WO2011021548A1 - Flexurally vibrating actuator and force-feedback-equipped touch panel using same - Google Patents

Flexurally vibrating actuator and force-feedback-equipped touch panel using same Download PDF

Info

Publication number
WO2011021548A1
WO2011021548A1 PCT/JP2010/063610 JP2010063610W WO2011021548A1 WO 2011021548 A1 WO2011021548 A1 WO 2011021548A1 JP 2010063610 W JP2010063610 W JP 2010063610W WO 2011021548 A1 WO2011021548 A1 WO 2011021548A1
Authority
WO
WIPO (PCT)
Prior art keywords
touch panel
shim
vibrator
cushion layer
flexural vibration
Prior art date
Application number
PCT/JP2010/063610
Other languages
French (fr)
Japanese (ja)
Inventor
末冨喜子
面了明
甲斐義宏
渡津裕次
遠藤裕子
Original Assignee
日本写真印刷株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本写真印刷株式会社 filed Critical 日本写真印刷株式会社
Publication of WO2011021548A1 publication Critical patent/WO2011021548A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/016—Input arrangements with force or tactile feedback as computer generated output to the user
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Definitions

  • the present invention relates to a flexural vibration type actuator that is used in a touch panel, is small, lightweight, has high drop resistance, is thin and has improved productivity, and a touch panel with a tactile feedback function using the same.
  • Patent Document 1 Conventionally, there has been a configuration described in Patent Document 1 below as an invention of a small and lightweight flexural vibration type actuator used for a speaker such as a cellular phone.
  • the invention described in Patent Document 1 includes an elongated plate-like vibrator composed of a shim made of an elongated plate-like body and piezoelectric flexural vibration elements (piezo elements) attached to both the front and back surfaces of the shim, and the length of the vibrator.
  • a vibrator holding portion that holds one end or the central portion of the direction as a base side end portion, and a protective plate on the front surface of the display panel of the electronic device is applied to the bending vibration excited by the vibrator via the vibrator holding portion.
  • the vibrator holding unit In a flexural vibration type actuator that excites a flexural vibration to the diaphragm by transmitting to the diaphragm that also serves as the diaphragm, the vibrator holding unit is held and spaced apart below the vibrator, and the longitudinal direction of the vibrator It is the structure provided with the baseplate of the elongate plate-like body extended by (1).
  • Patent Document 1 when an electronic device such as a cellular phone in which this actuator is formed falls on a hard floor such as concrete, a piezoelectric flexural vibration element is formed by excessive flexural vibration of a vibrator generated by the impact. Since there is a possibility of breakage, measures for suppressing this excessive bending vibration are also disclosed. That is, an opening for vibration suppression is formed in a bent portion that stands upright from the tip of a base plate made of a long and thin rectangular metal plate, and the tip of the shim of the vibrator is inserted into the opening. This suppresses excessive bending vibration (hereinafter, this vibration suppression mechanism is referred to as a “stopper”).
  • the method of providing the stopper that suppresses excessive bending vibration of the vibrator is not a problem when used for speakers, but a tactile sensation is obtained by attaching a bending vibration type actuator to the back of the touch panel and vibrating the panel during input.
  • a new problem occurred. That is, a large load is applied to the touch panel body each time input is made to the touch panel.
  • the touch panel body bends due to the input load, there is a problem in that an unpleasant sound is generated due to interference between the tip of the vibrator of the actuator attached to the touch panel body and the opening of the base plate.
  • the base plate made of a metal plate is fixed to the touch panel with a length up to the tip of the vibrator, so that the allowable range of bending of the touch panel is limited, and the thickness of the base plate is further increased.
  • the height of the bent portion that stands upright from the tip is required to be a dimension that can serve as a stopper, there has been a problem that the total thickness of the actuator becomes thick and bulky.
  • an object of the present invention is to solve the above-described problems, and is a flexible and flexural vibration type actuator that is suitable for touch panel applications, is small, lightweight, has high drop resistance, is thin and has improved productivity, and the same.
  • the object is to provide a touch panel with a tactile feedback function.
  • the present invention provides a flexural vibration type actuator having the following configuration and a touch panel with a tactile feedback function using the same.
  • a vibrator comprising a shim comprising an elongated plate-like body and piezoelectric elements respectively attached to both the front and back surfaces of the shim, and one end or a central portion in the longitudinal direction of the shim at the base side end
  • a flexural vibration type actuator that includes a vibrator holding portion that is held as a portion and a cushion layer that is mounted on at least one surface of the piezoelectric element.
  • the flexural vibration type actuator according to the first aspect, wherein the cushion layer is provided only at a tip portion on the piezoelectric element.
  • a vibrator comprising a shim comprising an elongated plate-like body and piezoelectric elements respectively attached to both the front and back surfaces of the shim, and one end or a central portion in the longitudinal direction of the shim
  • a flexural vibration type actuator comprising a vibrator holding portion that is held as a side end portion, and a cushion layer that is attached to at least one side of the shim on the tip side of the piezo element and is thicker than the piezo element.
  • the flexural vibration actuator according to any one of the first to third aspects is provided at a predetermined position on the periphery of the back surface of the touch panel body with at least the surface of the cushion layer facing the touch panel body.
  • a touch panel with a tactile feedback function which is arranged on the opposite side and fixed by a vibrator holding part.
  • the flexural vibration type actuator of the present invention is characterized in that a high drop resistance is obtained without a stopper by providing the cushion layer. Since no stopper is provided, no unpleasant sound is generated even if the touch panel body is bent when inputting to the touch panel.
  • the actuator can be fixed to the touch panel body only by the vibrator holding portion, and there is an effect that the allowable range of bending of the touch panel is increased.
  • the frequency of the vibrator can be set to a desired low value by the weight of the cushion layer. This has the effect of improving movement.
  • FIG. 2 is a schematic perspective view of the flexural vibration type actuator of FIG. 1. It is sectional drawing which showed schematic structure of the other Example of the bending vibration type actuator of this invention.
  • FIG. 4 is a schematic perspective view of the flexural vibration type actuator of FIG. 3. It is sectional drawing which showed schematic structure of the other Example of the bending vibration type actuator of this invention.
  • FIG. 6 is a schematic perspective view of the flexural vibration type actuator of FIG. 5. It is the schematic of the touchscreen with a tactile feedback function using the vibration type actuator of this invention. It is sectional drawing which shows the example of a change of the cushion layer of this invention. It is a top view which shows the example of a change of the cushion layer of this invention.
