WO2010120601A2 - High power, high energy and large area energy storage devices - Google Patents
High power, high energy and large area energy storage devices Download PDFInfo
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- WO2010120601A2 WO2010120601A2 PCT/US2010/030121 US2010030121W WO2010120601A2 WO 2010120601 A2 WO2010120601 A2 WO 2010120601A2 US 2010030121 W US2010030121 W US 2010030121W WO 2010120601 A2 WO2010120601 A2 WO 2010120601A2
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- Prior art keywords
- multiplicity
- electrode
- cells
- stripes
- current collector
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- 238000004146 energy storage Methods 0.000 title claims abstract description 90
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 238000000034 method Methods 0.000 claims abstract description 35
- 239000003792 electrolyte Substances 0.000 claims abstract description 32
- 239000010409 thin film Substances 0.000 claims abstract description 21
- 238000000059 patterning Methods 0.000 claims description 30
- 238000000151 deposition Methods 0.000 claims description 22
- 230000008021 deposition Effects 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000012545 processing Methods 0.000 abstract description 11
- 239000003990 capacitor Substances 0.000 abstract description 6
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- 238000000576 coating method Methods 0.000 abstract description 5
- 210000004027 cell Anatomy 0.000 description 80
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- 238000010586 diagram Methods 0.000 description 8
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- 239000007773 negative electrode material Substances 0.000 description 5
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- 239000000203 mixture Substances 0.000 description 4
- 239000007774 positive electrode material Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
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- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 2
- 229920001690 polydopamine Polymers 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 210000000352 storage cell Anatomy 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910032387 LiCoO2 Inorganic materials 0.000 description 1
- 229910011279 LiCoPO4 Inorganic materials 0.000 description 1
- 229910052493 LiFePO4 Inorganic materials 0.000 description 1
- 229910013084 LiNiPO4 Inorganic materials 0.000 description 1
- 229910002097 Lithium manganese(III,IV) oxide Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0436—Small-sized flat cells or batteries for portable equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/0029—Processes of manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/008—Terminals
- H01G9/012—Terminals specially adapted for solid capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/15—Solid electrolytic capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
- H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/42—Grouping of primary cells into batteries
- H01M6/46—Grouping of primary cells into batteries of flat cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2220/00—Batteries for particular applications
- H01M2220/20—Batteries in motive systems, e.g. vehicle, ship, plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2220/00—Batteries for particular applications
- H01M2220/30—Batteries in portable systems, e.g. mobile phone, laptop
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
- Y10T29/49115—Electric battery cell making including coating or impregnating
Definitions
- the present invention relates generally to thin film energy storage devices, and more particularly to large area energy storage devices with high power and high energy.
- Energy storage devices include a wide range of devices such as batteries, thin film batteries (TFBs), capacitors, supercapacitors and ultracapacitors. These energy storage devices are used in a wide variety of applications including micro-power sources (for micro- sensors, smart cards, real time clocks, etc.) and larger power/energy sources (for cell phones, PDAs, laptops, power tools, transportation, heavy industry, power generation and transmission, complementary energy storage for renewable energy generation, etc.).
- micro-power sources for micro- sensors, smart cards, real time clocks, etc.
- larger power/energy sources for cell phones, PDAs, laptops, power tools, transportation, heavy industry, power generation and transmission, complementary energy storage for renewable energy generation, etc.
- inventions of this invention provide readily manufacturable, high power, high energy, large area energy storage devices.
- the approach of the present invention includes, but is not limited to, the use of processes compatible with large area processing tools, such as large area coating systems.
- the approach of the present invention also includes, but is not limited to, the use of linear processing systems compatible with flexible thin film substrates.
- the energy storage devices may include batteries, super- capacitors and ultra-capacitors, whose basic structure is comprised of a positive electrode, a solid state electrolyte, and a negative electrode, and may also include negative and/or positive terminal current collectors.
- Embodiments of the energy storage devices described herein may be comprised of positive electrode materials with high charge capacity and high voltage capability, negative electrode materials with high charge capacity, and electrolytes with high electrochemical stability, high ionic conductivity and very low electrical conductivity.
