WO2010104291A3 - 광원특성 검사 시스템 및 이를 이용한 검사방법 - Google Patents

광원특성 검사 시스템 및 이를 이용한 검사방법 Download PDF

Info

Publication number
WO2010104291A3
WO2010104291A3 PCT/KR2010/001401 KR2010001401W WO2010104291A3 WO 2010104291 A3 WO2010104291 A3 WO 2010104291A3 KR 2010001401 W KR2010001401 W KR 2010001401W WO 2010104291 A3 WO2010104291 A3 WO 2010104291A3
Authority
WO
WIPO (PCT)
Prior art keywords
inspected
light sources
optical characteristic
inspection
present
Prior art date
Application number
PCT/KR2010/001401
Other languages
English (en)
French (fr)
Other versions
WO2010104291A2 (ko
Inventor
박성림
이현희
조재봉
김영곤
Original Assignee
광전자정밀 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 광전자정밀 주식회사 filed Critical 광전자정밀 주식회사
Publication of WO2010104291A2 publication Critical patent/WO2010104291A2/ko
Publication of WO2010104291A3 publication Critical patent/WO2010104291A3/ko

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/505Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors measuring the colour produced by lighting fixtures other than screens, monitors, displays or CRTs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/506Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors measuring the colour produced by screens, monitors, displays or CRTs

Abstract

본 발명은 검사대상광원에 대한 제조상태를 신속하고 정확하게 검사할 수 있는 광원특성 검사 시스템 및 검사방법에 관한 것이다다. 이를 위해 본 발명은 검사 대상이 되는 복수개의 검사대상광원과 각각 일대일 대응되도록 구비되며, 구획된 영역에서 상기 검사대상광원에서 발광되는 빛을 측정하는 복수개의 컬러센서, 상기 컬러센서에서 측정된 데이터를 바탕으로 상기 검사대상광원에 대한 특성값을 산출하는 제어부, 그리고 상기 복수개의 검사대상광원이 기판상에 일정간격으로 배열된 검사대상광원 모듈을 반입하여 상기 검사대상광원들이 상기 컬러센서와 일대일 대응되는 위치에 배치되어 고정되도록 하는 설치유닛을 포함하는 광원특성 검사 시스템 및 검사방법을 제공한다.
PCT/KR2010/001401 2009-03-13 2010-03-05 광원특성 검사 시스템 및 이를 이용한 검사방법 WO2010104291A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090021709A KR101049097B1 (ko) 2009-03-13 2009-03-13 광원특성 검사 시스템 및 이를 이용한 검사방법
KR10-2009-0021709 2009-03-13

Publications (2)

Publication Number Publication Date
WO2010104291A2 WO2010104291A2 (ko) 2010-09-16
WO2010104291A3 true WO2010104291A3 (ko) 2010-12-09

Family

ID=42728919

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/001401 WO2010104291A2 (ko) 2009-03-13 2010-03-05 광원특성 검사 시스템 및 이를 이용한 검사방법

Country Status (2)

Country Link
KR (1) KR101049097B1 (ko)
WO (1) WO2010104291A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8823406B2 (en) * 2010-10-20 2014-09-02 Cascade Micotech, Inc. Systems and methods for simultaneous optical testing of a plurality of devices under test

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100768884B1 (ko) * 2007-04-26 2007-10-19 서승환 기판의 발광소자 검사장치
KR100816289B1 (ko) * 2006-11-24 2008-03-24 (주)다윈텍 컬러 제어방법 및 이를 이용한 led 백라이트 시스템
WO2008059767A1 (fr) * 2006-11-15 2008-05-22 Japan Electronic Materials Corp. Appareil d'inspection de dispositif optique
KR20080089380A (ko) * 2005-12-06 2008-10-06 엔피스 리미티드 개선된 led 어레이

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080089380A (ko) * 2005-12-06 2008-10-06 엔피스 리미티드 개선된 led 어레이
WO2008059767A1 (fr) * 2006-11-15 2008-05-22 Japan Electronic Materials Corp. Appareil d'inspection de dispositif optique
KR100816289B1 (ko) * 2006-11-24 2008-03-24 (주)다윈텍 컬러 제어방법 및 이를 이용한 led 백라이트 시스템
KR100768884B1 (ko) * 2007-04-26 2007-10-19 서승환 기판의 발광소자 검사장치

Also Published As

Publication number Publication date
KR101049097B1 (ko) 2011-07-15
KR20100103208A (ko) 2010-09-27
WO2010104291A2 (ko) 2010-09-16

Similar Documents

Publication Publication Date Title
WO2012049326A3 (de) Verfahren und vorrichtung zum kalibrieren eines optischen systems, abstandsbestimmungsvorrichtung sowie optisches system
WO2011091280A3 (en) Methods and systems for analyte measurement
WO2010000818A3 (en) Calibration of a profile measuring system
EP2600114A3 (en) Multi-point measuring method of fbg sensor and multi-point measuring apparatus
BR112014007577A2 (pt) sistema de calibração de inspeção de manta e métodos relacionados
TW200707088A (en) Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method
WO2008084637A1 (ja) 対象物の温度分布測定方法及びセンサユニット
MX2016001824A (es) Sistemas y metodos para calibrar elementos informaticos integrados.
ZA200901433B (en) Optical sensing system and optical devices therefor
EP2293049A3 (en) Radiation inspection apparatus
BRPI0923292A2 (pt) processo e sistema de correção de um sinal de medição de uma temperatura fornecido por um sensor, e, turborreator
GB201119334D0 (en) Improved ambient light sensing system and method
WO2015063273A8 (en) Display system and method for producing same
EP2282188A4 (en) INSPECTION DEVICE AND METHOD FOR SPATIAL LIGHT MODULATOR, OPTICAL LIGHTING SYSTEM, METHOD FOR ADJUSTING THIS LIGHTING OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
WO2008076850A3 (en) Apparatus and methods for measuring workpieces
EP2518437A3 (en) Substrate processing system and substrate processing program
BRPI0919941A2 (pt) processo de calibração de um dispositivo de controle óptico de curvatura
MX2012003189A (es) Dispositivo para cirugia laser oftalmologica.
EP3961193A4 (en) WATER QUALITY ANALYZING SYSTEM, SENSOR MODULE, CALIBRATION MACHINE AND WATER QUALITY ANALYZING SYSTEM CALIBRATION METHOD
ATE514969T1 (de) Vorrichtung und verfahren zur kompensation von farbverschiebungen in faseroptischen abbildunssystemen
MX338030B (es) Dispositivo para determinar la ubicacion de elementos mecanicos.
FI20095061A0 (fi) Optisen mittauslaitteen runkomoduuli
PL2084836T3 (pl) Sposób identyfikowania sygnału dla włókna światłowodowego
FR2986326B1 (fr) Procede optique d'inspection d'articles transparents ou translucides visant a attribuer un reglage optique de reference au systeme de vision
FR2926636B1 (fr) Instrument et procede de caracterisation d'un systeme optique

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10750982

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10750982

Country of ref document: EP

Kind code of ref document: A2