WO2011024170A1 - A method and apparatus for thin film quality control in a batch manufacturing layout - Google Patents

A method and apparatus for thin film quality control in a batch manufacturing layout Download PDF

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Publication number
WO2011024170A1
WO2011024170A1 PCT/IL2010/000698 IL2010000698W WO2011024170A1 WO 2011024170 A1 WO2011024170 A1 WO 2011024170A1 IL 2010000698 W IL2010000698 W IL 2010000698W WO 2011024170 A1 WO2011024170 A1 WO 2011024170A1
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WO
WIPO (PCT)
Prior art keywords
panel
thin film
illumination
unit
photovoltaic panel
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Application number
PCT/IL2010/000698
Other languages
French (fr)
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WO2011024170A4 (en
Inventor
Doron Aspir
Benjamin Shoham
David Scheiner
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Brightview Systems Ltd.
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Publication date
Application filed by Brightview Systems Ltd. filed Critical Brightview Systems Ltd.
Publication of WO2011024170A1 publication Critical patent/WO2011024170A1/en
Publication of WO2011024170A4 publication Critical patent/WO2011024170A4/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32179—Quality control, monitor production tool with multiple sensors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32182—If state of tool, product deviates from standard, adjust system, feedback
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32183—Test cell
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • the method and system relate to the area of thin film quality control and in particular, to the quality and process control in manufacturing thin film photovoltaic cells.
  • Thin film photovoltaic solar panels being one such source have attracted particular attention. These panels represent a number of different thin films (stack) deposited on large size flexible web substrates or large size rigid substrates such as glass, metal and others.
  • the films may be of materials such as dielectrics, metals, semiconductors, and are typically combined in multilayer stacks usually separated by so-called scribe lines into a plurality of individual photovoltaic cells. In addition to separating the cells, the scribe lines enable serial connection of individual photovoltaic cells increasing the voltage generated by the panel.
  • scribe lines enable serial connection of individual photovoltaic cells increasing the voltage generated by the panel.
  • the panels are produced continuously and are transferred from one production station to another.
  • a robotic type mechanism transfers the panels within the stations and from one sub-station to another.
  • the transfer of the panels in between the production stations may be performed in single panels or in batches containing several, ten, twenty or more photovoltaic panels.
  • a photovoltaic panel represents a stack of thin layers of thin films sensitive to dust, scratches, stains, and other embedded process defects that may be introduced into the thin films in the course of the production process. It is therefore imperative that the thin layer quality control, or what is known as on-line quality control, is a part of the production process.
  • Patent Cooperation Treaty Applications PCT/IL2009/000299 and PCT/IL2009/000684 assigned to the applicant of the present application disclose systems and methods for on-line photovoltaic panel quality control in a continuous production process. These systems however, cannot be applied to quality control of photovoltaic panels produced by batch manufacturing methods and transferred in batch mode.
  • the control parameters of a photovoltaic panel produced in a batch manufacturing environment are similar to the parameters of the panels produced in a continuous manufacturing process and include: the refractive index (n) and the extinction coefficient (k), both as a function of the wavelength, the film thickness (d), roughness, photoluminescence spectrum and intensity as well as other parameters. These parameters determine how a thin film responds to incident or transmitted light. Additional process control parameters can include energy gap, absorption, doping concentration, conductivity or crystallinity percentage. Knowledge of these parameters enables process and tool monitoring, photovoltaic panel material characterization, defect detection, defect classification and generation of feedback to the other production stations and enable, if possible, defect repair.
  • thin film as used in the current disclosure means a single photovoltaic thin film and a plurality of thin films with each film deposited on the top of the previous one or what is known as a "stack.”
  • panel as used in the current disclosure means a plurality of photovoltaic cells located on the same substrate and possibly electrically connected between them.
  • a thin film photovoltaic panel quality control apparatus that evaluates quality of thin film photovoltaic panels located in a storage cassette with a space between the panels.
  • the apparatus includes illumination units illuminating a segment of the panel and illumination detection units that detect illumination reflected or transmitted by the panel and present on it one or more thin films.
  • the apparatus includes a panel profiling mechanism sensing the distance between the measurement unit and the panel and introducing into the measurements corrections caused by the distortion of the panel shape.
  • a robotic mechanism places the photovoltaic panels in horizontal or vertical orientation and provides a relative displacement between the panel and the panel illuminating units and illumination detector units.
  • a control unit coordinates the quality control process and the movements of at least the robotic mechanism, processes at least one detected illumination - thin film interaction product and derives at least one thin film parameter.
  • the system for thin film photovoltaic panel quality control and production process control may be located in almost any location along the panel production line, which may be near a process station, near a cassette station, and at the process end point station.
  • FIGS. IA and IB are schematic illustrations of typical thin film production stations.
  • FIG 2 is a schematic illustration of a first exemplary embodiment of the present system for thin film photovoltaic panel quality control.
  • FIG 3 is a three dimensional simplified illustration of FIG 2.
  • FIG 4 is another three dimensional simplified illustration of the first exemplary embodiment of the present system for thin film photovoltaic panel quality control system.
  • FIG 5 is a three dimensional simplified illustration of a second exemplary embodiment of the present system for thin film photovoltaic panel quality control.
  • FIG 6 is a three dimensional simplified illustration of a variation of the second exemplary embodiment of the present system for thin film photovoltaic panel quality control with multiple panel quality control systems.
  • FIG 7 is a schematic illustration of a third exemplary embodiment of the present system for thin film photovoltaic panel quality control.
  • FIG 8 A is a schematic illustration of a variation of the third exemplary embodiment of the present system for thin film photovoltaic panel quality control employing multiple panel quality control systems.
