WO2010057703A2 - Procédé pour faire fonctionner un entraînement électrostatique et entraînement électrostatique - Google Patents

Procédé pour faire fonctionner un entraînement électrostatique et entraînement électrostatique Download PDF

Info

Publication number
WO2010057703A2
WO2010057703A2 PCT/EP2009/062352 EP2009062352W WO2010057703A2 WO 2010057703 A2 WO2010057703 A2 WO 2010057703A2 EP 2009062352 W EP2009062352 W EP 2009062352W WO 2010057703 A2 WO2010057703 A2 WO 2010057703A2
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
subunit
actuator
stator
potential
Prior art date
Application number
PCT/EP2009/062352
Other languages
German (de)
English (en)
Other versions
WO2010057703A3 (fr
Inventor
Tjalf Pirk
Stefan Pinter
Joachim Fritz
Christoph Friese
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to KR1020117011256A priority Critical patent/KR101671541B1/ko
Priority to US12/998,669 priority patent/US8629635B2/en
Priority to EP09783351.1A priority patent/EP2359464B1/fr
Priority to CN200980146261.1A priority patent/CN102217183B/zh
Publication of WO2010057703A2 publication Critical patent/WO2010057703A2/fr
Publication of WO2010057703A3 publication Critical patent/WO2010057703A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods

