WO2010066297A1

WO2010066297A1 - Uv light having a reflector

Info

Publication number: WO2010066297A1
Application number: PCT/EP2008/067299
Authority: WO
Inventors: Siegmar Rudakowski; Oliver Rosier; Reinhold Wittkötter
Original assignee: Osram Gesellschaft mit beschränkter Haftung
Priority date: 2008-12-11
Filing date: 2008-12-11
Publication date: 2010-06-17

Abstract

The invention relates to a UV light for a tube-shaped UV lamp (1) having a UV reflector (2) designed for substantially diverting reflected light past the lamp (1).

Description

description

UV lamp with reflector

Technical area

The present invention relates to an ultraviolet (hereinafter UV) lamp.

State of the art

UV lamps, in particular designed for the emission of UV light discharge lamps, and designated lights are known and widely used. You will find u. a. in industrial production for surface modification use, for example for cleaning surfaces, for supporting chemical processes, for matting of lacquers or for lacquer exposure, but also for sterilizing, for example, drinking water.

There are both fluorescent lamps with UV phosphors and discharge lamps, in which the light generated by the gas discharge is used directly. Particularly short-wave so-called VUV light with wavelengths below 200 nm, for example in the range from 170 nm to 175 nm, can be produced with excimer discharge lamps, which are also already documented to a greater extent.

In many cases, the UV light is needed substantially on one side of the lamp and are accordingly arranged on the opposite side of the lamp reflectors.

In the lights, an inert gas is often used to protect light parts from corrosion and / or to the To minimize absorption of the UV radiation emitted by the lamp.

Presentation of the invention

This invention is based on the technical problem of specifying a reflector luminaire designed for UV lamps, in particular also VUV lamps, with improved performance properties.

To this end, the invention is directed to a UV lamp with a tubular UV lamp and a UV reflector along a longitudinal direction of the lamp on a side facing away from a main light exit side of the lamp, characterized by a cross-sectional profile of the reflective surface of the reflector transverse to the longitudinal direction which on the opposite side is concave on the lamp side and in this case partly inclined slightly outwards in such a way that light radiated centrally from the lamp on the cross section through the lamp transversely to the longitudinal direction passes through this inclined part of the reflector past the lamp is reflected.

Preferred embodiments are given in the dependent claims and are detailed below as well as the general description of the invention. In principle, the individual features may be of importance for all categories of requirements, in particular for a UV lamp, the use of a UV lamp and a method for operating a UV lamp. The basic idea of the invention is to limit the UV exposure of the lamp itself. As the generated UV Light for different applications has desirable material-changing properties, even lamp parts can be attacked themselves. This is especially true for VUV lamps and especially for the transparent material of the lamp discharge vessel, such as for synthetic quartz glass. In principle, however, other lamp parts may be affected by such effects, such as phosphor layers.

The radiation through the walls of the discharge vessel by the UV light is initially unavoidable. However, in reflector lights, a significant portion of the generated UV light is reflected by the reflector back through the lamp to the desired light exit side, thereby significantly increasing the UV load. This also applies in particular to fluorescent-free lamps, that is to say substantially clear lamps in which no shading and absorption problems are to be expected.

However, the inventors have found that the lifetime of VUV lamps in particular by cracks and / or other signs of aging, such as a reduced transmission of the discharge vessel walls, is limited or, in any case, the performance of the lamp is adversely affected after a longer service life.

Therefore, the invention proposes a reflector design in which reflected light directed by conventional reflectors through the lamp is at least partially directed to the desired light exit side without passing the lamp a second time. The invention is based on a tubular lamp, so an elongated discharge vessel. The discharge vessel does not necessarily have to be straight or have a circular cross-section. However, elongated cylinder shapes of the lamp are common and advantageous.

The UV reflector is therefore also elongated, along the lamp.

