WO2010034334A1 - Procédé et système microélectromécanique pour enregistrer une valeur de mesure pour un courant électrique passant par un conducteur électrique et disposition - Google Patents

Procédé et système microélectromécanique pour enregistrer une valeur de mesure pour un courant électrique passant par un conducteur électrique et disposition Download PDF

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Publication number
WO2010034334A1
WO2010034334A1 PCT/EP2008/008359 EP2008008359W WO2010034334A1 WO 2010034334 A1 WO2010034334 A1 WO 2010034334A1 EP 2008008359 W EP2008008359 W EP 2008008359W WO 2010034334 A1 WO2010034334 A1 WO 2010034334A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrical conductor
measuring coil
current
microelectromechanical
microelectromechanical system
Prior art date
Application number
PCT/EP2008/008359
Other languages
German (de)
English (en)
Inventor
Jörg HASSEL
Gotthard Rieger
Arno Steckenborn
Roland Weiss
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to PCT/EP2008/008359 priority Critical patent/WO2010034334A1/fr
Priority to EP09163275A priority patent/EP2169700B1/fr
Priority to AT09163275T priority patent/ATE533169T1/de
Priority to EP09164759A priority patent/EP2169830A3/fr
Priority to US12/559,819 priority patent/US20100082268A1/en
Priority to CN200910176196.9A priority patent/CN101685137B/zh
Publication of WO2010034334A1 publication Critical patent/WO2010034334A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/146—Measuring arrangements for current not covered by other subgroups of G01R15/14, e.g. using current dividers, shunts, or measuring a voltage drop
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H47/00—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current
    • H01H47/002—Monitoring or fail-safe circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/06—Arrangements for measuring electric power or power factor by measuring current and voltage