- a method of manufacturing an energy storage device comprises: providing the substrate; depositing layers corresponding to a thin film energy storage device on the substrate, the layers including, in order of deposition, a current collector, a first electrode, an electrolyte and a second electrode; patterning the current collector to form a multiplicity of current collector stripes; patterning the first electrode to form a multiplicity of first electrode stripes, each of the first electrode stripes being on top of a corresponding one of the multiplicity of current collector stripes; and patterning the second electrode to form a multiplicity of second electrode stripes, each of the multiplicity of second electrode stripes corresponding to one of the multiplicity
- a second method of manufacturing an energy storage device comprises: providing the substrate; depositing layers corresponding to a thin film energy storage device on the substrate, the layers including, in order of deposition, a current collector, a first electrode, an electrolyte and a second electrode; patterning the current collector to form a multiplicity of current collector stripes; patterning the first electrode to form a plurality of first area electrodes on the multiplicity of current collector stripes, the plurality of first area electrodes being formed in a multiplicity of first area electrode rows, each of the multiplicity of first area electrode rows corresponding to a different one of the multiplicity of current collector stripes; and patterning the second electrode to form a multiplicity of second electrode stripes, each of the multiplicity of second electrode stripes corresponding to a different one of the multiplicity of first electrode stripes; wherein each of the plurality of cells comprises one of the plurality
- an energy storage device includes a multiplicity of thin film cells formed on a single substrate, the multiplicity of cells being electrically connected in series, each one of the multiplicity of cells comprising: a current collector on the surface of the substrate; a first electrode on the current collector; a second electrode over the first electrode; and an electrolyte layer between the first electrode and the second electrode.
- a first one of the multiplicity of cells and a second one of the multiplicity of cells are electrically connected in series by the current collector stripe corresponding to the first one of the cells being electrically contacted to the second electrode stripe corresponding to the second one of the cells, and wherein the first one of the cells is adjacent to the second one of the cells on the substrate.
- a second energy storage device includes a plurality of thin film cells formed on a single substrate, the plurality of cells being electrically connected in a network, the network including both parallel and serial electrical connections between individual cells of the plurality of cells, the plurality of cells comprising: a multiplicity of current collector stripes on the surface of the substrate, the multiplicity of current collector stripes being mutually parallel; a plurality of first cell electrodes on the multiplicity of current collector stripes, the plurality of first cell electrodes corresponding to the plurality of cells; a multiplicity of second electrode stripes over the plurality of first cell electrodes, the multiplicity of second electrode stripes being parallel to the multiplicity of current collector stripes; and an electrolyte layer between the plurality of first cell electrodes and the multiplicity of second electrode stripes.
- the multiplicity of current collector stripes may provide parallel electrical connection of the plurality of cells.
- the plurality of cells may comprise rows of cells, and the rows of cells may be electrically connected in series with each other.
- FIG. 1 is a representation of a reel-to-reel tool set-up for fabrication of energy storage devices on large area substrates, according to some embodiments of the present invention
- FIG. 2 is a schematic diagram of battery cells connected in series
- FIG. 3 is a representation of battery cells on a large area substrate, corresponding to the schematic diagram of FIG. 2, according to some embodiments of the present invention
- FIG. 4 is a schematic diagram of battery cells connected both in series and parallel, according to some embodiments of the present invention.
- FIG. 5 is a representation of battery cells on a large area substrate, corresponding to the schematic diagram of FIG. 4, according to some embodiments of the present invention;
- FIGs. 6A to 6H illustrate an energy storage device fabrication process, according to some embodiments of the present invention
- FIG. 7 is a schematic diagram of part of the battery cell network of FIG. 4;
- FIG. 8 shows a top view of patterned cathode current collector and cathode layers corresponding to the structure of FIGs. 6B and 7, according to some embodiments of the present invention
- FIG. 9 is a cross-section of an energy storage device showing series electrical connection of energy storage cells, according to some embodiments of the present invention.
- FIG. 10 is a schematic representation of a process line for fabrication of energy storage devices, according to some embodiments of the present invention.
