sensor 3 read with a wavelength and read-out device 9, but with limitations in the measurement speed and anti-aliasing.
  • the optical modulators can be used, for example, successively different branches of
  • the modulators can also be used to read out various sensors along the optical fiber 2 via a selection of the signal propagation time, for example by placing a modulator in the region of the input 8 which is opened within a certain time window whose time position varies with respect to the time is emitted from the light source 6, a light pulse.
  • optical circulators can be installed directly in the read-out device 9 in certain semiconductor materials during the manufacturing process.
  • a material composition based on InP may be mentioned.
  • Such circulators may be necessary in order to feed the light into the optical fiber 2 and to supply the light reflected back from the sensors to the read-out device 9.
  • electrical heating elements to the substrate of the read-out device 9
  • the refractive index in the individual components or other thermo-optical effects can be used be used to tune the components. This allows the control of the dispersion properties of the measuring device 1 and in particular of the read-out device 9.
  • electromagnetic radiation in the entire optical wavelength range including the infrared and ultraviolet wavelength range is meant when light is mentioned.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de mesure pour la lecture de capteurs de mesure agencés dans une fibre optique. Le dispositif de mesure comprend un agencement de grille qui partage un signal d'entrée produit par les capteurs de mesure sur différentes sorties. Les caractéristiques de transmission (12) associées aux sorties présentent à cet effet une zone de chevauchement aussi importante que possible pour augmenter la plage de mesure du dispositif de mesure.
PCT/EP2010/063261 2009-09-09 2010-09-09 Dispositif de lecture d'un capteur de mesure optique spectralement sélectif et dispositif de mesure WO2011029884A1 (fr)

Priority Applications (1)

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EP10752800A EP2475971A1 (fr) 2009-09-09 2010-09-09 Dispositif de lecture d'un capteur de mesure optique spectralement sélectif et dispositif de mesure

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DE102009040885A DE102009040885A1 (de) 2009-09-09 2009-09-09 Vorrichtung zum Auslesen eines spektral selektiven Messaufnehmers und Messvorrichtung
DE102009040885.1 2009-09-09

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DE102011080278A1 (de) * 2011-08-02 2013-02-07 Carl Zeiss Ag Echelle-Spektrometer
CN112665749B (zh) * 2020-12-31 2023-04-11 武汉科宇智联信息技术有限公司 一种中阶梯光栅硅光芯片温度传感器

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
BUCK T C ET AL: "Performance analysis of interrogators for fiber Bragg grating sensors based on arrayed waveguide gratings", OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VI 15-18 JUNE 2009 MUNICH, GERMANY, vol. 7389, 15 June 2009 (2009-06-15), Proceedings of the SPIE - The International Society for Optical Engineering SPIE - The International Society for Optical Engineering USA, pages 1 - 9, XP002610175, ISSN: 0277-786X, DOI: DOI:10.1117/12.827526 *
GAOZHI XIAO ET AL: "Miniaturized optical fiber sensor interrogation system employing echelle diffractive gratings demultiplexer for potential aerospace applications", IEEE SENSORS JOURNAL IEEE USA, vol. 8, no. 7, July 2008 (2008-07-01), pages 1202 - 1207, XP002610177, ISSN: 1530-437X, DOI: DOI:10.1109/JSEN.2008.926521 *
SANO Y ET AL: "Fast optical wavelength interrogator employing arrayed waveguide grating for distributed fiber Bragg grating sensors", JOURNAL OF LIGHTWAVE TECHNOLOGY IEEE USA, vol. 21, no. 1, January 2003 (2003-01-01), pages 132 - 139, XP002610176, ISSN: 0733-8724, DOI: DOI:10.1109/JLT.2003.808620 *
SANO, Y.; YOSHINO, T: "Fast Optical Wavelength Interrogator Employing Arrayed Waveguide Grating for Distributed Fiber Bragg Grating Sensors", JOURNAL OF LIGHTWAVE TECHNOLOGY, vol. 21, no. 1, January 2003 (2003-01-01), XP001228604, DOI: doi:10.1109/JLT.2003.808620
XIAO, G. ET AL.: "Miniaturized Optical Fiber Bragg Grating Sensor Interrogator Based on Echelle Diffractive Gratings in", MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, vol. 49, no. 3, March 2007 (2007-03-01)

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EP2475971A1 (fr) 2012-07-18

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