Definitions

  • the invention relates to methods for operating an electrostatic drive. Furthermore, the invention relates to electrostatic drives.
  • Micromechanical components such as, for example, micromechanical torsion actuators or translational microactuators, frequently have an electrostatic drive whose electrodes are designed as multi-layer electrodes. Often an electrostatic drive with at least two multi-layer electrodes is referred to as a multi-layer comb drive
  • FIGS. 1A and 1B show cross sections illustrating a structure and operation of a conventional electrostatic drive with multi-layer electrodes.
  • the conventional electrostatic drive has a stator electrode 10 and an actuator electrode 12.
  • the two electrodes 10 and 12 are formed as Mehriagenelektroden.
  • a first separation layer 10a divides the stator electrode 10 into two stator electrode sub-units 10b and 10c which are electrically insulated from one another.
  • the actuator electrode 12 is subdivided by a second separation layer 12a into two actuator electrode subunits 12b and 12c which are electrically insulated from one another
  • the two separating layers 10a and 12a lie on a parting plane 14.
  • the first stator electrode subunit 10b and the first actuator electrode subunit 12b are located with respect to the parting plane 14 in a first deflection direction 16 of the actuator electrode 12.
  • the second stator electrode subunit 10c and the second actuator Electrode cleaning means 12c with respect to the separation plane 14 is a second deflection direction 18 ⁇ r actuator electrode 12th
  • the application of a first potential P1 to the first stator electrode subunit 10b and the application of a second potential P2 not equal to the first potential P1 to the second actuator electrode subunit 12c causes an attractive force between the first stator Electrode subunit 10b and the second actuator electrode subunit 12c and thus a deflection of the actuator electrode 12 from its (de-energized) starting position in the first Austenkungsraum 16.
  • the application of a third potential P3 to the second stator electrode subunit 12c and one of the third leads Potential P3 deviating fourth potential PA to the first actuator electrode subunit 12b for understanding the actuator electrode 12 from its initial position in the second Austegungsoplasty 18 (see Fig. 1B).
  • the illustrated electrostatic drive thus has the advantage that the actuator electrode 12 is adjustable from its voltage-free starting position into two different Austenkungsrichtun- 16 and 18.
  • the second Austenkungsutter 18 of the first Austenkungsutter 16 is Ertallege composition
  • FIGS. 1A and 1B The activation method of FIGS. 1A and 1B is known from the prior art as SEA (Switching Eectrode Actuator). Independent electrical potentials P1 to P4 are applied to different electrode sub-units 10b, 10c, 12b and 12c in this way For example, it is possible to selectively generate a force in the Ausjenkungsplatz 16 or in the deflection direction 18 by means of the electrostatic drive.
  • SEA Switching Eectrode Actuator
  • the non-actively driven electrode subunits 10c and 12b have no defined potential. Therefore, the non-actively driven electrode subunits 10c and 12b (Fig. 1A) or 10b and 12c (Fig. 1B) are often referred to as floating electrode subunits 10c and 12b or 10b and 12c.
  • the invention provides a method for operating an electrostatic drive with the features of claim 1, a method for quenching an electrostatic drive with the features of claim 6, a method for operating an electrostatic drive with the features of claim 8, an electrostatic drive with the Features of claim 9, an electrostatic drive with the features of claim 13 and an electrostatic drive with the Merkmaien of claim 15th
  • the present invention describes advantageous methods for operating an electrostatic drive with at least two multi-layer electrodes (multi-length comb drives), such as an SEA drive.
  • multi-layer electrodes multi-length comb drives
  • Floating electrode subunits need not be feared in the inventive method.
  • a potential is meant an active application of a potential for avoiding floating electrode subunits.
  • the actuator electrode is advanced with respect to the stator electrode into a first direction in which the first actuator electrode subunit is in relation to the second separation layer, by applying a second potential in a region between it to the first one
  • the third potential applied to the stator electrode subunit and the third potential applied to the second stator electrode subunit and to the second actuator electrode subunit are connected to the first actuator electrode subunit.
  • the actuator electrode can be moved in a second direction, with respect to the stator electrode which is the second actuator electrode subunit with respect to the second separation layer, can be pre-deflected by applying a first potential which is in a range between The second potential applied to the first actuator electrode subunit and the third potential applied to the second stator electrode subunit and the second actuator electrode subunit are applied to the first stator electrode subunit.
  • the actuator electrode can optionally be stiffened in a first deflection direction or in a second Austenkungs- direction, wherein the second A ⁇ sJenkungsoplasty is preferably directed opposite to the first deflection direction
  • the actuator electrode is deflected further in relation to the stator electrode from the first end position into a second end graduation. by reducing a difference between the first potential applied to the first stator electrode subunit and the second potential applied to the first actuator electrode subunit. This ensures an advantageous opening of the asymmetry of the drive potentials after the forward steering to increase the achievable adjustment force
  • the actuator electrode may be further deflected with respect to the stator electrode from the second end position to a third end position by equalizing the first potential applied to the first stator electrode subunit and the second applied to the first actuator electrode subunit Potential and increasing a difference between the third potential applied to the second stator electrode and the second actuator electrode subunit and the first potential applied to the first stator electrode subunit.