  • FIG 8B is a schematic cross section of another variation of the third exemplary embodiment of the present system for thin film photovoltaic panel quality control employing multiple panel quality control systems.
  • FIG 9 is a schematic illustration of a quality control system located at a central location of a manufacturing process line where different stations are arranged along a transport line.
  • FIG 10 is a schematic illustration of a quality control system located at an end- point location of a manufacturing process line where different stations are arranged along a transport line.
  • FIG 11 is a schematic illustration of a cluster of quality control systems located at a central location of a manufacturing process line where different stations are arranged along a transport line.
  • FIGS IA and IB illustrate typical manufacturing stations.
  • a station is usually performing a sequence of operations to supply the next production process with a finished panel which, depending on the specific station, may be a finished product.
  • FIG IA illustrates a carousel type production station 100, where different production sub-stations 104 performing specialized processes arranged around a central robotic unit-408 translating, with the help of a robotic arm or panel manipulator 112, the processed parts or units between stations 104.
  • processes may include deposition of contact layers, deposition of a photovoltaic absorber layer, formation of scribing lines, contact shunts formation, and other processes required for production of a thin film photovoltaic panel.
  • FIG IB illustrates a production station 130, of which different production substations 134, performing specialized processes, are arranged along a transport line 144.
  • a robotic unit 138 or an Automated Guided Vehicle (AGV) with a robotic arm translates the processed components or units between stations 134.
  • AGV Automated Guided Vehicle
  • One of sub-stations 104 or 134 may be a storage unit storing a batch of substrates or work-in-process panels, which may be panels with various thin films deposited on them. Additionally and alternatively one or more of sub-stations 104 and 134 may serve as an entrance-exit sub-station receiving processed components from, and delivering processed components to robotic unit 138 or Automated Guided Vehicle. In order to ensure high production yield the photovoltaic panels following each production step or process should be inspected for quality control to assess the quality of the thin film produced by the process.
  • the control parameters or characteristics of the photovoltaic panels are typically measured by detecting and analyzing illumination spectrum reflected or transmitted through one or more thin film layers forming the panel.
  • the characteristics determine how a thin film responds to incident or transmitted light and include: the refractive index (n) and the extinction coefficient (k), both as a function of the wavelength, the film thickness (d), roughness, photoluminescence spectrum and intensity as well as other parameters.
  • Additional process control parameters may include energy gap, absorption, conductivity or crystallinity percentage. Knowledge of these parameters enables photovoltaic panel material characterization, defect detection, defect classification and generation of feedback to the other integrated in the same cell production stations and enable, if possible, defect repair.
  • FIG 2 is a schematic illustration of a first exemplary embodiment of the present system for thin film photovoltaic panel quality control.
  • System 200 may be a sub-station of a manufacturing station 204 for thin film photovoltaic panel manufacture.
  • Station 204 may be a carousel type station or a station arranged along a transport line.
  • System 200 may be located adjacent to each production sub-station 208 or adjacent to the storage cassette 212.
  • a robotic mechanism 216 is operatively configured to extract panel 220 from the cassette 212 deliver it to a process sub-station 208, move between sub-stations 208, and upon completion of all processes to return the panel to the storage cassette 212.
  • one or more sub-stations may serve as an entrance-exit sub-station receiving processed components from, and delivering processed components to robotic mechanism 216.
  • FIG 3 is a three dimensional simplified detail of FIG 2 showing system 200, storage cassette 212, robot 216, and photovoltaic panel 220.
  • Robotic arm or panel manipulator 300 employs a vacuum tray 304 to manipulate a fully or partially processed photovoltaic panel 220 coated with one or more thin film.
  • System 200 includes a measurement unit 308 incorporating a panel illuminating unit 312 operative to illuminate at least a segment of the controlled thin film photovoltaic panel 220 with broadband illumination and a detector unit 316 operative to detect at least one interaction product of the illumination provided by the illumination unit 312 and one or more of the thin films of the photovoltaic panel 220.
  • the illuminating unit 312 illuminates a segment of the photovoltaic panel 220 with a line-shaped illumination spot or with discrete illuminated spots.
  • a control unit 320 is operative to coordinate the quality control process. This may include coordination of the illumination and detector unit operation with movements of the robotic mechanism, process the detected illumination thin layer interaction product and derive at least one thin film parameter or characteristic.
  • the control unit is also operative to communicate at least one measured thin film parameter to at least one production station. Based on the value of the parameter a correction action may be undertaken by changes in the production process at stations located upstream from the quality control inspection station at which the parameter measurement was performed or in the production processes to be performed by production stations downstream from the quality control inspection station.
  • Robotic mechanism 216 may be configured to provide in course of the thin film measurement process a relative displacement, linear or other, between panel 220 and panel illuminating unit 312 and illumination detector unit 316 that may be incorporated into measurement unit 308.
  • the displacement speed is determined by the data transfer rate of the quality control system. Based upon specific process control requirements received by the control unit 320, the displacement speed can be adjusted to enable denser or less dense sampling of the panel surface.
  • the glass substrates are not flat.
  • the dimensions of substrates used in batch production environment are 1100mm by 1300mm or 1200mm by 1200mm or 1100mm by 1400mm, although other dimensions may be used.
  • the substrates may have about 200 micron difference in thickness measured across the substrate.
  • the substrate/panel rests on support surfaces of vacuum tray 304 that support the panel in a number of discrete contact points, but not uniformly throughout the whole surface.
  • vacuum tray 304 that support the panel in a number of discrete contact points the deviations of the panel surface from a plane are further aggravated by gravity forces forming sags and bulges and further changing the relief of the panel, although this artifact is panel thickness dependent.
  • the presence of these photovoltaic panel specific factors or artifacts can be detrimental to the quality of measurement of the thin film's parameters.
