WO2011011955A1 - Repeatedly and intelligently gripping and releasing device with multiple jaws - Google Patents

Repeatedly and intelligently gripping and releasing device with multiple jaws Download PDF

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Publication number
WO2011011955A1
WO2011011955A1 PCT/CN2009/076064 CN2009076064W WO2011011955A1 WO 2011011955 A1 WO2011011955 A1 WO 2011011955A1 CN 2009076064 W CN2009076064 W CN 2009076064W WO 2011011955 A1 WO2011011955 A1 WO 2011011955A1
Authority
WO
WIPO (PCT)
Prior art keywords
grip
pallet
torsion spring
gripper
grasping
Prior art date
Application number
PCT/CN2009/076064
Other languages
French (fr)
Chinese (zh)
Inventor
杨明生
范继良
王银果
王曼媛
王勇
Original Assignee
东莞宏威数码机械有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 东莞宏威数码机械有限公司 filed Critical 东莞宏威数码机械有限公司
Publication of WO2011011955A1 publication Critical patent/WO2011011955A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1612Programme controls characterised by the hand, wrist, grip control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers

Definitions

  • Multi-grip repeating intelligent grab release device Multi-grip repeating intelligent grab release device
  • the invention relates to a grasping and releasing mechanism, in particular to a multi-handle repeating intelligent grasping and releasing device for repeatedly grasping and translating a plate-like object in the organic light emitting diode industry. Background technique
  • OLED display is a new product in digital products.
  • OLED is an organic light-emitting diode (Organic Light-Emitting Diode). Because of its light weight, power saving and other characteristics, it has been widely used in the display of digital products. And it has a large market potential.
  • OLED organic Light-Emitting Diode
  • the application of OLED in the world is focused on flat panel displays, because OLED is the only technology that can be compared with TFT-LCD in application, and it is the only one that can be made in all display technologies.
  • OLED display organic-emitting display
  • TFT-LCD display liquid crystal display
  • the typical structure is to deposit a layer of tens of nanometers thick organic light-emitting material on the IT0 glass as a light-emitting layer, and a metal electrode with a low work function is arranged above the light-emitting layer. When a voltage is applied to the electrodes, the luminescent layer produces optical radiation.
  • the preparation process of the OLED display device includes: in the processes of substrate cleaning, photolithography, substrate processing, film formation, packaging, etc., it is often necessary to grasp or interpret the plate-like object such as the substrate, the substrate, the mask, etc.
  • the release device includes a clamp, a clamp arm and a drive mechanism, and the drive mechanism drives the support arm to move and control
  • the driving mechanism controls the clamp to open, then drives the clamp arm to move to a designated position, and controls the clamp
  • the clamp is closed to grasp the object;
  • the driving mechanism drives the clamp arm to move to a designated position and controls the clamp to open, and the plate-shaped body is translated Putting on the pallet, and then controlling the clamp to close, thereby completing the work of releasing the object; due to the structure of the traditional clamp, when the closing action is performed, the reaction is slow and the movement is slow,
  • the grasping and releasing device cannot control the clamp to open in time, and it is often necessary to manually determine whether there is a plate-like object at the designated position, thereby operating the grasping and releasing.
  • the device opens the clamp and manually controls the entire working process, wasting manpower and time.
  • the traditional grasping and unloading mechanism is slow, unable to be timely, repetitive, and intelligent. Translation grab put to work.
  • the object of the present invention is to provide a grasping and releasing device capable of repeating, timely and intelligently completing the action of grasping and releasing the object of the plate.
  • the technical solution of the present invention is: a multi-grip repeating intelligent grasping and releasing device, which is suitable for grasping and translating a plate-like object, and the multi-grip repeating intelligent grasping and releasing device comprises: a plurality of grippers, a gripper drive mechanism, a pallet, a pallet drive mechanism, a pallet sensor, and a control system;
  • the gripper includes a grip portion, a grip holder, a torsion spring, and the grip portion
  • the grip holder is pivotally connected, the upper support point of the torsion spring is in contact with the grip portion, and the lower support point of the torsion spring is in contact with the grip holder;
  • the gripper drive mechanism and the handle a gripping portion of the gripper, the gripper driving mechanism driving the gripper to open or close;
  • the pallet driving mechanism being connected to the pallet, the tray a plate driving mechanism drives the pallet to move;
  • the pallet sensor detects bearing information of the pallet;
  • the gripper further includes a torsion spring shaft, and the torsion spring shaft passes through the torsion spring, and the grip portion is pivotally connected to the grip holder with the torsion spring shaft as a rotation axis.
  • Torsion spring The shaft is present as a support shaft of the torsion spring and is also present as a rotating shaft of the grip portion, so that the structure of the grip is simple and compact.
  • the grip portion includes a grip portion main body, an upper portion of the grip portion extending inwardly along both ends of the grip portion main body, and a lower portion of the grip portion, the grip holder fixing portion including the left side portion and the right portion a side portion, a base connecting the left side portion and the right side portion; the torsion spring shaft sequentially passes through the left side portion, the grip body and the right side portion, and the grip portion main body is rotated by the torsion spring shaft a shaft is pivotally connected to the grip holder, and a spring contact area is formed between the upper portion of the grip portion and the base, and a gripping area is formed between the lower portion of the grip portion and the base, the torsion spring The upper support point is in contact with the upper portion of the grip portion, and the lower support point of the torsion spring is in contact with the base.
  • connection relationship between the structure of the grip holder and the grip portion is such that the gripper has a symmetrical structure, which makes the gripper more stable when gripping an object, on the other hand
  • the grip portion includes a grip body, an upper portion of the grip portion and a lower portion of the grip portion. When the gripper is opened, only the upper portion of the grip portion is touched, and when the grip is closed, the pressure of the upper portion of the grip portion is released. Yes, the gripper operation is simple and convenient.
  • the lower portion of the grip portion has a protrusion extending toward the gripping region.
  • the gripper grips the plate-like object
  • the plate-like object is carried on the bump, and the bump enables the multi-grip to repeat the intelligent grasping and releasing device to carry the object more stably, and effectively
  • the contact area of the plate-like object with the gripper is reduced, thereby preventing damage to the object when the object is gripped.
  • the base is provided with a mounting hole at a position relative to the left side portion and the right side portion.
  • the mounting holes are respectively located at positions corresponding to the left side portion and the right side portion, such that the mounting holes are symmetrically distributed on the grip holder, and the gripper can be smoothly fixed by the mounting holes.
  • the grip driving mechanism comprises a lower pressing top column and a cylinder motor, the lower pressing top column is connected to the cylinder motor at one end, and the other end is suspended directly above the upper portion of the grip portion.
  • the gripper driving mechanism touches the upper portion of the grip portion of the grip portion, and the grip portion is along
  • the torsion spring shaft rotates, the lower portion of the grip portion rotates outward, and the gripping region is opened.
  • the gripper needs to be closed, the pressure of the upper portion of the grip portion is released by the spring.
  • the lower portion of the grip portion rotates inward, and the gripper is closed.
  • the plurality of grippers are located in the same plane and form a polygonal sheet clamping region.
  • the plate-like object is clamped in the plate clamping region, because the plate clamping region is closed, so when When the plate-like object is conveyed/reversed at this time, the plate-like object can be stably carried on the lower portion of the grip portion of the gripper to prevent slippage, displacement, and the like.
  • the multi-grip repeating intelligent grasping and releasing device of the present invention has a spring structure on the one hand, that is, a support point of the two ends of the torsion spring of the gripper, and an upper support point. Abutting against the grip portion, the lower support point is in contact with the grip holder, so that the gripper can be closed in time by the torsion spring after being opened; on the other hand, the multi-handle repeats
  • the pallet of the intelligent grasping and releasing device is provided with a pallet sensor, and the pallet sensor can detect whether there is a plate-like object on the pallet at any time, thereby driving the gripper by controlling the gripper driving device.
  • the automatic and timely opening, finally reaching the gripper in time, and intelligently controlling the purpose of the present invention for grasping and translating the plate object saves manpower and time.
  • the pallet sensor automatically detects the pallet when the multi-hand grip repeats the intelligent grasping and releasing device to grasp the object.
  • the top of the gripper applies downward pressure, the gripper opens, and the flat plate is lifted into the gripper's inner side, the gripper top pressure is released, and the gripper is in the Closed by the torsion spring, the plate-like object is placed on a plane composed of a plurality of grippers; when the present invention deciphers the plate-like object, the pallet rises to a position below the plate-like object,
  • the gripper driving device drives the gripper to open in time and translates the plate-like object onto the pallet, the pressure of the upper portion of the grip portion is released, and the gripper acts at the torsion spring Closely closing; therefore, the gripper sensor controls the gripper to open, the torsion spring drives the gripper to close, and the multi-grip repeating intelligent gripping and decoding device of the invention can be timely, intelligent and repeated Complete crawl, put the translation work tabular object.