  • the stator electrode is coupled to a second stator electrode and the actuator electrode is coupled to a second actuator electrode so that the actuator electrode is deflected in advance in relation to the stator electrode Second actuator electrode with respect to the second stator electrode, the actuator electrode is adjusted in relation to the stator electrode, and between the second actuator electrode and the second stator electrode, a non-zero deflection voltage for adjusting the Second actuator electrode applied
  • the second actuator electrode of the actuator electrode and the second stator of the stator electrode are electrically insulated
  • the second stator electrode and the second actuator electrode are another electric drive, which is designed for example as an out-of-Piane drive
  • the alternative embodiment is not limited to the use of an out-of-plane drive. Instead, any type of electrical drive may be used to favorably deflect the actuator electrode from its de-energized home position.
  • any type of electrical drive may be used to favorably deflect the actuator electrode from its de-energized home position.
  • the actuator electrode is arranged in its initial position in the plane of the at least one stator electrode, producing the at least two electrodes is relatively easy to carry out a etching out of the electrodes of a single electrode material layer.
  • the electrostatic drive can thus be produced cost-effectively by means of an easily executable production method, it being ensured that the at least two electrodes are arranged at a comparatively small distance from each other. This improves the ratio of the force obtained with respect to the applied voltage, in particular with respect to an electrostatic drive whose actuator electrode is arranged in its initial position outside the plane of the at least one stator electrode (out-of-plane arrangement).
  • the electrode subunits (floating electrode subunits) which are not covered by a potential are not electrically driven. In terms of circuitry, this control is demanding, since all electrode subunits must be able to be separated from the electrical locking element in order to achieve a floating state. In addition, at least two of the four required drive channels must be designed for applying a high voltage or a single voltage source with a high-voltage circuit breaker connected downstream must be used. This makes the conventional electrostatic drive with multilayer electrodes comparatively expensive.
  • control device of the electrostatic drive is additionally designed such that, when the actuator electrode is deflected with respect to the stator electrode, it moves from its initial position without load into a first end position into the first operating mode, in the case of a further opening Actuator electrode with respect to the stator electrode from the first end position to a second end position in the second operating mode and with a further deflection of the actuator electrode with respect to the stator Electrode switches from the second end position into a third end position into the third operating mode.
  • the method according to the invention can thus be easily transferred to an electrostatic drive.
  • Austenk ⁇ ngsraum can be done by a further electrode subunit instead of by an asymmetry potential (or an asymmetry voltage). Accordingly, shading is also possible by which the use of floating potentials corresponds to an OOP actuator. In order to keep the electronics simple, the floating potentials can not be connected.
  • the deflection direction can be determined without the need for an asyrnmet ⁇ potential.
  • This solution is advantageous, in particular, for actuators that can only be deflected in one direction
  • FIGS. 1A and 1B are cross-sectional views illustrating a structure and operation of a conventional electrostatic drive having multi-layer electrons
  • 2A to 2D are two schematic diagrams and two coordinate systems for explaining a first embodiment of the electrostatic drive
  • 3A ⁇ 3C are a schematic illustration and two coordinate systems for explaining an embodiment of the method for operating an electrostatic drive.
  • Figs. 2A to 2D show two schematic views and two coordinate systems for explaining an embodiment of the electrostatic drive.
  • the electrostatic drive shown schematically in FIGS. 2A and 2C comprises at least one stator electrode 50 and one actuator electrode 52.
  • the electrodes 50 and 52 may be, for example, comb electrodes. However, the electrodes 50 and 52 are shown only schematically in Figs. 2A and 2C. It is expressly understood that the present invention is not limited to a particular form of the electrodes 50 and 52
  • the electrodes 50 and 52 are formed as Mehriagenetektroden.
  • the at least one stator electrode 50 is divided into two mutually electrically isolated stator electrode subunits 50b and 50c, each having a height h, by a separation layer 50a.
  • the actuator electrode 52 is also cut through a separation layer 52a into two actuator electrode subunits 52b electrically insulated from each other and 52c divided by the high h
  • electrodes 50 and 52 may also include at least three electrode subunits electrically isolated from one another.
  • the electrostatic drive comprises a control device 54 (shown only schematically) by means of which a potential ni to ⁇ Z can be applied to the electrode submerged blades 50b, 50c, 52b and 52c. If there is no voltage not equal to 0 between the electrode subunits 50b, 50c, 52b and 52c, then the actuator electrode 52 is in its initial position. In the de-energized starting position, a first actuator electrode subunit 52b has a smaller distance to a first stator electrode subunit 50b than a second actuator electrode subunit 52c, the first stator electrode subunit 50b relative to the separation layer 50a and the first actuator electrode subunit 52b with respect to the separation layer 52a in a first deflection direction 58a.
  • a second stator electrode subunit 50c with respect to the separation layer 50a and the second actuator electrode subunit 52c with respect to the separation layer 52a are arranged in a second direction of deflection 58b. Accordingly, the second actuator electrode subunit 52c has a smaller distance from the second stator electrode subunit 50c than the first actuator electrode subunit 52b in the de-energized starting position.
  • the actuator electrode 52 is arranged with respect to the at least one stator electrode 50 so that the separation layers 50a and 52a lie on a common parting plane 56. This is also referred to as an IrvPlane arrangement of the electrodes 50 and 52.