Of course, if we talk about a longitudinal direction, the geometry of the cylinder and other straight elongated geometries naturally refers to the direction of the longest extension of the lamp. In the case of curved geometries, it is to some extent meant a local longitudinal extension and longitudinal direction.

The UV reflector according to the invention should be arranged at least on the side of the lamp opposite the desired light emission side, ie detect light emitted thereon, and preferably closer to this side than the lamp side oriented to the light emission side.

According to the invention, it is concave and, at least in the region in which a reflection into the lamp would occur in the case of straight reflector geometries which are perpendicular to the main light emission direction, is tilted slightly towards the outside, that is, as it were, tilted with respect to the prior art. In other words, the tilt relates to a part of the reflector surface located behind the lamp, as seen from the light emission side. According to the invention, these statements apply (to a certain extent as a model and in the sense of a delimitation) for light emitted centrally by the lamp, ie light which appears to come from a central longitudinal axis of the lamp with respect to its propagation direction, ie light emitted radially in the case of cylindrical lamps.

Although this is not the only propagation direction that occurs, the UV lamps emit diffuse radiation. This applies both to fluorescent-coated lamps in which the discharge vessel wall radiates, as well as for fluorescent-free lamps that radiate from the volume in a variety of directions, so to speak. The central propagation direction, however, is in the sense of an average value for a considerable part of the radiated light. If the reflector geometry already passes this part of the lamp itself, so also applies to a significant other part of the light, namely, so to speak, the part with a stronger "outer tendency". Another part, so to speak with a stronger inner tendency, can certainly, at least partially, be reflected back into the lamp. Overall, however, the proportion of UV light, which is reflected back into the lamp, significantly reduced.

Incidentally, by the way, the statement that central rays are no longer reflected past the lamp but rather past the lamp is valid for the entire reflector surface and not only for the region "behind" the lamp.

The problem of lamp damage caused by one's own UV light is particularly relevant in the case of very short-wave UV light, ie in particular in the case of VUV lamps. In the same sense The invention preferably relates to excimer discharge lamps.

A preferred geometry of the reflector is a cylinder jacket surface. This initially only affects the reflector surface. In many cases, however, the supporting wall of the reflector will also have a geometry corresponding to the reflecting surface. The cylinder axis is of course not on the center axis of the lamp, but to the respective side further outward; the cylinder jacket surface part is thus tilted outwards, as illustrated by an exemplary embodiment.

Another preferred geometry is polygonal reflectors with concave corners. The term "concave" does not only refer to rounded surfaces. Polygonal reflectors can be one-piece or multi-part.

Also of interest is efficient lamp cooling. This is especially true in cooperation with the invention. Due to the lower UV load of the lamp vessel, the lamp power can be further increased, so that the cooling problem is exacerbated. In this connection, continuous passage openings in the reflector are preferred in the already mentioned longitudinal direction, that is to say on the side of the lamp opposite the main light emission side. These passages can be traversed by cooling gas, which is moved by a fan. In a further preferred embodiment, the cooling gas can be cooled by a heat exchanger, which in turn is liquid-cooled, in particular water-cooled. A cooling gas recirculation is vorzugt. This relates in particular to a cooling gas circulation in a closed luminaire housing, which is filled with an inert gas, which serves as a cooling gas. The shielding gas is oxygen-free and protects the interior of the luminaire from excessive ozone concentrations resulting from the interaction of VUV radiation with atmospheric oxygen.

A suitably equipped luminaire can be used, in particular, in industrial production processes for surface modification, for example for cleaning substrates, for example in display production.

Preferred aspects of the invention relate to a UV lamp having a plurality of UV lamps in a common housing. By using several lamps, the irradiated area and the UV output can be significantly increased. To ensure the widest possible cleaning, to ensure short processing times and / or other reasons, namely, relatively high UV powers are often desired. When cleaning surfaces, for example, UV radiation of products under a gas atmosphere is considered, which is corrosive or becomes corrosive by the UV irradiation. This applies in particular to VUV irradiation under an oxygen atmosphere, in which ozone is formed and oxidizes impurities on the product surface and thus converts it into gaseous substances. This is especially true for substrates for the production of TFT displays.