  • the flexural vibration type actuator 1 is placed on the back surface of the touch panel main body 20 as shown in FIG. 7 in a touch panel with a tactile feedback function, and a casing, a liquid crystal display, etc. (not shown) are provided below the flexural vibration type actuator 1. Other parts are installed.
  • 7A is an exploded perspective view as viewed from the front surface side of the touch panel with tactile feedback function
  • FIG. 7B is a perspective view as viewed from the rear surface side of the touch panel with tactile feedback function.
  • the flexural vibration type actuator has a structure in which a shim 5 made of an elongated plate-like body, a vibrator comprising a piezo element 7 attached to both the front and back surfaces of the shim 5, and one end in the longitudinal direction of the shim 5 at the base side.
  • the vibrator holding unit 3 is held as an end.
  • the flexural vibration type actuator 1 of the present invention includes a cushion layer 10 attached on one of the piezoelectric elements 7 as shown in FIGS. 1 and 2, and the cushion layer 10 faces the touch panel body 20. It is arranged on the side opposite to the surface and fixed by the vibrator holding part 3.
  • the material of the cushion layer 10 examples include various thermoplastic elastomers, rubber resins such as butadiene, silicon, and urethane.
  • the thickness of the cushion layer 10 can be appropriately set in the range of 5 to 3000 ⁇ m. If the thickness is less than 5 ⁇ m, the function of absorbing impact cannot be exhibited, and if the thickness exceeds 3000 ⁇ m, the processing becomes bulky and difficult. For thin films, printing, painting, coating, etc. are suitable for thin films, and for thick films, potting or casting is used.
  • the cushion layer 10 may be formed so as to cover the entire surface of the piezo element 7 as shown in FIGS. 1 and 2, or may cover a part of the piezo element 7 as shown in FIGS. Also good. In the case of covering a part, it is preferable to use a tip part away from the vibrator holding part 3. This is because the frequency at which the vibrator vibrates is lowered by the weight of the cushion layer 10 installed at the distal end, and can be easily converted to a desired low frequency.
  • the cushion layer 10 may be attached to one side of the shim 5 on the front side of the piezo element 7 without covering the piezo element 7 as shown in FIGS. 5 and 6.
  • the thickness of the cushion layer 10 needs to be thicker than that of the piezo element 7 so that other components such as a casing and a liquid crystal display may hit the cushion layer 10 before the piezo element 7.
  • the cushion layer 10 may not be provided with a uniform thickness.
  • a part of the surface may protrude as shown in FIG. 8A, or an uneven surface may be formed as shown in FIG. Since the moment of contact comes in contact with a point or a part instead of a full contact, the impact can be absorbed gently.
  • the cushion layer 10 may be divided into a plurality of pieces. For example, they may be arranged as shown in FIG. 9A or arranged concentrically as shown in FIG. 9B. Also in these cases, since the moment of contact is partial contact instead of full contact, the impact can be absorbed gently.
  • the cushion layer 10 is disposed only on the side opposite to the surface facing the touch panel body 20 in FIGS. 1 to 6, it may be disposed on the surface facing the touch panel body 20 in addition. In this case, an effect that interference with the touch panel body 20 can be prevented is obtained.
  • the shock absorbing piece of Patent Document 1 absorbs the shock generated when the tip of the shim collides with the inner periphery of the opening of the base plate, and collides with other parts such as a casing and a liquid crystal display as in the present invention. It is different from the one that absorbs the impact generated by this and prevents the piezo element 7 from being damaged. Therefore, the thickness of the shock absorbing piece of Patent Document 1 is not limited.
  • the vibrator holding part 3 is made of a columnar body made of a molding resin such as acrylic, styrene, or polypropylene, and the base side end of the shim 5 is a narrow slit with a rectangular cross section formed inside the vibrator holding part 3. It is press-fitted inside.
  • the shim 5 is made of a metal plate made of stainless steel, aluminum alloy, nickel alloy or the like having a width of about 2 to 6 mm, a length of about 1 to 5 cm, and a thickness of about 0.1 to 1.0 mm.
  • Examples of the piezoelectric element 7 include a laminate in which a plurality of piezoelectric ceramic thin plates such as barium titanate are sandwiched between electrode layers.
  • the flexural vibration excited by the vibrator is transmitted from the vibrator holding unit 3 to the touch panel body 20. Since the tactile sensation is fed back by vibrating the touch panel body 20 during input, an input sensation can be obtained.
  • a distributed vibration mode (DM) speaker can be formed on the touch panel body 20.
  • the flexural vibration type actuator 1 As a method of attaching the flexural vibration type actuator 1 to the back surface of the touch panel body 20, there can be mentioned a method of attaching with an adhesive layer or a double-sided tape layer interposed.
  • the base material of the touch panel body 20 is a resin film such as polyester, acrylic, or polycarbonate
  • the flexural vibration type actuator as in the conventional patent document 1 is too rigid when the base plate is firmly bonded, and the touch panel may be bent. become unable.
  • the flexural vibration type actuator 1 of the present invention since it is fixed by the vibrator holding unit 3, it can follow the touch panel body 20 while maintaining the adhesiveness.
  • a flexural vibration type actuator configured to form a vibrator in the form of a cantilever on both sides in the longitudinal direction of the vibrator holding part, or a form in which the central part in the longitudinal direction of the vibrator is fixed by the vibrator holding part.
  • the present invention can also be applied to a flexural vibration type actuator.
  • a piezo element with a total thickness of about 0.3 mm was bonded to both sides of a shim made of stainless steel with a width of 3 mm, a length of 3 cm, and a thickness of 0.2 mm, with a barium titanate sheet sandwiched between electrode layers. After applying and curing a silicone rubber-based resin liquid to the thickness of 0.2 mm as one of the above-mentioned cushion layers on one side of the piezo, the shim is attached to the vibrator holding portion to bend and vibrate An actuator was obtained.
  • the obtained flexural vibration type actuator was excellent in drop resistance without providing a stopper. And after pasting on the touch panel, even if the touch panel was bent, no unpleasant sound was generated.
  • a 0.2 mm thick urethane rubber liquid was potted as the cushion layer on the tip of one side of the piezo, and the shim was attached to the vibrator holding part and bent.
  • a vibration type actuator was obtained.
  • the obtained flexural vibration type actuator was excellent in drop resistance without providing a stopper. And after pasting on the touch panel, even if the touch panel was bent, no unpleasant sound was generated.
  • a section of a thermoplastic urethane elastomer sheet having a thickness of 0.4 mm and a 2 mm square was attached as a cushion layer to at least one side of the tip of the shim, and then the shim was attached.
  • a bending vibration type actuator was obtained by attaching to the vibrator holding part.
  • the obtained flexural vibration type actuator was excellent in drop resistance without providing a stopper. And after pasting on the touch panel, even if the touch panel was bent, no unpleasant sound was generated.
  • this flexural vibration type actuator can reduce the frequency of the vibrator to a desired low value by the weight of the cushion layer, and the movement at the low frequency is improved.