  • the control device 54 has at least two modes of operation for applying a potential ⁇ to nZ to the electrode subunits 50b, 50c, 52b and 52c.
  • a first operating mode which is referred to below as an asymmetrical activation mode
  • the control device 54 is designed to apply to the first stator electrode subunit 50b a first potential ⁇ 1 and to the first actuator electrode subunit 52b a potential / r2 deviating from the potential ⁇ 1.
  • the control device 54 in the asymmetric activation mode is designed to apply to the second stator electrode subunit 50c and the second actuator electrode subunit 52c a third potential ⁇ Z, which is different from the first potential ⁇ 1 or the second potential n2.
  • the second stator electrode subunit 50c and the second actuator electrode subunit 52c thus have the same potential nZ in the asymmetrical driving mode. It can therefore be said that the second stator electrode subunit 50c and the second actuator electrode subunit 52c have a symmetry with respect to their applied potential ⁇ 3.
  • the potential ⁇ 2 applied to the first actuator electrode subunit 52b in the case of the asymmetrical drive mode can be, for example, in a wide range between the potentials ⁇ 1 and nZ. (Another example of the distribution of the potentials ⁇ 1, ⁇ 2, and nZ will be discussed in more detail below.) It should be noted here that it is not important for a potential r ⁇ 2 to be in a range of values between the potentials ⁇ and nZ Potential ⁇ 1 is smaller than the potential nZ, or vice versa
  • the potential n2 in a value range between the potentials ⁇ 1 and / 73 thus causes an asymmetry between the applied potentials ⁇ 1 and / 72 of the first stator electrode subunit 50b and the first actuator electrode unit 52b. Therefore, the potential / 72 in a range of values between the potentials ⁇ 1 and nZ can be called A-symmetry potential ⁇ 2.
  • Applying the potentials ⁇ 1 to / r 3 to the electrode subunits 50b, 50c, 52b and 52c is preferably carried out by applying a voltage between the associated electrode subunit 50b, 50c, 52b or 52c and a ground, not shown.
  • these voltages are 0V for the first stator electrode subunit 50b, 0.5V for the first actuator electrode subunit 52b and 1V for the second stator electrode subunit 50c and the second actuator electrode subunit 52c, respectively
  • the values given here are only to be understood as examples.
  • the asymmetrical drive mode described here is not limited to an asymmetry voltage that is one-half the difference of the voltages applied to the gate reactors 50b and 52c
  • the attractive force between the first stator electrode subunit 50b and the second actuator electrode subunit 52c is larger than the attractive force between the second stator electrode subunit 52b and the first actuator electrode subunit 52b.
  • the applied asymmetry potential / r2 thus causes a deflection of the actuator electrode 52 with respect to the stator electrode from the voltage-free starting position in the first deflection direction 58a.
  • the coordinate system illustrated in FIG. 2B has as the abscissa a deflection x (in ⁇ m) along the first alignment direction 58a.
  • the ordinates of the coordinate system indicate a normalized force FO (in M / (m * V2)).
  • a potential ⁇ 1 is applied to the first stator electrode subunit 50b, which lies in a value range between the potential 2 of the first actuator electrode subunit 52b and the potential ⁇ Z of the second stator electrode subunit 50c and the second actuator electrode subunit 52c in this case one can speak of an asyrnometric potential ⁇ 1. Due to the asymmetry potential ⁇ 1, the attracting force between the first stator electrode subunit 50b and the second actuator electrode subunit 52c is smaller than the attracting force between the second stator electrode subunit 52c and the first actuator electrode subunit 52b. The asymmetry potential ⁇ 1 thus causes an expansion of the actuator electrode 52 in relation to the stator electrode from the voltage-free starting position into the second deflection direction 58b.
  • the asymmetrical drive mode thus has the advantage that the desired direction in which the actuator electrode 52 is to be deflected with respect to the stator electrode 50 can be fixed in a simple manner.
  • the control device 54 is designed to apply an equal potential ⁇ 1 to the first stator electrode subunit 50b and the first actuator electrode subunit 52b.
  • a potential ⁇ Z different from the potential ⁇ 1 is applied to the second stator electrode subunit 50c and the second actuator electrode subunit 52c.
  • the first stator electrode subunit 50b and the first actuator electrode subunit 52b have a "symmetric" potential ⁇ 1 and the second stator electrode subunit 50c and the second actuator electrode subunit 52c have a " balanced" potential nZ.
  • the course of the normalized force FO for the symmetrical activation mode shows clear plateaus in the value ranges W1 and W2 for a greater deflection x in both directions of orientation 58a and 58b.
  • the normalized force FO in the value ranges W1 and W2 A maximum normalized force Fmax is significantly greater than a maximum achievable normalized force FO of the asymmetrical drive mode.
  • the normalized force FO achievable in the value ranges W1 and W2 corresponds to an out-of-plane arrangement of an electrostatic actuator.
  • the symmetrical activation mode is therefore to be preferred in the value ranges W1 and W2 to the asymmetrical activation mode.
  • the direction of the normalized force FO reverses at a displacement x of about 0.
  • the exact zero point ⁇ of the normalized force FO can easily deviate from the deflection x equals 0.
  • the zero of the normalized force FO is defined by asymmetries in the geometry of the electrodes 50 and 52, which are often caused by variations in the fabrication process. (In Rg. 2D, however, the asymmetry was not reproduced on the basis of the normalized force FO.)
  • the control device 54 is therefore designed to carry out a forward steering of the actuator electrode 52 from its voltage-free starting position with respect to the stator electrode in the asymmetrical activation mode.
  • the desired deflection direction 58a or 58b is determined by a corresponding asymmetry potential ⁇ 1 or r ⁇ 2. This determination of the desired deflection direction 58a or 58b can be carried out again and again during operation.