Accordingly, the invention is also directed to a

UV lamp with a housing that holds a

Multiple UV lamps and a protective atmosphere is designed, wherein the housing in such a way in each case one Part of the UV lamps containing chambers is divided and can be opened in such a way that each of the UV lamps is interchangeable with the deterioration of the protective atmosphere only the respective chamber.

The basic idea is to be able to carry out the necessary lamp replacement in the luminaire at regular intervals with reduced effort. For this purpose, the interior of the lamp should be affected only to the extent of lamp replacement, as actually lamps are exchanged. The protective atmosphere surrounding the lamps not affected by the exchange should not be affected. Therefore, the lamp, specifically the lamp housing, is divided into a plurality of chambers. Each chamber contains only a part of the lamps, preferably exactly one lamp.

The protective atmosphere may be an inert gas atmosphere, as known in the art, such as with nitrogen. But it can also be, for example, a vacuum. In any case, the subdivision into chambers only requires the protective atmosphere in the affected chamber to be restored, which necessitates flushing operations and / or pumping operations, at least in terms of time. However, this time is less than if an entire Leuchtengehäuseinneres affected.

In addition, it is possible, although not necessarily within the scope of the invention, for the lamps housed in the other chamber (s) to continue to operate. You are still under protective atmosphere, so that nothing stands in the way.

Incidentally, reduces the risk of damage or contamination when replacing the lamp to the affected Chamber. Should difficulties arise here, the overall light with the other chambers and the lamps contained therein is still operational.

Furthermore, the luminaire according to the invention is preferably designed such that a UV-permeable separating disk arranged between the chamber to be opened or the entire luminaire housing interior and the irradiated area, ie the emission area of the luminaire housing, remains unmoved and in the previous position during lamp replacement. Thus, the lamp replacement can be done without having to dismantle the blade. Instead, a housing part is to serve for opening the housing, wherein the cutting disc remains stationary relative to the rest of the lamp.

In the case of the process device, this means that the luminaire can remain mounted on the device, whereby the cutting disc also remains unchanged and thus there is the possibility not to affect the area of the products to be treated. Thus, contamination risks for the products to be treated can be reduced or eliminated, any seals or other constructional precautions remain untouched and / or endangerment of the environment by problematic substances, especially corrosive gases, avoided. In the case of the ozone purification mentioned, for example, it would be possible to leave the atmosphere in the actual product area, ie not to purge for safety reasons, as is necessary in the prior art. In the case of inert gas atmospheres in, for example, printing presses, contamination in the product area can be avoided. But regardless of this, purely handling advantages in lamp replacement or the avoidance of contamination of the product area can be reasons for the advantageous use of the invention.

The invention has advantageous applications outside the treatment of actual products. For example, UV lights and in particular VUV lights can be used for water sterilization. Here it is of course advantageous if the cutting disc can be directly adjacent to the water and a lamp replacement without dismantling of the cutting disc is possible. Otherwise, for the purpose of the lamp replacement, a separating disk separate from the actual boundary of the water to be irradiated must be provided, the addition of the absorption losses being disadvantageous.

In other cases, in any case the stationary with the blade remaining remaining part should be designed to be mounted on site, so that it forms the lamp base with the blade or belongs to.

Incidentally, the housing part to be moved to open may be the same for the plurality of lamps or may also be different for different lamps, in particular for each of the lamps a respectively associated housing part.

It is furthermore preferred that the opening takes place by movement of the respective housing part under positive guidance, that is, for example, by rotation about a device, ie by a pivot bearing, given axis of rotation by displacement along a sliding guide, by a combination thereof or the like. In particular, the housing part should not be completely free be mobile and not completely detached from the rest of the luminaire structure. Preferably, the positive guide also provides a holder when the lamp or other lighting part, such as a reflector, is replaced. A particularly preferred variant is a Hubdrehmechanismus, wherein the lifting movement takes place away from the cutting disc and connects to the lifting movement a rotational movement when the housing is opened (and vice versa when closing). For the sake of illustration, reference is made to the exemplary embodiment.