- large area TFBs are provided.
- concepts of the present invention are not limited to large area energy storage devices, but are applicable to energy storage devices generally, including micro-power sources (for micro-sensors, smart cards, etc.), larger power/energy sources (for cell phones, PDAs, laptops, power tools, etc.), and large format energy storage devices (meter-scale devices for mounting behind solar panels, for example).
- the energy storage devices are formed on substrates.
- Specific examples of flexible large area substrates, suitable for reel-to-reel processing, are provided.
- concepts of the present invention are not limited to large area substrates, but are applicable to energy storage devices formed on a wide range of substrates, including semiconductor substrates, large area substrates, flexible large area substrates, conducting/metallic and dielectric substrates, etc.
- FIG 1 is a representation of a reel-to-reel tool set-up for fabrication of thin film energy storage devices on large area substrates, according to some embodiments of the present invention.
- a flexible large area substrate 2 is mounted on reels 3 and is moved through a processing tool 4, as indicated.
- the processing tool 4 may include deposition equipment, such as a large area coater, and patterning equipment. For ease of illustration, only one processing tool is shown; however, multiple processing tools may be used on the same reel-to-reel tool set-up. See Figure 10.
- the energy storage devices may comprise large numbers of energy storage device cells fabricated on the substrate 2.
- the energy storage device cells may be formatted as stripes across the width of the substrate.
- cathode stripes 5 on current collector stripes 7, which are the first two layers in the energy storage device are shown in Fig. 1 ; the cathode stripes define individual cells of an energy storage device.
- the energy storage device may be formatted as rows of smaller energy storage device cells.
- cathode areas 6 on current collector stripes 7 are also shown in Fig. 1; the cathode areas define individual cells of an energy storage device. See below for a fuller description of the structure of energy storage devices.
- energy storage devices may have a wide variety of different formats and the embodiments of the present invention are not limited to the formats shown in Fig.l.
- FIG 2 is a schematic diagram of battery cells 11, electrically connected in series.
- Such chains 10 of battery cells 11 provide an output voltage which is a sum of the voltages across the individual battery cells 11.
- Figure 3 shows a representation of battery cells with a "stripe" format on a large area substrate 2 which correspond to the schematic diagram of Fig. 2, according to some embodiments of the invention.
- the cathode stripes 5 represent the general format and layout of the cells; more details of the cell structure and the way in which they are connected electrically in series are provided, by way of example, in the cross-sectional illustrations of Figs.
- embodiments of the present invention may include a network 20 of battery cells 11 which are electrically connected together both in series and in parallel, as shown schematically in Figure 4.
- FIG. 5 shows a representation of an array of battery cells with a format on a large area substrate 2 which corresponds to the schematic diagram of Fig. 4, according to some embodiments of the invention.
- the cathode areas 6 represent the general format and layout of the cells - on each current collector stripe 7 there are n cathode areas 6, where the cathode areas 6 define the cells of an energy storage device. More details of the way in which the cells are connected electrically in series and in parallel are provided, by way of example, in Fig. 8 and Figs. 6A-6H.
- FIGs 6A-6H illustrate a fabrication process for an energy storage device, according to some embodiments of the invention.
- the particular embodiment shown in Figs. 6A-6H is a multiplicity of battery cells on a single substrate.
- a current collector 102 and then a cathode 104 (also referred to herein as a first electrode) are deposited on a substrate 100, to provide the structure shown in Fig. 6A.
- the current collector 102 and cathode 104 are patterned using well known lithographic techniques, to provide the structure shown in Fig. 6B.
- the current collector has been patterned to form a multiplicity of current collector stripes - for example, see the current collector stripes 7 in Figs. 1, 3 and 5.
- the cathode has been patterned to form a multiplicity of cathode structures.
- the cathode structures may be cathode stripes 5, as shown in Figs. 1 and 3, or cathode areas 6, as shown in Figs. 1, 5 and 8.
- An electrolyte 106 is deposited over the patterned current collector and cathode, to provide the structure shown in Fig. 6C.
