WO2011012741A2 - Microscopy device with tuning fork and rectilinear tip - Google Patents

Microscopy device with tuning fork and rectilinear tip Download PDF

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Publication number
WO2011012741A2
WO2011012741A2 PCT/ES2010/000297 ES2010000297W WO2011012741A2 WO 2011012741 A2 WO2011012741 A2 WO 2011012741A2 ES 2010000297 W ES2010000297 W ES 2010000297W WO 2011012741 A2 WO2011012741 A2 WO 2011012741A2
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WO
WIPO (PCT)
Prior art keywords
tip
fork
resonant
rectilinear
resonant fork
Prior art date
Application number
PCT/ES2010/000297
Other languages
Spanish (es)
French (fr)
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WO2011012741A3 (en
Inventor
Manuel Puig Vidal
Jorge OTERO DÍAZ
Original Assignee
Universidad De Barcelona
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Publication of WO2011012741A2 publication Critical patent/WO2011012741A2/en
Publication of WO2011012741A3 publication Critical patent/WO2011012741A3/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02Probe holders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04Fine scanning or positioning
    • G01Q10/045Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025Optical microscopes coupled with SPM
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12Fluid environment
    • G01Q30/14Liquid environment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00

Definitions

  • Microscopy device provided with a resonant fork and a rectilinear tip
  • the invention relates to an atomic force microscopy (AFM) device equipped with a resonant fork and a tip that allows to explore submerged objects, visually control their movement and obtain high quality factors.
  • AFM atomic force microscopy
  • certain scanning microscopes mainly near-field scanning microscopes (SNOM)
  • SNOM near-field scanning microscopes
  • These devices are provided with means to support the resonant fork by its base and move it to explore objects placed on a support surface that supports the objects to be analyzed, for example tissues, cells, etc.
  • the tips are curved so that they come in contact perpendicularly with the surface to be analyzed and so that it is possible to keep the horizontal resonant fork and sufficiently far from the object to be analyzed, preventing the resonant fork from coming into contact with the surface. . Simultaneously, it allows visually access from above the end of the tip, making it possible to monitor its position and therefore control its movement.
  • EP 791,802 describes a scanning near field interatomic force microscope similar to that of the Lewis patent and presenting the same drawbacks.
  • US 6,515,279 describes a near-field scanning optical microscope provided with a high quality factor piezoelectric sensor element, in which a tip attached to a resonator is also used.
  • the resonator operates parallel to the surface whereby the tip should be bent to make measurements that have the same drawbacks as the object of the Lewis patent.
  • the present invention provides a microscopy device provided with at least one resonant fork and a fixed rectilinear tip.
  • the tips can measure simultaneously in an area of 100x100 ⁇ m 2 and, for example, measure the elasticity, impedance or capacity of a cell membrane.
  • the device may comprise the following optional features:
  • the tip is inclined with respect to said support surface with an angle between 30 and 60 °, and preferably between 50 and 55 ° in order to place the tip as vertical as possible but still visible.
  • the tip protrudes from the end of the leg of the resonant fork a distance between 3.8 and 4.2 mm, preferably 4 mm.
  • the resonant fork has a length between 5 and 7 mm.
  • the tip is a fiber optic tip, for example to measure Ia
  • the microscopy device of the invention allows the cooperation of a plurality of tips operating simultaneously on the same area.
  • a particularly useful configuration presented schematically comprises a second resonant fork and a second rectilinear tip similar to the first resonant fork assembly and tip facing it, in which both assemblies are arranged so that the two tips can make measurements on the same area simultaneously and, more preferably, the two points are arranged in the same vertical plane facing each other.
  • Fig. 1 shows a schematic drawing of the essential elements of the device of the invention.
  • Fig. 2 shows a schematic drawing of a preferred embodiment of the invention comprising two resonant fork / tip assemblies arranged under an optical microscope.
  • the invention relates to a type of microscopy device 1 known, already described, for example in US 6,094,971, provided with a resonant fork 3 and a rectilinear tip 2 fixed longitudinally to a of its legs 3a, a support surface 4 for supporting objects 5 to be analyzed and means for supporting and displacing the resonant fork 3.