The cutting disk is preferably subdivided into a plurality of individual cutting disks, in particular in each case one cutting disk for each lamp. This allows a thinner version of the individual cutting discs and thus lower absorption losses and lower lamp weight, because the disc has to bridge smaller distances. In addition, the disc can be exchanged, so to speak, modularly for each lamp, if need be. Particularly with VUV luminaires, the materials used are affected by various degradation processes, including the cutting discs.

The modular design already described with regard to the lamp replacement, the protective gas atmosphere and the separating disk preferably also applies (though not necessarily in combination with these features) to electronic ballasts for supplying the lamps and / or respective lamp cooling devices with cooling gas blowers for cooling the lamps. Also, these components are preferably provided individually for each lamp and thus replace individually. A largely modular design has next to the maintenance and repair friendliness also the advantage that different sized UV lights with different numbers of lamps can be designed and manufactured by combinations of different numbers of largely identical basic modules. However, in the context of this invention, the UV lamp is already a structurally unified and coherent overall construction, for example in the form of a frame that holds the modules together, as the exemplary embodiment shows.

The invention is particularly suitable for VUV discharge lamps, especially for tubular lamps, which are typically used in a plurality of parallel arranged as a lamp array.

Brief description of the drawings

The invention will be described in more detail below with reference to the figures and the exemplary embodiment illustrated therein. In this case, individual features can also be essential to the invention in other combinations and, as stated above, meaning for all categories of claims.

Fig. 1 shows a section transverse to the longitudinal direction through a portion of a UV lamp according to the invention.

Fig. 2 shows a detail of Figure 1 with typical beam paths for illustration.

FIG. 3 shows a variant of the exemplary embodiment from FIGS. 1 and 2 with beam paths for comparison with FIG. 2.

Fig. 4 shows a figure 1 corresponding section with the housing open. Fig. 5 shows a representation corresponding to Figure 4, but with rotated housing cover.

Fig. 6 shows an overall perspective view of a lamp according to the invention with a plurality of units according to the figures 1-5, wherein in one of them the housing is opened according to Figure 4.

FIG. 7 shows a representation corresponding to FIG. 6, but with an opening state analogous to FIG. 5.

Preferred embodiment of the invention

Figure 1 shows a part of a UV lamp according to the invention in cross section. In the lower area, 1 indicates a circular section through a Xerexx cylindrical VUV lamp, which is elongated perpendicular to the plane of the drawing and generates VUV light of wavelength 172 nm by means of a noble gas excimer discharge. Details of this lamp 1 will not be discussed because it is known per se.

The cylindrical discharge vessel wall made of synthetic quartz glass which can be seen in the figure allows VUV radiation generated inside the lamp 1 to pass outwards, the radiation being generated in principle in the entire volume of the lamp 1. The quartz glass walls react to very large VUV cans with cracks or degraded transmission behavior. On the other hand, it is endeavored to maximize the performance of the lamp 1 as far as possible. In particular, the necessary residence times of irradiated surfaces can be reduced, for example for cleaning substrates for producing TFT displays. Short times reduce lead times and production costs.

In FIG. 1, above the lamp 1, a two-part reflector 2 consisting of two cylinder-jacket-shaped glass panes is provided, each of which forms slightly more than a quarter-circle ring in the illustrated cross-section. The glass sheets of the reflectors 2 are metal-coated on the concave inner side and thus show good reflectivity even at the wavelength of 172 nm.

