WO2011008043A3 - Gas sensor - Google Patents

Gas sensor Download PDF

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Publication number
WO2011008043A3
WO2011008043A3 PCT/KR2010/004635 KR2010004635W WO2011008043A3 WO 2011008043 A3 WO2011008043 A3 WO 2011008043A3 KR 2010004635 W KR2010004635 W KR 2010004635W WO 2011008043 A3 WO2011008043 A3 WO 2011008043A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
gas sensor
gas
nanotube powder
powder
Prior art date
Application number
PCT/KR2010/004635
Other languages
French (fr)
Korean (ko)
Other versions
WO2011008043A9 (en
WO2011008043A2 (en
Inventor
이상훈
황하룡
Original Assignee
(주)와이즈산전
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)와이즈산전 filed Critical (주)와이즈산전
Publication of WO2011008043A2 publication Critical patent/WO2011008043A2/en
Publication of WO2011008043A9 publication Critical patent/WO2011008043A9/en
Publication of WO2011008043A3 publication Critical patent/WO2011008043A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82BNANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0095Manufacture or treatments or nanostructures not provided for in groups B82B3/0009 - B82B3/009
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

Abstract

Disclosed is a gas sensor. A gas sensor according to one example of the present invention comprises: a first electrode and a second electrode which are formed on a base plate, which have an alternating power source applied to them, and which are positioned apart from each other; and a carbon nanotube powder or nanowire powder coated in regions formed between the first electrode and the second electrode, and the impedance of the nanotube powder changes depending on the concentration of a gas.
PCT/KR2010/004635 2009-07-17 2010-07-16 Gas sensor WO2011008043A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0065227 2009-07-17
KR1020090065227A KR20110007676A (en) 2009-07-17 2009-07-17 Gas sensor

Publications (3)

Publication Number Publication Date
WO2011008043A2 WO2011008043A2 (en) 2011-01-20
WO2011008043A9 WO2011008043A9 (en) 2011-03-31
WO2011008043A3 true WO2011008043A3 (en) 2011-05-12

Family

ID=43449987

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/004635 WO2011008043A2 (en) 2009-07-17 2010-07-16 Gas sensor

Country Status (2)

Country Link
KR (1) KR20110007676A (en)
WO (1) WO2011008043A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101492389B1 (en) * 2013-10-18 2015-02-12 공주대학교 산학협력단 Electrostatic gas sensor
CN116678935A (en) 2017-11-20 2023-09-01 霍尼韦尔国际公司 Thin ionization detector
KR102651194B1 (en) * 2019-05-21 2024-03-27 울산과학기술원 GASS SENSOR BASED ON THE 3ω-METHOD USING A SUSPENDED CARBON NANOWIRE AND METHOD FOR MANUFACTURING GASS SENSOR
KR102435557B1 (en) * 2020-04-10 2022-08-24 포항공과대학교 산학협력단 Flexible gas sensor and method of manufacturing the same
KR102608526B1 (en) * 2021-10-05 2023-12-04 한국과학기술원 Suspended nanowire structure capable of high-speed operation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002082082A (en) * 2000-09-07 2002-03-22 Matsushita Refrig Co Ltd Odor sensor and its manufacturing method
KR20070096121A (en) * 2006-01-05 2007-10-02 삼성전자주식회사 Gas sensor using carbon nanotube and method of measuring using the same
KR100809421B1 (en) * 2006-09-29 2008-03-05 한국전자통신연구원 Gas sensor having nano size sensing material and method of sensing using the same
JP2009098121A (en) * 2007-09-26 2009-05-07 Institute Of National Colleges Of Technology Japan Gas sensor and method for manufacturing the gas sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002082082A (en) * 2000-09-07 2002-03-22 Matsushita Refrig Co Ltd Odor sensor and its manufacturing method
KR20070096121A (en) * 2006-01-05 2007-10-02 삼성전자주식회사 Gas sensor using carbon nanotube and method of measuring using the same
KR100809421B1 (en) * 2006-09-29 2008-03-05 한국전자통신연구원 Gas sensor having nano size sensing material and method of sensing using the same
JP2009098121A (en) * 2007-09-26 2009-05-07 Institute Of National Colleges Of Technology Japan Gas sensor and method for manufacturing the gas sensor

Also Published As

Publication number Publication date
KR20110007676A (en) 2011-01-25
WO2011008043A9 (en) 2011-03-31
WO2011008043A2 (en) 2011-01-20

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