WO2010074434A2 - Alimentation électrique haute tension utilisée dans des locaux à environnement plasmique et procédé de commande associé - Google Patents

Alimentation électrique haute tension utilisée dans des locaux à environnement plasmique et procédé de commande associé Download PDF

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Publication number
WO2010074434A2
WO2010074434A2 PCT/KR2009/007316 KR2009007316W WO2010074434A2 WO 2010074434 A2 WO2010074434 A2 WO 2010074434A2 KR 2009007316 W KR2009007316 W KR 2009007316W WO 2010074434 A2 WO2010074434 A2 WO 2010074434A2
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Prior art keywords
voltage
power supply
voltage power
high voltage
output
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PCT/KR2009/007316
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English (en)
Korean (ko)
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WO2010074434A3 (fr
Inventor
김수홍
이정흠
권병기
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주식회사 포스콘
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Priority claimed from KR1020090117267A external-priority patent/KR101030576B1/ko
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Publication of WO2010074434A2 publication Critical patent/WO2010074434A2/fr
Publication of WO2010074434A3 publication Critical patent/WO2010074434A3/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/337—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only in push-pull configuration
    • H02M3/3376—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only in push-pull configuration with automatic control of output voltage or current
    • H02M3/3378—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only in push-pull configuration with automatic control of output voltage or current in a push-pull configuration of the parallel type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/0077—Plural converter units whose outputs are connected in series
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0083—Converters characterised by their input or output configuration
    • H02M1/0085—Partially controlled bridges

