WO2010052682A3 - Mems with poly-silicon cap layer - Google Patents

Mems with poly-silicon cap layer Download PDF

Info

Publication number
WO2010052682A3
WO2010052682A3 PCT/IB2009/054992 IB2009054992W WO2010052682A3 WO 2010052682 A3 WO2010052682 A3 WO 2010052682A3 IB 2009054992 W IB2009054992 W IB 2009054992W WO 2010052682 A3 WO2010052682 A3 WO 2010052682A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
devices
poly
oscillators
cap layer
Prior art date
Application number
PCT/IB2009/054992
Other languages
French (fr)
Other versions
WO2010052682A2 (en
Inventor
Greja Johanna Adriana Verheijden
Gerhard Koops
Original Assignee
Nxp B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp B.V. filed Critical Nxp B.V.
Publication of WO2010052682A2 publication Critical patent/WO2010052682A2/en
Publication of WO2010052682A3 publication Critical patent/WO2010052682A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
    • B81C1/00293—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS maintaining a controlled atmosphere with processes not provided for in B81C1/00285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0136—Growing or depositing of a covering layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0145—Hermetically sealing an opening in the lid

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The present invention relates to a novel way of sealing a MEMS and the MEMS obtained thereby. MEMS resonators are being intensively studied in many research groups and some first products have recently been released. This type of device offers a high Q-factor, small size, high level of integration and potentially low cost. These devices are expected to replace bulky quartz crystals in high-precision oscillators and may also be used as RF filters. The oscillators are widely used in time-keeping and frequency reference applications such as RF modules in mobile phones, devices containing blue-tooth modules and other digital and telecommunication devices.
PCT/IB2009/054992 2008-11-10 2009-11-10 Mems with poly-silicon cap layer WO2010052682A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08168722 2008-11-10
EP08168722.0 2008-11-10

Publications (2)

Publication Number Publication Date
WO2010052682A2 WO2010052682A2 (en) 2010-05-14
WO2010052682A3 true WO2010052682A3 (en) 2011-04-07

Family

ID=42153355

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2009/054992 WO2010052682A2 (en) 2008-11-10 2009-11-10 Mems with poly-silicon cap layer

Country Status (1)

Country Link
WO (1) WO2010052682A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012218147A (en) * 2011-04-11 2012-11-12 Imec Method for sealing microcavity
JP6299142B2 (en) * 2013-10-21 2018-03-28 セイコーエプソン株式会社 Vibrator, vibrator manufacturing method, electronic device, electronic apparatus, and moving body
JP2015171740A (en) * 2014-03-12 2015-10-01 セイコーエプソン株式会社 Mems device and manufacturing method of the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040152228A1 (en) * 2001-03-22 2004-08-05 Hubert Benzel Method for producing micromechanic sensors and sensors produced by said method
US20050189318A1 (en) * 2004-02-02 2005-09-01 Twan Bearda Method for forming macropores in a layer and products obtained thereof
US20060144142A1 (en) * 2005-01-06 2006-07-06 Gogoi Bishnu P Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor
US20070235501A1 (en) * 2006-03-29 2007-10-11 John Heck Self-packaging MEMS device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040152228A1 (en) * 2001-03-22 2004-08-05 Hubert Benzel Method for producing micromechanic sensors and sensors produced by said method
US20050189318A1 (en) * 2004-02-02 2005-09-01 Twan Bearda Method for forming macropores in a layer and products obtained thereof
US20060144142A1 (en) * 2005-01-06 2006-07-06 Gogoi Bishnu P Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor
US20070235501A1 (en) * 2006-03-29 2007-10-11 John Heck Self-packaging MEMS device

Also Published As

Publication number Publication date
WO2010052682A2 (en) 2010-05-14

Similar Documents

Publication Publication Date Title
CN105827214B (en) Filter apparatus
DE602005012385D1 (en) Production of integrated, acoustic thin-film resonators (FBAR) with different frequencies
US11563421B2 (en) Acoustic structure having tunable parallel resonance frequency
WO2005038513A3 (en) Tunable balanced opto-electronic filters and applications in opto-electronic oscillators
TW201233060A (en) Electromechanical systems piezoelectric contour mode differential resonators and filters
WO2012158727A3 (en) Generation of single optical tone, rf oscillation signal and optical comb in a triple-oscillator device based on nonlinear optical resonator
WO2010052682A3 (en) Mems with poly-silicon cap layer
WO2009002575A3 (en) Antennas for handheld electronic devices with conductive bezels
WO2006017847A3 (en) Silicon-insulator thin-film structures for optical modulators and methods of manufacture
TW200718008A (en) Adjusted frequency temperature coefficient resonator
WO2009120292A3 (en) Accelerometer-controlled mobile handheld device
WO2012079038A3 (en) Method, system, and apparatus for resonator circuits and modulating resonators
WO2010085743A3 (en) Protected resonator
WO2008150726A3 (en) Method for integrating nanotube devices with cmos for rf/analog soc applications
WO2013155364A3 (en) Enhanced inter-rat mobility support using inter-rat channel avoidance
WO2007050101A8 (en) Packaging systems incorporating thin film liquid crystal polymer (lcp) and methods of manufacture
WO2011050213A8 (en) Low-pass filter design
EP4228155A4 (en) Resonator, filter, and electronic device
TW200705644A (en) Cellular/Wi-Fi combination devices
WO2009066380A1 (en) Filter, duplexer using the same, and communication apparatus using the duplexer
TW200733476A (en) Mobile communication devices
TW200632078A (en) Liquid crystal composition comprising novel silicon containing compounds and liquid crystal display device using the same
US7928633B2 (en) Elastic wave element containing a silicon oxide film and a silicon nitride oxide film
WO2012082405A3 (en) Multi-band tunable antenna for integrated digital television service on mobile devices
WO2011120637A3 (en) A method of stabilizing a blue phase liquid crystal composition

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09753217

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09753217

Country of ref document: EP

Kind code of ref document: A2