  • FIG. 1 is a schematic structural view of a multi-handle repeating intelligent grasping and releasing device according to the present invention.
  • FIG. 2 is a schematic structural view of a gripper of the multi-grip repeating intelligent grasping and releasing device of the present invention.
  • FIG. 3 is another schematic structural view of the gripper of the multi-hand grasping intelligent grasping and releasing device of the present invention.
  • 4 is another schematic structural view of the gripper of the multi-hand grasping intelligent grasping and releasing device of the present invention.
  • Figure 5 is a cross-sectional view of the gripper of the multi-handle repeating intelligent grasping and releasing device of the present invention.
  • FIG. 6 is a schematic view of the multi-handle repeating intelligent grasping and releasing device of the present invention when the plate body is grasped.
  • FIG. 7 is a schematic view of the multi-grip repeating intelligent grasping and releasing device of the present invention for grasping a plate-like object.
  • FIG. 8 is a schematic view of the multi-grip repeating intelligent grasping and releasing device of the present invention after grasping the plate-like object.
  • FIG. 9 is a schematic view of the multi-grip repeating intelligent grasping and releasing device of the present invention when the translation of the plate-like object is started.
  • FIG. 10 is a schematic view of the multi-handle repeating intelligent grasping and releasing device for releasing a plate-like object according to the present invention.
  • FIG. 11 is a schematic view of the multi-handle repeating intelligent grasping and releasing device of the present invention after the translation and release of the plate body.
  • the multi-grip repeating intelligent grasping and releasing device of the present invention is suitable for grasping and releasing the plate-like object 50
  • the multi-grip repeating intelligent grasping and releasing device comprises: a plurality of grippers 10, grasping a hand drive mechanism, a pallet 30, a pallet drive mechanism (not shown), and a pallet sensor (not shown), and a control system (not shown); with reference to Figures 2-5, the grip The hand 10 includes a grip portion 11 , a grip holder 12 , and a torsion spring 13 .
  • the grip portion 11 is pivotally connected to the grip holder 12 , and the upper support point 1 31 of the torsion spring 13 The grip portion 11 is in contact with each other, and the lower support point 1 32 of the torsion spring 13 is in contact with the grip holder 12; the gripper driving mechanism is connected to the grip portion 11 of the grip 10,
  • the gripper drive mechanism drives the gripper 10 to open or close;
  • the pallet 30 carries the plate-like object 50;
  • the pallet drive mechanism is coupled to the pallet 30, and the pallet drive mechanism drives The pallet 30 moves;
  • the pallet sensor detects the bearer information of the pallet 30;
  • the system is electrically connected to the gripper drive mechanism, the pallet drive mechanism and the pallet sensor, respectively, the control system processes the load bearing information of the pallet 30 detected by the pallet sensor and controls the gripper drive mechanism and the support The action of the plate drive mechanism.
  • the grip 10 further includes a torsion spring shaft 14 including a grip portion main body 112, a grip portion upper portion 111 extending inwardly along both ends of the grip portion main body 112, and a gripping portion a lower portion 11 3;
  • the grip holder 12 includes a left side portion 122, a right side portion 123, and a base 121 connecting the left side portion and the right side portion;
  • the torsion spring shaft 14 is sequentially fixed through the gripper a left side portion 122 of the seat 12, the grip portion main body 112, and a right side portion 123 of the grip holder base 12, the grip portion main body 112 pivotally connected to the gripping shaft 12 with the torsion spring shaft 14 as a rotating shaft a spring contact area is formed between the upper portion 111 of the grip portion and the base 121, and the lower portion 113 and the base 121 of the grip portion are formed.
  • a gripping zone 15 is formed therebetween; the torsion spring 13 passes through the torsion spring shaft 14 , and the upper support point 1 31 of the torsion spring 13 opposes the gripping upper portion 111, the twist
  • the lower support point 1 32 of the spring 13 is in interference with the base 121.
  • the grip portion 10 When it is necessary to close the gripper 10, the pressure of the upper portion 1 11 of the grip portion is released, and the torsion spring 13 generates an upward force on the upper portion 11 1 of the grip portion with respect to the base 121, in the torsion spring 13 Under the action of the grip portion main body 112, the grip portion lower portion 11 3 rotates inward along the torsion spring shaft 14, the gripping region 15 is closed, and the gripper 10 is in a closed state.
  • the grip portion lower portion 11 has a projection 114 extending toward the gripping region 15.
  • the plate-like object is carried on the bump 114, by effectively reducing the plate-like object 50 and the gripper 10
  • the contact area reduces damage to the object when the object is gripped, and makes the multi-grip repeating intelligent grasping and releasing device more stable.
  • the base 121 is provided with mounting holes 124 at positions below the left side portion 122 and the right side portion 123.
  • the mounting holes 124 are respectively located at positions corresponding to the left side portion 122 and the right side portion 123, such that the mounting holes 124 are symmetrically distributed on the base 121, and the gripping holes can be adopted through the mounting holes 124. 10 is smoothly fixed to the bracket 40 to be mounted.
  • the grip driving mechanism comprises a lower pressing top post 20 and a cylinder motor (not shown), the lower pressing top post 20-end is connected to the cylinder motor, and the other end is suspended from the upper part of the gripping portion. Directly above 111.
  • the cylinder motor acts to drive the lower pressing top post 20 to move downward and touch the upper portion 111 of the grip portion of the grip portion 11, the grip portion 1 1 along
  • the torsion spring shaft 14 is rotated outwardly and opened.
  • the gripper 10 needs to be closed, the cylinder motor is reset and the lower pressing column 20 is reset, and the pressure of the upper portion 111 of the grip portion is released. Actuated by the torsion spring 13 , the grip portion lower portion 11 3 rotates inward, and the gripper 10 is closed.
  • a plurality of said grippers 10 are located on the same plane and form a closed polygonal sheet gripping zone 16.
  • the remaining gripping areas 15 of the two grippers 10 are opposite and distributed The sides of the wide sides of the rectangular plate clamping region 16; when the gripper 10 grips the plate-like object 50, the plate-like object 50 is grasped and fixed to the closed rectangular plate composed of the six grippers 10.
  • the plate-like object 50 held in the plate nip 16 is conveyed/reversed to ensure that the plate-like object 50 is stably grasped at the gripper 10.
  • the number of the grippers 10 may also be four, five, seven, eight or the other, and the plate clamping area may be rectangular, square or other polygons (depending on the actual situation), as long as the composition is guaranteed.
  • Each side of the closed panel holding area 16 has at least one gripper 10.
  • a plurality of the grippers 10 are fixed by the mounting holes 124.
  • the pallet sensor mounted on the pallet 30 detects whether there is a plate-like object on the pallet 30, and if so, the pallet sensor Transmitting a plate load signal to the control system, the control system issuing a grip open command to the grip drive device, and issuing a pallet up command to the pallet drive device;
  • the grip portion upper portion 111 of the grip 10 applies a downward pressure in the direction of the arrow, and the grip portion lower portion 11 3 is rotated inwardly about the torsion spring shaft 14 , and the gripper 10 is opened (see FIG. 6 ).
  • the pallet driving device drives the pallet 30 to rise in the direction of the arrow, and feeds the panel object 30 into the open gripping region 15 (as shown in FIG. 7);
  • the hand drive mechanism issues a close command,
  • the pressure of the upper portion 111 of the grip portion 10 of the gripper 10 is translated in the direction of the arrow, and the lower portion 11 3 of the grip portion is rotated outward by the torsion spring 13
  • the gripper 10 is closed, the plate-like object 50 is clamped in a plate clamping region 16 composed of a plurality of the grippers 10, and the control system issues a pallet lowering command to the pallet drive device.
  • the pallet drive device drives the pallet 30 to descend in the direction of the arrow (as shown in FIG. 8).
  • the pallet drive device issues a pallet up command
  • the pallet drive device drives the pallet 30 to rise in the direction of the arrow (as shown in FIG.
  • the control system issues a grip open command to the gripper driving device, and the lower pressing top post 20 applies downward pressure to the upper portion 1 11 of the gripping portion of the gripper 10 in the direction of the arrow, the gripping The lower part of the holding portion 11 3 is twisted
  • the rotating spring shaft 14 is rotated inwardly from the center, the gripping zone 15 is opened and the plate-like object 50 is released onto the pallet 30 (as shown in FIG.
  • the control system drives the pallet
  • the apparatus issues a pallet lowering command, the pallet 30 descending in the direction of the arrow under the action of the pallet driving device, the plate-like object 50 being carried on the pallet 30 and along with the pallet 30 Disengaging from the plate clamping region 16, the control system issues a grip closing command to the grip driving mechanism, and the lower pressing post 20 is translated in the direction of the arrow to apply to the upper portion 111 of the grip portion of the gripper 10.