Definitions

  • the present invention relates to a high-voltage power supply device and a control method thereof used in a plasma environment facility, and more particularly, to a large-capacity N-series voltage source structure, and to increase the voltage easily when a high frequency high voltage is required in the plasma reactor.
  • the present invention relates to a high voltage power supply device and a control method for improving stability by using feedback control.
  • FIG. 1 is a diagram briefly illustrating environmental facilities using plasma.
  • the plasma environment facility includes a high voltage power supply device 110, a magnetic pulse compressor tank 120, and a plasma reactor 130 that generate high frequency high voltage.
  • the high voltage of the high voltage generated by the high voltage power supply 11 is charged in the capacitors CL, C1, and C2 of the MPC tank 120, and the operation of each of the switches SW1, SW2, and SW3.
  • a high voltage vout is formed in the plasma reactor 130 so as to cause a plasma reaction by the current flowing out.
  • a high voltage power supply device 110 for generating a high frequency high voltage applied to the plasma reactor 130 is essential to the plasma environment facility.
  • the size of the high voltage required in the plasma reactor may be different depending on the capacity of the plasma environmental equipment. Therefore, there is a growing need for a high voltage power supply device that can easily cope with the voltage fluctuation according to the magnitude of the voltage value required in the plasma reactor.
  • the problem to be solved by the present invention is to provide a high-voltage power supply for use in a plasma environment, a high-voltage power supply including a high-voltage power supply that can easily increase the output voltage provided to the output by modularized and connected in series; It is to provide a control method.
  • another object of the present invention is to provide a high-voltage power supply device and a method of controlling the same that can be charged at the same time, the charging unit in the individual high-voltage power supply means.
  • the high pressure power supply device used for the plasma environment facility wherein the high pressure power supply device is a first to Nth (where N is a natural number of 2 or more)
  • a first rectifying unit including a power supply means, each of the first to Nth high voltage power supply means generating a DC voltage by full-wave rectifying an AC voltage;
  • An inverter for converting the DC voltage into a high frequency square wave voltage by switching based on a switching control signal;
  • a transformer for receiving the high frequency square wave voltage from a primary side and generating a high voltage boosted from the secondary side;
  • a secondary rectifier for full-wave rectifying the secondary high voltage of the transformer;
  • a charging unit configured to charge a voltage output from the secondary rectifying unit, wherein the charging units of the first to Nth high voltage charging units are connected in series, and the first to Nth detection currents flowing through the first to Nth high voltage power supply means.
  • reference voltages for providing first to Nth divided voltages output from the first to Nth high voltage power supply means, total output voltages of the first to Nth high voltage power means, and reference values of the charging unit applied from the outside.
  • an inverter controller configured to receive a synchronization flag signal applied from the outside and output the synchronized switching control signal.
  • the transformer in the first to N-th high-voltage power supply means compared to the inverter is characterized in that one-to-one.
  • the transformer in the first to N-th high-voltage power supply means the transformer is one-to-many.
  • the inverter control unit the divided voltage deviation calculation unit for calculating the difference between the reference voltage and the first detected divided voltage output from the charging unit in the first high-voltage power supply means;
  • a first proportional integrator that proportionally integrates the voltage deviation output from the divided voltage deviation calculation unit;
  • a divided voltage adding unit configured to add first to Nth detected divided voltages output from the first to Nth high voltage power supply means and output a divided voltage;
  • a total voltage deviation calculation unit for calculating a difference between the total output voltage of the first to Nth high voltage power supply means and the divided voltage summation voltage;
  • a current limiting unit configured to limit the first reference value current not to increase when the output of the total voltage deviation calculator is outside the set range;
  • a current deviation calculator for calculating a difference between the first reference value current and the first detection current flowing through the inverter in the first high voltage power supply unit and outputting a current deviation;
  • a second proportional integrator configured to proportionally integrate the current deviation to output a switching control signal;
  • a synchronizer configured
  • the inverter is a phase shift pulse width modulated inverter operated by zero voltage switching.
  • the control method of the high-voltage power supply device used in the plasma environmental equipment comprising a first to N (where N is a natural water of two or more) high-voltage power supply means used for the plasma environmental equipment
  • a voltage divider voltage deviation calculating step of calculating a difference between a reference voltage applied from the outside and a first detected divided voltage output from a charging unit in the first high voltage power supply means
  • a first proportional integration step of proportionally integrating the voltage deviation output from the divided voltage deviation calculation step
  • a total voltage deviation calculation step of calculating a difference between the total output voltage of said first to Nth high voltage power supply means and said divided voltage
  • a current limiting step of limiting the first reference value current from increasing when the output of the total voltage deviation calculation step is out of a set range
  • the output stage structure of the inverter included in the high voltage power supply device is simple, and the production of a transformer is easy, so that the modularization of the high voltage power supply generating high voltage of high frequency is possible, and a plurality of high voltage power supply units are connected in series Since the power supply device can be configured, the magnitude of the output voltage can be easily changed in accordance with the capacity of the plasma environmental facility.
  • the breakdown voltage of the elements constituting the high voltage power supply device is low and closed-loop control is used, it is robust against load and parameter variations of the elements.