Definitions

  • Microelectromechanical systems often referred to as microsystems, find application in a variety of applications, such as acceleration and tilt sensors.
  • the present invention relates to a method for detecting a measured variable for an electric current flowing through an electrical conductor by means of a microelectromechanical system.
  • the present invention has the object y nnrun.de to provide a versatile and particularly efficient method of the aforementioned type.
  • This object is achieved according to the invention by a method for detecting a measured variable for an electrical current flowing through an electrical conductor by means of a microelectromechanical system, wherein a measuring coil moves in the electric field caused by the electric current magnetic field of the electrical conductor by means of a microelectromechanical oscillator is that a cyclic change of the magnetic coil passing through the measuring coil is effected, and a voltage induced in the measuring coil due to the change of the magnetic coil passing through the magnetic flux detected voltage as a measure of the current flowing through the electrical conductor current.
  • the method according to the invention thus makes use of an inductive principle in order to detect the measured variable for the electrical current flowing through the electrical conductor by means of the microelectromechanical system.
  • a measuring coil is moved in the magnetic field caused by the electric current and surrounding the electrical conductor by means of a microelectromechanical or micromechanical oscillator.
  • Corresponding oscillators which are also referred to as microelectromechanical or micromechanical oscillators, are also available on the market with comparatively high oscillation frequencies, i. approximately in the kHz and MHz range, comparatively inexpensive available.
  • the measuring coil is now moved by the microelectromechanical oscillator in such a way that the magnetic flux, which passes through the measuring coil due to the present magnetic field, changes cyclically.
  • the movement of the measuring coil has a component which is perpendicular to the longitudinal direction of the electrical conductor. Since the magnet surrounding the electrical conductor As the magnetic field decreases with increasing distance from the electrical conductor and the magnetic field is thus inhomogeneous, a corresponding movement of the measuring coil by the microelectromechanical oscillator causes a change in the magnetic flux passing through the measuring coil.
  • This change in the magnetic flux passing through the measuring coil induces, in accordance with the law of induction in the measuring coil, an induction voltage that is proportional to the current flowing in the electrical conductor and thus can be detected as a measure of this current. Due to the cyclic change of the magnetic flux passing through the measuring coil caused by the electromechanical oscillator, a permanent and therefore particularly stable induced voltage is advantageously achieved in this case.
  • the method according to the invention is advantageous, since it makes possible a galvanically isolated detection of a measured variable for an electrical current flowing through an electrical conductor by means of a microelectromechanical system.
  • a corresponding electrical isolation usually has particular advantages in terms of safety, accuracy of measurement and the prevention of ground loops and electromagnetic interference.
  • the method according to the invention has the particular advantage that the electric current to be measured or to be detected does not flow through the microelectromechanical system itself.
  • the method according to the invention is furthermore distinguished, in particular, by being comparatively simple and inexpensive to implement by means of available microelectrical oscillators.
  • sensing the induced voltage as a measure of the current flowing through the electrical conductor by conventional microelectromechanical vibration systems, i. Oscillators, resulting in a sufficient signal amplitude of the induced voltage.
  • the amplitude of the movement of the measuring coil and its frequency is advantageously chosen as large or high.
  • an increase in the area of the measuring coil and an increase in the number of turns it causes an increase in the induced voltage obtained.
  • this may also be necessary for a higher isolation distance, i. for increasing the distance between the electrical conductor and the measuring coil.
  • the inventive method is riprsrt pronounced that the ⁇ ess-SpuIe between a forward and a return conductor of the electrical conductor is moved.
  • This offers the advantage that the signal strength of the induced voltage is further increased.
  • a greater isolation distance can be selected.
  • the forward and return conductors of the electrical conductor or the electrical conductor can have any shape as such in the context of the method according to the invention.
  • the measuring coil is moved between a forward and a return conductor in the form of the legs of a U-shaped electrical conductor.
  • U-shaped electrical conductor is a form of an electrical conductor with a forward and a return conductor that is particularly easy to implement and to operate. It should be noted at this point that the return conductor and the return conductor will usually have a comparatively small distance from each other due to the use of a microelectromechanical system for detecting the induced voltage and the associated comparatively small deflection of the measuring coil, which is usually in the micrometer - will be up to millimeter range.
  • the method according to the invention is suitable based on the detected induced voltage for detecting the flow of an electric current.
  • the method according to the invention is suitable based on the detected induced voltage for detecting the flow of an electric current.