  • United States Provisional Patent Application 61/229,304 to the Assignee of the present application provides a method of evaluating the profile of the photovoltaic panel.
  • the distance between them may be continuously adjusted or maintain constant.
  • a number of distance sensors may be placed at desired intervals along the length of the measurement unit.
  • the sensors can be placed adjacent to each measurement unit, thereby providing distance adjustment information individually for each unit, or the sensors can be placed at desired intervals.
  • the intervals may be determined by the expected spatial frequency of height or distance between the probe and panel surface variations.
  • the distortions of the panels may be based on the calculated or earlier measured distortion of similar panels.
  • the sensors may be optical sensors and utilize illumination provided by the illumination unit, capacitive sensors, or other distance measurement sensors or mechanisms.
  • the panel deformation may be composed of a variable component, related to the deviation from flatness of each glass panel, and a relatively constant component, which may be substantially larger than the variable component, related to the glass panel distortion introduced by the gravity forces operating on the panel segments located between the support surfaces of vacuum tray 304.
  • a relatively constant component which may be substantially larger than the variable component, related to the glass panel distortion introduced by the gravity forces operating on the panel segments located between the support surfaces of vacuum tray 304.
  • the subsequent profiling would consist of finding the deviations from an average almost constant glass panel distortion component.
  • the glass panel distortion component may be measured by the same disclosed above distance sensors or mechanisms.
  • the thin layers to be measured should be transported under or over system 200 such that the measured layers remain in one plane.
  • Robotic mechanism 216 providing relative displacement, linear or other, between panel 220 and panel illuminating unit 312 and illumination detector unit 316 may be configured to support such a requirement.
  • the coordinated measurement can be performed by robotic motion, whereby different locations on the panel are measured along an axis of the panel. Motion along two axes can be performed in order to generate a map of values of the parameters of thin film.
  • the system 200 can contain multiple illumination and detector units which provide information along an axis of the panel and the robotic motion can be utilized to provide motion in at least one axis in order to generate a two dimensional map.
  • Thin layers may be deposited on glass substrates oriented in different planes.
  • the panel may be oriented in a vertical or in a horizontal position.
  • robotic unit 216 for quality control may be configured to rotate panel 220 from one spatial orientation to another.
  • FIG 4 which is another three dimensional simplified illustration of the first exemplary embodiment of the present system for thin film photovoltaic panel quality control system and configured to accept vertically oriented thin film photovoltaic panels. Quality control of a panel in vertical orientation simplifies the process to some extent, since gravity associated forces do not cause panel distortion.
  • FIG 5 is a three dimensional simplified illustration of a second exemplary embodiment of the present system for thin film photovoltaic panel quality control.
  • System 500 is essentially a component of a multiple axis manipulator 504 adjacent to the panel storage cassette 508.
  • System 500 is organized in a way that at every panel 512 loading cycle the panel 512 is transported under or over system 500, such that the measured thin layers remain in one plane.
  • system 500 slides as shown by arrow 516 along the manipulator 504 and cassette 508 such as to enable the panel to be transferred and controlled/scanned.
  • the manipulator 504 may include more than one system 500 for thin film photovoltaic panel quality control. This increases the throughput of the quality control stations and enables higher sampling density.
  • FIG 7 is a schematic illustration of a third exemplary embodiment of the present system for thin film photovoltaic panel quality control. It is known that almost every additional stage, and in particular a panel handling stage, may introduce defects into the sensitive thin films. In a photovoltaic panel batch production process substrates, or work in process panels, containing one or more thin layers and marked by numeral 700, are stacked in a panel storage cassette 704.
  • a thin film photovoltaic panel quality control system 712 may be organized on a distal end of a cantilever type robotic or manipulator arm 720 extending into the space 708 between panels 700, supported by 716 and providing linear movement to the quality control system 712.
  • the manipulator can scan linearly in two horizontal axes to provide measurements of the whole panel surface or the width of system 712 may be the same as that of panel 700 in order to scan the whole panel in one axis.
  • Arm 720 would move system 712 in a linear scanning movement along panel 700 as indicated by arrow 724, scanning the panel.
  • controller 730 may be programmed to enable a quality control sequence where system 712 shown in broken lines operates in a space 734 vacated by an extracted panel or substrate 700.
  • Such process organization provides greater freedom in design and operation of the thin film photovoltaic panel quality control system 712.
  • Throughput of the quality control system 712 may be further improved by including in system 712 multiple illumination and illumination detection units.
  • FIG 8 A is a schematic illustration of a variation of the third exemplary embodiment of the present system for thin film photovoltaic panel quality control employing multiple panel quality control systems 712 in multiple spaces 708 between panels, whereby the systems 712 scan multiple panels simultaneously.
  • Such configuration significantly increases the through-put of a manufacturing line or station, where the system for thin film photovoltaic panel quality control is integrated.
  • multiple systems 712 having adjacent fields of view may be located in the same space 708 and may be used to further increase the throughput of the system for thin film photovoltaic panel quality control.
  • the system for thin film photovoltaic panel quality control may be located in any one of the locations of the manufacturing station or arranged along a transport line (FIG IB). In the previous examples the quality control system was located near a process station or near a storage cassette. The system may also be located at the process end point station. [0040] When thin film photovoltaic panel manufacturing process is performed by stations arranged along a transport line it may require a large number of quality control systems to be located at each process station and integrated into the process by performing the quality control immediately at the end of each process. Selection of dedicated quality control system locations may reduce the number of quality control systems required and the associated cost.
  • FIG 9 is a schematic illustration of a quality control system located at a central location of a manufacturing process where different stations are arranged along a transport line.