Abstract

Disclosed is a small, thin, lightweight flexurally vibrating actuator that is suitable for use in a touch panel, is resistant to damage from falling, and provides improved yield. Also disclosed is a force-feedback-equipped touch panel using the aforementioned flexurally vibrating actuator. The disclosed flexurally vibrating actuator (1) is provided with: an oscillator comprising a long, thin, plate-shaped shim (5) and piezo elements (7) mounted on the top and bottom surfaces of said shim (5); an oscillator retention part (3) that holds either one end of the shim (5) in the long direction thereof or the middle area of the shim (5); and a cushion layer (10) mounted on at least one of the aforementioned piezo elements (7). The oscillator retention part (3) affixes the flexurally vibrating actuator (1) to the provided force-feedback-equipped touch panel at a prescribed location on the rim of the back surface of a touch panel body (20), and the aforementioned cushion layer (10) is disposed on at least the side of the shim opposite the side facing the touch panel body (20).

Description

撓み振動型アクチュエータ及びこれを用いた触感フィードバック機能付タッチパネルFlexural vibration type actuator and touch panel with tactile feedback function using the same
　本発明は、タッチパネルに使用する小型、軽量で落下耐性が高く、薄型化・生産性を向上した撓み振動型アクチュエータ及びこれを用いた触感フィードバック機能付タッチパネルに関する。 [Technical Field] The present invention relates to a flexural vibration type actuator that is used in a touch panel, is small, lightweight, has high drop resistance, is thin and has improved productivity, and a touch panel with a tactile feedback function using the same.
　従来、携帯電話器などのスピーカーに使用される小型、軽量である撓み振動型アクチュエータの発明として下記の特許文献１に記載された構成のものがあった。特許文献１に記載の発明は、細長板状体から成るシムおよびこのシムの表裏両面に取付けられた圧電撓み振動素子(ピエゾ素子)から成る細長板状体の振動子と、この振動子の長手方向の片端または中央部分を根元側端部として保持する振動子保持部とを備え、前記振動子に励振された撓み振動を前記振動子保持部を介して電子機器の表示パネル前面の保護板を兼ねる振動板に伝達することによってこの振動板に撓み振動を励振する撓み振動型アクチュエータにおいて、前記振動子保持部を保持しかつ前記振動子の下方に離間して配置され、この振動子の長手方向に延長される細長板状体のベースプレートを備える構成である。 Conventionally, there has been a configuration described in Patent Document 1 below as an invention of a small and lightweight flexural vibration type actuator used for a speaker such as a cellular phone. The invention described in Patent Document 1 includes an elongated plate-like vibrator composed of a shim made of an elongated plate-like body and piezoelectric flexural vibration elements (piezo elements) attached to both the front and back surfaces of the shim, and the length of the vibrator. A vibrator holding portion that holds one end or the central portion of the direction as a base side end portion, and a protective plate on the front surface of the display panel of the electronic device is applied to the bending vibration excited by the vibrator via the vibrator holding portion. In a flexural vibration type actuator that excites a flexural vibration to the diaphragm by transmitting to the diaphragm that also serves as the diaphragm, the vibrator holding unit is held and spaced apart below the vibrator, and the longitudinal direction of the vibrator It is the structure provided with the baseplate of the elongate plate-like body extended by (1).
　そして、特許文献１には、このアクチュエータが形成された携帯電話器などの電子機器がコンクリートなどの硬い床に落下した場合、その衝撃によって発生する振動子の過大な撓み振動によって圧電撓み振動素子が破損するおそれがあるため、この過大な撓み振動を抑制する対策も開示されている。すなわち、細長くて薄い矩形状の金属板で構成されるベースプレートの先端から直立する折り曲げ部分には振動抑制用の開口が形成されており、当該開口内に前記振動子のシムの先端部が挿入されることで過大な撓み振動を抑制する（以下、この振動抑制機構を「ストッパー」と呼ぶ）。 In Patent Document 1, when an electronic device such as a cellular phone in which this actuator is formed falls on a hard floor such as concrete, a piezoelectric flexural vibration element is formed by excessive flexural vibration of a vibrator generated by the impact. Since there is a possibility of breakage, measures for suppressing this excessive bending vibration are also disclosed. That is, an opening for vibration suppression is formed in a bent portion that stands upright from the tip of a base plate made of a long and thin rectangular metal plate, and the tip of the shim of the vibrator is inserted into the opening. This suppresses excessive bending vibration (hereinafter, this vibration suppression mechanism is referred to as a “stopper”).
特開２００８－２５２８７８号公報JP 2008-252878 A
　しかし、振動子の過大な撓み振動を抑制する前記ストッパーを設ける方法は、スピーカー用途に用いる場合は問題がないが、タッチパネルの裏面に撓み振動型アクチュエータを取り付け、入力時にパネルを振動させ入力した触感を得る用途に用いると、新たな問題が発生した。すなわち、タッチパネルに入力する際には、その度に大きな荷重がタッチパネル本体に加わる。この入力荷重によりタッチパネル本体が撓むとき、タッチパネル本体に取付けられたアクチュエータの前記振動子の先端部と前記ベースプレートの開口とが干渉し、不快な音が発生する問題があった。 However, the method of providing the stopper that suppresses excessive bending vibration of the vibrator is not a problem when used for speakers, but a tactile sensation is obtained by attaching a bending vibration type actuator to the back of the touch panel and vibrating the panel during input. When it was used for the purpose of obtaining, a new problem occurred. That is, a large load is applied to the touch panel body each time input is made to the touch panel. When the touch panel body bends due to the input load, there is a problem in that an unpleasant sound is generated due to interference between the tip of the vibrator of the actuator attached to the touch panel body and the opening of the base plate.
　また、ストッパーを設けると、金属板で構成される前記ベースプレートが前記振動子の先端部までの長さでタッチパネルに固定されるため当該タッチパネルの曲げの許容範囲に制限が加わり、さらに前記ベースプレートの厚みやその先端から直立する折り曲げ部分の高さがストッパーの役割を果せる寸法で必要なためアクチュエータの総厚が厚くなってかさばる問題があった。 Further, when a stopper is provided, the base plate made of a metal plate is fixed to the touch panel with a length up to the tip of the vibrator, so that the allowable range of bending of the touch panel is limited, and the thickness of the base plate is further increased. In addition, since the height of the bent portion that stands upright from the tip is required to be a dimension that can serve as a stopper, there has been a problem that the total thickness of the actuator becomes thick and bulky.
　また、このようなストッパーを一個ずつ設けていくことは大変な手間になり生産性低下の原因になる問題もあった。 Also, providing such stoppers one by one was very laborious and had the problem of reducing productivity.
　したがって、本発明の目的は、前記課題を解決することにあって、タッチパネル用途に適し、小型、軽量で落下耐性が高く、薄型化・生産性を向上した撓み撓み振動型アクチュエータ及びこれを用いた触感フィードバック機能付タッチパネルを提供することにある。 Accordingly, an object of the present invention is to solve the above-described problems, and is a flexible and flexural vibration type actuator that is suitable for touch panel applications, is small, lightweight, has high drop resistance, is thin and has improved productivity, and the same. The object is to provide a touch panel with a tactile feedback function.