  • the lower portion of the grip portion 11 is rotated outwardly by the torsion spring 13 and the gripper 10 is closed (Fig. 11).
  • the multi-handle repeating intelligent grasping and releasing device comprises a plurality of grippers 10, a gripper driving mechanism, a pallet 30, a pallet driving mechanism, and a pallet sensor disposed on the pallet 30;
  • the hand 10 includes a torsion spring 1 3 , the upper support point 1 31 of the torsion spring 13 is in contact with the grip portion 11 , and the lower support point is in contact with the grip holder 12 , so that the grip 10 is After being opened, it can be closed under the action of the torsion spring 13 , so that the multi-grip repeating intelligent grasping and decoding device of the present invention can repeatedly grasp and translate the plate-like object; on the other hand, the multi-hand grip
  • the pallet 30 of the repeating intelligent grasping and releasing device is provided with a pallet sensor, and the pallet sensor can detect whether there is a plate-like object 50 on the pallet 30 at any time, thereby driving by controlling the gripper driving device.
  • the gripper 10 is opened in time, and finally achieves the purpose of grasping the plate-like object 50 in a timely and automatic manner, saving manpower and time.
  • the multi-grip repeating intelligent grasping and releasing device can automatically and timely control the gripper 10 to open.
  • the torsion spring 13 can drive the gripper 10 to close in time, so that the multi-grip repeating intelligent grasping and decoding device of the present invention repeats the timely, intelligent completion of the capture and release of the plate-like object.

Abstract

A repeatedly and intelligently gripping and releasing device with multiple jaws, includes multiple jaws (10), a jaw driving machine, a supporting panel (30), a supporting panel driving machine, a supporting panel sensor and a controlling system. The jaw includes a holding section (11), a jaw fixing section (12) and a torsion spring (13). The holding section and the jaw fixing section are connected to each other through a pivoted mechanism. The upper supporting point (131) of the torsion spring is against the holding section, and the lower supporting point (132) of the torsion spring is against the jaw fixing section. The jaw driving machine is connected to the holding section and drives the jaws to open or to close. The supporting panel holds a plate object (50). The supporting panel driving machine is connected to the supporting panel and drives the supporting panel to move. The supporting panel sensor detects holding information of the supporting panel. The controlling system has electrical connection with the jaw driving machine, the supporting panel driving machine and the supporting panel sensor. The controlling system deals with the detected holding information and controls the jaw driving machine and the supporting panel driving machine to work. The supporting panel driving machine and the torsion spring realize gripping and releasing the plate object repeatedly and intelligently.

Description

多抓手重复智能抓取释放装置 技术领域  Multi-grip repeating intelligent grab release device
本发明涉及一种抓取译放机构, 尤其涉及一种用于重复抓取、 译放有机发 光二极管行业中的板状物体的多抓手重复智能抓取译放装置。 背景技术  The invention relates to a grasping and releasing mechanism, in particular to a multi-handle repeating intelligent grasping and releasing device for repeatedly grasping and translating a plate-like object in the organic light emitting diode industry. Background technique
随着经济的不断发展、 科技的不断进步和世界能源的日益减少, 人们在生 产中越来越重视能源的节约及利用效率, 使得人与自然和谐发展以满足中国新 型的工业化道路要求。  With the continuous development of the economy, the continuous advancement of science and technology, and the decreasing energy of the world, people pay more and more attention to energy conservation and utilization efficiency in production, which makes people and nature develop harmoniously to meet the requirements of China's new industrialization road.
例如, 在数码产品的显示产业中, 企业为了节约能源、 降低生产成本, 都 加大投资研发力度, 不断地追求节能的新产品。 其中, OLED显示屏就是数码产 品中的一种新产品, OLED即有机发光二极管( Organic Light-Emitting Diode ), 因为具备轻薄、 省电等特性, 因此在数码产品的显示屏上得到了广泛应用, 并且具有较大的市场潜力, 目前世界上对 OLED 的应用都聚焦在平板显示 器上, 因为 OLED是唯一在应用上能和 TFT-LCD相提并论的技术, 且是目 前所有显示技术中,唯一可制作大尺寸、高亮度、高分辨率软屏的显示技术, 可以做成和紙张一样的厚度; 但 OLED显示屏(有机发光显示屏)与传统的 TFT-LCD 显示屏 (液晶显示屏) 并不同, 其无需背光灯, 釆用非常薄的有 机材料涂层和玻璃基片, 当有电流通过时, 这些有机材料就会发光, 而且 OLED显示屏可以做得更轻更薄, 可视角度更大, 并且能够显著节省电能; 相应地, 制造 OLED显示屏的所有设备必须要保证 OLED显示屏的精度要 求。 OLED显示屏是基于有机材料的一种电流型半导体发光器件。 其典型结构 是在 IT0玻璃上蒸镀一层几十纳米厚的有机发光材料作发光层, 发光层上方有 一层低功函数的金属电极。 当电极上加有电压时, 发光层就产生光辐射。  For example, in the display industry of digital products, in order to save energy and reduce production costs, enterprises have increased investment in research and development and are constantly pursuing new products that are energy-saving. Among them, OLED display is a new product in digital products. OLED is an organic light-emitting diode (Organic Light-Emitting Diode). Because of its light weight, power saving and other characteristics, it has been widely used in the display of digital products. And it has a large market potential. At present, the application of OLED in the world is focused on flat panel displays, because OLED is the only technology that can be compared with TFT-LCD in application, and it is the only one that can be made in all display technologies. Dimensional, high-brightness, high-resolution soft-screen display technology can be made to the same thickness as paper; however, OLED display (organic-emitting display) is different from traditional TFT-LCD display (liquid crystal display). No need for backlighting, using a very thin coating of organic material and a glass substrate, these organic materials will illuminate when current is passed through, and the OLED display can be made lighter and thinner, with a larger viewing angle, and Significant energy savings; accordingly, all devices that make OLED displays must ensure the accuracy of the OLED display begging. The OLED display is a current-type semiconductor light-emitting device based on an organic material. The typical structure is to deposit a layer of tens of nanometers thick organic light-emitting material on the IT0 glass as a light-emitting layer, and a metal electrode with a low work function is arranged above the light-emitting layer. When a voltage is applied to the electrodes, the luminescent layer produces optical radiation.
OLED显示器件的制备工艺包括: 基板清洗、 光刻、 基片处理、 成膜、 封装 等工艺中, 常常需要抓取或者译放基板、 基片、 掩膜等板状物体, 传统的抓取 译放装置包括夹钳、 钳臂和驱动机构, 所述驱动机构驱动所述支撑臂移动并控 制所述夹钳抓取物体, 用上述抓取译放装置抓取板状物体时, 所述驱动机构控 制所述夹钳打开, 然后驱动所述钳臂移动到指定位置, 并控制所述夹钳关闭从 而抓取物体; 当用上述抓取译放装置译放板状物体时, 所述驱动机构驱动所述 钳臂移动到指定位置并控制所述夹钳打开, 将所述板状物体译放在所述托板上, 再控制所述夹钳关闭, 从而完成译放物体的工作; 由于传统夹钳的结构, 执行 关闭动作时, 反应迟钝、 动作緩慢, 不能将打开的夹钳及时关闭; 另一方面, 当需要抓取板状物体时, 所述抓取译放装置并不能及时的控制夹钳打开, 而往 往需要人工判断指定位置上是否具有板状物体, 从而操作抓取译放装置打开夹 钳并人工控制整个工作过程, 浪费人力和时间, 总之, 传统的抓取译放机构的 动作迟钝、 不能及时、 重复、 智能的完成抓取译放工作。 The preparation process of the OLED display device includes: in the processes of substrate cleaning, photolithography, substrate processing, film formation, packaging, etc., it is often necessary to grasp or interpret the plate-like object such as the substrate, the substrate, the mask, etc. The release device includes a clamp, a clamp arm and a drive mechanism, and the drive mechanism drives the support arm to move and control When the clamp grasps an object, when the plate-like object is grasped by the grasping and releasing device, the driving mechanism controls the clamp to open, then drives the clamp arm to move to a designated position, and controls the clamp The clamp is closed to grasp the object; when the plate-like object is translated by the above-mentioned grasping and releasing device, the driving mechanism drives the clamp arm to move to a designated position and controls the clamp to open, and the plate-shaped body is translated Putting on the pallet, and then controlling the clamp to close, thereby completing the work of releasing the object; due to the structure of the traditional clamp, when the closing action is performed, the reaction is slow and the movement is slow, and the opened clamp cannot be closed in time. On the other hand, when the plate-like object needs to be grasped, the grasping and releasing device cannot control the clamp to open in time, and it is often necessary to manually determine whether there is a plate-like object at the designated position, thereby operating the grasping and releasing. The device opens the clamp and manually controls the entire working process, wasting manpower and time. In short, the traditional grasping and unloading mechanism is slow, unable to be timely, repetitive, and intelligent. Translation grab put to work.