  • numeral 900 marks a Plasma Enhanced Chemical Vapor Deposition (PECVD) stations cluster
  • numeral 904 marks Transparent Conductive Oxide (TCO) deposition stations cluster
  • numeral 908 marks laser scribing cluster
  • numeral 912 marks other process stations required by the panel manufacture process.
  • One or more thin film quality control systems 916 is located at a central location through which the partially processed panels are transported by a dedicated robotic or AGV transfer system 920.
  • Systems 916 support all process steps and may be implemented as panel scanning systems (FIGS 3 through 6) or as cassette scanning systems (FIGS 7 and 8). The effect of all of the processes on the panel is measured immediately after completion of each of the processes. The throughput of such configuration may be easily increased by addition of quality control systems 916.
  • FIG 10 is a schematic illustration of a quality control system located at an end- point location of a manufacturing process where different stations are arranged along a transport line, or even system 916 may be located at the entrance of back-end of the line, for example, before station 1004 where front and back glass are joined together. In such a configuration system 916 measures an almost finished product and provides feedback to all of the previous process stations.
  • FIG 11 is a schematic illustration of a quality control system located at a central location of a manufacturing process where multiple different process stations 1112 are arranged along a transport line.
  • a cassette station or stations 1110 interfaces between the dedicated robotic or AGV transfer system 1120, which travels along the central track 1122, and each process station 1112.
  • Cassettes 1108 are transferred by transfer system 1120 between cassette stations 1110 and each process station receives panels for processing from its respective cassette station by robotic transfer (not shown).
  • a thin film quality control system 1116 is located at a central location, also interfaced by a cassette station or stations, through which cassettes with partially or completely processed panels are transported by a dedicated robotic or AGV transfer system 1120.
  • System 1116 supports all process steps and may be implemented as a panel scanning system (FIGS 3 through 6) or as a cassette scanning systems (FIGS 7 and 8). The effect of all of the processes on the panel can be measured immediately after completion of each of the processes. The throughput of such a configuration may be easily increased by addition of multiple quality control systems 1116. Additional types of systems, measuring different parameters of panels, can be placed at a central location similar to 1116.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Presented is a system for thin film photovoltaic panel quality control in a batch manufacturing process. The system includes a panel illuminating unit, a detector unit, a robotic mechanism handling the panel and providing a relative displacement between the panel and the panel illuminating unit and illumination detector unit. A control unit is operative to coordinate the quality control process with movements of at least the robotic mechanism, process at least one detected illumination thin film interaction product and derive at least one thin film parameter.

Description

A METHOD AND APPARATUS FOR THIN FILM QUALITY CONTROL IN A
BATCH MANUFACTURING LAYOUT
TECHNOLOGY FIELD
[001] The method and system relate to the area of thin film quality control and in particular, to the quality and process control in manufacturing thin film photovoltaic cells.
BACKGROUND
[002] Scarcity and environmental effects of fossil energy sources that emerged in recent years have accelerated development of alternative energy sources. Thin film photovoltaic solar panels, being one such source have attracted particular attention. These panels represent a number of different thin films (stack) deposited on large size flexible web substrates or large size rigid substrates such as glass, metal and others. The films may be of materials such as dielectrics, metals, semiconductors, and are typically combined in multilayer stacks usually separated by so-called scribe lines into a plurality of individual photovoltaic cells. In addition to separating the cells, the scribe lines enable serial connection of individual photovoltaic cells increasing the voltage generated by the panel. Several thin film photovoltaic solar panel production processes exist. In the continuous production process the panels are produced continuously and are transferred from one production station to another. In the batch production process, a robotic type mechanism transfers the panels within the stations and from one sub-station to another. The transfer of the panels in between the production stations may be performed in single panels or in batches containing several, ten, twenty or more photovoltaic panels.
[003] A photovoltaic panel represents a stack of thin layers of thin films sensitive to dust, scratches, stains, and other embedded process defects that may be introduced into the thin films in the course of the production process. It is therefore imperative that the thin layer quality control, or what is known as on-line quality control, is a part of the production process. Patent Cooperation Treaty Applications PCT/IL2009/000299 and PCT/IL2009/000684 assigned to the applicant of the present application disclose systems and methods for on-line photovoltaic panel quality control in a continuous production process. These systems however, cannot be applied to quality control of photovoltaic panels produced by batch manufacturing methods and transferred in batch mode. [004] In a batch manufacturing environment the panels are handled in batches and typically are located in cassettes, each holding a batch of panels. Excessive panel handling between the manufacturing cell production stations, in and out of the cassette, and the quality control system may damage the sensitive thin layers. The stations may operate on the panel oriented in vertical or horizontal orientation. Handling of the panel by a robotic handling system may also be in different planes. United States Patent No. 6,833,048 to Finarov et al discloses a method of semiconductor wafer quality control applied to a work piece contained in a cassette wafers.
[005] The control parameters of a photovoltaic panel produced in a batch manufacturing environment are similar to the parameters of the panels produced in a continuous manufacturing process and include: the refractive index (n) and the extinction coefficient (k), both as a function of the wavelength, the film thickness (d), roughness, photoluminescence spectrum and intensity as well as other parameters. These parameters determine how a thin film responds to incident or transmitted light. Additional process control parameters can include energy gap, absorption, doping concentration, conductivity or crystallinity percentage. Knowledge of these parameters enables process and tool monitoring, photovoltaic panel material characterization, defect detection, defect classification and generation of feedback to the other production stations and enable, if possible, defect repair.
[006] Availability of equipment and methods enabling photovoltaic panel material characterization, defect detection, defect classification and generation of feedback to the other production stations would significantly improve the quality of thin film solar panel production, improve the yield, and reduce the costs.
GLOSSARY
[007] The term "thin film" as used in the current disclosure means a single photovoltaic thin film and a plurality of thin films with each film deposited on the top of the previous one or what is known as a "stack."