　本発明は、前記技術的課題を解決するために、以下の構成の撓み振動型アクチュエータ及びこれを用いた触感フィードバック機能付タッチパネルを提供する。 In order to solve the technical problem, the present invention provides a flexural vibration type actuator having the following configuration and a touch panel with a tactile feedback function using the same.
　本発明の第１態様によれば、細長い板状体から成るシム及び当該シムの表裏両面に各々取付けられたピエゾ素子からなる振動子と、前記シムの長手方向の片端または中央部分を根元側端部として保持する振動子保持部と、少なくとも片面の前記ピエゾ素子上に取付けられたクッション層を備えた、撓み振動型アクチュエータを提供する。 According to the first aspect of the present invention, a vibrator comprising a shim comprising an elongated plate-like body and piezoelectric elements respectively attached to both the front and back surfaces of the shim, and one end or a central portion in the longitudinal direction of the shim at the base side end Provided is a flexural vibration type actuator that includes a vibrator holding portion that is held as a portion and a cushion layer that is mounted on at least one surface of the piezoelectric element.
　また、本発明の第２態様によれば、前記クッション層が前記ピエゾ素子上の先端部のみに設けられている、第１態様の撓み振動型アクチュエータを提供する。 Also, according to the second aspect of the present invention, there is provided the flexural vibration type actuator according to the first aspect, wherein the cushion layer is provided only at a tip portion on the piezoelectric element.
　また、本発明の第３態様によれば、細長い板状体から成るシム及び当該シムの表裏両面に各々取付けられたピエゾ素子からなる振動子と、前記シムの長手方向の片端または中央部分を根元側端部として保持する振動子保持部と、前記シムの少なくとも片面に前記ピエゾ素子よりも先端側に取付けられ、前記ピエゾ素子よりも厚みのあるクッション層を備えた、撓み振動型アクチュエータを提供する。 Further, according to the third aspect of the present invention, a vibrator comprising a shim comprising an elongated plate-like body and piezoelectric elements respectively attached to both the front and back surfaces of the shim, and one end or a central portion in the longitudinal direction of the shim Provided is a flexural vibration type actuator comprising a vibrator holding portion that is held as a side end portion, and a cushion layer that is attached to at least one side of the shim on the tip side of the piezo element and is thicker than the piezo element. .
　また、本発明の第４態様によれば、タッチパネル本体の裏面周縁の所定箇所に、第１～３態様のいずれかの撓み振動型アクチュエータが、前記クッション層を少なくとも前記タッチパネル本体と対向する面とは反対側に配置し、振動子保持部にて固定された触感フィードバック機能付タッチパネルを提供する。 According to the fourth aspect of the present invention, the flexural vibration actuator according to any one of the first to third aspects is provided at a predetermined position on the periphery of the back surface of the touch panel body with at least the surface of the cushion layer facing the touch panel body. Provides a touch panel with a tactile feedback function which is arranged on the opposite side and fixed by a vibrator holding part.
　本発明の撓み振動型アクチュエータは、前記クッション層を設けることにより、ストッパー無しで高い落下耐性を得ることを特徴とする。ストッパーを設けないので、タッチパネルに入力する際にタッチパネル本体に撓みが生じても不快な音は発生しない。 The flexural vibration type actuator of the present invention is characterized in that a high drop resistance is obtained without a stopper by providing the cushion layer. Since no stopper is provided, no unpleasant sound is generated even if the touch panel body is bent when inputting to the touch panel.
　また、ストッパーを設けないので、アクチュエータを前記振動子保持部だけでタッチパネル本体に固定することができ、タッチパネルの曲げの許容範囲が大きくなる効果がある。 Also, since the stopper is not provided, the actuator can be fixed to the touch panel body only by the vibrator holding portion, and there is an effect that the allowable range of bending of the touch panel is increased.
　さらに、前記クッション層を設けるだけなので、ストッパーを設ける従来技術と比べてアクチュエータの総厚を薄くできる効果がある。 Furthermore, since only the cushion layer is provided, there is an effect that the total thickness of the actuator can be reduced as compared with the conventional technique in which a stopper is provided.
　また、本発明の撓み振動型アクチュエータは、振動子の先端部のみに前記クッション層を設けた場合、クッション層の重みによって振動子の周波数を所望の低い値にすることができ、低い周波数での動きが良くなる効果がある。 Further, in the flexural vibration type actuator of the present invention, when the cushion layer is provided only at the tip portion of the vibrator, the frequency of the vibrator can be set to a desired low value by the weight of the cushion layer. This has the effect of improving movement.
本発明の撓み振動型アクチュエータの一実施例の概略構成を示した断面図である。It is sectional drawing which showed schematic structure of one Example of the bending vibration type actuator of this invention. 図１の撓み振動型アクチュエータの概略斜視図である。FIG. 2 is a schematic perspective view of the flexural vibration type actuator of FIG. 1. 本発明の撓み振動型アクチュエータの他の実施例の概略構成を示した断面図である。It is sectional drawing which showed schematic structure of the other Example of the bending vibration type actuator of this invention. 図３の撓み振動型アクチュエータの概略斜視図である。FIG. 4 is a schematic perspective view of the flexural vibration type actuator of FIG. 3. 本発明の撓み振動型アクチュエータの他の実施例の概略構成を示した断面図である。It is sectional drawing which showed schematic structure of the other Example of the bending vibration type actuator of this invention. 図５の撓み振動型アクチュエータの概略斜視図である。FIG. 6 is a schematic perspective view of the flexural vibration type actuator of FIG. 5. 本発明の振動型アクチュエータを用いた触感フィードバック機能付タッチパネルの概略図である。It is the schematic of the touchscreen with a tactile feedback function using the vibration type actuator of this invention. 本発明のクッション層の変化例を示す断面図である。It is sectional drawing which shows the example of a change of the cushion layer of this invention. 本発明のクッション層の変化例を示す平面図である。It is a top view which shows the example of a change of the cushion layer of this invention.
　以下、本発明の最良の実施の形態について、図面を参照しながら説明する。 Hereinafter, the best mode of the present invention will be described with reference to the drawings.