  • a one-time selection of the first deflection direction 58a does not preclude a later selection of the second extension direction 58b.
  • the achievable maximum normalized force FO of the asymmetric activation mode is significantly lower than the achievable maximum normalized force FO of the symmetrical activation mode. It therefore does not make sense to maintain the asymmetrical drive mode over the entire range of the deflection x of the actuator electrode 52 in a fixed deflection direction 58a or 58b.
  • the change from the asymmetrical activation mode to the symmetrical activation mode occurs via an intermediate drive mode in which the applied potentials ⁇ and ⁇ 2 approach each other. The asymmetry between the applied potentials ⁇ 1 and r ⁇ 2 is canceled, for example stepwise or continuously.
  • the control device 54 is shaded from the intermediate drive mode into the symmetrical drive mode. Alternatively, however, it is also possible. To pass an abrupt equalization of the applied potentials ⁇ 1 and ⁇ 2 directly from the asymmetric drive mode in the symmetric drive mode.
  • the further deflection of the actuator electrode 52 is then carried out by controlling the applied potentials ⁇ 1 and ⁇ 3 in the symmetrical drive mode such that a difference between the applied potentials 771 and ⁇ 3 increases.
  • the symmetrical activation mode has a greater normalized force FO is achievable (see Rg. 2B and 2D).
  • the electrostatic drive shown with reference to FIGS. 2A-2D can be used in a micromechanical component.
  • a micromechanical component is, for example, a torsional actuator such as a micromirror.
  • the electrostatic drive in a translational actuator in which a force is generated perpendicular to a chip surface, are used.
  • a possible field of application of the electrostatic drive is, for example, a head-up display in the automotive sector and a mini projector in consumer Beretch. Furthermore, the use of the electrostatic drive in a surface scanner or in a switching mirror of an optical network (optical cross-connect) is conceivable.
  • 3A-3C show a schematic representation and two coordinate systems for explaining an embodiment of the method for operating an electrostatic drive.
  • the electrostatic drive shown schematically in FIG. 3A has the previously described design of the electrodes 50 and 52 as multi-layer electrodes. If no voltage U1 to U3 is present between the electrode subunits 50b, 50c, 52b and 52c, then the actuator electrode 50 is in its initial position with respect to the two stator electrodes 50.
  • the separating layers 50a and 50b are preferably in the dead position the actuator electrode 50 on a parting plane 56.
  • the first stator electrode subunits 50b and the first actuator electrode subunit 52b are located in With respect to the parting plane 56 in a first direction of deflection 58a. Accordingly, the second stator electrode subunits 50c and the second actuator electrode subunit 52c are located in a second deflection direction 58b with respect to the parting plane 56.
  • the abscissa of the coordinate system of FIG. 3B is a Aus ⁇ kung x, by which the actuator electrode 52 from its de-energized starting position by applying a voltage U1 to U3 to the electrode subunits 50b, 50c. 52b and 52c is adjusted.
  • the application of a potential is made by applying the voltages U1 to U3 between an associated electrode subunit 50b, 50c, 52b or 52c and a ground (not shown).
  • the ordinate of the coordinate system gives the applied voltages U1 to U3 again.
  • the coordinate system shown in FIG. 3C indicates the course of the normalized force FO along the deflection x as a graph g3.
  • the abscissa corresponds to the deflection x (in ⁇ m).
  • the ordinate indicates the normalized force FO (in N / (m * V2)).
  • the actuator electrode 52 For a Austenken the actuator electrode 52 from its de-energized rest position with a deflection x equal to 0, the voltages U1 to U3 are applied to the electrode subunits 50b, 50c, 52b and 52c
  • a first voltage U1 is applied between the first stator electrode subunits 50b and ground.
  • the second voltage U2 is applied to the first actuator electrode subunit 52b with an asymmetry between the voltages U1 and U2 will be described in more detail below, in particular can be determined in this way by means of the asymmetry voltage U2 a desired deflection direction 58a or 58b.
  • a third voltage U3 is applied between a ground and each of the second stator electrode subunits 50c and the second actuator electrode subunit 52c.
  • the electrode subunits 50c and 52c thus have a symmetry with respect to their applied voltage U3.
  • the first voltage U1 is kept constant at OV.
  • the third voltage U3 steadily increases.
  • the second voltage U2 is steadily increased at a deflection x between 0 and x1, but is in a range between the voltages U1 and U3.
  • the graph g3 lies on the graph gl of the asymmetric activation mode. In doing so, use is made of the fact that the normalized force F 0 achievable by means of the method step described above is a definite deflection direction 58 a or 58 b.
  • the further deflection of the actuator electrode 52 takes place in a method step corresponding to the above-described intermediate mode, which represents a transition from the asymmetrical activation mode to the symmetrical activation mode (this transition is used for the further deflection of the actuator Electrode 52 selected to achieve a deflection x> x1, since by means of the symmetrical Anste ⁇ réelle at these large deflections x> x2 a larger in relation to the applied voltage normalized force FO can be generated)
  • the first voltage U1 is still kept constant at OV.
  • the second voltage U2 is reduced and thus approximates the first voltage U1.
  • the reduction of the second voltage U2 can be continuous or stepwise.
  • the third voltage U3 is increased or kept constant with a decrease in the second voltage U2. It should be noted here that the second voltage U2 can also be kept constant in the meantime, while the third voltage U3 is increased.
  • the method step described in the preceding paragraph causes an increase in the normalized force FO achieved (see graph g3 in FIG. 3C).
  • this increase in the normalized force FO achieved can be used to apply comparatively small voltages U1 to U3 to the electrode subunits 50b, 50c, 52b and 52c.
  • the voltages U1 and U2 both have the same value, for example a voltage U1 equal to OV.