  • the charging sections in the individual high voltage power supply means can be charged simultaneously, and can be charged in a balanced manner.
  • FIG. 1 is a view briefly illustrating an environmental facility using a plasma
  • FIG. 2 is a block diagram showing a high voltage power supply unit used in an environmental facility using plasma
  • FIG. 3 is a view showing a high-voltage power supply device implemented by parallelizing the high-voltage power supply unit according to FIG. 2;
  • FIG. 4 is an overall block diagram showing an N-series high voltage power supply according to an embodiment of the present invention.
  • FIG. 5 is a detailed block diagram of the inverter control unit according to FIG. 4, and
  • FIG. 6 is a detailed circuit diagram of an individual high voltage power supply unit according to an embodiment of the present invention.
  • inverter 440 current limiting unit
  • FIG. 2 is a diagram illustrating a high voltage power supply unit used in a plasma environment facility
  • FIG. 3 is a diagram illustrating a high voltage power supply device implemented by paralleling the high voltage power supply unit of FIG. 2.
  • the high voltage power supply device used in the plasma environment equipment includes a high voltage power supply unit for generating a high frequency high voltage.
  • the high voltage power supply unit includes a primary rectifier 111, a smoothing capacitor Cf, a resonance inverter 112, a resonance capacitor Cs, The transformer 113, the secondary rectifier 114, and the voltage divider 115.
  • the primary rectifier 111 rectifies a three-phase AC voltage having a commercial frequency of 60 Hz into a three-phase full bridge method and converts it into a direct current (DC) voltage, and the smoothing capacitor (Cf) is a primary.
  • the DC voltage converted by the rectifier 111 is smoothed.
  • the resonant inverter 112 is composed of an Insulated Gate Bipolar Transistor (IGBT) module for power conversion, and a high frequency series resonant inverter composed of a single-phase full bridge is used, and a smoothing capacitor is used.
  • the voltage smoothed by Cf is adjusted to generate a sinusoidal voltage having a predetermined frequency by adjusting a switch duty ratio.
  • a resonant capacitor Cs for resonance is inserted into an output terminal of the resonant inverter 112, and a transformer 113 for boosting a high voltage to generate a high voltage is connected to the resonant capacitor Cs.
  • the resonant inverter 112 is configured to operate in series resonance form together with the capacitor component of the resonant capacitor Cs and the inductor parasitic component of the transformer 113, so that each switch of the resonant inverter 112 is zero voltage switching (ZVS: Allows soft switching by zero voltage switching (Zero) or zero current switching (ZCS).
  • the transformer 113 is a high frequency high voltage transformer operated in a high frequency band.
  • the transformer 113 is composed of a voltage multiplying transformer having multiple channels on the secondary side, and by generating a total output voltage by combining the boosted output voltage, respectively, compared to the conventional method using a single transformer. Lower the voltage boost ratio of the transformer to produce a stable high voltage.
  • the secondary rectifier 114 is connected to the secondary side of the transformer 113, and serves to full-wave rectify the high voltage generated at the secondary side of the transformer 113.
  • the voltage divider 115 uses a capacitor-resistor voltage divider (CR) in which a capacitor and a resistor are coupled in parallel.
  • the DC voltage of the rectified high frequency high voltage generated at the secondary side of the transformer 113 is approximately 10,000: 1.
  • the voltage is dropped, and the dropped DC voltage is fed back to the IGBT control unit 117 and output.
  • the IGBT control unit 117 controls the resonant inverter 112 according to the output voltage dropped to about 1 / 10,000.
  • FIG. 3 illustrates a plurality of high voltage power supplies 110-1, 110-2,..., 110-n connected in parallel, and each of the high voltage power supplies follows the configuration of FIG. 2.
  • Each of the high voltage power supply units 110-1, 110-2,..., 110-n has a plurality of high voltage power supply units 110-1 and 110-as shown in FIG. 2, ..., 110-n) are respectively connected in parallel.
  • the capacitor component of the resonant capacitor Cs for the resonance and the inductor component of the transformer 113 are the most important components of the high voltage power supply, and transfer the energy using LC resonance to the load in the switching frequency band, To determine the amount of energy that delivers energy to the load over time.
  • a product having a small error in each parameter should be used for the LC resonance element, and the operating range of the resonance frequency should be maintained to minimize the change of each parameter during the operation of the high voltage power supply.
  • the primary side is a single winding structure
  • the secondary side is a decentralized structure
  • the core of the transformer is a single core
  • the output side of the transformer is composed of multi-channels.
  • control range is determined by the resonance parameter and the switching frequency.
  • the resonant frequency should be more than twice the switching frequency and the control range should be within the above boundary conditions, so the control width is narrow.
  • the effective charge voltage must be controlled by controlling the duty ratio, and the switching frequency must be adjusted to be equal to the resonance point in order to control the current, which causes problems in the reliability and stability of the system when the resonance point changes.
  • an n-parallel method should be used between the high-voltage power supply units because the output stage is a current source.
  • the current is usually large and the voltage source is predetermined, so the application range may be limited.
  • the output terminal of the high voltage power supply unit uses a CR divider for high voltage measurement, and a multi-channel method in which voltage is distributed through the secondary side decentralization of the transformer of the high voltage power supply unit.
  • a multi-channel method in which voltage is distributed through the secondary side decentralization of the transformer of the high voltage power supply unit.
  • FIG. 4 is a block diagram illustrating an N-series high voltage power supply unit according to an embodiment of the present invention
  • FIG. 5 is a detailed block diagram of an inverter controller according to FIG. 4.
  • the N-serial high voltage power supply unit includes first to Nth high voltage power supply units 400-1, 400-2, N output terminals connected in series to provide an output voltage vout. , 400 -N, and an inverter controller 480.
  • the first to Nth high voltage power supply units 400-1, 400-2,..., 400 -N include the primary rectifying unit 410, the smoothing unit 420, the inverter 430, and the high frequency transformer 450.