因此, 急需一种可以重复的、 及时的抓取、 译放板状物体的抓取译放装置。 发明内容  Therefore, there is an urgent need for a retrievable and timely grasping and releasing device for grasping and releasing a plate-like object. Summary of the invention
本发明的目的在于提供一种可以重复的、 及时的、 智能完成抓取、 译放板 状物体动作的抓取译放装置。  The object of the present invention is to provide a grasping and releasing device capable of repeating, timely and intelligently completing the action of grasping and releasing the object of the plate.
为了实现上述目的, 本发明的技术方案为: 一种多抓手重复智能抓取译放 装置, 适用于抓取、 译放板状物体, 所述多抓手重复智能抓取译放装置包括: 多个抓手、 抓手驱动机构、 托板、 托板驱动机构、 托板传感器、 及控制系统; 所述抓手包括抓持部、 抓手固定座、 扭转弹簧, 所述抓持部与所述抓手固定座 枢接, 所述扭转弹簧的上支撑点与所述抓持部抵触, 所述扭转弹簧的下支撑点 与所述抓手固定座抵触; 所述抓手驱动机构与所述抓手的抓持部连接,所述抓手 驱动机构驱动所述抓手打开或关闭; 所述托板承载所述板状物体; 所述托板驱 动机构与所述托板连接, 所述托板驱动机构驱动所述托板移动; 所述托板传感 器检测所述托板的承载信息; 所述控制系统分别与所述抓手驱动机构、 托板驱 动机构及托板传感器电连接, 所述控制系统处理所述托板传感器检测的托板的 承载信息并控制所述抓手驱动机构和托板驱动机构的动作。  In order to achieve the above object, the technical solution of the present invention is: a multi-grip repeating intelligent grasping and releasing device, which is suitable for grasping and translating a plate-like object, and the multi-grip repeating intelligent grasping and releasing device comprises: a plurality of grippers, a gripper drive mechanism, a pallet, a pallet drive mechanism, a pallet sensor, and a control system; the gripper includes a grip portion, a grip holder, a torsion spring, and the grip portion The grip holder is pivotally connected, the upper support point of the torsion spring is in contact with the grip portion, and the lower support point of the torsion spring is in contact with the grip holder; the gripper drive mechanism and the handle a gripping portion of the gripper, the gripper driving mechanism driving the gripper to open or close; the pallet carrying the plate-like object; the pallet driving mechanism being connected to the pallet, the tray a plate driving mechanism drives the pallet to move; the pallet sensor detects bearing information of the pallet; the control system is electrically connected to the gripper driving mechanism, the pallet driving mechanism and the pallet sensor respectively, control Bearer information processing system sensor detects the pallet and the pallet and the pallet means to control operation of the drive mechanism driving the gripper.
较佳地, 所述抓手还包括扭转弹簧轴, 所述扭转弹簧轴穿过所述扭转弹簧, 所述抓持部以所述扭转弹簧轴为旋转轴与所述抓手固定座枢接。 所述扭转弹簧 轴即作为所述扭转弹簧的支撑轴存在, 又作为所述抓持部的旋转轴存在, 使得 所述抓手的结构简单、 紧凑。 Preferably, the gripper further includes a torsion spring shaft, and the torsion spring shaft passes through the torsion spring, and the grip portion is pivotally connected to the grip holder with the torsion spring shaft as a rotation axis. Torsion spring The shaft is present as a support shaft of the torsion spring and is also present as a rotating shaft of the grip portion, so that the structure of the grip is simple and compact.
较佳地, 所述抓持部包括抓持部主体、 沿所述抓持部主体两端向内侧延伸 的抓持部上部和抓持部下部, 所述抓手固定座包括左侧部、 右侧部、 连接左侧 部和右侧部的底座; 所述扭转弹簧轴依次穿过所述左侧部、 抓手主体以及右侧 部, 所述抓持部主体以所述扭转弹簧轴为旋转轴与所述抓手固定座枢接, 且所 述抓持部上部与所述底座之间形成弹簧抵触区, 所述抓持部下部与所述底座之 间形成抓持区, 所述扭转弹簧的上支撑点与所述抓持部上部抵触, 所述扭转弹 簧的下支撑点与所述底座抵触。 一方面, 所述抓手固定座的结构与所述抓持部 之间的连接关系使得所述抓手呈对称结构, 使所述抓手抓持物体时更加稳定, 另一方面, 由于所述抓持部包括抓持部主体、 抓持部上部和抓持部下部, 打开 所述抓手时, 只需触压所述抓持部上部, 关闭时译放所述抓持部上部的压力即 可, 使得所述抓手操作简单、 方便。  Preferably, the grip portion includes a grip portion main body, an upper portion of the grip portion extending inwardly along both ends of the grip portion main body, and a lower portion of the grip portion, the grip holder fixing portion including the left side portion and the right portion a side portion, a base connecting the left side portion and the right side portion; the torsion spring shaft sequentially passes through the left side portion, the grip body and the right side portion, and the grip portion main body is rotated by the torsion spring shaft a shaft is pivotally connected to the grip holder, and a spring contact area is formed between the upper portion of the grip portion and the base, and a gripping area is formed between the lower portion of the grip portion and the base, the torsion spring The upper support point is in contact with the upper portion of the grip portion, and the lower support point of the torsion spring is in contact with the base. In one aspect, the connection relationship between the structure of the grip holder and the grip portion is such that the gripper has a symmetrical structure, which makes the gripper more stable when gripping an object, on the other hand, The grip portion includes a grip body, an upper portion of the grip portion and a lower portion of the grip portion. When the gripper is opened, only the upper portion of the grip portion is touched, and when the grip is closed, the pressure of the upper portion of the grip portion is released. Yes, the gripper operation is simple and convenient.
较佳地, 所述抓持部下部上具有向抓持区延伸的凸块。 当所述抓手抓持板 状物体时, 所述板状物体承载在所述凸块上, 所述凸块使得所述多抓手重复智 能抓取译放装置承载物体更稳定, 并有效地减少了板状物体与所述抓手的接触 面积, 从而防止夹持物体时对物体的损伤。  Preferably, the lower portion of the grip portion has a protrusion extending toward the gripping region. When the gripper grips the plate-like object, the plate-like object is carried on the bump, and the bump enables the multi-grip to repeat the intelligent grasping and releasing device to carry the object more stably, and effectively The contact area of the plate-like object with the gripper is reduced, thereby preventing damage to the object when the object is gripped.
较佳地, 所述底座相对于所述左侧部和右侧部的位置设有安装孔。 所述安 装孔分别位于所述左侧部和右侧部相对应的位置, 使得所述安装孔对称分布在 所述抓手固定座上, 通过所述安装孔可将所述抓手平稳的固定在需要安装的支 架上。  Preferably, the base is provided with a mounting hole at a position relative to the left side portion and the right side portion. The mounting holes are respectively located at positions corresponding to the left side portion and the right side portion, such that the mounting holes are symmetrically distributed on the grip holder, and the gripper can be smoothly fixed by the mounting holes. On the bracket that needs to be installed.
较佳地, 所述抓手驱动机构包括下压顶柱和气缸马达, 所述下压顶柱一端 与所述气缸马达相连, 另一端悬于所述抓持部上部的正上方。 当所述多抓手重 复智能抓取译放装置开始抓取或译放板状物体时 , 所述抓手驱动机构触压所述 抓持部的抓持部上部, 所述抓持部沿着所述扭转弹簧轴旋转, 所述抓持部下部 向外旋转, 所述抓持区打开, 当需要关闭所述抓手时, 所述抓持部上部的压力 译放, 受弹簧作用, 所述抓持部下部向内旋转, 所述抓手关闭。  Preferably, the grip driving mechanism comprises a lower pressing top column and a cylinder motor, the lower pressing top column is connected to the cylinder motor at one end, and the other end is suspended directly above the upper portion of the grip portion. When the multi-grip repeating intelligent grasping and releasing device starts to grasp or release the plate-like object, the gripper driving mechanism touches the upper portion of the grip portion of the grip portion, and the grip portion is along The torsion spring shaft rotates, the lower portion of the grip portion rotates outward, and the gripping region is opened. When the gripper needs to be closed, the pressure of the upper portion of the grip portion is released by the spring. The lower portion of the grip portion rotates inward, and the gripper is closed.
较佳地, 多个所述抓手位于同一平面并形成一个多边形的板材夹持区。 当 所述多抓手重复智能抓取译放装置开始抓取板状物体时, 所述板状物体被夹持 在所述板材夹持区内, 由于所述板材夹持区呈封闭状, 因此当此时传送 /翻转所 述板状物体时, 所述板状物体可以稳定的承载在所述抓手的抓持部下部上, 防 止产生滑落、 移位等现象。 Preferably, the plurality of grippers are located in the same plane and form a polygonal sheet clamping region. when When the multi-grip repeating intelligent grasping and releasing device starts to grasp the plate-like object, the plate-like object is clamped in the plate clamping region, because the plate clamping region is closed, so when When the plate-like object is conveyed/reversed at this time, the plate-like object can be stably carried on the lower portion of the grip portion of the gripper to prevent slippage, displacement, and the like.