  • the current flowing through the electrical conductor is determined from the detected induced voltage. This offers the advantage of being a quantitative determination of the current flowing through the electrical conductor is made possible. In this case, the current can be determined either only in absolute terms or taking into account the current direction.
  • the invention further relates to a microelectromechanical system for detecting a measured variable for an electric current flowing through an electrical conductor.
  • the present invention has for its object to provide a microelectromechanical system for detecting a measured variable for an electric current flowing through an electrical conductor, which is versatile and particularly powerful.
  • a microelectromechanical system for detecting a measured variable for an electric current flowing through an electrical conductor with a measuring coil and a microelectromechanical oscillator for moving the measuring coil such that upon movement of the measuring coil in the by the electrical current caused magnetic field of the electrical conductor a cyclic change of the measuring coil passing through the magnetic flux is caused, wherein the system for detecting a induced in the measuring coil due to the change of the magnetic coil passing through the magnetic flux induced voltage Ait> Hessgrße for the is formed by the electric conductor flowing current.
  • the microelectromechanical system according to the invention is configured such that it is designed to determine the current flowing through the electrical conductor from the detected induced voltage.
  • a microelectromechanical capacitive voltmeter for detecting the voltage of the electrical conductor.
  • a microelectromechanical capacitive voltmeter is known, for example, from the published international application WO 2005/121819 A1.
  • the additional provision of a microelectromechanical capacitive voltmeter offers the advantage that in addition to the detection of a measured variable for the current flowing through the electrical conductor or in addition to the determination of this current, a voltage measurement can continue to be carried out.
  • the microelectromechanical system according to the invention is designed such that the voltmeter is mechanically coupled to the microelectromechanical oscillator.
  • This offers the advantage that both the induced voltage as a measured variable for the flowing current and the voltage of the electrical conductor can be detected by means of the microelectromechanical oscillator of the microelectromechanical system.
  • a particularly compact design of the microelectromechanical system is made possible;
  • advantages result from this. visibly the production costs for a corresponding microelectromechanical system.
  • the microelectromechanical system according to the invention is developed in such a way that an electronic circuit for determining the electrical power from the voltage induced in the measuring coil and the voltage detected by the voltmeter is provided.
  • a corresponding electronic circuit can be realized for example by a microcontroller or by an ASIC (Application Specific Integrated Circuit).
  • the electronic circuit is integrated directly on the chip or semiconductor component carrying the microelectromechanical oscillator.
  • the electronic circuit is realized by means of a separate chip which is electrically connected to the chip carrying the microelectromechanical oscillator. In this case, the total microelectromechanical system in the form of the Wattmeter thus includes both chips.
  • the invention furthermore includes an arrangement having a microelectromechanical system according to the invention or a microelectromechanical system according to one of the preferred refinements of the microelectromechanical system according to the invention and the electrical conductor through which the electrical current flows.
  • the arrangement according to the invention is configured such that the electrical conductor has a forward and a return conductor and the microelectromechanical oscillator for moving the measuring coil between the outgoing and the return conductor of the electrical conductor is formed.
  • FIG. 1 shows a schematic sketch to illustrate an embodiment of the method according to the invention
  • Figure 2 is another schematic sketch to further
  • FIG. 3 shows an exemplary embodiment of the arrangement according to the invention with an exemplary embodiment of the microelectromechanical system according to the invention.
  • Figure 1 shows a schematic diagram to illustrate an embodiment of the method according to the invention. Shown is a cross section perpendicular to the direction of an electrical conductor EL, which consists of a forward and a return conductor. In the electrical conductor EL, an electric current I flows, the current direction is indicated in the usual manner. Due to the current I flowing in the electrical conductor EL, a magnetic field B is formed around the electrical conductor EL.
  • a measuring coil L which has two windings in the exemplary embodiment shown and is formed in a flat shape ,
  • the measuring coil L is mounted on a carrier T, which is moved by means of a micromechanical or microelectromechanical oscillator (not shown for reasons of clarity) in such a way that a cyclical change of the magnetic flux passing through the measuring coil L is effected.
  • a swinging of the microelectromechanical oscillator and thus also the measuring coil L connected to the carrier T takes place in the direction of movement D indicated by the double arrow, ie perpendicular to the path of the electrical conductor EL.
  • a voltage is induced in the measuring coil L which leads to the electrical current flowing through the electrical conductor EL Current T and thus represents a measured variable for this.
  • the measuring coil L deviating from the representation of Figure 1, of course, in a magnetic field of a single electrical conductor, that could not be moved between a forward and a return conductor.