　撓み振動型アクチュエータ１は、触感フィードバック機能付タッチパネルにおいて図７のようにタッチパネル本体２０の裏面に載置されるものであり、当該撓み振動型アクチュエータ１の下には図示しない筐体や液晶ディスプレイなどの他の部品が設置される。なお、図７中の（ａ）は触感フィードバック機能付タッチパネルの表面側から見た分解斜視図であり、（ｂ）は触感フィードバック機能付タッチパネルの裏面側からみた斜視図である。撓み振動型アクチュエータの構成は、一般に、細長い板状体から成るシム５及び当該シム５の表裏両面に各々取付けられたピエゾ素子７からなる振動子と、前記シム５の長手方向の片端を根元側端部として保持する振動子保持部３とを備えるものである。そして、本発明の撓み振動型アクチュエータ１では、図１および図２に示すように一方の前記ピエゾ素子７上に取付けられたクッション層１０を備え、当該クッション層１０を前記タッチパネル本体２０と対向する面とは反対側に配置して振動子保持部３にて固定されている。したがって、このアクチュエータが形成された携帯電話器などの電子機器がコンクリートなどの硬い床に落下した場合に、その衝撃によって振動子が過大に振動して筐体や液晶ディスプレイなどの他の部品に当たっても、振動子が筐体や部品と当るときの衝撃をクッション層１０が吸収して和らげるため振動子のピエゾ素子７が破損されることはない。 The flexural vibration type actuator 1 is placed on the back surface of the touch panel main body 20 as shown in FIG. 7 in a touch panel with a tactile feedback function, and a casing, a liquid crystal display, etc. (not shown) are provided below the flexural vibration type actuator 1. Other parts are installed. 7A is an exploded perspective view as viewed from the front surface side of the touch panel with tactile feedback function, and FIG. 7B is a perspective view as viewed from the rear surface side of the touch panel with tactile feedback function. In general, the flexural vibration type actuator has a structure in which a shim 5 made of an elongated plate-like body, a vibrator comprising a piezo element 7 attached to both the front and back surfaces of the shim 5, and one end in the longitudinal direction of the shim 5 at the base side. The vibrator holding unit 3 is held as an end. The flexural vibration type actuator 1 of the present invention includes a cushion layer 10 attached on one of the piezoelectric elements 7 as shown in FIGS. 1 and 2, and the cushion layer 10 faces the touch panel body 20. It is arranged on the side opposite to the surface and fixed by the vibrator holding part 3. Therefore, when an electronic device such as a mobile phone on which this actuator is formed falls on a hard floor such as concrete, even if the vibrator vibrates excessively due to the impact and hits other parts such as a housing or a liquid crystal display Since the cushion layer 10 absorbs and softens the impact when the vibrator hits the casing or parts, the piezoelectric element 7 of the vibrator is not damaged.
　クッション層１０の材質としては、各種熱可塑性エラストマー、ブタジエン、シリコン、ウレタンなどのゴム系の樹脂が挙げられる。クッション層１０の厚みは５～３０００μｍの範囲で適宜設定可能である。５μｍ未満では衝撃を吸収する機能が発揮できなくなり、３０００μｍを越える厚みではかさばって加工が困難となる。形成方法としては、薄膜の場合は印刷・塗装・コーティングなどの方法が適しており、厚膜の場合はポッティングや注型したものを貼付する方法が適している Examples of the material of the cushion layer 10 include various thermoplastic elastomers, rubber resins such as butadiene, silicon, and urethane. The thickness of the cushion layer 10 can be appropriately set in the range of 5 to 3000 μm. If the thickness is less than 5 μm, the function of absorbing impact cannot be exhibited, and if the thickness exceeds 3000 μm, the processing becomes bulky and difficult. For thin films, printing, painting, coating, etc. are suitable for thin films, and for thick films, potting or casting is used.
　なお、クッション層１０は、図１及び図２に示すようにピエゾ素子７を全面覆うように形成してもよいし、図３及び図４に示すようにピエゾ素子７の一部分を覆うようにしてもよい。一部分を覆うようにする場合には、振動子保持部３から離れた先端部にするほうが好ましい。先端部に設置されたクッション層１０の重みによって振動子の振動する周波数が低くなり、所望とする低い周波数に変換しやすくなるためである。 The cushion layer 10 may be formed so as to cover the entire surface of the piezo element 7 as shown in FIGS. 1 and 2, or may cover a part of the piezo element 7 as shown in FIGS. Also good. In the case of covering a part, it is preferable to use a tip part away from the vibrator holding part 3. This is because the frequency at which the vibrator vibrates is lowered by the weight of the cushion layer 10 installed at the distal end, and can be easily converted to a desired low frequency.
　また、クッション層１０は、シム５の片面に、図５及び図６に示すようにピエゾ素子７を覆わないで前記ピエゾ素子７よりも先端側に取付けられていてもよい。ただし、ピエゾ素子７よりも先にクッション層１０に筐体や液晶ディスプレイなどの他の部品が当たるよう、クッション層１０の厚みはピエゾ素子７よりも厚くする必要がある。 Further, the cushion layer 10 may be attached to one side of the shim 5 on the front side of the piezo element 7 without covering the piezo element 7 as shown in FIGS. 5 and 6. However, the thickness of the cushion layer 10 needs to be thicker than that of the piezo element 7 so that other components such as a casing and a liquid crystal display may hit the cushion layer 10 before the piezo element 7.
　また、クッション層１０は、均一な厚みで設けなくてもよい。例えば、図８（ａ）に示すように表面の一部が突出していてもよいし、図８（ｂ）に示すように凹凸表面を形成してもよい。接触の瞬間が全面接触でなく点又は部分で接触するので、衝撃を緩やかに吸収することができる。 Further, the cushion layer 10 may not be provided with a uniform thickness. For example, a part of the surface may protrude as shown in FIG. 8A, or an uneven surface may be formed as shown in FIG. Since the moment of contact comes in contact with a point or a part instead of a full contact, the impact can be absorbed gently.
　また、クッション層１０は、複数個に分割して設けてもよい。例えば、図９（ａ）に示すように並べたり、図９（ｂ）に示すように同心円状に配置してもよい。これらの場合も、接触の瞬間が全面接触でなく部分接触するので、衝撃を緩やかに吸収することができる。 Further, the cushion layer 10 may be divided into a plurality of pieces. For example, they may be arranged as shown in FIG. 9A or arranged concentrically as shown in FIG. 9B. Also in these cases, since the moment of contact is partial contact instead of full contact, the impact can be absorbed gently.
　また、クッション層１０は、図１～６においてタッチパネル本体２０と対向する面とは反対側のみに配置しているが、加えてタッチパネル本体２０と対向する面にも配置してもよい。この場合、タッチパネル本体２０との干渉を防止することができるという効果が得られる。 Further, although the cushion layer 10 is disposed only on the side opposite to the surface facing the touch panel body 20 in FIGS. 1 to 6, it may be disposed on the surface facing the touch panel body 20 in addition. In this case, an effect that interference with the touch panel body 20 can be prevented is obtained.
　なお、振動子のシムの先端部に衝撃を吸収しシムの破損を回避する衝撃吸収片を設けることは特許文献１にも若干記載はされているが、本発明とは異なる。特許文献１の衝撃吸収片はシムの先端がベースプレートの開口内周部に衝突することにより発生する衝撃を吸収するのであって、本発明のような筐体や液晶ディスプレイなどの他の部品に衝突することにより発生する衝撃を吸収してピエゾ素子７の破損を防ぐものとは異なる。したがって、特許文献１の衝撃吸収片では厚みの限定はされていない。 It should be noted that providing a shock absorbing piece that absorbs shock and avoids damage to the shim at the tip of the shim of the vibrator is slightly described in Patent Document 1, but is different from the present invention. The shock absorbing piece of Patent Document 1 absorbs the shock generated when the tip of the shim collides with the inner periphery of the opening of the base plate, and collides with other parts such as a casing and a liquid crystal display as in the present invention. It is different from the one that absorbs the impact generated by this and prevents the piezo element 7 from being damaged. Therefore, the thickness of the shock absorbing piece of Patent Document 1 is not limited.
　振動子保持部３はアクリル、スチレン、ポリプロピレンなどの成形樹脂を材質とする柱状体から成り、シム５の根元側端部がこの振動子保持部３の内部に形成された矩形断面の細いスリットの内部に圧入される。 The vibrator holding part 3 is made of a columnar body made of a molding resin such as acrylic, styrene, or polypropylene, and the base side end of the shim 5 is a narrow slit with a rectangular cross section formed inside the vibrator holding part 3. It is press-fitted inside.
　シム５は、幅が２～６ｍｍ程度、長さが１～５ｃｍ程度、厚みが０．１～１．０ｍｍ程度のステンレス鋼やアルミ合金、ニッケル合金などを材質とする金属板からなる。 The shim 5 is made of a metal plate made of stainless steel, aluminum alloy, nickel alloy or the like having a width of about 2 to 6 mm, a length of about 1 to 5 cm, and a thickness of about 0.1 to 1.0 mm.