- the electrolyte 106 is then patterned using well known lithographic techniques, to provide the structure shown in Fig. 6D.
- the patterned gaps in the electrolyte 106 are for making electrical contact to the patterned current collector 102.
- An anode 108 (also referred to herein as a second electrode) is deposited over the patterned electrolyte, and makes electrical contact to the current collector 102 through the gaps in the patterned electrolyte 106, to provide the structure shown in Fig. 6E.
- the anode 108 is patterned using well known lithographic techniques in order to provide cell isolation, as shown in Fig. 6F.
- a final protective coating 110 is deposited, to provide the structure shown in Fig. 6G.
- the final protective coating 110 is patterned using well known lithographic techniques to provide gaps in the protective coating to allow external electrical contact to the series chain of battery cells, as shown in Fig. 6H.
- well-known lithographic techniques covers a wide range of lithographic techniques known in the industry, including photolithography, resist-based techniques, resistless techniques such as laser-based patterning, etc.
- the layer 108 may include both an anode and a protective coating for the underlying anode layer - the anode would be deposited first, and the protective coating second.
- the anode is a reactive metal such as lithium
- a protective coating is required if the structure is to be exposed to air for patterning.
- the protective coating may include blanket deposition of metals and dielectrics. Examples of potentially suitable metals are Cu, Ti and Al. Suitable dielectric oxides would need to be stable in contact with the anode.
- the protective coating may also be an anode current collector.
- the patterning of layer 108, for this embodiment, is the same as described above.
- the layer 108 may include both an anode and an anode current collector - the anode would be deposited first, and the anode current collector second.
- the patterning of layer 108, for this embodiment is the same as described above.
- Figure 7 shows a detail of the battery cell network of Fig. 4, and Figure 8 shows a top view of the patterned current collector 102 and cathode layer 104 corresponding to the structure of Fig. 7.
- Fig. 8 shows the cathode areas 6 for four energy storage cells.
- the current collector which is patterned in stripes 7, as seen in Fig. 8, provides the parallel connection between individual cells.
- the cross-sectional plane X-X in Fig. 8 is the same as the cross-sectional plane of Figs. 6A-6H.
- the cross-section X-X is the same as the two cells shown in cross-section in Fig. 6B.
- FIG. 9 shows a version of Fig. 6H in which the series electrical connection of energy storage device cells, such as battery cells, is clearly indicated.
- a first energy storage device cell comprises a first current collector 910, a first cathode 912, a first electrolyte 914 and a first anode 916.
- a second energy storage device comprises a second current collector 920, a second cathode 922, a second electrolyte 924 and a second anode 926.
- External electrical connection to the energy storage device is made through electrical leads 904 and 908. Electrical lead 904 is connected to a first pad 902 and electrical lead 908 is connected to the second current collector 920.
- the energy storage device cells may include the cathode stripes or cathode area electrodes.
- an energy storage device cell may include a current collector stripe, the corresponding cathode stripe, the corresponding anode stripe, and the corresponding portion of electrolyte layer.
- the current collector stripe, cathode stripe and anode stripe may be mutually parallel.
- an energy storage device may include a cathode area electrode, the corresponding portion of current collector stripe, the corresponding portion of anode stripe, and the corresponding portion of electrolyte layer.
- the cathode area electrodes may be arranged in a row where the row is parallel to the current collector stripe and the anode stripe.
- the energy storage devices may be packaged in different formats. For example, energy storage devices on flexible substrates may be rolled into cylinders. Alternatively, energy storage devices may be stacked, and the stacked devices may be electrically connected together, either serially and/or in parallel.
- energy storage devices may be stacked and then rolled. Dimensions of typical packaged devices may vary from millimeter up to meter scale. The energy storage devices are suitable for a very wide range of applications, including applications requiring one or more of high power, high energy, and high voltage (multiples of single cell voltage). Note that the voltage per cell for a typical thin film battery may be expected to be around 3 to 5 V, and connecting these cells in series may allow much higher voltages to be achieved.