  • the means support the fork by its base 3c, that is, the opposite end to that on which the tip is fixed, so that the other leg 3b of the resonant fork 3 can vibrate freely.
  • the microscopy device of the invention is characterized in that the means for holding and displacing the resonant fork 3 are arranged so that the rectilinear tip 2 is inclined an angle ⁇ with respect to the support surface 4.
  • This angle is such that it allows to explore with a rectilinear tip 2 while avoiding that the resonant fork 3 comes into contact with the objects 5, or a liquid 6 in which they are immersed, allowing simultaneously, to visually access the position of the end 2a of the rectilinear tip 2 from above the support surface 4.
  • the tip 2 is inclined with respect to the support surface 4 with an angle ⁇ between 30 and 60 °, and preferably between 50 and 55 °, the tip 2 protrudes from the end of the leg of The resonant fork 3a a distance I between 3.8 and 4.2 mm, preferably 4 mm, and the resonant fork 3 has a length L between 5 and 7 mm. It has been proven that these dimensions provide good quality factors in the exploration of objects immersed in liquids. For example, to explore objects 5 submerged in a 2 mm layer of water, with a tip protruding 4 mm from the resonant fork, a minimum angle of 30-40 ° is sufficient.
  • the tip 2 is a fiber optic tip or a metal tip.
  • the microscopy device 1 comprises a second resonant fork 3 'and a second rectilinear tip 2' similar to the other set of resonant fork and tip 2, 3 and arranged in front of the latter, in which both assemblies are arranged so that both tips 2, 2 'can carry out measurements on the same area
  • the characteristics of the invention allow a plurality of resonant fork / tip assemblies to be arranged, which in turn allows several physical parameters of the object surface to be measured simultaneously. If more points were to be arranged, the resonant forks could be arranged with both legs inscribed in a plane perpendicular to the surface.
  • the microscopy device of the invention allows an optical microscope 7 to be placed on the sample with its axis 7a substantially perpendicular to said support surface 4, to control the movement of the tips on the surface to explore
  • the dimensions described above allow the use of an optical microscope (x50) with a focal length F of approximately 8 mm. In this case, with a tip protruding 4 mm from the resonant fork, an angle of 50-55 ° is available to avoid the collision with the objective of the microscope.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The device has a tuning fork and a rectilinear tip attached to one tine of the fork, a surface for supporting objects to be analysed and means for holding and moving the fork, said means being positioned so that the tip is inclined with respect to the support surface, at an angle that enables exploration with a rectilinear tip without the fork coming into contact with the objects or the liquid in which said object may be submerged, at the same time allowing visual access to the position of the end of the rectilinear tip from above said support surface, and makes it possible to use a plurality of tuning fork/tip assemblies, thereby enabling simultaneous measurement of several physical parameters of the surface of the object.

Description

Dispositivo de microscopía provisto de una horquilla resonante y una punta rectilínea  Microscopy device provided with a resonant fork and a rectilinear tip
La invención se refiere a un dispositivo de microscopia de fuerza atómica (AFM, "atomic forcé microscopy") provisto de una horquilla resonante y una punta que permite explorar objetos sumergidos, controlar visualmente su movimiento y obtener factores de calidad elevados. The invention relates to an atomic force microscopy (AFM) device equipped with a resonant fork and a tip that allows to explore submerged objects, visually control their movement and obtain high quality factors.
ESTADO DE LA TÉCNICA STATE OF THE TECHNIQUE
De manera ya conocida por el experto en Ia materia, determinados microscopios de exploración, principalmente los microscopios de exploración de campo cercano (SNOM, "scanning near-field optical microscopes"), se basan en dispositivos provistos de al menos una horquilla resonante y una punta fijada a una de sus patas. In a manner already known to those skilled in the art, certain scanning microscopes, mainly near-field scanning microscopes (SNOM), are based on devices provided with at least one resonant fork and a tip fixed to one of its legs.