与现有技术相比, 本发明多抓手重复智能抓取译放装置一方面, 其抓手釆 用弹簧结构, 即: 所述抓手的所述扭转弹簧的两端支撑点, 上支撑点与所述抓 持部抵触, 下支撑点与所述抓手固定座抵触, 从而使所述抓手打开后可以在所 述扭转弹簧的作用下及时关闭; 另一方面, 所述多抓手重复智能抓取译放装置 的托板上设置有托板传感器, 所述托板传感器可以随时检测所述托板上是否有 板状物体, 从而通过控制所述抓手驱动装置来驱动所述抓手自动的、 及时的打 开, 最终达到及时打开所述抓手, 并智能地控制本发明抓取和译放板状物体的 目的, 节省了人力和时间。 另外, 由于所述具有弹簧机构的抓手以及所述托板 上设置的托板传感器, 本发明多抓手重复智能抓取译放装置抓取物体时, 所述 托板传感器自动检测托板是那个是否有平板, 若有会控制驱动机构抓手顶部对 施加向下的压力, 抓手打开, 平板被上升的托板送入抓手内侧后, 抓手顶部压 力译放, 抓手在所述扭转弹簧的作用下关闭, 所述板状物体被放在多个抓手组 成的平面上; 当本发明译放板状物体时, 所述托板上升到靠近所述板状物体下 面的位置, 所述抓手驱动装置来驱动所述抓手及时打开并将所述板状物体译放 到所述托板上, 抓持部上部的压力译放, 所述抓手在所述扭转弹簧的作用下关 闭; 因此, 由所述托板传感器控制所述抓手打开, 所述扭转弹簧驱动所述抓手 关闭, 本发明多抓手重复智能抓取译放装置可以及时、 智能、 重复的完成抓取、 译放板状物体的工作。 附图说明  Compared with the prior art, the multi-grip repeating intelligent grasping and releasing device of the present invention has a spring structure on the one hand, that is, a support point of the two ends of the torsion spring of the gripper, and an upper support point. Abutting against the grip portion, the lower support point is in contact with the grip holder, so that the gripper can be closed in time by the torsion spring after being opened; on the other hand, the multi-handle repeats The pallet of the intelligent grasping and releasing device is provided with a pallet sensor, and the pallet sensor can detect whether there is a plate-like object on the pallet at any time, thereby driving the gripper by controlling the gripper driving device. The automatic and timely opening, finally reaching the gripper in time, and intelligently controlling the purpose of the present invention for grasping and translating the plate object, saves manpower and time. In addition, due to the gripper having the spring mechanism and the pallet sensor disposed on the pallet, the pallet sensor automatically detects the pallet when the multi-hand grip repeats the intelligent grasping and releasing device to grasp the object. Whether there is a flat plate, if there is control of the driving mechanism, the top of the gripper applies downward pressure, the gripper opens, and the flat plate is lifted into the gripper's inner side, the gripper top pressure is released, and the gripper is in the Closed by the torsion spring, the plate-like object is placed on a plane composed of a plurality of grippers; when the present invention deciphers the plate-like object, the pallet rises to a position below the plate-like object, The gripper driving device drives the gripper to open in time and translates the plate-like object onto the pallet, the pressure of the upper portion of the grip portion is released, and the gripper acts at the torsion spring Closely closing; therefore, the gripper sensor controls the gripper to open, the torsion spring drives the gripper to close, and the multi-grip repeating intelligent gripping and decoding device of the invention can be timely, intelligent and repeated Complete crawl, put the translation work tabular object. DRAWINGS
图 1是本发明多抓手重复智能抓取译放装置的结构示意图。  1 is a schematic structural view of a multi-handle repeating intelligent grasping and releasing device according to the present invention.
图 2是本发明多抓手重复智能抓取译放装置的抓手的结构示意图。  2 is a schematic structural view of a gripper of the multi-grip repeating intelligent grasping and releasing device of the present invention.
图 3是本发明多抓手重复智能抓取译放装置的抓手的另一结构示意图。 图 4是本发明多抓手重复智能抓取译放装置的抓手的又一结构示意图。 图 5是本发明多抓手重复智能抓取译放装置的抓手的剖视图。 FIG. 3 is another schematic structural view of the gripper of the multi-hand grasping intelligent grasping and releasing device of the present invention. 4 is another schematic structural view of the gripper of the multi-hand grasping intelligent grasping and releasing device of the present invention. Figure 5 is a cross-sectional view of the gripper of the multi-handle repeating intelligent grasping and releasing device of the present invention.
图 6是本发明多抓手重复智能抓取译放装置开始抓取板状物体时的示意图。 图 7是本发明多抓手重复智能抓取译放装置抓取板状物体时的示意图。 图 8是本发明多抓手重复智能抓取译放装置抓取板状物体后的示意图。 图 9是本发明多抓手重复智能抓取译放装置开始译放板状物体时的示意图。 图 10是本发明多抓手重复智能抓取译放装置译放板状物体时的示意图。 图 11是本发明多抓手重复智能抓取译放装置译放板状物体后的示意图。 具体实施方式  FIG. 6 is a schematic view of the multi-handle repeating intelligent grasping and releasing device of the present invention when the plate body is grasped. FIG. 7 is a schematic view of the multi-grip repeating intelligent grasping and releasing device of the present invention for grasping a plate-like object. FIG. 8 is a schematic view of the multi-grip repeating intelligent grasping and releasing device of the present invention after grasping the plate-like object. FIG. 9 is a schematic view of the multi-grip repeating intelligent grasping and releasing device of the present invention when the translation of the plate-like object is started. FIG. 10 is a schematic view of the multi-handle repeating intelligent grasping and releasing device for releasing a plate-like object according to the present invention. FIG. 11 is a schematic view of the multi-handle repeating intelligent grasping and releasing device of the present invention after the translation and release of the plate body. detailed description
如图 1 所示, 本发明多抓手重复智能抓取译放装置适用于抓取、 释放板状 物体 50 , 所述多抓手重复智能抓取译放装置包括: 多个抓手 10、抓手驱动机构、 托板 30、 托板驱动机构(图中未示)、 以及托板传感器(图中未示)、 及控制系统 (图中未示); 参考图 2-图 5 , 所述抓手 10包括抓持部 11、 抓手固定座 12、 扭 转弹簧 1 3 , 所述抓持部 11与所述抓手固定座 12枢接, 所述扭转弹簧 1 3的上支 撑点 1 31与所述抓持部 11抵触, 所述扭转弹簧 1 3的下支撑点 1 32与所述抓手 固定座 12抵触; 所述抓手驱动机构与所述抓手 10的抓持部 11连接, 所述抓手 驱动机构驱动所述抓手 1 0打开或关闭; 所述托板 30承载所述板状物体 50; 所 述托板驱动机构与所述托板 30连接, 所述托板驱动机构驱动所述托板 30移动; 所述托板传感器检测所述托板 30的承载信息; 所述控制系统分别与所述抓手驱 动机构、 托板驱动机构及托板传感器电连接, 所述控制系统处理所述托板传感 器检测的托板 30的承载信息并控制所述抓手驱动机构和托板驱动机构的动作。  As shown in FIG. 1 , the multi-grip repeating intelligent grasping and releasing device of the present invention is suitable for grasping and releasing the plate-like object 50, and the multi-grip repeating intelligent grasping and releasing device comprises: a plurality of grippers 10, grasping a hand drive mechanism, a pallet 30, a pallet drive mechanism (not shown), and a pallet sensor (not shown), and a control system (not shown); with reference to Figures 2-5, the grip The hand 10 includes a grip portion 11 , a grip holder 12 , and a torsion spring 13 . The grip portion 11 is pivotally connected to the grip holder 12 , and the upper support point 1 31 of the torsion spring 13 The grip portion 11 is in contact with each other, and the lower support point 1 32 of the torsion spring 13 is in contact with the grip holder 12; the gripper driving mechanism is connected to the grip portion 11 of the grip 10, The gripper drive mechanism drives the gripper 10 to open or close; the pallet 30 carries the plate-like object 50; the pallet drive mechanism is coupled to the pallet 30, and the pallet drive mechanism drives The pallet 30 moves; the pallet sensor detects the bearer information of the pallet 30; The system is electrically connected to the gripper drive mechanism, the pallet drive mechanism and the pallet sensor, respectively, the control system processes the load bearing information of the pallet 30 detected by the pallet sensor and controls the gripper drive mechanism and the support The action of the plate drive mechanism.