  • the embodiment shown in FIG. 1 has the advantage that due to the fact that the measuring coil L is moved between the forward and the return conductor of the electrical conductor EL, the voltage induced in the measuring coil L has a greater magnitude Having amplitude. The reason for this is that by means of the movement of the measuring coil L between the forward and the return conductor a particularly strong change in the magnetic flux passing through the measuring coil L is effected.
  • the arrangement shown in FIG. 1 could be designed, for example, such that for an electrical conductor EL with a width of 2mm, the distance between the measuring coil L and the surface of the electrical conductor EL is half a millimeter. Accordingly, the measuring coil L in the representation of FIG. 1 could have a horizontal extent of the order of magnitude of 1 mm and the amplitude of the cyclic movement effected by the microelectromechanical oscillator could be for example half a millimeter. It should, however, be emphasized that the stated values are merely examples and, depending on the respective requirements and the particular application, arrangements with possibly significantly different values are also conceivable.
  • FIG. 2 shows a further schematic sketch for the rest
  • Clarification of the embodiment of the method according to the invention Shown here is a perspective view of a substantially corresponding to the figure 1 arrangement, for better illustration, the carrier of the measuring coil L has been omitted. It can be seen that the measuring coil L is moved between a forward and a return conductor in the form of the legs of a U-shaped electrical conductor EL, wherein the direction of movement D is again indicated by a corresponding arrow.
  • the component of the magnetic field B resulting in a current I flowing through the electrical conductor EL and the magnetic field caused by this current I in the movement direction D is sketched as Hx as a function of the position x in the direction of movement D in the graph G.
  • the magnetic field Hx changes in the direction of movement D, so that a change in the magnetic flux passing through the measuring coil L occurs when the measuring coil L moves in the locking direction D.
  • a Voltage induces, which is a measure of the current flowing through the electrical conductor EL current I.
  • the oscillation frequency of the micro-electro-mechanical oscillator is preferably selected in the range of several kilohertz to in the megahertz range. It should be noted that the oscillation frequency of the microelectromechanical oscillator is preferably chosen such that the spectral components of the electric current I in the range of the operating frequency of the microelectromechanical oscillator can be neglected. For this purpose, bandpass filtering with a low bandwidth is advantageously provided, and the operating frequency of the microelectromechanical oscillator is significantly greater, ie, for example, a factor 10 to 100 greater than the maximum frequencies occurring in the spectrum of the electric current I having a significant amplitude.
  • the operating frequency is in the range of at least 10 kHz.
  • FIG. 3 shows an exemplary embodiment of the invention
  • micro-electro-mechanical system MEMS which consists of an armature A, a measuring coil L, two first electrodes ETDl and a second electrode ETD2.
  • armature A armature A
  • measuring coil L two first electrodes
  • ETDl first electrodes
  • ETD2 second electrode
  • U-shaped electrical conductor EL is illustrated. It should generally be pointed out at this point that the electrical conductor EL is basically also a component of the can be the actual measuring device.
  • a current to be measured is thus introduced into the electrical conductor EL, which in this case will usually be arranged in the measuring device at a fixed distance from the microelectromechanical system MEMS.
  • the electrical conductor EL may also be part of any other component, in which case the actual measuring device thus does not include the electrical conductor EL.
  • a microelectromechanical oscillator is formed by the armature A as well as the first electrodes ETD1 and the second electrode ETD2.
  • the oscillatable part of the oscillator which is given by the second electrode ETD2, suspended from the armature A.
  • an air gap SP whose width will usually be in the micrometer range.
  • a measuring coil L which again has two turns in the illustrated example, is mounted on the second electrode ETD2, so that the measuring coil L is moved in such a way by means of the microelectromechanical oscillator that due to the movement of the Measuring coil L in which caused by the electric current I magnetic field of the electrical conductor EL a cyclic change of the measuring coil L passing through rr. ⁇ gneti- rule flow is effected.
  • a voltage is induced in the measuring coil L, which voltage is detected by corresponding means and from which the voltage in the electric conductor EL flowing current I can be determined.
  • microelectromechanical oscillators which operate on a principle other than an electrostatic principle.
  • a measuring coil with only one or even more than two turns can be used.
  • the microelectromechanical system shown in FIG. 3 may additionally have a capacitive voltmeter for detecting the voltage of the electrical conductor EL.
  • a corresponding microelectromechanical system for capacitive voltage measurement is known, for example, from the previously mentioned WO 2005/121819 A1.
  • the voltage meter is preferably coupled to the microelectromechanical oscillator, so that the movement effected by the oscillator not only causes the change of the magnetic flux passing through the measuring coil, but also causes a change in capacitance required in the context of the voltage measurement.
  • microelectromechanical system according to the invention and the method according to the invention have in particular the
  • the microelectromechanical system and the method are furthermore particularly advantageous, in particular also with regard to their applicability at comparatively high current intensities powerful.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement Of Current Or Voltage (AREA)