Estos dispositivos están provistos de medios para sostener por su base a Ia horquilla resonante y moverla para explorar objetos colocados sobre una superficie de soporte que sostiene a los objetos a analizar, por ejemplo tejidos, células, etc. These devices are provided with means to support the resonant fork by its base and move it to explore objects placed on a support surface that supports the objects to be analyzed, for example tissues, cells, etc.
Un ejemplo de esta técnica se describe en Ia solicitud de patente WO 03019238, donde se describe un microscopio con sonda de exploración reconfigurable para Ia exploración con varias puntas con una interfaz transparente de microscopios ópticos de campo cercano, en el que se emplean varias puntas de AFM, preferiblemente fijadas a horquillas resonantes. An example of this technique is described in patent application WO 03019238, which describes a microscope with reconfigurable scanning probe for multi-point scanning with a transparent interface of near-field optical microscopes, in which several tips are used. AFM, preferably fixed to resonant forks.
En WO 03019238 las puntas están curvadas de modo que entran en contacto perpendicularmente con Ia superficie a analizar y de modo que es posible mantener Ia horquilla resonante horizontal y Io suficientemente alejada del objeto a analizar, evitando que Ia horquilla resonante entre en contacto con Ia superficie. Simultáneamente, permite acceder visualmente desde encima el extremo de Ia punta, haciendo posible Ia monitorización de su posición y por Io tanto controlar su movimiento. In WO 03019238 the tips are curved so that they come in contact perpendicularly with the surface to be analyzed and so that it is possible to keep the horizontal resonant fork and sufficiently far from the object to be analyzed, preventing the resonant fork from coming into contact with the surface. . Simultaneously, it allows visually access from above the end of the tip, making it possible to monitor its position and therefore control its movement.
Sin embargo, estas características presentan los siguientes inconvenientes: - Las puntas dobladas son mucho más caras y frágiles que las rectilíneas, Io cual supone mayores costes, incluso prohibitivos teniendo en cuenta que es un material fungible necesario en laboratorios de AFM que deben ser sustituidas con mucha frecuencia. However, these features have the following drawbacks: - The bent tips are much more expensive and fragile than the rectilinear ones, which means higher costs, even prohibitive considering that it is a fungible material necessary in AFM laboratories that must be replaced very frequently.
- El funcionamiento del punta/horquilla resonante con puntas dobladas es deficiente debido a que Ia mayor parte está sumergida en el líquido, Io cual proporciona un factor de calidad bajo. - The operation of the resonant tip / fork with bent tips is poor because most of it is submerged in the liquid, which provides a low quality factor.
En EP 791.802 se describe un microscopio de fuerza interatómica de campo cercano de exploración similar al de Ia patente de Lewis y que presenta los mismos inconvenientes. EP 791,802 describes a scanning near field interatomic force microscope similar to that of the Lewis patent and presenting the same drawbacks.
Otro ejemplo de estas técnicas se describe en US 6.094.971 , donde se describe un microscopio de sonda por barrido provisto de medios no ópticos para Ia detección de interacciones muestra-punta normales. Este dispositivo emplea una punta de detección de fuerzas atómicas dispuesta adosada a una pata de un resonador cuya otra pata puede vibrar libremente. Tal como se describe en Ia patente y se aprecia en las figuras, Ia punta está dispuesta perpendicular a Ia superficie a explorar, quedando el resonador perpendicular o paralelo a esta según Ia aplicación. Sin embargo, presenta los Another example of these techniques is described in US 6,094,971, which describes a scanning probe microscope provided with non-optical means for the detection of normal sample-tip interactions. This device employs an atomic force detection tip disposed attached to a leg of a resonator whose other leg can vibrate freely. As described in the patent and can be seen in the figures, the tip is arranged perpendicular to the surface to be explored, the resonator being perpendicular or parallel to it according to the application. However, it presents the
inconvenientes de que no permite un guiado de Ia punta con el microscopio óptico ni permite Ia cooperación entre varias puntas operando disadvantages that it does not allow guidance of the tip with the optical microscope nor does it allow cooperation between several tips operating
simultáneamente sobre una misma zona. simultaneously on the same area.