较佳者, 所述抓手 10还包括扭转弹簧轴 14 , 所述抓持部 11包括抓持部主 体 112、沿所述抓持部主体 112两端向内侧延伸的抓持部上部 111和抓持部下部 11 3; 所述抓手固定座 12包括左侧部 122、 右侧部 123、 连接左侧部和右侧部的 底座 121 ; 所述扭转弹簧轴 14依次穿过所述抓手固定座 12的左侧部 122、 所述 抓持部主体 112以及抓手固定座 12的右侧部 123 , 所述抓持部主体 112以所述 扭转弹簧轴 14为旋转轴枢接在所述抓手固定座 12上, 且所述抓持部上部 111 与所述底座 121之间形成弹簧抵触区, 在所述抓持部下部 11 3与所述底座 121 之间形成一个抓持区 15 ; 所述扭转弹簧 1 3穿过所述扭转弹簧轴 14 , 且所述扭 转弹簧 1 3的上支撑点 1 31与所述抓持部上部 111抵触, 所述扭转弹簧 1 3的下 支撑点 1 32与所述底座 121抵触。 当需要抓手 10打开时, 触压所述抓持部 11 的抓持部上部 11 1 ,所述抓持部主体 112带动所述抓持部下部 11 3沿所述扭转弹 簧轴 14向外旋转, 所述抓持区 15打开, 即所述抓手 1 0处于打开状态。 当需要 关闭抓手 10时, 译放抓持部上部 1 11的压力, 所述扭转弹簧 1 3对所述抓持部 上部 11 1产生相对于底座 121向上的作用力, 在上述扭转弹簧 1 3的作用下, 所 述抓持部主体 112带动所述抓持部下部 11 3沿所述扭转弹簧轴 14向内旋转, 所 述抓持区 15被闭合, 所述抓手 10处于关闭状态。 Preferably, the grip 10 further includes a torsion spring shaft 14 including a grip portion main body 112, a grip portion upper portion 111 extending inwardly along both ends of the grip portion main body 112, and a gripping portion a lower portion 11 3; the grip holder 12 includes a left side portion 122, a right side portion 123, and a base 121 connecting the left side portion and the right side portion; the torsion spring shaft 14 is sequentially fixed through the gripper a left side portion 122 of the seat 12, the grip portion main body 112, and a right side portion 123 of the grip holder base 12, the grip portion main body 112 pivotally connected to the gripping shaft 12 with the torsion spring shaft 14 as a rotating shaft a spring contact area is formed between the upper portion 111 of the grip portion and the base 121, and the lower portion 113 and the base 121 of the grip portion are formed. A gripping zone 15 is formed therebetween; the torsion spring 13 passes through the torsion spring shaft 14 , and the upper support point 1 31 of the torsion spring 13 opposes the gripping upper portion 111, the twist The lower support point 1 32 of the spring 13 is in interference with the base 121. When the gripper 10 is required to be opened, the grip portion 11 1 of the grip portion 11 is pressed, and the grip portion main body 112 drives the grip portion lower portion 11 3 to rotate outward along the torsion spring shaft 14 The gripping zone 15 is opened, that is, the gripper 10 is in an open state. When it is necessary to close the gripper 10, the pressure of the upper portion 1 11 of the grip portion is released, and the torsion spring 13 generates an upward force on the upper portion 11 1 of the grip portion with respect to the base 121, in the torsion spring 13 Under the action of the grip portion main body 112, the grip portion lower portion 11 3 rotates inward along the torsion spring shaft 14, the gripping region 15 is closed, and the gripper 10 is in a closed state.
具体地, 所述抓持部下部 11 3上具有向抓持区 15延伸的凸块 114。 当所述 多抓手重复智能抓取译放装置开始抓取板状物体时 , 所述板状物体承载在所述 凸块 114上, 通过有效地减少了板状物体 50与所述抓手 10的接触面积降低了 夹持物体时对物体的损伤, 并使得所述多抓手重复智能抓取译放装置承载物体 更稳定。 更具体地, 所述底座 121相对于左侧部 122和右侧部 123下方的位置 上各设有安装孔 124。所述安装孔 124分别位于所述左侧部 122和右侧部 123相 对应的位置, 使得所述安装孔 124对称分布在所述底座 121上, 通过所述安装 孔 124可将所述抓手 10平稳的固定在需要安装的支架 40上。  Specifically, the grip portion lower portion 11 has a projection 114 extending toward the gripping region 15. When the multi-grip repeating intelligent grasping and releasing device starts to grasp the plate-like object, the plate-like object is carried on the bump 114, by effectively reducing the plate-like object 50 and the gripper 10 The contact area reduces damage to the object when the object is gripped, and makes the multi-grip repeating intelligent grasping and releasing device more stable. More specifically, the base 121 is provided with mounting holes 124 at positions below the left side portion 122 and the right side portion 123. The mounting holes 124 are respectively located at positions corresponding to the left side portion 122 and the right side portion 123, such that the mounting holes 124 are symmetrically distributed on the base 121, and the gripping holes can be adopted through the mounting holes 124. 10 is smoothly fixed to the bracket 40 to be mounted.
较佳者, 所述抓手驱动机构包括下压顶柱 20和气缸马达(图中未示), 所 述下压顶柱 20—端与所述气缸马达相连, 另一端悬于所述抓持部上部 111的正 上方。 当需要打开所述抓手 10 时, 所述气缸马达动作, 驱动所述下压顶柱 20 向下运动并触压所述抓持部 11的抓持部上部 111 ,所述抓持部 1 1沿着所述扭转 弹簧轴 14向外旋转并打开, 当需要关闭所述抓手 10时, 所述气缸马达复位并 带动所述下压顶柱 20复位, 译放了所述抓持部上部 111的压力, 受所述扭转弹 簧 1 3作用, 所述抓持部下部 11 3向内旋转, 所述抓手 10关闭。  Preferably, the grip driving mechanism comprises a lower pressing top post 20 and a cylinder motor (not shown), the lower pressing top post 20-end is connected to the cylinder motor, and the other end is suspended from the upper part of the gripping portion. Directly above 111. When the gripper 10 needs to be opened, the cylinder motor acts to drive the lower pressing top post 20 to move downward and touch the upper portion 111 of the grip portion of the grip portion 11, the grip portion 1 1 along The torsion spring shaft 14 is rotated outwardly and opened. When the gripper 10 needs to be closed, the cylinder motor is reset and the lower pressing column 20 is reset, and the pressure of the upper portion 111 of the grip portion is released. Actuated by the torsion spring 13 , the grip portion lower portion 11 3 rotates inward, and the gripper 10 is closed.
较佳者, 多个所述抓手 10位于同一平面上并形成一个封闭的多边形的板材 夹持区 16。 如图 1所示, 本实施例中具有六个抓手 10并形成了一个封闭的矩形 的板材夹持区 16 , 其中四个抓手 10的抓持区 15两两相对, 且分布在矩形的板 材夹持区 16的长边的两侧上, 剩下的两个抓手 10的抓持区 15相对, 且分布在 矩形的板材夹持区 16的宽边的两侧; 当所述抓手 10抓取板状物体 50 , 所述板 状物体 50被抓持固定在六个抓手 10构成的封闭的矩形的板材夹持区 16内, 传 送 /翻转被夹持在所述板材夹持区 16内的所述板状物体 50 , 可以保证所述板状 物体 50稳定的被抓持在在所述抓手 10的抓持区 15上, 而不会出现产生滑落、 移位等现象。 当然, 所述抓手 10的数目也可以是四个、 五个、 七个、 八个或其 他, 所述板材夹持区可以是矩形、正方形或者其他多边形(根据实际情况决定), 只要保证组成封闭的板材夹持区 16的每个边都至少有一个抓手 10即可。 Preferably, a plurality of said grippers 10 are located on the same plane and form a closed polygonal sheet gripping zone 16. As shown in FIG. 1, in this embodiment, there are six grippers 10 and a closed rectangular plate clamping region 16 is formed, wherein the gripping regions 15 of the four grippers 10 are opposite each other and are distributed in a rectangular shape. On both sides of the long side of the plate holding area 16, the remaining gripping areas 15 of the two grippers 10 are opposite and distributed The sides of the wide sides of the rectangular plate clamping region 16; when the gripper 10 grips the plate-like object 50, the plate-like object 50 is grasped and fixed to the closed rectangular plate composed of the six grippers 10. In the nip region 16, the plate-like object 50 held in the plate nip 16 is conveyed/reversed to ensure that the plate-like object 50 is stably grasped at the gripper 10. Grab the area 15, without the phenomenon of slipping, shifting, etc. Of course, the number of the grippers 10 may also be four, five, seven, eight or the other, and the plate clamping area may be rectangular, square or other polygons (depending on the actual situation), as long as the composition is guaranteed. Each side of the closed panel holding area 16 has at least one gripper 10.