[008] The term "panel" as used in the current disclosure means a plurality of photovoltaic cells located on the same substrate and possibly electrically connected between them. BRIEF SUMMARY
A thin film photovoltaic panel quality control apparatus that evaluates quality of thin film photovoltaic panels located in a storage cassette with a space between the panels. The apparatus includes illumination units illuminating a segment of the panel and illumination detection units that detect illumination reflected or transmitted by the panel and present on it one or more thin films. The apparatus includes a panel profiling mechanism sensing the distance between the measurement unit and the panel and introducing into the measurements corrections caused by the distortion of the panel shape. A robotic mechanism places the photovoltaic panels in horizontal or vertical orientation and provides a relative displacement between the panel and the panel illuminating units and illumination detector units. A control unit coordinates the quality control process and the movements of at least the robotic mechanism, processes at least one detected illumination - thin film interaction product and derives at least one thin film parameter.
The system for thin film photovoltaic panel quality control and production process control may be located in almost any location along the panel production line, which may be near a process station, near a cassette station, and at the process end point station.
BRIEF DESCRIPTION OF THE DRAWINGS
[009] The method and system disclosed are herein presented, by way of non-limiting examples only, with reference to the accompanying drawings, wherein like numerals depict the same elements throughout the text of the specifications. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the method and apparatus.
[0010] FIGS. IA and IB are schematic illustrations of typical thin film production stations.
[0011] FIG 2 is a schematic illustration of a first exemplary embodiment of the present system for thin film photovoltaic panel quality control.
[0012] FIG 3 is a three dimensional simplified illustration of FIG 2. [0013] FIG 4 is another three dimensional simplified illustration of the first exemplary embodiment of the present system for thin film photovoltaic panel quality control system.
[0014] FIG 5 is a three dimensional simplified illustration of a second exemplary embodiment of the present system for thin film photovoltaic panel quality control.
[0015] FIG 6 is a three dimensional simplified illustration of a variation of the second exemplary embodiment of the present system for thin film photovoltaic panel quality control with multiple panel quality control systems.
[0016] FIG 7 is a schematic illustration of a third exemplary embodiment of the present system for thin film photovoltaic panel quality control.
[0017] FIG 8 A is a schematic illustration of a variation of the third exemplary embodiment of the present system for thin film photovoltaic panel quality control employing multiple panel quality control systems.
[0018] FIG 8B is a schematic cross section of another variation of the third exemplary embodiment of the present system for thin film photovoltaic panel quality control employing multiple panel quality control systems.
[0019] FIG 9 is a schematic illustration of a quality control system located at a central location of a manufacturing process line where different stations are arranged along a transport line.
[0020] FIG 10 is a schematic illustration of a quality control system located at an end- point location of a manufacturing process line where different stations are arranged along a transport line.
[0021] FIG 11 is a schematic illustration of a cluster of quality control systems located at a central location of a manufacturing process line where different stations are arranged along a transport line.
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0022] Reference is made to FIGS IA and IB which illustrate typical manufacturing stations. A station is usually performing a sequence of operations to supply the next production process with a finished panel which, depending on the specific station, may be a finished product. FIG IA illustrates a carousel type production station 100, where different production sub-stations 104 performing specialized processes arranged around a central robotic unit-408 translating, with the help of a robotic arm or panel manipulator 112, the processed parts or units between stations 104. In a thin film photovoltaic panel manufacturing line such processes may include deposition of contact layers, deposition of a photovoltaic absorber layer, formation of scribing lines, contact shunts formation, and other processes required for production of a thin film photovoltaic panel.
[0023] FIG IB illustrates a production station 130, of which different production substations 134, performing specialized processes, are arranged along a transport line 144. A robotic unit 138 or an Automated Guided Vehicle (AGV) with a robotic arm translates the processed components or units between stations 134.
[0024] One of sub-stations 104 or 134 may be a storage unit storing a batch of substrates or work-in-process panels, which may be panels with various thin films deposited on them. Additionally and alternatively one or more of sub-stations 104 and 134 may serve as an entrance-exit sub-station receiving processed components from, and delivering processed components to robotic unit 138 or Automated Guided Vehicle. In order to ensure high production yield the photovoltaic panels following each production step or process should be inspected for quality control to assess the quality of the thin film produced by the process.
[0025] The control parameters or characteristics of the photovoltaic panels are typically measured by detecting and analyzing illumination spectrum reflected or transmitted through one or more thin film layers forming the panel. The characteristics determine how a thin film responds to incident or transmitted light and include: the refractive index (n) and the extinction coefficient (k), both as a function of the wavelength, the film thickness (d), roughness, photoluminescence spectrum and intensity as well as other parameters. Additional process control parameters may include energy gap, absorption, conductivity or crystallinity percentage. Knowledge of these parameters enables photovoltaic panel material characterization, defect detection, defect classification and generation of feedback to the other integrated in the same cell production stations and enable, if possible, defect repair.
[0026] FIG 2 is a schematic illustration of a first exemplary embodiment of the present system for thin film photovoltaic panel quality control. System 200 may be a sub-station of a manufacturing station 204 for thin film photovoltaic panel manufacture. Station 204 may be a carousel type station or a station arranged along a transport line. System 200 may be located adjacent to each production sub-station 208 or adjacent to the storage cassette 212. A robotic mechanism 216 is operatively configured to extract panel 220 from the cassette 212 deliver it to a process sub-station 208, move between sub-stations 208, and upon completion of all processes to return the panel to the storage cassette 212. Additionally and alternatively one or more sub-stations may serve as an entrance-exit sub-station receiving processed components from, and delivering processed components to robotic mechanism 216.
