WO2010092588A3 - Method and system for measuring and analyzing the production data directly from machine - Google Patents
Method and system for measuring and analyzing the production data directly from machine Download PDFInfo
- Publication number
- WO2010092588A3 WO2010092588A3 PCT/IN2009/000296 IN2009000296W WO2010092588A3 WO 2010092588 A3 WO2010092588 A3 WO 2010092588A3 IN 2009000296 W IN2009000296 W IN 2009000296W WO 2010092588 A3 WO2010092588 A3 WO 2010092588A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- machine
- parameters
- measuring
- values
- analyzing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
- G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
- G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
- G05B23/0235—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/80—Management or planning
Abstract
The present invention relates to a method for measuring and analyzing the production data directly from machines. The said method comprises the steps of : a. measuring the parameters relating to machine and parameters of the process to be carried on by machine; b. storing values of parameters measured for the analysis purpose; c. providing standard values of said parameters being provided by the user; d. comparing said standard values and the measured values of the parameters for checking performance of machine and consistency in product quality; e. deciding whether the machine performance and product quality are consistently maintained to required standards; and f. displaying the standard values and measured values of said parameters, and decision taken in respect of machine performance and product quality. Also the system for implementing the aforesaid method is disclosed.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IN1093/MUM/2008 | 2008-05-23 | ||
IN1093MU2008 | 2008-05-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010092588A2 WO2010092588A2 (en) | 2010-08-19 |
WO2010092588A3 true WO2010092588A3 (en) | 2011-12-15 |
Family
ID=42562133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IN2009/000296 WO2010092588A2 (en) | 2008-05-23 | 2009-05-22 | Method and system for measuring and analyzing the production data directly from machine |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW201007398A (en) |
WO (1) | WO2010092588A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104749973A (en) * | 2013-12-30 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and system for controlling deep silicon etching process |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5923553A (en) * | 1995-12-21 | 1999-07-13 | Samsung Electronics Co., Ltd. | Method for controlling a semiconductor manufacturing process by failure analysis feedback |
US6038540A (en) * | 1994-03-17 | 2000-03-14 | The Dow Chemical Company | System for real-time economic optimizing of manufacturing process control |
WO2002013105A2 (en) * | 2000-08-08 | 2002-02-14 | Transpacific Investments, Inc. | Productivity monitoring system and method |
JP2002236511A (en) * | 2001-02-07 | 2002-08-23 | Murata Mfg Co Ltd | System and method for production control |
CN1474328A (en) * | 2002-08-09 | 2004-02-11 | 英新达股份有限公司 | Real-time managing method system for production information |
-
2009
- 2009-05-22 WO PCT/IN2009/000296 patent/WO2010092588A2/en active Application Filing
- 2009-05-22 TW TW098116976A patent/TW201007398A/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6038540A (en) * | 1994-03-17 | 2000-03-14 | The Dow Chemical Company | System for real-time economic optimizing of manufacturing process control |
US5923553A (en) * | 1995-12-21 | 1999-07-13 | Samsung Electronics Co., Ltd. | Method for controlling a semiconductor manufacturing process by failure analysis feedback |
WO2002013105A2 (en) * | 2000-08-08 | 2002-02-14 | Transpacific Investments, Inc. | Productivity monitoring system and method |
JP2002236511A (en) * | 2001-02-07 | 2002-08-23 | Murata Mfg Co Ltd | System and method for production control |
CN1474328A (en) * | 2002-08-09 | 2004-02-11 | 英新达股份有限公司 | Real-time managing method system for production information |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104749973A (en) * | 2013-12-30 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and system for controlling deep silicon etching process |
Also Published As
Publication number | Publication date |
---|---|
TW201007398A (en) | 2010-02-16 |
WO2010092588A2 (en) | 2010-08-19 |
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