  • the voltages U1 and U2 are kept the same. An asymmetry with respect to the voltages U1 and U2 is thus no longer present at a deflection x> x2.
  • the graph g3 lies on the graph g2 of the symmetrical drive mode.
  • the actuator Etektrode 52 thus the maximum normalized force Fmax is obtained.
  • the method described here according to a combination of the asymmetrical activation mode and the symmetrical activation mode is therefore particularly advantageous.
  • An OOP actuator with two deflection directions requires two separate Comb-Drive areas, each used for only one deflection direction.
  • the method described here requires only one comb drive area. which is usable for both deflection directions 58a and 58b. This enables a reduction in the size of the electrostatic drive while maintaining the number of possible deflection directions 58a and 58b. In particular, it is thus ensured that an electrostatic drive operated by means of the method is easier to insert into a micrornechanical component
  • the voltage U2 is kept constant at 0.
  • the voltage U3 is increased
  • the asymmetry voltage U1 is selected in a range between the voltages U2 and U3, wherein the voltage U1 is continuously increased.
  • the voltage U1 is steadily reduced while the voltage U2 is kept constant and the voltage U3 increases steadily.
  • the voltages U1 and U2 are kept the same and the voltage U3 is increased.
  • the method described in the preceding paragraphs can be executed by means of a comparatively inexpensive control device.
  • the control device for applying the voltages U1 to Ü3 on four voltage sources The voltages IM and U2 remain low during the entire range of the deflection 0 ⁇ x ⁇ x3. Only the course of the voltage U3 may require high electrical potentials for large deflections x> x2 or x ⁇ x2 * .
  • the method with only a maximum of a high voltage source ausssel. This saves in addition to other expensive high voltage sources the Ausb ⁇ den a larger number of leads with suitable insulation for coupling the other high voltage sources.
  • Fig. 4 is a schematic view for explaining a second embodiment of the electrostatic drive.
  • the electrostatic drive represented diagrammatically in FIG. 4 comprises the already described components 50 to 54.
  • the electrostatic drive has a second stator electrode 60 coupled to the stator electrode 50 and a second electrode coupled to the actuator electrode 52.
  • the second electrodes 60 and 62 are in this case coupled to the respective electrode 50 or 52 (directly or indirectly), that upper a Versized the second actuator electrode 62 with respect to the second stator electrode 60th the actuator electrode 52 is adjustable with respect to the stator electrode 50.
  • the second stator electrode 60 and the second actuator electrode 62 provide another electrostatic drive which is operable by the controller 54.
  • the second stator electrode 60 and the second actuator electrode 62 are out-of-order
  • the second electrodes 60 and 62 may have an overall height equal to the height h of the electrode subunits 50b and 52b or 50c and 52c.
  • Such an OOP drive has the advantage that it at the same time as the structuring of the electrodes 50 and 52 from two common electronic materials, between which at least one electrically insulating T ⁇ itmüht is arranged out structurable.
  • the etch mask it can be ensured that the second electrodes 60 and 62 are formed as insert electrodes. Since a corresponding manufacturing method is obvious to a person skilled in the art with reference to the preceding description and FIG. 4, this will not be discussed in more detail.
  • second electrodes 60 and 62 which are in their voltage-free output. Position in the OOP arrangement are arranged to each other. Instead, other embodiments of the second electrodes 60 and 62 may be used to advance the electrodes 50 and 52 from their de-energized home position.
  • a deflection direction 58a or 58b of the actuator electrode 52 is determined.
  • the potentials ⁇ 1 and ⁇ Z are applied to the corresponding second electrode 60 and 62.
  • other potentials for Applying the deflection voltage to the second electrodes 60 and 62 are applied.
  • the actuator electrode 52 can be adjusted in a predetermined deflection direction 58a or 58b.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un procédé pour faire fonctionner un entraînement électrostatique comprenant une électrode stator (50) et une électrode actionneur (52) qui se présentent sous la forme d'électrodes multicouches. Selon l'invention, l'électrode actionneur (52), lorsqu'elle se trouve dans sa position initiale hors tension, en l'absence d'une tension appliquée entre une sous-unité d'électrode stator (50b, 50c) et une sous-unité d'électrode actionneur (52b, 52c), est disposée par rapport à l'électrode stator (50) de sorte que la première sous-unité d'électrode actionneur (52b) se trouve à une distance inférieure de la première sous-unité d'électrode stator (50b), que la deuxième sous-unité d'électrode actionneur (52c). Le procédé consiste à : réaliser une pré-orientation de l'électrode actionneur (52) par rapport à l'électrode stator (50) de sa position initiale hors tension à une première position finale, par application d'un premier potentiel (p1) à la première sous-unité d'électrode stator (50b) et d'un deuxième potentiel (p2) différent du premier potentiel (p1), à la première sous-unité d'électrode actionneur (52b); et appliquer un troisième potentiel (p3) à la deuxième sous-unité d'électrode stator (50c) et à la deuxième sous-unité d'électrode actionneur (52c), le troisième potentiel étant différent du premier potentiel (p1) et du deuxième potentiel (p2).
PCT/EP2009/062352 2008-11-19 2009-09-24 Procédé pour faire fonctionner un entraînement électrostatique et entraînement électrostatique WO2010057703A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020117011256A KR101671541B1 (ko) 2008-11-19 2009-09-24 정전 구동 장치 작동 방법 및 정전 구동 장치
US12/998,669 US8629635B2 (en) 2008-11-19 2009-09-24 Methods for operating an electrostatic drive, and electrostataic drives
EP09783351.1A EP2359464B1 (fr) 2008-11-19 2009-09-24 Procédé de fonctionnement de commande électrostatique et des entrainements électrostatiques
CN200980146261.1A CN102217183B (zh) 2008-11-19 2009-09-24 用于运行静电驱动装置的方法和静电驱动装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008043836.7 2008-11-19
DE102008043836A DE102008043836A1 (de) 2008-11-19 2008-11-19 Verfahren zum Betreiben eines elektrostatischen Antriebs und elektrostatische Antriebe