- Embodiments of the energy storage devices described herein may be comprised of negative electrode (anode) materials with high charge capacity and high voltage tolerance, positive electrode (cathode) materials with high charge capacity, and electrolytes with high electrochemical stability.
- the positive electrode materials may include transition metal oxides, phosphates, fluorinated oxides and phosphates, and various mixtures thereof.
- metal oxide positive electrode materials are layered materials, such as LiCoO 2 and Li n Ni x Co y Al z O m , spinel materials such as LiMn 2 O 4 and Co/Ni substituted Mn oxide, and olivine materials such as LiFePO 4 .
- Examples of materials that have high voltage tolerance include LiCoPO 4 and LiNiPO 4 , with open circuit voltages of ⁇ 4.8 and 5.2V, respectively, with respect to a Li metal negative electrode. These materials also present high charge capacities of ⁇ 170 mAh/gm.
- High charge capacity negative electrode materials may include Si, Sn, Ge, Al, etc., which will form binary alloys with the ionic charge carrier, Li.
- the use of such materials offers the potential to eliminate the use of pure Li, which presents significant challenges and complexity in manufacturing.
- One of the biggest concerns about the alloy negative electrode materials is the potential for stress in the deposited electrode material resulting from large volume changes during charging (MLi x — > M + xLi) and discharging (M + xLi — > MLi x ) cycles.
- the build-up of stress may be alleviated by using nano-structuring of the deposited layers in grain size, density or porosity, for example, to allow "breathing" of the negative electrode materials during these cycling events.
- All of these positive and negative electrode materials may be used in fabricating energy storage devices.
- Various deposition methods including standard vacuum deposition methods and non-vacuum deposition methods may be used.
- vacuum deposition PVD and CVD techniques may be used.
- doping of the electrode materials sputter deposition may be used with target materials with the desired composition.
- the electrode materials may be co-sputtered from several targets to form the correct composition, and, if needed, in a reactive environment. Such methods may be used to add a carbon coating as well.
- Modulation of the grain structure to achieve nano-structured or porous materials may be achieved by controlling the deposition processes. For example, low temperature deposition may be used to limit the diffusion kinetics and control the grain growth.
- Electrolytes are desired that have high ionic conductivity, low electrical conductivity and a high and broad electrochemical stability window.
- Suitable liquid (at room temperature) electrolyte candidates may be ionic liquids and molten salts with solvated Li salts.
- Embodiments of the energy storage devices with large form factors may be fabricated using large-area coaters, such as coaters used in the flat panel display, glass coating and thin film solar photovoltaic industries.
- Large-area coating systems may be beneficial for scaling of production as well as being able to efficiently handle the product's large size and manufacturing worthy throughputs.
- FIG. 10 shows a schematic representation of a process line 1000 according to some embodiments of the present invention.
- the process line may be set-up as a linear processing system.
- the process line may be compatible with flexible thin film substrates and may use a reel-to-reel set-up such as shown in Fig. 1.
- the process line 1000 comprises multiple process tools 1010, such as deposition tools and patterning tools.
- the substrates/flexible substrate move through the process tools 1010 serially as indicated by the arrows.
- the process tools 1010 may be chosen to fabricate energy storage devices according to any of the methods described above.
- the process tools 1010 may include: deposition tools for depositing layers corresponding to a thin film energy storage device on a substrate, the layers including, in order of deposition, a current collector, a first electrode, an electrolyte and a second electrode; a first patterning tool to pattern the current collector; a second patterning tool to pattern the first electrode; and a third patterning tool to pattern the second electrode. Note that the order of process tools in the process line will be determined by the particular fabrication method being used.