　ピエゾ素子７は、チタン酸バリウムなどの圧電セラミックの薄板を電極層で挟みながら複数枚積層したものが挙げられる。シム５の表裏両面にピエゾ素子７，７を各々取付ける方法としては、エポキシ系接着剤などにより接着する方法が挙げられる。両ピエゾ素子７，７に交流の動作電力を供給することにより反りを生じ、振動子が振動する。 Examples of the piezoelectric element 7 include a laminate in which a plurality of piezoelectric ceramic thin plates such as barium titanate are sandwiched between electrode layers. As a method of attaching the piezo elements 7 and 7 to both the front and back surfaces of the shim 5, there is a method of adhering with an epoxy adhesive or the like. By supplying AC operating power to both piezo elements 7, 7, warpage occurs, and the vibrator vibrates.
　振動子に励振された撓み振動は、振動子保持部３からタッチパネル本体２０に伝達される。入力時にタッチパネル本体２０を振動させることにより触感がフィードバックされるので、入力感を得ることができる。また、撓み振動型アクチュエータ１の取付け位置を精緻に計算して設計することによって、タッチパネル本体２０で分布振動モード（ＤＭ：Ｄｉｓｔｒｉｂｕｔｅｄ　Ｍｏｄｅ）方式のスピーカーを形成することもできる。 The flexural vibration excited by the vibrator is transmitted from the vibrator holding unit 3 to the touch panel body 20. Since the tactile sensation is fed back by vibrating the touch panel body 20 during input, an input sensation can be obtained. In addition, by precisely calculating and designing the mounting position of the flexural vibration type actuator 1, a distributed vibration mode (DM) speaker can be formed on the touch panel body 20.
　タッチパネル本体２０の裏面に撓み振動型アクチュエータ１を取付ける方法としては、粘着剤層や両面テープ層などを介在させて貼り付ける方法が挙げられる。タッチパネル本体２０の基材がポリエステルやアクリル、ポリカーボネートなどの樹脂フィルムの場合、従来の特許文献１のような撓み振動型アクチュエータではベースプレートにて強固に接着すると剛性が強くなり過ぎ、タッチパネルを曲げることができなくなる。これに対して、本発明の撓み振動型アクチュエータ１では、振動子保持部３にて固定されるため、接着性を保持したままタッチパネル本体２０に追随することができる。 As a method of attaching the flexural vibration type actuator 1 to the back surface of the touch panel body 20, there can be mentioned a method of attaching with an adhesive layer or a double-sided tape layer interposed. When the base material of the touch panel body 20 is a resin film such as polyester, acrylic, or polycarbonate, the flexural vibration type actuator as in the conventional patent document 1 is too rigid when the base plate is firmly bonded, and the touch panel may be bent. become unable. On the other hand, in the flexural vibration type actuator 1 of the present invention, since it is fixed by the vibrator holding unit 3, it can follow the touch panel body 20 while maintaining the adhesiveness.
 以上、振動子の一端を保持する片持ち梁の形式の振動子を使用する構造について例示した。しかしながら、片持ち梁の形式の振動子を、振動子保持部の長手方向の両側に形成する構成の撓み振動型アクチュエータや、振動子の長手方向への中央部分を振動子保持部によって固定する形式の撓み振動型アクチュエータにも本発明を適用することができる。 Above, the structure using the cantilever type vibrator that holds one end of the vibrator is illustrated. However, a flexural vibration type actuator configured to form a vibrator in the form of a cantilever on both sides in the longitudinal direction of the vibrator holding part, or a form in which the central part in the longitudinal direction of the vibrator is fixed by the vibrator holding part. The present invention can also be applied to a flexural vibration type actuator.
　幅が３ｍｍ、長さが３ｃｍ、厚さ０．２ｍｍのステンレス鋼からなるシムの両面に、チタン酸バリウム薄板を電極層で挟みながら複数枚積層した総厚み０．３ｍｍ程度のピエゾ素子を接着して設けた後、該ピエゾの片面に前記したクッション層として厚さが０．２ｍｍになるようシリコンゴム系樹脂液を塗布し硬化させた後、該シムを振動子保持部に取り付けて撓み振動型アクチュエータを得た。 A piezo element with a total thickness of about 0.3 mm was bonded to both sides of a shim made of stainless steel with a width of 3 mm, a length of 3 cm, and a thickness of 0.2 mm, with a barium titanate sheet sandwiched between electrode layers. After applying and curing a silicone rubber-based resin liquid to the thickness of 0.2 mm as one of the above-mentioned cushion layers on one side of the piezo, the shim is attached to the vibrator holding portion to bend and vibrate An actuator was obtained.
　得られた撓み振動型アクチュエータは、ストッパーを設けずとも落下耐性に優れたものであった。そして、タッチパネルに貼り付けた後、タッチパネルに撓みが生じても不快な音は発生しなかった。 The obtained flexural vibration type actuator was excellent in drop resistance without providing a stopper. And after pasting on the touch panel, even if the touch panel was bent, no unpleasant sound was generated.
　幅が２．５ｍｍ、長さが２．５ｃｍ、厚さ０．２ｍｍのニッケル合金からなるシムの両面に、チタン酸バリウム薄板を電極層で挟みながら複数枚積層した総厚み０．３ｍｍ程度のピエゾ素子を実施例１と同様に設けた後、該ピエゾの片面の先端部に前記したクッション層として厚さ０．２ｍｍのウレタンゴム液をポッティングした後、該シムを振動子保持部に取り付けて撓み振動型アクチュエータを得た。 A piezo with a total thickness of about 0.3 mm in which a plurality of barium titanate thin plates are sandwiched between electrode layers on both sides of a shim made of a nickel alloy having a width of 2.5 mm, a length of 2.5 cm, and a thickness of 0.2 mm. After the element was provided in the same manner as in Example 1, a 0.2 mm thick urethane rubber liquid was potted as the cushion layer on the tip of one side of the piezo, and the shim was attached to the vibrator holding part and bent. A vibration type actuator was obtained.
　得られた撓み振動型アクチュエータは、ストッパーを設けずとも落下耐性に優れたものであった。そして、タッチパネルに貼り付けた後、タッチパネルに撓みが生じても不快な音は発生しなかった。 The obtained flexural vibration type actuator was excellent in drop resistance without providing a stopper. And after pasting on the touch panel, even if the touch panel was bent, no unpleasant sound was generated.
　幅が２．５ｍｍ、長さが３ｃｍ、厚さ０．２ｍｍのステンレス鋼からなるシムの両面に、チタン酸バリウム薄板を電極層で挟みながら複数枚積層した総厚み０．３ｍｍ程度のピエゾ素子を実施例１と同様に設けた後、前記シムの先端の少なくとも片方の側に前記したクッション層として厚さ０．４ｍｍで２ｍｍ角の熱可塑性ウレタンエラストマーシートの切片を貼り付けした後、該シムを振動子保持部に取り付けて撓み振動型アクチュエータを得た。 A piezo element having a total thickness of about 0.3 mm, in which a plurality of barium titanate thin plates are sandwiched between electrode layers on both sides of a shim made of stainless steel having a width of 2.5 mm, a length of 3 cm, and a thickness of 0.2 mm. After being provided in the same manner as in Example 1, a section of a thermoplastic urethane elastomer sheet having a thickness of 0.4 mm and a 2 mm square was attached as a cushion layer to at least one side of the tip of the shim, and then the shim was attached. A bending vibration type actuator was obtained by attaching to the vibrator holding part.
　得られた撓み振動型アクチュエータは、ストッパーを設けずとも落下耐性に優れたものであった。そして、タッチパネルに貼り付けた後、タッチパネルに撓みが生じても不快な音は発生しなかった。又、この撓み振動型アクチュエータは、クッション層の重みによって振動子の周波数を所望の低い値にすることができ、低い周波数での動きが良くなった。 The obtained flexural vibration type actuator was excellent in drop resistance without providing a stopper. And after pasting on the touch panel, even if the touch panel was bent, no unpleasant sound was generated. In addition, this flexural vibration type actuator can reduce the frequency of the vibrator to a desired low value by the weight of the cushion layer, and the movement at the low frequency is improved.
１　撓み振動型アクチュエータ
３　振動子保持部
５　シム
７　ピエゾ素子
１０　クッション層
２０　タッチパネル本体 DESCRIPTION OF SYMBOLS 1 Flexural vibration type actuator 3 Vibrator holding part 5 Shim 7 Piezo element 10 Cushion layer 20 Touch panel main body