Publications (2)

Publication Number Publication Date
WO2010057703A2 true WO2010057703A2 (fr) 2010-05-27
WO2010057703A3 WO2010057703A3 (fr) 2011-08-18

Family

ID=42104830

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/062352 WO2010057703A2 (fr) 2008-11-19 2009-09-24 Procédé pour faire fonctionner un entraînement électrostatique et entraînement électrostatique

Country Status (6)

Country Link
US (1) US8629635B2 (fr)
EP (1) EP2359464B1 (fr)
KR (1) KR101671541B1 (fr)
CN (1) CN102217183B (fr)
DE (1) DE102008043836A1 (fr)
WO (1) WO2010057703A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017213277B4 (de) * 2017-08-01 2019-08-14 Infineon Technologies Ag Mems-sensoren, verfahren zum bereitstellen derselben und verfahren zum betreiben eines mems-sensors
CN108809144B (zh) * 2018-07-09 2019-10-15 山东理工大学 一种基于微梁振动静电驱动微马达装置
EP3881425A4 (fr) * 2018-11-13 2022-04-27 C-Motive Technologies, Inc. Système de machine électrostatique et procédé de fonctionnement
US11954292B2 (en) * 2019-07-17 2024-04-09 Panasonic Intellectual Property Management Co., Ltd. Input device and input system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0584479A1 (fr) * 1992-08-25 1994-03-02 Kanagawa Academy Of Science And Technology Actuateur électrostatique
US20030164042A1 (en) * 2000-06-29 2003-09-04 Francois Valentin Electronic microcomponent, sensor and actuator incorporating same
US20040008396A1 (en) * 2002-01-09 2004-01-15 The Regents Of The University Of California Differentially-driven MEMS spatial light modulator
US20040189144A1 (en) * 2003-03-28 2004-09-30 Olympus Corporation Electrostatic actuator and method of displacement
US20050062361A1 (en) * 2003-09-22 2005-03-24 Harley Jonah A. Stepping electrostatic comb drive actuator
DE102005018955A1 (de) * 2005-04-23 2006-11-09 Forschungszentrum Karlsruhe Gmbh Mikropositioniersystem