  • the secondary rectifying unit 460 and the charging unit 470 may further include a current limiting unit 440.
  • Inverter control unit 480 is a current (i1 ⁇ iN) flowing in each of the high-voltage power supply, the divided voltage (vo1 ⁇ voN) output from each of the high-voltage power supply, the total output voltage (vout) of the high-voltage power supply, reference value of the charging unit 470
  • the reference voltage Vref and the sync flag signal Sync are provided to provide the synchronized switching control signals Scon1 to SconN.
  • the inverter controller 480 operates as follows.
  • the divided voltage deviation calculation unit 510-1 calculates a difference between the reference voltage Vref applied from the outside and the first detected divided voltage vo1.
  • the first proportional integrator 520-1 proportionally integrates the calculated voltage deviation verr1 and outputs it.
  • the divided voltage adder 570 outputs the divided voltage added by adding the divided voltages vo1 to voN output from the respective high voltage power supplies 400-1, 400-2,.
  • the voltage deviation calculator 580 calculates a difference between the total output voltage vout and the divided voltage sum.
  • the current limiter 530-1 restricts the first reference value current iref1 from increasing when the output of the total voltage deviation calculator 580 is out of a predetermined range.
  • the current deviation calculation unit 540-1 calculates a difference between the first reference value current reef1 and the first detection current i1.
  • the second proportional integrator 550-1 proportionally integrates the calculated current deviation ierr1 and outputs the proportional integral.
  • the synchronization unit 560-1 outputs the synchronized switching control signal Scon1 by synchronizing the switching control signal output from the second proportional integrator 550-1 with the synchronization flag signal Sync applied from the outside.
  • the switching control signals Scon2 to SconN for the second to Nth high voltage power supply means 400-2, ..., 400-N also occur at the same time in the same manner.
  • the inverter control unit 480 may control the current i1 flowing in the primary side of the high frequency transformer 440 and the divided voltages vo1,..., VoN output from the charging unit 470. According to the present invention, it is possible to easily cope with the variation in the capacity of the plasma environmental equipment by selecting the appropriate number of modular high-voltage power supply unit according to the size of the high voltage required in the plasma reactor and connecting them in series.
  • FIG. 6 is a detailed circuit diagram of an individual high voltage power supply unit according to an embodiment of the present invention.
  • the primary rectifier 410 includes a full-wave rectifier circuit 610 composed of a diode, and further includes a smoothing capacitor 620 for smoothing.
  • the full-wave rectifying circuit 610 converts the three-phase AC voltage (AC Vin) having a commercial frequency of 60 Hz into full-wave rectification by a three-phase full bridge method, and converts the DC voltage into a direct current (DC) voltage. Smooth the full-wave rectified DC voltage.
  • the inverter unit 630 is composed of an IGBT module and generates a square wave voltage having a high frequency by switching the DC voltage passed through the primary rectifier 410.
  • the switching frequency can be appropriately determined, and a switching frequency of 20 KHz can be used in the present invention.
  • the inverter unit 630 may be a phase shift width modulation inverter operated by zero voltage switching.
  • the inverter 630 is controlled by the inverter controller 480, and the current i1 and the voltage dividing unit flowing to the primary side of the high frequency transformer 640 by the PWM control of the inverter controller 480.
  • the output voltage vo1 output from 670 is controlled.
  • the high frequency transformer 450 includes one or a plurality of transformers HTr1, HTr2,..., 650, and is connected to an output terminal of the inverter unit 630 to boost a high-frequency spherical voltage generated by the inverter unit 630. do. Between the inverter unit 630 and the high frequency transformer 650 may limit the maximum current and a current limiting unit 640 for soft switching control may be inserted in series, and an inductor Lr 1 may be inserted into the current limiting unit 640. Can be used.
  • the primary current i1 of the high frequency transformer 650 is fed back to the inverter controller 480.
  • the secondary rectifier 660 full-wave rectifies the high-frequency spherical voltage boosted by the high-frequency transformer 650.
  • the secondary rectifier 660 may be configured as a full-wave rectifier circuit composed of a diode, according to an embodiment of the present invention, the full-wave rectifier circuit 660 is a plurality of transformers (HTr1 included in the high frequency transformer 650) , HTr2, ..., 650), respectively.
  • the voltage divider 670 is connected in parallel with each of the full-wave rectifier circuits included in the secondary rectifier 660, and the plurality of capacitors in the voltage divider 670 are connected in series, respectively, and the voltages Vc_1, Both Vc_2 and Vc_3 are added together, and the output voltage vo1 is finally applied to the output terminal of the voltage divider 670.
  • it may further include a voltage divider resistor connected in parallel with the capacitor to distribute the voltage.
  • the inverter unit 430 of the high voltage power supply unit of FIG. 4 is easier to control than the resonant inverter 112 of the high voltage power supply unit of FIG. 2, and the output terminal structure thereof may be simplified.
  • the transformer included in the high frequency transformer 450 according to FIG. 4 is easier to manufacture than the transformer of the transformer 113 according to FIG. 2.
  • the high-voltage power supply according to FIG. 4 is composed of low pressure, it is easy to manufacture the load of the simulator, and through this, sufficient performance verification is possible, thereby increasing the reliability of the product.
  • the resonant inverter 112 according to FIG. 2 is difficult to design the optimum value of the LC resonant element, and it is difficult to control the resonant frequency when the resonance parameter changes due to deterioration.
  • the application range of the resonant frequency according to the load variation connected to the final output terminal of the voltage divider 115 is narrow, and when applied to the plasma environment equipment requiring high frequency and high voltage, the rating of the device compared to the high voltage power supply unit of the N-serialized voltage source structure This increases and requires a transformer with a large turn ratio has the disadvantage that the modularity is difficult.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Dc-Dc Converters (AREA)