[0027] FIG 3 is a three dimensional simplified detail of FIG 2 showing system 200, storage cassette 212, robot 216, and photovoltaic panel 220. Robotic arm or panel manipulator 300 employs a vacuum tray 304 to manipulate a fully or partially processed photovoltaic panel 220 coated with one or more thin film. System 200 includes a measurement unit 308 incorporating a panel illuminating unit 312 operative to illuminate at least a segment of the controlled thin film photovoltaic panel 220 with broadband illumination and a detector unit 316 operative to detect at least one interaction product of the illumination provided by the illumination unit 312 and one or more of the thin films of the photovoltaic panel 220. The illuminating unit 312 illuminates a segment of the photovoltaic panel 220 with a line-shaped illumination spot or with discrete illuminated spots.
[0028] A control unit 320 is operative to coordinate the quality control process. This may include coordination of the illumination and detector unit operation with movements of the robotic mechanism, process the detected illumination thin layer interaction product and derive at least one thin film parameter or characteristic. The control unit is also operative to communicate at least one measured thin film parameter to at least one production station. Based on the value of the parameter a correction action may be undertaken by changes in the production process at stations located upstream from the quality control inspection station at which the parameter measurement was performed or in the production processes to be performed by production stations downstream from the quality control inspection station.
[0029] Robotic mechanism 216 may be configured to provide in course of the thin film measurement process a relative displacement, linear or other, between panel 220 and panel illuminating unit 312 and illumination detector unit 316 that may be incorporated into measurement unit 308. In certain cases the displacement speed is determined by the data transfer rate of the quality control system. Based upon specific process control requirements received by the control unit 320, the displacement speed can be adjusted to enable denser or less dense sampling of the panel surface. [0030] Generally, the glass substrates are not flat. Typically, the dimensions of substrates used in batch production environment are 1100mm by 1300mm or 1200mm by 1200mm or 1100mm by 1400mm, although other dimensions may be used. The substrates may have about 200 micron difference in thickness measured across the substrate. The substrate/panel rests on support surfaces of vacuum tray 304 that support the panel in a number of discrete contact points, but not uniformly throughout the whole surface. When the panel is supported in a number of discrete contact points the deviations of the panel surface from a plane are further aggravated by gravity forces forming sags and bulges and further changing the relief of the panel, although this artifact is panel thickness dependent. The presence of these photovoltaic panel specific factors or artifacts can be detrimental to the quality of measurement of the thin film's parameters. United States Provisional Patent Application 61/229,304 to the Assignee of the present application provides a method of evaluating the profile of the photovoltaic panel.
[0031] In order to maintain the proper measurement distance between the measurement units and the measured thin film layer or the surface of the photovoltaic panel, the distance between them may be continuously adjusted or maintain constant. A number of distance sensors may be placed at desired intervals along the length of the measurement unit. The sensors can be placed adjacent to each measurement unit, thereby providing distance adjustment information individually for each unit, or the sensors can be placed at desired intervals. The intervals may be determined by the expected spatial frequency of height or distance between the probe and panel surface variations. The distortions of the panels may be based on the calculated or earlier measured distortion of similar panels. The sensors may be optical sensors and utilize illumination provided by the illumination unit, capacitive sensors, or other distance measurement sensors or mechanisms.
[0032] When a robotic unit handles a panel the panel deformation may be composed of a variable component, related to the deviation from flatness of each glass panel, and a relatively constant component, which may be substantially larger than the variable component, related to the glass panel distortion introduced by the gravity forces operating on the panel segments located between the support surfaces of vacuum tray 304. In order to simplify the thin film measurement process it is possible to map the glass panel distortion factors introduced by the support surfaces of vacuum tray 304 or machine specific factors. The subsequent profiling would consist of finding the deviations from an average almost constant glass panel distortion component. Alternatively, the glass panel distortion component may be measured by the same disclosed above distance sensors or mechanisms.
[0033] The thin layers to be measured should be transported under or over system 200 such that the measured layers remain in one plane. Robotic mechanism 216 providing relative displacement, linear or other, between panel 220 and panel illuminating unit 312 and illumination detector unit 316 may be configured to support such a requirement. The coordinated measurement can be performed by robotic motion, whereby different locations on the panel are measured along an axis of the panel. Motion along two axes can be performed in order to generate a map of values of the parameters of thin film. The system 200 can contain multiple illumination and detector units which provide information along an axis of the panel and the robotic motion can be utilized to provide motion in at least one axis in order to generate a two dimensional map.
[0034] Thin layers, depending on the deposition equipment, may be deposited on glass substrates oriented in different planes. For example, the panel may be oriented in a vertical or in a horizontal position. Accordingly, robotic unit 216 for quality control may be configured to rotate panel 220 from one spatial orientation to another. Alternatively, as shown in FIG 4, which is another three dimensional simplified illustration of the first exemplary embodiment of the present system for thin film photovoltaic panel quality control system and configured to accept vertically oriented thin film photovoltaic panels. Quality control of a panel in vertical orientation simplifies the process to some extent, since gravity associated forces do not cause panel distortion.
[0035] FIG 5 is a three dimensional simplified illustration of a second exemplary embodiment of the present system for thin film photovoltaic panel quality control. System 500 is essentially a component of a multiple axis manipulator 504 adjacent to the panel storage cassette 508. System 500 is organized in a way that at every panel 512 loading cycle the panel 512 is transported under or over system 500, such that the measured thin layers remain in one plane. As the cassette 508 fills in by processed panels, system 500 slides as shown by arrow 516 along the manipulator 504 and cassette 508 such as to enable the panel to be transferred and controlled/scanned.