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
KR100398856B1 (ko) * 2000-03-30 2003-09-19 가부시끼가이샤 도시바 정전 액튜에이터 기구, 그 구동 방법, 및 그것을 이용한카메라 모듈
JP3529761B2 (ja) * 2001-11-20 2004-05-24 株式会社東芝 静電アクチュエータ及びその駆動方法
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
WO2005011121A2 (fr) 2003-07-23 2005-02-03 Thunder Creative Technologies, Inc. Systemes de convertisseur numerique/analogique a faible distorsion et de synthetiseur de signaux numeriques
JP4621577B2 (ja) 2005-10-27 2011-01-26 アルプス電気株式会社 静電アクチュエータ及びその駆動方法
JP4548792B2 (ja) * 2006-08-22 2010-09-22 日本電信電話株式会社 オーバーレイネットワークの通信経路制御方法および通信経路制御システムとプログラム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0584479A1 (fr) * 1992-08-25 1994-03-02 Kanagawa Academy Of Science And Technology Actuateur électrostatique
US20030164042A1 (en) * 2000-06-29 2003-09-04 Francois Valentin Electronic microcomponent, sensor and actuator incorporating same
US20040008396A1 (en) * 2002-01-09 2004-01-15 The Regents Of The University Of California Differentially-driven MEMS spatial light modulator
US20040189144A1 (en) * 2003-03-28 2004-09-30 Olympus Corporation Electrostatic actuator and method of displacement
US20050062361A1 (en) * 2003-09-22 2005-03-24 Harley Jonah A. Stepping electrostatic comb drive actuator
DE102005018955A1 (de) * 2005-04-23 2006-11-09 Forschungszentrum Karlsruhe Gmbh Mikropositioniersystem

Also Published As

Publication number Publication date
DE102008043836A1 (de) 2010-05-20
WO2010057703A3 (fr) 2011-08-18
KR101671541B1 (ko) 2016-11-16
US20110260658A1 (en) 2011-10-27
CN102217183A (zh) 2011-10-12
KR20110094284A (ko) 2011-08-23
CN102217183B (zh) 2014-11-26
EP2359464B1 (fr) 2014-03-05
US8629635B2 (en) 2014-01-14
EP2359464A2 (fr) 2011-08-24

Similar Documents

Publication Publication Date Title
DE60222075T2 (de) Elektrostatischer Betätiger, und elektrostatisches Relais und andere Vorrichtungen unter Benutzung derselben
EP1123526B1 (fr) Composant micromecanique a corps oscillant
DE2941983A1 (de) Elektronenstrahlerzeuger
WO1994019819A1 (fr) Relais micromecanique a actionnement hybride
WO2010034551A1 (fr) Culasse d’aimant, composant micromécanique et procédé de fabrication pour une culasse d’aimant et un composant micromécanique
EP0175933A1 (fr) Système de lentilles à balayage sans défauts chromatiques de déviation pour traitement de matériaux par faisceaux corpusculaires
WO2010057703A2 (fr) Procédé pour faire fonctionner un entraînement électrostatique et entraînement électrostatique
DE112005000510T5 (de) MEMS-basierte Aktorvorrichtungen, die Elektrets verwenden
DE10302618B4 (de) Elektrostatische Betätigungsvorrichtung
DE102008035297A1 (de) Aberrationskorrektureinrichtung für Ladungsteilchenstrahlen in einem optischen System einer Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung mit der Aberrationskorrektureinrichtung
EP0075712A2 (fr) Système optique électronique pour la formation d'un rayon d'électrons à forme et diamètre variables pour la fabrication de structures microscopiques
DE19823690C1 (de) Mikromechanisches elektrostatisches Relais
WO2016113251A1 (fr) Actionneur mems, système pourvu d'une pluralité d'actionneurs mems et procédé de fabrication d'un actionneur mems
DE2827458C3 (de) Konvergenzvorrichtung für ein Projektions-Farbfernsehsystem
DE102011081002A1 (de) Mikromechanisches Bauteil, durch ein Herstellungsverfahren hergestelltes Zwischenprodukt und Herstellungsverfahren für ein mikromechanisches Bauteil
WO2020173989A1 (fr) Structure micromécanique et procédé de fourniture de celle-ci
DE102009000475A1 (de) Verfahren zur Quadraturkompensation
EP2242122B1 (fr) Procédé d'opération et dispositif de commande d'un entraînement linéaire piézoélectrique
DE10210344A1 (de) Verfahren zur Herstellung mikromechanischer Bauteile und nach dem Verfahren hergestellte Bauteile
DE102006059929A1 (de) Inertialsensor mit einer seismischen Masse
DE102006052414A1 (de) Mikromechanischer Aktor
EP1246215B1 (fr) Microrelais à nouvelle construction
DE60300187T2 (de) Farbbildröhre
DE102008007345A1 (de) Mikromechanisches Bauelement und Verfahren zur Herstellung desselben
DE102009000599A1 (de) Elektrostatischer Antrieb, Verfahren zum Betreiben eines mikromechanischen Bauteils mit einem elektrostatischen Antrieb und Herstellungsverfahren für einen elektrostatischen Antrieb

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200980146261.1

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09783351

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2009783351

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 20117011256

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 12998669

Country of ref document: US