Finalmente, US 6.515.279 describe un microscopio óptico por barrido de campo cercano provisto de un elemento sensor piezoeléctrico de factor de calidad elevado, en el cual también se emplea una punta adherida a un resonador. Sin embargo, el resonador opera paralelo a Ia superficie por Io cual se debería doblar Ia punta para realizar medidas que presenta los mismos inconvenientes que el objeto de Ia patente de Lewis. Finally, US 6,515,279 describes a near-field scanning optical microscope provided with a high quality factor piezoelectric sensor element, in which a tip attached to a resonator is also used. However, the resonator operates parallel to the surface whereby the tip should be bent to make measurements that have the same drawbacks as the object of the Lewis patent.
Por Io tanto, a pesar de estas propuestas, sigue sin resolverse el problema de proporcionar un dispositivo de bajo coste que permita acceder visualmente a Ia punta para su monitorización, que permita Ia cooperación entre una pluralidad de puntas que operan simultáneamente, pero que permita operar en líquidos con un factor de calidad elevado, problema que resuelve Ia presente invención con una solución simple y efectiva. Therefore, despite these proposals, the problem of providing a low-cost device that allows visually accessing the tip for monitoring, which allows cooperation between a plurality of points that operate simultaneously, but that allows to operate remains unresolved. in liquids with a high quality factor, problem that solves the present invention with a simple and effective solution.
A Io largo de toda Ia descripción y las reivindicaciones el término "comprende" y sus derivados, en caso alguno implican Ia exclusión de otras características técnicas, aditivos, componentes, o etapas. Throughout the entire description and the claims the term "comprises" and its derivatives, in any case imply the exclusion of other technical characteristics, additives, components, or stages.
EXPLICACIÓN DE LA INVENCIÓN EXPLANATION OF THE INVENTION
La presente invención proporciona un dispositivo de microscopía provisto de al menos una horquilla resonante y una punta rectilínea fijada The present invention provides a microscopy device provided with at least one resonant fork and a fixed rectilinear tip.
longitudinalmente a una pata de dicha horquilla resonante, una superficie de soporte para soportar objetos a analizar y medios para sostener y desplazar a Ia horquilla resonante, sosteniendo dichos medios a Ia horquilla por su base de modo que Ia otra pata de Ia horquilla resonante puede vibrar libremente, caracterizado por el hecho de que dichos medios para sostener y desplazar a Ia horquilla resonante están dispuestos de modo que dicha horquilla resonante y Ia punta rectilínea están inclinadas un ángulo con respecto a dicha superficie de soporte, siendo dicho ángulo tal que permite explorar con una punta rectilínea evitando a Ia vez que Ia horquilla resonante entre en contacto con los objetos o un líquido donde dicho objeto está sumergido, permitiendo simultáneamente acceder visualmente a Ia posición del extremo de Ia punta rectilínea desde encima de dicha superficie de soporte y que permite Ia cooperación entre una pluralidad de puntas operando longitudinally to one leg of said resonant fork, a support surface for supporting objects to be analyzed and means for holding and displacing the resonant fork, said means holding the fork by its base so that the other leg of the resonant fork can vibrate freely, characterized in that said means for supporting and displacing the resonant fork are arranged so that said resonant fork and the rectilinear tip are inclined at an angle with respect to said support surface, said angle being such that it allows exploration with a rectilinear tip while preventing the resonant fork from coming into contact with the objects or a liquid where said object is submerged, allowing simultaneously access visually to the position of the end of the rectilinear tip from above said support surface and allowing Ia cooperation between a plurality of operating tips
simultáneamente sobre una misma zona. simultaneously on the same area.
Por Io tanto, estas características resuelven simultáneamente los Therefore, these characteristics simultaneously solve the
inconvenientes mencionados más arriba, porque: inconveniences mentioned above, because:
- Permite emplear puntas largas y rectilíneas para acceder a objetos a analizar sumergidos en líquidos. Estas puntas son de bajo coste, no precisan de forma específica alguna y su fijación a horquillas resonantes en el sentido longitudinal es fácil. - Allows the use of long, straight tips to access objects to be analyzed immersed in liquids. These tips are inexpensive, do not require any specific form and their fixation to resonant forks in the longitudinal direction is easy.