Abstract

L'invention concerne une alimentation électrique haute tension utilisée dans des locaux à environnement plasmique, qui permet d'augmenter facilement la tension de sortie à fournir à une extrémité de sortie par une connexion série par modularisation, et qui permet de charger simultanément et uniformément des chargeurs dans un moyen d'alimentation électrique haute tension individuel. L'alimentation électrique haute tension utilisée dans des locaux à environnement plasmique selon l'invention comprend de 1 à N (N étant un nombre naturel au moins égal à 2) moyens d'alimentation électrique haute tension qui comprennent chacun : un redresseur primaire pour effectuer un redressement d'onde pleine d'une tension CA afin de générer une tension CC; un onduleur pour convertir la tension CC en une tension d'onde carrée radiofréquence par commutation en fonction d'un signal de commande de commutation; un transformateur comprenant un côté primaire afin de recevoir la tension d'onde carrée radiofréquence et un côté secondaire pour générer une haute tension amplifiée; un second redresseur pour effectuer un redressement d'onde pleine de la haute tension du côté secondaire du transformateur; et un chargeur pour charger une sortie de tension provenant du redresseur secondaire, et une unité de commande d'onduleur qui émet 1 à N courants détectés circulant à travers les 1 à N moyens d'alimentation haute tension, 1 à N tensions divisées détectées émises des 1 à N moyens d'alimentation haute tension, une tension de sortie totale des 1 à N moyens d'alimentation haute tension, et une tension de référence afin de fournir une valeur de référence du chargeur étant appliquée de l'extérieur, et qui reçoit un signal drapeau synchrone appliqué de l'extérieur et émet un signal de commande de commutation synchronisé.
PCT/KR2009/007316 2008-12-26 2009-12-08 Alimentation électrique haute tension utilisée dans des locaux à environnement plasmique et procédé de commande associé WO2010074434A2 (fr)

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KR20080134940 2008-12-26
KR10-2008-0134940 2008-12-26
KR1020090117267A KR101030576B1 (ko) 2008-12-26 2009-11-30 플라즈마 환경설비에 이용되는 고압 전원 장치 및 그 제어방법
KR10-2009-0117267 2009-11-30

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US20170310111A1 (en) * 2016-04-22 2017-10-26 The Secretary, Department Of Atomic Energy High voltage dc power supply for high power radio frequency amplifiers
CN107579662A (zh) * 2017-10-25 2018-01-12 吉林大学 一种双等离子体离子源放电电源
CN110289775A (zh) * 2019-05-30 2019-09-27 中国工程物理研究院应用电子学研究所 一种多路交错高压电源系统及控制方法
CN114069886A (zh) * 2021-11-17 2022-02-18 西安交通大学 一种一对多无线电能传输系统及其控制方法
CN114157127A (zh) * 2020-09-08 2022-03-08 新奥(天津)能源技术有限公司 一种用于等离子体炬的恒流电源电路及等离子体炬系统

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KR100820171B1 (ko) * 2006-11-02 2008-04-07 한국전기연구원 반도체 스위치를 이용한 펄스전원장치

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JP2002010408A (ja) * 2000-06-19 2002-01-11 Hitachi Ltd 自動車、およびその電源装置
JP2002063923A (ja) * 2000-08-14 2002-02-28 Equos Research Co Ltd 燃料電池回路
KR20040057673A (ko) * 2002-12-26 2004-07-02 주식회사 엔시스 독립적 제어구조를 갖는 엔 플러스 1 모듈형 무정전전원장치
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170310111A1 (en) * 2016-04-22 2017-10-26 The Secretary, Department Of Atomic Energy High voltage dc power supply for high power radio frequency amplifiers
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CN107579662A (zh) * 2017-10-25 2018-01-12 吉林大学 一种双等离子体离子源放电电源
CN107579662B (zh) * 2017-10-25 2024-04-09 吉林大学 一种双等离子体离子源放电电源
CN110289775A (zh) * 2019-05-30 2019-09-27 中国工程物理研究院应用电子学研究所 一种多路交错高压电源系统及控制方法
CN114157127A (zh) * 2020-09-08 2022-03-08 新奥(天津)能源技术有限公司 一种用于等离子体炬的恒流电源电路及等离子体炬系统
CN114069886A (zh) * 2021-11-17 2022-02-18 西安交通大学 一种一对多无线电能传输系统及其控制方法
CN114069886B (zh) * 2021-11-17 2024-05-24 西安交通大学 一种一对多无线电能传输系统及其控制方法

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