参考图 6-图 8 , 详细说明所述多抓手重复智能抓取译放装置抓取所述板状 物体 50的工作过程, 首先, 通过所述安装孔 124将多个所述抓手 10固定在相 应的支架 40上, 当需要抓取板状物体 50时, 安装在所述托板 30上的托板传感 器检测所述托板 30上是否有板状物体, 若有, 所述托板传感器对所述控制系统 发出平板承载信号, 所述控制系统对所述抓手驱动装置发出抓手打开命令, 并 对所述托板驱动装置发出托板上升命令; 所述下压顶柱 20对所述抓手 10的抓 持部上部 111沿箭头方向施加向下的压力, 所述抓持部下部 11 3 以所述扭转弹 簧轴 14为中心向内旋转打开, 所述抓手 10打开(如图 6 ); 所述托板驱动装置 驱动所述托板 30沿箭头方向上升, 并将所述板状物体 30送入打开的抓持区 15 内 (如图 7 ); 所述控制系统对所述抓手驱动机构发出关闭命令, 所述下压顶柱 20沿箭头方向译放对所述抓手 10的抓持部上部 111施加的压力,所述抓持部下 部 11 3在所述扭转弹簧 1 3的作用下向外旋转, 所述抓手 1 0关闭, 所述板状物 体 50被夹持在由多个所述抓手 1 0组成的板材夹持区 16内, 所述控制系统对所 述托板驱动装置发出托板下降命令, 所述托板驱动装置驱动所述托板 30沿箭头 方向下降(如图 8 )。  Referring to FIG. 6 to FIG. 8 , the working process of the multi-grip repeating intelligent grasping and releasing device for grasping the plate-like object 50 is described in detail. First, a plurality of the grippers 10 are fixed by the mounting holes 124. On the corresponding bracket 40, when it is required to grasp the plate-like object 50, the pallet sensor mounted on the pallet 30 detects whether there is a plate-like object on the pallet 30, and if so, the pallet sensor Transmitting a plate load signal to the control system, the control system issuing a grip open command to the grip drive device, and issuing a pallet up command to the pallet drive device; The grip portion upper portion 111 of the grip 10 applies a downward pressure in the direction of the arrow, and the grip portion lower portion 11 3 is rotated inwardly about the torsion spring shaft 14 , and the gripper 10 is opened (see FIG. 6 ). The pallet driving device drives the pallet 30 to rise in the direction of the arrow, and feeds the panel object 30 into the open gripping region 15 (as shown in FIG. 7); The hand drive mechanism issues a close command, The pressure of the upper portion 111 of the grip portion 10 of the gripper 10 is translated in the direction of the arrow, and the lower portion 11 3 of the grip portion is rotated outward by the torsion spring 13 The gripper 10 is closed, the plate-like object 50 is clamped in a plate clamping region 16 composed of a plurality of the grippers 10, and the control system issues a pallet lowering command to the pallet drive device. The pallet drive device drives the pallet 30 to descend in the direction of the arrow (as shown in FIG. 8).
参考图 9-图 11 , 详细说明所述多抓手重复智能抓取译放装置译放所述板状 物体 50的工作过程, 当需要译放所述板状物体 50时, 所述控制系统对所述托 板驱动装置发出托板上升命令, 所述托板驱动装置驱动所述托板 30沿箭头方向 上升 (如图 9 ), 当所述托板 30上升到靠近所述板状物体 50下面位置, 所述控 制系统对所述抓手驱动装置发出抓手打开命令,所述下压顶柱 20对所述抓手 10 的抓持部上部 1 11沿箭头方向施加向下的压力, 所述抓持部下部 11 3 以所述扭 转弹簧轴 14为中心向内旋转打开, 所述抓持区 15打开并将所述板状物体 50释 放到所述托板 30上(如图 10 ); 所述控制系统对所述托板驱动装置发出托板下 降命令, 所述托板 30在所述托板驱动装置的作用下沿箭头方向下降, 所述板状 物体 50被承载在所述托板 30上并随着所述托板 30脱离所述板材夹持区 16 ,所 述控制系统对所述抓手驱动机构发出抓手关闭命令, 所述下压顶柱 20沿箭头方 向译放对所述抓手 10的抓持部上部 111施加的压力, 所述抓持部下部 11 3在所 述扭转弹簧 1 3的作用下向外旋转关闭, 所述抓手 1 0关闭 (如图 11 )。 Referring to FIG. 9 to FIG. 11 , the working process of the multi-handle repeating intelligent grasping and decoding device for releasing the plate-like object 50 is described in detail. When the plate-like object 50 needs to be translated, the control system is The pallet drive device issues a pallet up command, the pallet drive device drives the pallet 30 to rise in the direction of the arrow (as shown in FIG. 9), and when the pallet 30 rises near the plate-like object 50 Positioning, the control system issues a grip open command to the gripper driving device, and the lower pressing top post 20 applies downward pressure to the upper portion 1 11 of the gripping portion of the gripper 10 in the direction of the arrow, the gripping The lower part of the holding portion 11 3 is twisted The rotating spring shaft 14 is rotated inwardly from the center, the gripping zone 15 is opened and the plate-like object 50 is released onto the pallet 30 (as shown in FIG. 10); the control system drives the pallet The apparatus issues a pallet lowering command, the pallet 30 descending in the direction of the arrow under the action of the pallet driving device, the plate-like object 50 being carried on the pallet 30 and along with the pallet 30 Disengaging from the plate clamping region 16, the control system issues a grip closing command to the grip driving mechanism, and the lower pressing post 20 is translated in the direction of the arrow to apply to the upper portion 111 of the grip portion of the gripper 10. The lower portion of the grip portion 11 is rotated outwardly by the torsion spring 13 and the gripper 10 is closed (Fig. 11).
本发明多抓手重复智能抓取译放装置包括多个抓手 10、 抓手驱动机构、 托 板 30、 托板驱动机构、 以及设置在所述托板 30上的托板传感器; 所述抓手 10 中包括有扭转弹簧 1 3 ,所述扭转弹簧 1 3的上支撑点 1 31与所述抓持部 11抵触, 下支撑点与所述抓手固定座 12抵触, 使所述抓手 10打开后可以在所述扭转弹 簧 1 3的作用下关闭, 从而使得本发明多抓手重复智能抓取译放装置可以重复的 抓取、 译放板状物体; 另一方面, 所述多抓手重复智能抓取译放装置的托板 30 上设置有托板传感器, 所述托板传感器可以随时检测所述托板 30上是否有板状 物体 50 ,从而通过控制所述抓手驱动装置来驱动所述抓手 10及时打开, 最终达 到及时地、 自动的完成板状物体 50的抓取目的, 节省了人力和时间。 总之, 通 过用于检测托板 30上是否具有板状物体 50的托板传感器, 本发明多抓手重复 智能抓取译放装置可以自动的、 及时的控制所述抓手 1 0打开, 通过所述扭转弹 簧 1 3可以及时驱动所述抓手 10关闭, 从而使得本发明多抓手重复智能抓取译 放装置重复的、 及时的、 智能完成抓取译放板状物体。  The multi-handle repeating intelligent grasping and releasing device comprises a plurality of grippers 10, a gripper driving mechanism, a pallet 30, a pallet driving mechanism, and a pallet sensor disposed on the pallet 30; The hand 10 includes a torsion spring 1 3 , the upper support point 1 31 of the torsion spring 13 is in contact with the grip portion 11 , and the lower support point is in contact with the grip holder 12 , so that the grip 10 is After being opened, it can be closed under the action of the torsion spring 13 , so that the multi-grip repeating intelligent grasping and decoding device of the present invention can repeatedly grasp and translate the plate-like object; on the other hand, the multi-hand grip The pallet 30 of the repeating intelligent grasping and releasing device is provided with a pallet sensor, and the pallet sensor can detect whether there is a plate-like object 50 on the pallet 30 at any time, thereby driving by controlling the gripper driving device. The gripper 10 is opened in time, and finally achieves the purpose of grasping the plate-like object 50 in a timely and automatic manner, saving manpower and time. In summary, by using the pallet sensor for detecting whether the pallet 30 has the plate-like object 50, the multi-grip repeating intelligent grasping and releasing device can automatically and timely control the gripper 10 to open. The torsion spring 13 can drive the gripper 10 to close in time, so that the multi-grip repeating intelligent grasping and decoding device of the present invention repeats the timely, intelligent completion of the capture and release of the plate-like object.
以上所揭露的仅为本发明的优选实施例而已, 当然不能以此来限定本发明 之权利范围, 因此依本发明申请专利范围所作的等同变化, 仍属本发明所涵盖 的范围。  The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and the equivalent changes made by the scope of the present invention remain within the scope of the present invention.