Abstract

L'invention concerne un procédé largement utilisable et particulièrement performant pour enregistrer une valeur de mesure pour un courant électrique (I) passant par un conducteur électrique (EL) au moyen d'un système microélectromécanique (MEMS), une bobine de mesure (L) étant mue au moyen d'un oscillateur microélectromécanique dans le champ magnétique (B) du conducteur électrique (EL) généré par le courant électrique (I) de manière à provoquer un changement cyclique du flux magnétique traversant la bobine de mesure (L), et une tension induite dans la bobine de mesure (L) en raison du changement du flux magnétique traversant la bobine de mesure (L) est enregistrée comme valeur de mesure pour le courant (I) passant par le conducteur électrique (EL). L'invention concerne également un système microélectromécanique (MEMS) ainsi qu'une disposition.
PCT/EP2008/008359 2008-09-26 2008-09-26 Procédé et système microélectromécanique pour enregistrer une valeur de mesure pour un courant électrique passant par un conducteur électrique et disposition WO2010034334A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
PCT/EP2008/008359 WO2010034334A1 (fr) 2008-09-26 2008-09-26 Procédé et système microélectromécanique pour enregistrer une valeur de mesure pour un courant électrique passant par un conducteur électrique et disposition
EP09163275A EP2169700B1 (fr) 2008-09-26 2009-06-19 Procédé et dispositif de surveillance d'un processus de commutation et composant de relais
AT09163275T ATE533169T1 (de) 2008-09-26 2009-06-19 Verfahren und vorrichtung zur überwachung eines schaltvorganges und relaisbaugruppe
EP09164759A EP2169830A3 (fr) 2008-09-26 2009-07-07 Dispositif de conversion d'un signal analogique en un signal numérique
US12/559,819 US20100082268A1 (en) 2008-09-26 2009-09-15 Method and apparatus for monitoring a switching process and relay module
CN200910176196.9A CN101685137B (zh) 2008-09-26 2009-09-25 用于监控开断过程的方法和设备,以及继电器组件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/008359 WO2010034334A1 (fr) 2008-09-26 2008-09-26 Procédé et système microélectromécanique pour enregistrer une valeur de mesure pour un courant électrique passant par un conducteur électrique et disposition

Publications (1)

Publication Number Publication Date
WO2010034334A1 true WO2010034334A1 (fr) 2010-04-01

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PCT/EP2008/008359 WO2010034334A1 (fr) 2008-09-26 2008-09-26 Procédé et système microélectromécanique pour enregistrer une valeur de mesure pour un courant électrique passant par un conducteur électrique et disposition

Country Status (2)

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AT (1) ATE533169T1 (fr)
WO (1) WO2010034334A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0816861A2 (fr) * 1996-06-25 1998-01-07 Siemens Aktiengesellschaft Dispositif de mesure de champs magnétiques
DE19809742A1 (de) * 1998-03-06 1999-09-16 Bosch Gmbh Robert Magnetfeldsensor
WO2005121819A1 (fr) * 2004-06-08 2005-12-22 Canon Kabushiki Kaisha Instrument de mesure du potentiel electrique et appareil d'imagerie
US20060181273A1 (en) * 2004-07-13 2006-08-17 Greywall Dennis S Oscillating-beam magnetometer
EP1882953A1 (fr) * 2006-07-26 2008-01-30 Siemens Aktiengesellschaft Dispositif d'enregistrement du courant

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0816861A2 (fr) * 1996-06-25 1998-01-07 Siemens Aktiengesellschaft Dispositif de mesure de champs magnétiques
DE19809742A1 (de) * 1998-03-06 1999-09-16 Bosch Gmbh Robert Magnetfeldsensor
WO2005121819A1 (fr) * 2004-06-08 2005-12-22 Canon Kabushiki Kaisha Instrument de mesure du potentiel electrique et appareil d'imagerie
US20060181273A1 (en) * 2004-07-13 2006-08-17 Greywall Dennis S Oscillating-beam magnetometer
EP1882953A1 (fr) * 2006-07-26 2008-01-30 Siemens Aktiengesellschaft Dispositif d'enregistrement du courant

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
HETRICK R E: "A VIBRATING CANTILEVER MAGNETIC-FIELD SENSOR", SENSORS AND ACTUATORS, ELSEVIER SEQUOIA S.A. LAUSANNE, CH, vol. 16, no. 3, 1 March 1989 (1989-03-01), pages 197 - 207, XP000118071 *
IIJIMA T ET AL: "MEASUREMENT OF MAGNETIC FIELD USING ULTRASONIC VIBRATION", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, TOKYO,JP, vol. 36, no. 2, 1 February 1997 (1997-02-01), pages 930 - 934, XP000735555, ISSN: 0021-4922 *

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Publication number Publication date
ATE533169T1 (de) 2011-11-15

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