Between the respective upper ends of the reflector parts 2, a narrow gap is left as a passage opening for cooling gas, which is designated here by 3. From there, the reflector parts 2 each extend downwards around the lamp 1, whereby the distance to the lamp increases constantly and the respective lower ends of the reflector parts 2 are approximately at the same height as the lower edge of the lamp 1 to a designated 4 quartz glass, which separates the lights inside of a turn below production line. In the production line, ozone is generated in a relatively high concentration by the VUV irradiation, while the luminaire housing interior, in contrast, sealed contains a protective gas atmosphere, namely pure nitrogen. This avoids corrosive attacks of ozone on internal luminaire components and reduces the absorption of VUV radiation between the lamp 1 and the quartz glass pane 4. The nitrogen atmosphere also serves as a cooling gas.

The luminaire housing essentially consists of a lower frame 5, on which a lower flange surrounds the quartz glass Disk 4 carries, wherein the transition between the flange and the quartz glass plate 4 is sealed inwardly via a seal 6, and also from an upper hood 7, which is also connected via a seal 8 tightly connected to the frame 5.

The lamp housing shown in Figures 1 to 5 thus encloses a chamber 14, wherein the reference numeral 14 is entered in Figure 1 at different points to illustrate that the chamber means the internal volume of the lamp housing. This chamber 14 is, as will be shown below with reference to Figures 6 and 7, only a modular chamber of the total light, which consists of several, here a total of four such chambers 14.

In the luminaire housing, a blower 9 is mounted, the gas sucks from above and blown through a designated 10 heat exchanger to the above-mentioned passage opening 3 and through this to the lamp 1. The heat exchanger 10 thus forms centrally a vertical shaft for cooling the cooling gas nitrogen. The air movement is marked with arrows and leads under the lower edges of the reflector parts 2 by the outside of the frame 5 and the hood 7 over past.

On the one hand, this cooling according to the invention combines the effectiveness of liquid cooling with the advantages of omitting contact cooling of the lamp itself (by contact with a cooling block). This creates space behind the lamp for the arrangement of inventive reflectors. Effective cooling is essential to the efficiency of VUV production. Incidentally, cool- ing-cooled lamps are easier to replace as liquid-cooled lamps. There is also a greater tolerance to geometric variations in the case of significant lengths (for example, up to 2 m) having lamps.

FIG. 2 shows the lower third of the cross section from FIG. 1 enlarged and with illustrative beam paths. Radial sections of the cylindrical reflector part 2 are denoted by IIa, b, c, 12a, b, c respectively tangent pieces and 13a, b, c each radially emitted from the lamp 1 (thus apparently from the cylinder axis of the lamp 1 originating ) Ray paths.

The radial sections IIa-c show that the cylinder axis of the reflector part 2 lies approximately in the lower right edge region of the lamp 1. Mirror-symmetrically the same applies to the left not provided with beam paths reflector part 2, the cylinder axis is located in the lower left edge region of the lamp 1. Accordingly, the upper ends in the vicinity of the passage opening 3 and the adjoining portion are tilted slightly outwards. Thus, the beam 13a, which meets the left most reflective part (directly following the unspecified mounting bracket) of the right reflector part 2, far as reflected away to the right that it passes the lamp 1. The same applies to the further right impinging beams IIb and 11c and would also apply to beams in even further right and bottom part of the reflector surface.

Thus, a considerable part of the light emitted by the lamp 1 to the rear of the lamp 1 itself reflected forward and made usable without increasing the VUV dose of the discharge vessel of the lamp 1.

It can also be seen, however, that this does not necessarily apply to all beams from the lamp 1. If one imagines the beam 13a extended through the entire lamp 1, it is clear that all of the rays from the left half of the cross-section originating from the lamp 1 are also reflected past the lamp 1, even if they are the right-hand reflector half 2 on the far left. This does not apply to all rays produced in the right half of it. If these meet the right-hand reflector part 2 on the far left or relatively far left, reflections can also occur in the lamp 1. Overall, this proportion of the light reflected back into the lamp 1, however, is significantly reduced compared to not inventively designed reflectors.