Claims (4)

  1. 　細長い板状体から成るシム及び当該シムの表裏両面に各々取付けられたピエゾ素子からなる振動子と、
    　前記シムの長手方向の片端または中央部分を根元側端部として保持する振動子保持部と、
    　少なくとも片面の前記ピエゾ素子上に取付けられたクッション層を備えた、　
    ことを特徴とする撓み振動型アクチュエータ。     A vibrator comprising a shim comprising an elongated plate-like body and piezoelectric elements respectively attached to the front and back surfaces of the shim;
    A vibrator holding portion that holds one end or a central portion in the longitudinal direction of the shim as a root side end; and
    Comprising a cushion layer mounted on at least one side of the piezo element,
    A flexural vibration type actuator characterized by that.
  2. 　前記クッション層が前記ピエゾ素子上の先端部のみに設けられている、請求項１記載の撓み振動型アクチュエータ。 2. The flexural vibration type actuator according to claim 1, wherein the cushion layer is provided only at a tip portion on the piezo element.
  3. 　細長い板状体から成るシム及び当該シムの表裏両面に各々取付けられたピエゾ素子からなる振動子と、
    　前記シムの長手方向の片端または中央部分を根元側端部として保持する振動子保持部と、
    　前記シムの少なくとも片面に前記ピエゾ素子よりも先端側に取付けられ、前記ピエゾ素子よりも厚みのあるクッション層を備えた、　
    ことを特徴とする撓み振動型アクチュエータ。     A vibrator comprising a shim comprising an elongated plate-like body and piezoelectric elements respectively attached to both the front and back surfaces of the shim;
    A vibrator holding portion that holds one end or a central portion in the longitudinal direction of the shim as a root side end; and
    At least one side of the shim is attached to the tip side of the piezo element, and includes a cushion layer that is thicker than the piezo element.
    A flexural vibration type actuator characterized by that.
  4. 　タッチパネル本体の裏面周縁の所定箇所に、請求項１～請求項３のいずれかに記載の撓み振動型アクチュエータが、前記クッション層を少なくとも前記タッチパネル本体と対向する面とは反対側に配置し、振動子保持部にて固定されたことを特徴とする触感フィードバック機能付タッチパネル。 The flexural vibration actuator according to any one of claims 1 to 3, wherein the cushion layer is disposed at least on a side opposite to the surface facing the touch panel main body at a predetermined position on the peripheral edge of the back surface of the touch panel main body, A touch panel with a tactile feedback function, which is fixed by a child holding portion.
PCT/JP2010/063610 2009-08-19 2010-08-11 Flexurally vibrating actuator and force-feedback-equipped touch panel using same WO2011021548A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-190534 2009-08-19
JP2009190534A JP2011043925A (en) 2009-08-19 2009-08-19 Flexurally vibrating actuator and touch panel with tactile sensation feedback function using the same