[0036] In some embodiments, as shown in FIG 6 the manipulator 504 may include more than one system 500 for thin film photovoltaic panel quality control. This increases the throughput of the quality control stations and enables higher sampling density. [0037] FIG 7 is a schematic illustration of a third exemplary embodiment of the present system for thin film photovoltaic panel quality control. It is known that almost every additional stage, and in particular a panel handling stage, may introduce defects into the sensitive thin films. In a photovoltaic panel batch production process substrates, or work in process panels, containing one or more thin layers and marked by numeral 700, are stacked in a panel storage cassette 704. There is a space 708 between panels 700 and defined thereby sufficient to enable a robotic arm to extend into the space and pick-up a panel. A thin film photovoltaic panel quality control system 712 may be organized on a distal end of a cantilever type robotic or manipulator arm 720 extending into the space 708 between panels 700, supported by 716 and providing linear movement to the quality control system 712. The manipulator can scan linearly in two horizontal axes to provide measurements of the whole panel surface or the width of system 712 may be the same as that of panel 700 in order to scan the whole panel in one axis. Arm 720 would move system 712 in a linear scanning movement along panel 700 as indicated by arrow 724, scanning the panel. In an additional embodiment, controller 730 may be programmed to enable a quality control sequence where system 712 shown in broken lines operates in a space 734 vacated by an extracted panel or substrate 700. Such process organization provides greater freedom in design and operation of the thin film photovoltaic panel quality control system 712. Throughput of the quality control system 712 may be further improved by including in system 712 multiple illumination and illumination detection units.
[0038] FIG 8 A is a schematic illustration of a variation of the third exemplary embodiment of the present system for thin film photovoltaic panel quality control employing multiple panel quality control systems 712 in multiple spaces 708 between panels, whereby the systems 712 scan multiple panels simultaneously. Such configuration significantly increases the through-put of a manufacturing line or station, where the system for thin film photovoltaic panel quality control is integrated. In addition to this as shown in FIG 8B, multiple systems 712 having adjacent fields of view may be located in the same space 708 and may be used to further increase the throughput of the system for thin film photovoltaic panel quality control.
[0039] The system for thin film photovoltaic panel quality control may be located in any one of the locations of the manufacturing station or arranged along a transport line (FIG IB). In the previous examples the quality control system was located near a process station or near a storage cassette. The system may also be located at the process end point station. [0040] When thin film photovoltaic panel manufacturing process is performed by stations arranged along a transport line it may require a large number of quality control systems to be located at each process station and integrated into the process by performing the quality control immediately at the end of each process. Selection of dedicated quality control system locations may reduce the number of quality control systems required and the associated cost.
[0041] FIG 9 is a schematic illustration of a quality control system located at a central location of a manufacturing process where different stations are arranged along a transport line. For example, numeral 900 marks a Plasma Enhanced Chemical Vapor Deposition (PECVD) stations cluster, numeral 904 marks Transparent Conductive Oxide (TCO) deposition stations cluster, numeral 908 marks laser scribing cluster, and numeral 912 marks other process stations required by the panel manufacture process. One or more thin film quality control systems 916 is located at a central location through which the partially processed panels are transported by a dedicated robotic or AGV transfer system 920. Systems 916 support all process steps and may be implemented as panel scanning systems (FIGS 3 through 6) or as cassette scanning systems (FIGS 7 and 8). The effect of all of the processes on the panel is measured immediately after completion of each of the processes. The throughput of such configuration may be easily increased by addition of quality control systems 916.
[0042] FIG 10 is a schematic illustration of a quality control system located at an end- point location of a manufacturing process where different stations are arranged along a transport line, or even system 916 may be located at the entrance of back-end of the line, for example, before station 1004 where front and back glass are joined together. In such a configuration system 916 measures an almost finished product and provides feedback to all of the previous process stations.
[0043] FIG 11 is a schematic illustration of a quality control system located at a central location of a manufacturing process where multiple different process stations 1112 are arranged along a transport line. A cassette station or stations 1110 interfaces between the dedicated robotic or AGV transfer system 1120, which travels along the central track 1122, and each process station 1112. Cassettes 1108 are transferred by transfer system 1120 between cassette stations 1110 and each process station receives panels for processing from its respective cassette station by robotic transfer (not shown). A thin film quality control system 1116 is located at a central location, also interfaced by a cassette station or stations, through which cassettes with partially or completely processed panels are transported by a dedicated robotic or AGV transfer system 1120. System 1116 supports all process steps and may be implemented as a panel scanning system (FIGS 3 through 6) or as a cassette scanning systems (FIGS 7 and 8). The effect of all of the processes on the panel can be measured immediately after completion of each of the processes. The throughput of such a configuration may be easily increased by addition of multiple quality control systems 1116. Additional types of systems, measuring different parameters of panels, can be placed at a central location similar to 1116.
44] A number of embodiments have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the method. Accordingly, other embodiments are within the scope of the following claims:

Claims

What is claimed is:
1. A system for thin film photovoltaic panel quality control and production process control in a batch manufacturing process, said system comprising:
- a panel illuminating unit operatively configured to illuminate at least a segment of the controlled thin film photovoltaic panel with broadband illumination and wherein the illumination provided by said unit is one of a group consisting of illumination in shape of a line or discrete illumination spots;
- a detector unit operatively configured to detect at least one interaction product of the illumination provided by the illumination unit and at least one of thin films of the photovoltaic panel;
- a robotic mechanism operative to provide a relative displacement between the panel and the panel illuminating unit and illumination detector unit; and
- a control unit operative to coordinate the quality control process with movements of at least a robotic mechanism, process at least one detected interaction product and derive at least one thin film parameter.
2. The system according to claim 1 further comprising a panel profiling unit operatively configured to generate a profile of the photovoltaic panel surface.