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- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Secondary Cells (AREA)
- Connection Of Batteries Or Terminals (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010800190260A CN102414900A (en) | 2009-04-13 | 2010-04-06 | High power, high energy and large area energy storage devices |
EP10764923.8A EP2419956B1 (en) | 2009-04-13 | 2010-04-06 | High power, high energy and large area energy storage devices |
KR1020117027129A KR101690589B1 (en) | 2009-04-13 | 2010-04-06 | High powerhigh energy and large area energy storage devices |
JP2012506071A JP5640074B2 (en) | 2009-04-13 | 2010-04-06 | High power, high energy, and large area energy storage devices |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/422,739 US20100261049A1 (en) | 2009-04-13 | 2009-04-13 | high power, high energy and large area energy storage devices |
US12/422,739 | 2009-04-13 |
Publications (2)
Publication Number | Publication Date |
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WO2010120601A2 true WO2010120601A2 (en) | 2010-10-21 |
WO2010120601A3 WO2010120601A3 (en) | 2011-01-13 |
Family
ID=42934643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/US2010/030121 WO2010120601A2 (en) | 2009-04-13 | 2010-04-06 | High power, high energy and large area energy storage devices |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100261049A1 (en) |
EP (1) | EP2419956B1 (en) |
JP (1) | JP5640074B2 (en) |
KR (1) | KR101690589B1 (en) |
CN (1) | CN102414900A (en) |
WO (1) | WO2010120601A2 (en) |
Cited By (2)
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WO2013106082A3 (en) * | 2011-06-17 | 2013-10-17 | Applied Materials, Inc. | Mask-less fabrication of thin film batteries |
US9240508B2 (en) | 2011-08-08 | 2016-01-19 | Applied Materials, Inc. | Thin film structures and devices with integrated light and heat blocking layers for laser patterning |
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JP5435131B2 (en) * | 2010-06-28 | 2014-03-05 | 株式会社村田製作所 | Electric storage device and manufacturing method thereof |
JP2014523624A (en) * | 2011-07-12 | 2014-09-11 | アプライド マテリアルズ インコーポレイテッド | Method for producing a change in porosity of a lithium ion battery electrode film |
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JP2016501439A (en) * | 2012-12-19 | 2016-01-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Maskless manufacturing of vertical thin film batteries |
TWI485905B (en) * | 2014-07-18 | 2015-05-21 | Iner Aec Executive Yuan | Thin film battery structure and manufacturing method thereof |
KR101570983B1 (en) | 2014-11-11 | 2015-11-23 | 한국에너지기술연구원 | Block-type supercapacitors and fabricating method for the same, graphene oxide-metal oxide composite and synthesizing method for the composite |
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JP2022067009A (en) * | 2020-10-19 | 2022-05-02 | トライポッド・デザイン株式会社 | battery |
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-
2010
- 2010-04-06 EP EP10764923.8A patent/EP2419956B1/en not_active Not-in-force
- 2010-04-06 KR KR1020117027129A patent/KR101690589B1/en active IP Right Grant
- 2010-04-06 CN CN2010800190260A patent/CN102414900A/en active Pending
- 2010-04-06 JP JP2012506071A patent/JP5640074B2/en not_active Expired - Fee Related
- 2010-04-06 WO PCT/US2010/030121 patent/WO2010120601A2/en active Application Filing
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013106082A3 (en) * | 2011-06-17 | 2013-10-17 | Applied Materials, Inc. | Mask-less fabrication of thin film batteries |
US9240508B2 (en) | 2011-08-08 | 2016-01-19 | Applied Materials, Inc. | Thin film structures and devices with integrated light and heat blocking layers for laser patterning |
US9252320B2 (en) | 2011-08-08 | 2016-02-02 | Applied Materials, Inc. | Thin film structures and devices with integrated light and heat blocking layers for laser patterning |
US9252308B2 (en) | 2011-08-08 | 2016-02-02 | Applied Materials, Inc. | Thin film structures and devices with integrated light and heat blocking layers for laser patterning |
Also Published As
Publication number | Publication date |
---|---|
KR101690589B1 (en) | 2016-12-28 |
JP5640074B2 (en) | 2014-12-10 |
JP2012523676A (en) | 2012-10-04 |
WO2010120601A3 (en) | 2011-01-13 |
CN102414900A (en) | 2012-04-11 |
KR20120030367A (en) | 2012-03-28 |
US20100261049A1 (en) | 2010-10-14 |
EP2419956B1 (en) | 2018-06-06 |
EP2419956A4 (en) | 2014-01-08 |
EP2419956A2 (en) | 2012-02-22 |
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