Publications (1)

Publication Number Publication Date
WO2011021548A1 true WO2011021548A1 (en) 2011-02-24

Family

ID=43607003

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/063610 WO2011021548A1 (en) 2009-08-19 2010-08-11 Flexurally vibrating actuator and force-feedback-equipped touch panel using same

Country Status (3)

Country Link
JP (1) JP2011043925A (en)
TW (1) TW201121339A (en)
WO (1) WO2011021548A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130088123A1 (en) * 2011-10-06 2013-04-11 Texas Instruments Incorporated Soft mechanical stops to limit over-travel of proof masses in cantilevered piezoelectric devices
US10848123B2 (en) 2016-01-29 2020-11-24 Murata Manufacturing Co., Ltd. Vibration device
EP3347796B1 (en) * 2015-09-08 2021-03-17 Apple Inc. Stand alone input device

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140036431A1 (en) * 2011-04-19 2014-02-06 Nec Corporation Piezoelectric actuator and electronic device having piezoelectric actuator mounted thereon
KR101320176B1 (en) * 2011-12-26 2013-10-23 삼성전기주식회사 Haptic feedback device
JP5905312B2 (en) * 2012-03-27 2016-04-20 京セラ株式会社 Sound equipment
CN104380227A (en) * 2012-06-15 2015-02-25 株式会社尼康 Electronic device
US9116546B2 (en) * 2012-08-29 2015-08-25 Immersion Corporation System for haptically representing sensor input
JP5976212B2 (en) * 2013-05-30 2016-08-23 京セラドキュメントソリューションズ株式会社 Display input device, information processing device, touch panel device
JP5685703B1 (en) * 2013-09-20 2015-03-18 新シコー科技株式会社 LINEAR DRIVE DEVICE, ELECTRONIC DEVICE USING LINEAR DRIVE DEVICE AND BODY
JP6237927B2 (en) * 2014-10-27 2017-11-29 株式会社村田製作所 Tactile presentation device
CN117588390B (en) * 2024-01-19 2024-04-09 常州威图流体科技有限公司 Gas generating device with protective structure and fluid control module

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003122507A (en) * 2001-10-10 2003-04-25 Smk Corp Touch panel input device
JP2005045691A (en) * 2003-07-24 2005-02-17 Taiyo Yuden Co Ltd Piezoelectric vibrator
WO2007102305A1 (en) * 2006-03-07 2007-09-13 Nec Corporation Piezoelectric actuator and electronic device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003122507A (en) * 2001-10-10 2003-04-25 Smk Corp Touch panel input device
JP2005045691A (en) * 2003-07-24 2005-02-17 Taiyo Yuden Co Ltd Piezoelectric vibrator
WO2007102305A1 (en) * 2006-03-07 2007-09-13 Nec Corporation Piezoelectric actuator and electronic device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130088123A1 (en) * 2011-10-06 2013-04-11 Texas Instruments Incorporated Soft mechanical stops to limit over-travel of proof masses in cantilevered piezoelectric devices
US9054294B2 (en) * 2011-10-06 2015-06-09 Texas Instruments Incorporated Soft mechanical stops to limit over-travel of proof masses in cantilevered piezoelectric devices
EP3347796B1 (en) * 2015-09-08 2021-03-17 Apple Inc. Stand alone input device
US10848123B2 (en) 2016-01-29 2020-11-24 Murata Manufacturing Co., Ltd. Vibration device
EP3320987B1 (en) * 2016-01-29 2021-01-13 Murata Manufacturing Co., Ltd. Vibration device

Also Published As

Publication number Publication date
TW201121339A (en) 2011-06-16
JP2011043925A (en) 2011-03-03

Similar Documents

Publication Publication Date Title
WO2011021548A1 (en) Flexurally vibrating actuator and force-feedback-equipped touch panel using same
JP5597583B2 (en) Touch panel device and electronic device
JP5558577B2 (en) Piezoelectric vibration device and portable terminal using the same
JP5820846B2 (en) Vibrating device and electronic device using the same
KR101524579B1 (en) Piezoelectric vibration element, piezoelectric vibration device, and portable terminal
EP1655994A2 (en) Flat panel speaker
JP2004104327A (en) Actuator for piezoelectric speaker
JP4188304B2 (en) Piezoelectric actuator, flat panel speaker
WO2014143723A2 (en) Acoustic transducers
JP5287998B2 (en) Electronic equipment with touch panel
KR101630353B1 (en) Piezoelectric speaker having weight and method of producing the same
JP5258995B2 (en) Electronic device and portable terminal equipped with the same
KR20070026279A (en) A panel-typed loud speaker and an exciter therefor
JP5738105B2 (en) Touch panel device and electronic device
TW202004420A (en) Tactile presentation device
US20150214466A1 (en) Vibration generating apparatus for portable terminal
JP6360904B2 (en) Electronics
JP5541022B2 (en) Vibration device
JP4160042B2 (en) Flat panel speaker
JP4688687B2 (en) Piezoelectric vibration unit and panel speaker
WO2013094744A1 (en) Portable device and method for using same
JP6286218B2 (en) Vibration transmitting device and piezoelectric speaker
JP2019087833A (en) Sensor unit and music instrument
JP2010245842A (en) Bending vibration actuator
JP2012119882A (en) Vibration device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10809893

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10809893

Country of ref document: EP

Kind code of ref document: A1