Claims

权 利 要 求 Rights request
1、 一种多抓手重复智能抓取译放装置, 适用于抓取、 译放板状物体,其特征在 于:所述多抓手重复智能抓取译放装置包括:  1. A multi-grip repeating intelligent grasping and releasing device, which is suitable for grasping and translating a plate-like object, wherein the multi-grip repeating intelligent grasping and releasing device comprises:
多个抓手, 所述抓手包括抓持部、 抓手固定座、 扭转弹簧, 所述抓持部与 所述抓手固定座枢接, 所述扭转弹簧的上支撑点与所述抓持部抵触, 所述扭转 弹簧的下支撑点与所述抓手固定座抵触;  a plurality of grips, the gripper includes a grip portion, a grip holder, and a torsion spring, the grip portion is pivotally connected to the grip holder, the upper support point of the torsion spring and the grip Abutting, the lower support point of the torsion spring is in contact with the grip holder;
抓手驱动机构, 所述抓手驱动机构与所述抓手的抓持部连接, 所述抓手驱 动机构驱动所述抓手打开或关闭;  a grip driving mechanism, the grip driving mechanism is connected to the grip portion of the gripper, and the grip driving mechanism drives the gripper to open or close;
托板, 所述托板承载所述板状物体;  a pallet, the pallet carrying the board object;
托板驱动机构, 所述托板驱动机构与所述托板连接, 所述托板驱动机构驱 动所述托板移动;  a pallet drive mechanism, the pallet drive mechanism is coupled to the pallet, and the pallet drive mechanism drives the pallet to move;
托板传感器, 所述托板传感器检测所述托板的承载信息; 及  a pallet sensor, wherein the pallet sensor detects bearing information of the pallet; and
控制系统, 所述控制系统分别与所述抓手驱动机构、 托板驱动机构及托板 传感器电连接, 所述控制系统处理所述托板传感器检测的托板的承载信息并控 制所述抓手驱动机构和托板驱动机构的动作。  a control system, wherein the control system is electrically connected to the gripper drive mechanism, the pallet drive mechanism and the pallet sensor, respectively, the control system processes the bearer information of the pallet detected by the pallet sensor and controls the gripper The action of the drive mechanism and the pallet drive mechanism.
2、 如权利要求 1所述的多抓手重复智能抓取译放装置, 其特征在于: 所述抓手 还包括扭转弹簧轴, 所述扭转弹簧轴穿过所述扭转弹簧, 所述抓持部以所述扭 转弹簧轴为旋转轴与所述抓手固定座枢接。 2. The multi-hand grasping intelligent grasping and releasing device according to claim 1, wherein: the gripper further comprises a torsion spring shaft, the torsion spring shaft passing through the torsion spring, the gripping The portion is pivotally connected to the grip holder by using the torsion spring shaft as a rotation axis.
3、 如权利要求 2所述的多抓手重复智能抓取译放装置, 其特征在于: 所述抓持 部包括抓持部主体、 沿所述抓持部主体两端向内侧延伸的抓持部上部和抓持部 下部, 所述抓手固定座包括左侧部、 右侧部、 连接左侧部和右侧部的底座; 所 述扭转弹簧轴依次穿过所述左侧部、 抓手主体及右侧部, 所述抓持部主体以所 述扭转弹簧轴为旋转轴与所述抓手固定座枢接, 且所述抓持部上部与所述底座 之间形成弹簧抵触区, 所述抓持部下部与所述底座之间形成抓持区, 所述扭转 弹簧的上支撑点与所述抓持部上部抵触, 所述扭转弹簧的下支撑点与所述底座 抵触。 The multi-grip repeat intelligent grasping and releasing device according to claim 2, wherein: the grip portion comprises a grip portion main body and a grip extending inwardly along both ends of the grip portion main body a lower portion and a lower portion of the grip portion, the grip holder includes a left side portion, a right side portion, and a base connecting the left side portion and the right side portion; the torsion spring shaft sequentially passes through the left side portion, the gripper The main body and the right side portion, the grip body is pivotally connected to the grip fixing base by using the torsion spring shaft as a rotating shaft, and a spring contact area is formed between the upper portion of the grip portion and the base. Forming a gripping zone between the lower portion of the grip portion and the base, the twist The upper support point of the spring is in contact with the upper portion of the grip portion, and the lower support point of the torsion spring is in contact with the base.
4、 如权利要求 3所述的多抓手重复智能抓取译放装置, 其特征在于: 所述抓持 部下部上具有向抓持区延伸的凸块。 4. The multi-hand grasping intelligent grasping and releasing device according to claim 3, wherein: the lower portion of the grip portion has a protrusion extending toward the gripping region.
5、 如权利要求 3所述的多抓手重复智能抓取译放装置, 其特征在于: 所述底座 相对于所述左侧部和右侧部的位置处设有安装孔。 5. The multi-grip repeat intelligent grasping and releasing device according to claim 3, wherein: the base is provided with a mounting hole at a position relative to the left side portion and the right side portion.
6、 如权利要求 3所述的多抓手重复智能抓取译放装置, 其特征在于: 所述抓手 驱动机构包括下压顶柱和气缸马达, 所述下压顶柱一端与所述气缸马达相连, 另一端悬于所述抓持部上部的正上方。 6. The multi-grip repeat intelligent grasping and releasing device according to claim 3, wherein: the grip driving mechanism comprises a lower pressing top column and a cylinder motor, and one end of the lower pressing top column is connected to the cylinder motor. The other end is suspended directly above the upper portion of the grip portion.
7、 如权利要求 1所述的多抓手重复智能抓取译放装置, 其特征在于: 所述抓手 位于同一平面并形成一个多边形的板材夹持区。 7. The multi-grip repeat intelligent grasping and releasing device according to claim 1, wherein: the grippers are located on the same plane and form a polygonal sheet clamping region.
PCT/CN2009/076064 2009-07-29 2009-12-25 Repeatedly and intelligently gripping and releasing device with multiple jaws WO2011011955A1 (en)

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CN2009100415102A CN101656223B (en) 2009-07-29 2009-07-29 Intelligent gripping/releasing device with a plurality of tongs repeatedly gripping and releasing

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106033739A (en) * 2015-03-19 2016-10-19 南京瀚宇彩欣科技有限责任公司 Substrate supporting device and platform device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105500392A (en) * 2016-02-02 2016-04-20 江苏豪林自动化科技有限公司 Manipulator capable of judging grabbing quantity of plates
CN107564847B (en) * 2017-07-21 2019-12-24 惠科股份有限公司 Manufacturing method and manufacturing equipment of display panel
CN107600874B (en) * 2017-09-11 2023-08-15 苏州海通机器人系统有限公司 Roller transfer type robot
CN116978856B (en) * 2023-09-25 2023-11-24 泓浒(苏州)半导体科技有限公司 Double-arm clean type semiconductor wafer overturning clamp and control method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5775000A (en) * 1996-05-13 1998-07-07 Ebara Corporation Substrate gripper device for spin drying
US6273484B1 (en) * 1999-10-29 2001-08-14 Winbond Electronics Corp. Wafer holding device
US6761362B2 (en) * 2001-04-23 2004-07-13 Kabushiki Kaisha Topcon Wafer holding device
CN1810465A (en) * 2005-01-26 2006-08-02 重机公司 Electronic component part clamping device of electronic component part embarkation machine
CN201017866Y (en) * 2007-02-06 2008-02-06 广东省粤晶高科股份有限公司 Grip of piece sending device of transistor arranging piece prewarming machine
CN101422902A (en) * 2007-10-31 2009-05-06 鸿富锦精密工业(深圳)有限公司 Manipulator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3593292B2 (en) * 2000-01-17 2004-11-24 シャープ株式会社 Optical coupling device with movable contact
JP4746002B2 (en) * 2007-05-07 2011-08-10 リンテック株式会社 Transfer device and transfer method
CN201140393Y (en) * 2007-12-05 2008-10-29 东莞彩显有机发光科技有限公司 Mechanical arm for grasping OLED device
CN201490175U (en) * 2009-07-29 2010-05-26 东莞宏威数码机械有限公司 Repeated intelligent grabbing-releasing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5775000A (en) * 1996-05-13 1998-07-07 Ebara Corporation Substrate gripper device for spin drying
US6273484B1 (en) * 1999-10-29 2001-08-14 Winbond Electronics Corp. Wafer holding device
US6761362B2 (en) * 2001-04-23 2004-07-13 Kabushiki Kaisha Topcon Wafer holding device
CN1810465A (en) * 2005-01-26 2006-08-02 重机公司 Electronic component part clamping device of electronic component part embarkation machine
CN201017866Y (en) * 2007-02-06 2008-02-06 广东省粤晶高科股份有限公司 Grip of piece sending device of transistor arranging piece prewarming machine
CN101422902A (en) * 2007-10-31 2009-05-06 鸿富锦精密工业(深圳)有限公司 Manipulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106033739A (en) * 2015-03-19 2016-10-19 南京瀚宇彩欣科技有限责任公司 Substrate supporting device and platform device

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