- Impide que Ia horquilla resonante entre en contacto con el líquido que contiene a Ia muestra a analizar permitiendo a Ia vez el ver el extremo de Ia punta desde encima para controlar su posición y movimiento, es decir, permite emplear un microscopio óptico dispuesto sobre las puntas. - Prevents the resonant fork from coming into contact with the liquid containing the sample to be analyzed, allowing at the same time to see the end of the tip from above to control its position and movement, that is, allows to use an optical microscope arranged on the tips.
- Finalmente, permite disponer una pluralidad de conjuntos horquilla resonante/punta con los extremos de las puntas dispuestos muy cerca entre sí, Io cual permite Ia cooperación simultánea entre las puntas. Por - Finally, it allows a plurality of resonant fork / tip assemblies to be arranged with the ends of the tips arranged very close to each other, which allows simultaneous cooperation between the tips. By
cooperación simultánea debe entenderse que las puntas pueden medir simultáneamente en un área de 100x100 μm2 y, por ejemplo, medir Ia elasticidad, Ia impedancia o Ia capacidad de una membrana celular. Simultaneous cooperation should be understood that the tips can measure simultaneously in an area of 100x100 μm 2 and, for example, measure the elasticity, impedance or capacity of a cell membrane.
Según realizaciones preferidas de Ia invención, el dispositivo puede comprender las siguientes características opcionales: According to preferred embodiments of the invention, the device may comprise the following optional features:
- La punta está inclinada con respecto a dicha superficie de soporte con un ángulo comprendido entre 30 y 60°, y preferentemente entre 50 y 55° con Ia finalidad de colocar Ia punta tan vertical como sea posible pero aún visible. - The tip is inclined with respect to said support surface with an angle between 30 and 60 °, and preferably between 50 and 55 ° in order to place the tip as vertical as possible but still visible.
- La punta sobresale del extremo de Ia pata de Ia horquilla resonante una distancia comprendida entre 3,8 y 4,2 mm, preferentemente 4 mm. - The tip protrudes from the end of the leg of the resonant fork a distance between 3.8 and 4.2 mm, preferably 4 mm.
- La horquilla resonante tiene una longitud comprendida entre 5 y 7 mm. - The resonant fork has a length between 5 and 7 mm.
- La punta es una punta de fibra óptica, por ejemplo para medir Ia - The tip is a fiber optic tip, for example to measure Ia
propagación de vibraciones con vistas a determinar su constante de elasticidad, o una punta metálica, para medir parámetros eléctricos vibration propagation with a view to determining its elasticity constant, or a metal tip, to measure electrical parameters
(impedancias, conductancias, capacidades, etc.). (impedances, conductances, capacities, etc.).
Finalmente, el dispositivo de microscopía de Ia invención permite Ia cooperación de una pluralidad de puntas operando simultáneamente sobre una misma zona. Como ejemplo, una configuración especialmente útil presentada esquemáticamente comprende una segunda horquilla resonante y una segunda punta rectilínea similares al primer conjunto de horquilla resonante y punta y dispuesto frente a este, en el que ambos conjuntos están dispuestos de modo que las dos puntas pueden realizar medidas sobre una misma área simultáneamente y, más preferentemente, las dos puntas están dispuestas en el mismo plano vertical enfrentadas. Finally, the microscopy device of the invention allows the cooperation of a plurality of tips operating simultaneously on the same area. As an example, a particularly useful configuration presented schematically comprises a second resonant fork and a second rectilinear tip similar to the first resonant fork assembly and tip facing it, in which both assemblies are arranged so that the two tips can make measurements on the same area simultaneously and, more preferably, the two points are arranged in the same vertical plane facing each other.
Otros objetos, ventajas y características de Ia invención aparecerán para el experto en Ia materia a partir de Ia lectura de Ia invención y de Ia realización práctica de Ia invención. Los siguientes ejemplos y dibujos se ofrecen a título ilustrativo y no pretenden en ningún caso limitar el alcance de Ia presente invención. Además, Ia presente invención cubre todas las posibles combinaciones descritas a continuación. Other objects, advantages and characteristics of the invention will appear for the expert in the field from the reading of the invention and the practical implementation of the invention. The following examples and drawings are offered by way of illustration and are not intended to limit the scope of the present invention. In addition, the present invention covers all possible combinations described below.
