WO2010120491A3 - Self-cleaning wiresaw apparatus and method - Google Patents

Self-cleaning wiresaw apparatus and method Download PDF

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Publication number
WO2010120491A3
WO2010120491A3 PCT/US2010/029144 US2010029144W WO2010120491A3 WO 2010120491 A3 WO2010120491 A3 WO 2010120491A3 US 2010029144 W US2010029144 W US 2010029144W WO 2010120491 A3 WO2010120491 A3 WO 2010120491A3
Authority
WO
WIPO (PCT)
Prior art keywords
wiresaw
cleaning
self
cutting
wiresaw apparatus
Prior art date
Application number
PCT/US2010/029144
Other languages
French (fr)
Other versions
WO2010120491A2 (en
Inventor
Steven Grumbine
Carlos Barros
Ramasubramanyam Nagarajan
Original Assignee
Cabot Microelectronics Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corporation filed Critical Cabot Microelectronics Corporation
Priority to EP20100764843 priority Critical patent/EP2415070A4/en
Priority to JP2012503590A priority patent/JP5540072B2/en
Priority to US13/258,112 priority patent/US8851059B2/en
Publication of WO2010120491A2 publication Critical patent/WO2010120491A2/en
Publication of WO2010120491A3 publication Critical patent/WO2010120491A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/242—With means to clean work or tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The present invention provides a self-cleaning wiresaw cutting apparatus including a cleaning mechanism adapted to clean the components of the wiresaw before, during, or after a cutting process or to humidify the cutting region of the apparatus. The apparatus contains at least one dispenser adapted to dispense an aqueous fluid onto various components of the wiresaw.
PCT/US2010/029144 2009-04-01 2010-03-30 Self-cleaning wiresaw apparatus and method WO2010120491A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP20100764843 EP2415070A4 (en) 2009-04-01 2010-03-30 Self-cleaning wiresaw apparatus and method
JP2012503590A JP5540072B2 (en) 2009-04-01 2010-03-30 Self-cleaning wire saw device and method
US13/258,112 US8851059B2 (en) 2009-04-01 2010-03-30 Self-cleaning wiresaw apparatus and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21159209P 2009-04-01 2009-04-01
US61/211,592 2009-04-01

Publications (2)

Publication Number Publication Date
WO2010120491A2 WO2010120491A2 (en) 2010-10-21
WO2010120491A3 true WO2010120491A3 (en) 2011-01-13

Family

ID=42983067

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2010/029144 WO2010120491A2 (en) 2009-04-01 2010-03-30 Self-cleaning wiresaw apparatus and method

Country Status (5)

Country Link
US (1) US8851059B2 (en)
EP (1) EP2415070A4 (en)
JP (1) JP5540072B2 (en)
TW (1) TWI368563B (en)
WO (1) WO2010120491A2 (en)

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CN102107465A (en) * 2010-11-30 2011-06-29 西安隆基硅材料股份有限公司 Method and device for reducing cutting line mark of solar silicon slice
DE102013219468B4 (en) * 2013-09-26 2015-04-23 Siltronic Ag A method of simultaneously separating a plurality of slices from a workpiece
JP5865436B2 (en) * 2014-06-19 2016-02-17 株式会社アマダホールディングス Vibration suppression method and vibration suppression device for band saw blade in band saw machine
KR20160015068A (en) * 2014-07-30 2016-02-12 두산중공업 주식회사 Treatment device for waste steam generator, and installation method thereof
JP6304118B2 (en) * 2015-05-01 2018-04-04 信越半導体株式会社 Wire saw equipment
CN107538632A (en) * 2016-06-24 2018-01-05 上海新昇半导体科技有限公司 A kind of linear cutting mortar supply system and method
CN110883955B (en) * 2019-11-28 2021-11-02 西安奕斯伟材料科技有限公司 Wire cutting cleaning device and wire cutting system
CN114434664A (en) * 2022-03-07 2022-05-06 广东高景太阳能科技有限公司 Device for reducing wire jumper rate of silicon rod cutting and cutting method

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US20030170948A1 (en) * 2002-03-07 2003-09-11 Memc Electronic Materials, Inc. Method and apparatus for slicing semiconductor wafers

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Publication number Priority date Publication date Assignee Title
KR20000022567A (en) * 1998-09-01 2000-04-25 오카모토 유지 Method for cutting rare earth alloy, method for manufacturing rare earth alloy plates and method for manufacturing rare earth alloy magnets using wire saw, and voice coil motor
JP2000087059A (en) * 1998-09-16 2000-03-28 Hisafuku Yamaguchi Cutting liquid and cutting of work
US20030170948A1 (en) * 2002-03-07 2003-09-11 Memc Electronic Materials, Inc. Method and apparatus for slicing semiconductor wafers

Also Published As

Publication number Publication date
JP5540072B2 (en) 2014-07-02
EP2415070A2 (en) 2012-02-08
EP2415070A4 (en) 2012-09-26
WO2010120491A2 (en) 2010-10-21
US8851059B2 (en) 2014-10-07
TWI368563B (en) 2012-07-21
US20120006312A1 (en) 2012-01-12
TW201043422A (en) 2010-12-16
JP2012522655A (en) 2012-09-27

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