A variant is shown in FIG. 3. The lamp and the beam paths are no longer numbered, but the reflector parts 2 'and 2 ", which are of polygonal design here. The reflector parts 2 'and 2''are thus Vielflächler, which represent themselves in cross-section as polygons. The left reflector part 2 'consists of four planar facets, the right reflector part 2''of five facets. The beam paths drawn on the right illustrate the same basic principle as in FIG. 2, which also applies to the left-hand reflector part 2 ". Incidentally, no passage opening for cooling gas is provided here, which could, however, easily be inserted by omitting or shortening the respectively innermost facets centrally. Of course, even more complicated than cylindrical curved reflector surfaces are conceivable, in particular also so-called involute reflectors. The latter are known from lighting technology, but there serve the purpose of a uniform distribution of the luminance as possible in classical fluorescent lamps. In the present context, homogeneity is not essential. The cylinder jacket surfaces are therefore preferable because of their ease of manufacture.

In FIG. 4, not only all individual parts are designated as in FIG. 1 for the sake of simplicity. The difference between the two figures is that in Figure 4, the upper hood 7 is moved as a movable housing part along a sliding guide shown in Figures 6 and 7 and explained later. In this case, the seal 8 remains on the frame 5, which in turn has remained stationary as a solid housing test with the quartz glass plate 4 and the seal 6 and the other associated parts. With the hood 7, the parts mounted therein, in particular the lamp 1 and the reflector 2 are shifted upward.

So that is the chamber 14, the lamp housing interior of the module shown, opened.

In Figure 5, this upwardly shifted luminaire portion is rotated about an axis of rotation which is perpendicular to the plane, the reflector 2 and the lamp 1 are exposed substantially upwards and thus are easily accessible for exchange. A reverse movement sequence, ie a reverse rotation into the position shown in FIG. 4 and then a lowering of the upper one Luminaire part in the position shown in Figure 1, carried out after maintenance or part replacement.

Figures 6 and 7 illustrate this process using perspective views of the overall light. This lamp consists of a frame 5 according to Figures 1 to 5, which is provided for the respective quartz glass panes 4 of the four parallel juxtaposed respective lamps 1 together. In FIG. 7, one of the lamps 1 can be seen inside the raised and turned-over hood 7 (see FIG. 5). The remaining lamps 1 are arranged within the three further hoods 7. There are therefore three closed and one open chamber 14.

On the frame 5 vertically upstanding support 14 are constructed, namely four front left and four right rear. On the carriers 14 each guide rods 15 are held, which are encompassed by guide sleeves 16. These sleeves 16 are each fastened via a rotary joint 17 above the upper horizontal wall of the hood 7 and on their end faces. About these hinges 17, the hoods 7 can be rotated when they have been driven by a displacement of the sleeves 16 along the guide rods 15 upwards, as the figures 6 and 7 show.

From the context of the figures, it is already apparent that a separate inert gas chamber 14 (general protective gas chamber), a separate quartz glass pane 4, a separate reflector 2 and a separate cooling device 9, 10 are provided for each lamp 1 in a modular design. In addition, FIGS. 6 and 7 show, for each of these models. dule each own electronic ballast 18. This is outside the hood 7 and easily accessible mounted on the top.