BREVE DESCRIPCIÓN DE LOS DIBUJOS BRIEF DESCRIPTION OF THE DRAWINGS
La Fig. 1 muestra un dibujo esquemático de los elementos esenciales del dispositivo de Ia invención. Fig. 1 shows a schematic drawing of the essential elements of the device of the invention.
La Fig. 2 muestra un dibujo esquemático de una realización preferida de Ia invención que comprende dos conjuntos de horquilla resonante/ punta dispuestos bajo un microscopio óptico. Fig. 2 shows a schematic drawing of a preferred embodiment of the invention comprising two resonant fork / tip assemblies arranged under an optical microscope.
DESCRIPCIÓN DETALLADA DE REALIZACIONES PREFERIDAS DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
Tal como se muestra en Ia Fig. 1 , Ia invención se refiere a un tipo de dispositivo de microscopia 1 conocido, ya descrito, por ejemplo en US 6.094.971, provisto de una horquilla resonante 3 y una punta rectilínea 2 fijada longitudinalmente a una de sus patas 3a, una superficie de soporte 4 para soportar objetos 5 a analizar y medios para sostener y desplazar a Ia horquilla resonante 3. As shown in Fig. 1, the invention relates to a type of microscopy device 1 known, already described, for example in US 6,094,971, provided with a resonant fork 3 and a rectilinear tip 2 fixed longitudinally to a of its legs 3a, a support surface 4 for supporting objects 5 to be analyzed and means for supporting and displacing the resonant fork 3.
En general, los medios sostienen a Ia horquilla por su base 3c, es decir, el extremo opuesto a aquel en el que está fijada Ia punta, de modo que Ia otra pata 3b de Ia horquilla resonante 3 puede vibrar libremente. In general, the means support the fork by its base 3c, that is, the opposite end to that on which the tip is fixed, so that the other leg 3b of the resonant fork 3 can vibrate freely.
Concretamente, el dispositivo de microscopia de Ia invención se caracteriza por el hecho de que los medios para sostener y desplazar a Ia horquilla resonante 3 están dispuestos de modo que Ia punta rectilínea 2 está inclinada un ángulo α con respecto a Ia superficie de soporte 4. Specifically, the microscopy device of the invention is characterized in that the means for holding and displacing the resonant fork 3 are arranged so that the rectilinear tip 2 is inclined an angle α with respect to the support surface 4.
Este ángulo es tal que permite explorar con una punta rectilínea 2 evitando a Ia vez que Ia horquilla resonante 3 entre en contacto con los objetos 5, o un líquido 6 en el que estos estén inmersos, permitiendo simultáneamente, acceder visualmente a Ia posición del extremo 2a de Ia punta rectilínea 2 desde encima de Ia superficie de soporte 4. This angle is such that it allows to explore with a rectilinear tip 2 while avoiding that the resonant fork 3 comes into contact with the objects 5, or a liquid 6 in which they are immersed, allowing simultaneously, to visually access the position of the end 2a of the rectilinear tip 2 from above the support surface 4.
Según una realización preferida de Ia invención, Ia punta 2 está inclinada con respecto a Ia superficie de soporte 4 con un ángulo α comprendido entre 30 y 60°, y preferentemente entre 50 y 55°, Ia punta 2 sobresale del extremo de Ia pata de Ia horquilla resonante 3a una distancia I comprendida entre 3,8 y 4,2 mm, preferentemente 4 mm y Ia horquilla resonante 3 tiene una longitud L comprendida entre 5 y 7 mm. Se ha comprobado que estas dimensiones proporcionan buenos factores de calidad en Ia exploración de objetos inmersos en líquidos. Por ejemplo, para explorar objetos 5 sumergidos en una capa de agua de 2 mm, con una punta que sobresale 4 mm de Ia horquilla resonante, es suficiente un ángulo mínimo de 30-40°. According to a preferred embodiment of the invention, the tip 2 is inclined with respect to the support surface 4 with an angle α between 30 and 60 °, and preferably between 50 and 55 °, the tip 2 protrudes from the end of the leg of The resonant fork 3a a distance I between 3.8 and 4.2 mm, preferably 4 mm, and the resonant fork 3 has a length L between 5 and 7 mm. It has been proven that these dimensions provide good quality factors in the exploration of objects immersed in liquids. For example, to explore objects 5 submerged in a 2 mm layer of water, with a tip protruding 4 mm from the resonant fork, a minimum angle of 30-40 ° is sufficient.
