WO2010092588A3 - Method and system for measuring and analyzing the production data directly from machine - Google Patents

Method and system for measuring and analyzing the production data directly from machine Download PDF

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Publication number
WO2010092588A3
WO2010092588A3 PCT/IN2009/000296 IN2009000296W WO2010092588A3 WO 2010092588 A3 WO2010092588 A3 WO 2010092588A3 IN 2009000296 W IN2009000296 W IN 2009000296W WO 2010092588 A3 WO2010092588 A3 WO 2010092588A3
Authority
WO
WIPO (PCT)
Prior art keywords
machine
parameters
measuring
values
analyzing
Prior art date
Application number
PCT/IN2009/000296
Other languages
French (fr)
Other versions
WO2010092588A2 (en
Inventor
Nitin Gupta
Rupesh Vasant Kotwal
Original Assignee
Nitin Gupta
Rupesh Vasant Kotwal
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitin Gupta, Rupesh Vasant Kotwal filed Critical Nitin Gupta
Publication of WO2010092588A2 publication Critical patent/WO2010092588A2/en
Publication of WO2010092588A3 publication Critical patent/WO2010092588A3/en

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00Testing or monitoring of control systems or parts thereof
    • G05B23/02Electric testing or monitoring
    • G05B23/0205Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • G05B23/0235Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80Management or planning

Abstract

The present invention relates to a method for measuring and analyzing the production data directly from machines. The said method comprises the steps of : a. measuring the parameters relating to machine and parameters of the process to be carried on by machine; b. storing values of parameters measured for the analysis purpose; c. providing standard values of said parameters being provided by the user; d. comparing said standard values and the measured values of the parameters for checking performance of machine and consistency in product quality; e. deciding whether the machine performance and product quality are consistently maintained to required standards; and f. displaying the standard values and measured values of said parameters, and decision taken in respect of machine performance and product quality. Also the system for implementing the aforesaid method is disclosed.
PCT/IN2009/000296 2008-05-23 2009-05-22 Method and system for measuring and analyzing the production data directly from machine WO2010092588A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IN1093/MUM/2008 2008-05-23
IN1093MU2008 2008-05-23

Publications (2)

Publication Number Publication Date
WO2010092588A2 WO2010092588A2 (en) 2010-08-19
WO2010092588A3 true WO2010092588A3 (en) 2011-12-15

Family

ID=42562133

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IN2009/000296 WO2010092588A2 (en) 2008-05-23 2009-05-22 Method and system for measuring and analyzing the production data directly from machine

Country Status (2)

Country Link
TW (1) TW201007398A (en)
WO (1) WO2010092588A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104749973A (en) * 2013-12-30 2015-07-01 北京北方微电子基地设备工艺研究中心有限责任公司 Method and system for controlling deep silicon etching process

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5923553A (en) * 1995-12-21 1999-07-13 Samsung Electronics Co., Ltd. Method for controlling a semiconductor manufacturing process by failure analysis feedback
US6038540A (en) * 1994-03-17 2000-03-14 The Dow Chemical Company System for real-time economic optimizing of manufacturing process control
WO2002013105A2 (en) * 2000-08-08 2002-02-14 Transpacific Investments, Inc. Productivity monitoring system and method
JP2002236511A (en) * 2001-02-07 2002-08-23 Murata Mfg Co Ltd System and method for production control
CN1474328A (en) * 2002-08-09 2004-02-11 英新达股份有限公司 Real-time managing method system for production information

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6038540A (en) * 1994-03-17 2000-03-14 The Dow Chemical Company System for real-time economic optimizing of manufacturing process control
US5923553A (en) * 1995-12-21 1999-07-13 Samsung Electronics Co., Ltd. Method for controlling a semiconductor manufacturing process by failure analysis feedback
WO2002013105A2 (en) * 2000-08-08 2002-02-14 Transpacific Investments, Inc. Productivity monitoring system and method
JP2002236511A (en) * 2001-02-07 2002-08-23 Murata Mfg Co Ltd System and method for production control
CN1474328A (en) * 2002-08-09 2004-02-11 英新达股份有限公司 Real-time managing method system for production information

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104749973A (en) * 2013-12-30 2015-07-01 北京北方微电子基地设备工艺研究中心有限责任公司 Method and system for controlling deep silicon etching process

Also Published As

Publication number Publication date
TW201007398A (en) 2010-02-16
WO2010092588A2 (en) 2010-08-19

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