Overall, the structure of the overall light is recognizable largely modular design and is held together by the common frame structure 5. With this frame 5, the VUV light is attached to an ozone cleaning device for the treatment of TFT displays and is thus located above a production line, not shown, for the displays. In this cleaning section of the production line there is an oxygen atmosphere, which is converted by VUV radiation to a considerable extent in ozone, as known per se. If one of the lamps 1 has to be replaced, due to the modular design, only the chamber 14 directly affected by it must be opened and the nitrogen atmosphere contained therein disturbed. The remaining modules are not affected. Depending on whether the required lamp power can be achieved even without the lamp just started up - possibly by extending the residence time - or by correspondingly redundant power design - the cleaning operation can even continue. Even if it is interrupted, this only applies to the time required for the actual maintenance and the rinsing steps required to restore the required nitrogen purity in the chamber 14. These times are significantly lower than in the restoration of a protective gas atmosphere in a larger coherent light housing, especially if this is constructed correspondingly complex. In particular, the panes 4 with the frame 5 remain firmly connected to the cleaning device, so that the oxygen or ozone atmosphere is not touched during the removal of one or more of the modules. According to the prior art, however, considerable time losses due to ventilation and rinsing operations are necessary before and after the maintenance work, because the ozone concentration within the production line is very dangerous or even when using an inert gas atmosphere within the production line, for example in printing presses, this in the necessary Purity must be restored.

Claims

claims

1 . UV lamp with a tubular UV lamp (1) and a UV reflector (2, 2 ', 2' ') along a longitudinal direction of the lamp (1) on a side of the lamp (1) facing away from a main light exit side,

characterized by a cross-sectional profile of the reflective surface of the reflector (2, 2 ', 2' ') transverse to the longitudinal direction, which is concave on the opposite side of the lamp and in part slightly inclined outwards in such a way that of the lamp (1) centered light (13a-c) is reflected past the lamp (1) by this inclined part of the reflector (2, 2 ', 2' '), transversely to the longitudinal direction of the cross section through the lamp (1).

2. UV lamp according to claim 1, which is designed for a fluorescent lamp (1).

3. UV lamp according to claim 1 or 2, which is designed for a VUV lamp (1).

4. UV lamp according to one of the preceding claims, which is designed for an excimer discharge lamp (1).

5. UV lamp according to one of the preceding claims, wherein the reflective surface of the reflector (2) corresponds to a part of a cylinder jacket surface with parallel to the longitudinal axis of the cylinder axis.

6. UV lamp according to one of claims 1 - 4, wherein the reflective surface of the reflector (2 ', 2' ') has a polygonal cross-sectional profile perpendicular to the longitudinal direction.

7. UV lamp according to one of the preceding claims, wherein the reflector (2, 2 ', 2' ') has an elongated passage in the longitudinal direction (3) for cooling gas.

8. UV lamp according to one of the preceding claims with a gas flow cooling device (9, 10) having a liquid-cooled heat exchanger (10) for the cooling gas.

9. UV lamp according to one of the preceding claims with a protective gas-filled, closed Leuchtenge- housing (4-8) and a gas flow cooling device (9, 10) with cooling gas recirculation in the lamp housing (4-8).

10. UV lamp according to one of the preceding claims with a housing (4-8), which is designed to receive a plurality of UV lamps (1) and a protective atmosphere, wherein the housing (4-8) in such a way in each case one Part of the UV lamps (1) containing chambers (14) is divided and can be opened in such a way that each of the UV lamps (1) is interchangeable with impairment of the protective atmosphere only the respective chamber (14).

11. UV lamp according to claim 10, wherein each chamber (14) contains exactly one UV lamp (1).

12. UV lamp according to claim 10 or 11, wherein the housing (4-8) has at least one UV-transparent separating disc (4) for delimitation between the housing exterior and Gehäuseinnerem and can be opened in such a way that each of the UV Lamps (1) after moving a part (7) of the housing (4-8) is exchangeable, wherein the cutting disc (4) relative to the rest of the lamp (4, 5, 6, 8) remains unmoved.

13. A device for carrying out a technical process with products using UV light, in particular for surface modification, which device comprises a UV lamp according to one of the preceding claims and a product holding device for the process to be treated with the products.

14. Device according to claim 13, comprising a gas container containing the product holding device, which is designed not to open the gas atmosphere in the gas container when opening the housing part and exchanging the UV lamps (1).

15. Use of a UV lamp according to one of the preceding claims 1 - 12 or a device according to claim 13 or 14 for surface modification in the production of industrial products.