Según los parámetros a medir, Ia punta 2 es una punta de fibra óptica o una punta metálica. According to the parameters to be measured, the tip 2 is a fiber optic tip or a metal tip.
Tal como se muestra en Ia Fig. 2, en Ia que se muestra una segunda realización de Ia invención, el dispositivo de microscopia 1 comprende una segunda horquilla resonante 3' y una segunda punta rectilínea 2' similar al otro conjunto de horquilla resonante y punta 2, 3 y dispuestos frente a estos últimos, en el que ambos conjuntos están dispuestos de modo que ambas puntas 2, 2' pueden llevar a cabo medidas sobre una misma área As shown in Fig. 2, in which a second embodiment of the invention is shown, the microscopy device 1 comprises a second resonant fork 3 'and a second rectilinear tip 2' similar to the other set of resonant fork and tip 2, 3 and arranged in front of the latter, in which both assemblies are arranged so that both tips 2, 2 'can carry out measurements on the same area
simultáneamente. Obviamente, las características propias de Ia invención permiten disponer una pluralidad de conjuntos de horquilla resonante/ punta, Io cual permite a su vez medir varios parámetros físicos de Ia superficie del objeto simultáneamente. Si se debiesen disponer más puntas, las horquillas resonantes se podrían disponer con ambas patas inscritas en un plano perpendicular a Ia superficie. simultaneously. Obviously, the characteristics of the invention allow a plurality of resonant fork / tip assemblies to be arranged, which in turn allows several physical parameters of the object surface to be measured simultaneously. If more points were to be arranged, the resonant forks could be arranged with both legs inscribed in a plane perpendicular to the surface.
Tal como se puede ver en Ia Fig. 2, el dispositivo de microscopia de Ia invención permite colocar un microscopio óptico 7 sobre Ia muestra con su eje 7a sustancialmente perpendicular a dicha superficie de soporte 4, para controlar el movimiento de las puntas sobre Ia superficie a explorar. Las dimensiones antes expuestas permiten emplear un microscopio óptico (x50) con una distancia focal F de aproximadamente 8 mm. En este caso, con una punta que sobresale 4 mm de Ia horquilla resonante, se dispone de un ángulo de 50-55° para evitar Ia colisión con el objetivo del microscopio. As can be seen in Fig. 2, the microscopy device of the invention allows an optical microscope 7 to be placed on the sample with its axis 7a substantially perpendicular to said support surface 4, to control the movement of the tips on the surface to explore The dimensions described above allow the use of an optical microscope (x50) with a focal length F of approximately 8 mm. In this case, with a tip protruding 4 mm from the resonant fork, an angle of 50-55 ° is available to avoid the collision with the objective of the microscope.