3. The system according to claim 1 wherein the robotic mechanism provides relative displacement between the panel and the panel illuminating unit and illumination detector unit positioning the panel in a vertical or horizontal orientation.
4. The system according to claim 1 wherein the control unit is operative to communicate to at least one production station at least one thin film parameter.
5. The system according to claim 1 further comprising a system located in at least one location selected from a group consisting of a location near a process station, a location near a cassette station, a location in a panel manipulator and at the process end point station.
6. The system according to claim 1 further employing transferring panels between production stations and cassettes.
7. A method for thin film photovoltaic panel quality control in a batch manufacturing process, said method comprising:
- providing a thin film photovoltaic panel, illuminating a segment of the thin film photovoltaic panel and detecting at least one interaction product between the illumination and at least one thin film at the illuminated segment of the photovoltaic panel;
- enabling relative displacement between the thin film photovoltaic panel and the illuminating and detecting units;
- profiling the photovoltaic panel and deriving photovoltaic panel shape compensation factors;
- processing the interaction product between the illumination and at least one thin film of the photovoltaic panel deriving panel shape compensation parameters;
- generating at least one thin film parameter; and
wherein the panel displacement speed is adjusted to enable variable sampling density of the panel.
8. The method according to claim 7 wherein illuminating a segment of the thin film photovoltaic panel includes at least one of a group consisting of line illumination and discrete point illumination.
9. The method according to claim 7 wherein illuminating a segment of the thin film photovoltaic panel means illuminating by broadband illumination.
10. The method according to claim 9 wherein said broadband illumination is operative in continuous or pulse mode.
11. The method according to claim 7 wherein also delivering a thin film photovoltaic panel in an orientation enabling panel quality control and wherein said relative displacement consists of vertical or horizontal panel orientation.
12. The method according to claim 11 wherein the relative displacement is performed by a robotic arm and wherein the robotic arm is operatively configured for loading and unloading of cassettes.
13. The method according to claim 7 wherein the panel displacement speed enabling reliable panel quality control is the speed determined by the data transfer rate.
14. The method according to claim 7 wherein the photovoltaic panel shape compensation factors are at least one of a group consisting of a machine specific factors and photovoltaic panel specific factors.
15. The method according to claim 7 wherein generating at least one thin film parameter includes at least one of a group of thin film parameters consisting of the thin film refractive index (n), thin film extinction coefficient (k), thin film surface roughness, spectrum and intensity of photoluminescence.
16. The method according to claim 7 further comprising extracting from the thin film characteristics process specific control parameters includes at least one of a group of parameters consisting of the energy gap, absorption, conductivity or crystallinity percentage.
17. A thin film photovoltaic panel quality control apparatus to evaluate the quality of thin film photovoltaic panels located in a storage cassette with a space between them, said apparatus comprising:
- multiple robotic arms with multiple illumination units and multiple illumination detection units assembled on the distal end of each of the arms and wherein the illumination units are operative to illuminate discrete locations on the panel and the illumination detection units are configured to detect illumination reflected from said panel;
- a photovoltaic panel profiling mechanism; and
- a controller coordinating the robotic arm movement, operation of the illumination unit and illumination detection unit.
18. The apparatus according to claim 17 wherein the external dimensions of the illumination unit, illumination detection unit and their assembly on the distal end of the robotic arm are smaller than the space between two neighboring panels located in said cassette.
19. The apparatus according to claim 17 wherein the distal end of said robotic arm extends into the space between two neighboring panels located in said cassette.
20. The apparatus according to claim 17 wherein the robotic arm is a three axis robotic arm.
21. The apparatus according to claim 17 wherein the illumination units and the illumination detection units extend along their respective scanning axes.
22. The apparatus according to claim 17 wherein the robotic arm has an operative and non- operative position.
23. The apparatus according to claim 17 wherein said robotic arms operative position is in the space between said panels.
24. The apparatus according to claim 17 wherein said photovoltaic panel profiling mechanism is an optical mechanism utilizing at least one of said illumination system and other distance measuring devices.
25. The apparatus according to claim 17wherein said photovoltaic panel profiling mechanism is a capacitance measuring mechanism.
26. A thin film photovoltaic panel quality control apparatus to measure thin film photovoltaic panels being a sub-station of a manufacturing station, said apparatus comprising:
- a panel manipulator operatively configured to deliver one or more panels from a substation or a cassette to a measurement unit; - a measurement unit including at least a panel illumination unit and an illumination detection unit;
- a panel profiling unit operatively configured to determine the relief of surface of the panel; and
- a control unit operatively configured to accept the illumination detection unit output, process it and determine at least one characteristic of the thin film photovoltaic panel.
27. The apparatus according to claim 26 wherein the panel manipulator is a robotic arm.
28. The apparatus according to claim 26 further comprising a panel manipulator with a movably attached measurement unit and a panel profiling unit.
29. The apparatus according to claim 26 whereby the measuring unit and panel profiling unit perform scanning of panels while they are being transferred by a panel manipulator.
30. A thin film photovoltaic panel quality control apparatus to measure thin film photovoltaic panels in a storage cassette with a space therebetween, said apparatus comprising:
a robotic arm operatively configured to load and unload the photovoltaic panels into and from said cassette, with assembled on the distal end of said arm an illumination unit operative to illuminate discrete locations on the panel and an illumination detection unit configured to detect illumination reflected from said panel;
- a photovoltaic panel profiling mechanism; and
a controller coordinating the robotic arm movement, operation of the illumination unit and illumination detection unit, and sequence of panels insertion and extraction from the cassette.
PCT/IL2010/000698 2009-08-31 2010-08-26 A method and apparatus for thin film quality control in a batch manufacturing layout WO2011024170A1 (en)

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