Claims

REIVINDICACIONES
1. Dispositivo de microscopía (1) provisto de al menos una horquilla resonante (3) y una punta rectilínea (2) fijada longitudinalmente a una pata (3a) de dicha horquilla resonante (3), una superficie de soporte (4) para soportar objetos (5) a analizar y medios para sostener y desplazar a Ia horquilla resonante (3), sosteniendo dichos medios a Ia horquilla por su base (3c) de modo que Ia otra pata (3b) de Ia horquilla resonante (3) puede vibrar libremente, caracterizado porque dichos medios para sostener y desplazar a Ia horquilla resonante (3) están dispuesto de modo que dicha punta rectilínea (2) está inclinada un ángulo (α) con respecto a dicha superficie de soporte (4), siendo dicho ángulo tal que permite explorar con una punta rectilínea (2) evitando a Ia vez que Ia horquilla resonante (3) entre en contacto con los objetos (5) o un líquido (6) donde dicho objeto está sumergido, haciendo posible simultáneamente para acceder visualmente a Ia posición del extremo (2a) de Ia punta rectilínea (2) desde encima de dicha superficie de soporte (4) y que permite colocar una pluralidad de conjuntos de horquilla resonante/punta, Io cual permite a su vez medir varios parámetros físicos de Ia superficie del objeto simultáneamente. 1. Microscopy device (1) provided with at least one resonant fork (3) and a rectilinear tip (2) fixed longitudinally to a leg (3a) of said resonant fork (3), a support surface (4) to support objects (5) to be analyzed and means for supporting and displacing the resonant fork (3), holding said means to the fork by its base (3c) so that the other leg (3b) of the resonant fork (3) can vibrate freely, characterized in that said means for supporting and displacing the resonant fork (3) are arranged so that said rectilinear tip (2) is inclined an angle (α) with respect to said support surface (4), said angle being such which allows to explore with a rectilinear tip (2) while avoiding that the resonant fork (3) comes into contact with the objects (5) or a liquid (6) where said object is submerged, simultaneously making it possible to visually access the end position (2a) of The rectilinear tip (2) from above said support surface (4) and which allows to place a plurality of resonant fork / tip assemblies, which in turn allows to measure several physical parameters of the surface of the object simultaneously.
2. Dispositivo según Ia reivindicación 1 , en el que dicha punta (2) está inclinada con respecto a dicha superficie de soporte (4) con un ángulo (α) comprendido entre 30 y 60°, preferentemente entre 50 y 55°. 2. Device according to claim 1, wherein said tip (2) is inclined with respect to said support surface (4) with an angle (α) between 30 and 60 °, preferably between 50 and 55 °.
3. Dispositivo según cualquiera de las reivindicaciones anteriores, en el que dicha punta (2) sobresale del extremo de Ia pata de Ia horquilla resonante (3a) una distancia (I) comprendida entre 3,8 y 4,2 mm, preferentemente 4 mm. 3. Device according to any of the preceding claims, wherein said tip (2) protrudes from the end of the leg of the resonant fork (3a) a distance (I) between 3.8 and 4.2 mm, preferably 4 mm .
4. Dispositivo según cualquiera de las reivindicaciones anteriores, en el que dicha horquilla resonante (3) tiene una longitud (L) comprendida entre 5 y 7 mm. Device according to any one of the preceding claims, wherein said resonant fork (3) has a length (L) between 5 and 7 mm.
5. Dispositivo según Ia reivindicación 1 , en el que dicha punta (2) es una punta de fibra óptica o una punta metálica. 5. Device according to claim 1, wherein said tip (2) is a fiber optic tip or a metal tip.
6. Dispositivo según cualquiera de las reivindicaciones anteriores, que comprende una segunda horquilla resonante (3') y una segunda punta rectilínea (2') similar al otro conjunto de horquilla resonante y punta (2, 3) y dispuesto frente a éste, en el que ambos conjuntos están dispuestos de modo que ambas puntas (2, 2') pueden simultáneamente realizar medidas sobre Ia misma área de muestra. 6. Device according to any of the preceding claims, which it comprises a second resonant fork (3 ') and a second rectilinear tip (2') similar to the other set of resonant fork and tip (2, 3) and arranged opposite it, in which both assemblies are arranged so that both tips (2, 2 ') can simultaneously perform measurements on the same sample area.
7. Dispositivo según Ia reivindicación anterior, en el que las dos puntas (2, 2') están dispuestas en el mismo plano vertical una frente a Ia otra. 7. Device according to the preceding claim, in which the two tips (2, 2 ') are arranged in the same vertical plane facing each other.
PCT/ES2010/000297 2009-07-31 2010-07-12 Microscopy device with tuning fork and rectilinear tip WO2011012741A2 (en)

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ES200901740A ES2354795B1 (en) 2009-07-31 2009-07-31 MICROSCOPY DEVICE PROVIDED WITH A RESONANT FORK AND A RECTILINAL POINT.
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ES2354795A1 (en) 2011-03-18
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