WO2010011186A9 - A method of fabricating a cantilever structure and a cantilever structure - Google Patents

A method of fabricating a cantilever structure and a cantilever structure Download PDF

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Publication number
WO2010011186A9
WO2010011186A9 PCT/SG2009/000259 SG2009000259W WO2010011186A9 WO 2010011186 A9 WO2010011186 A9 WO 2010011186A9 SG 2009000259 W SG2009000259 W SG 2009000259W WO 2010011186 A9 WO2010011186 A9 WO 2010011186A9
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever structure
fabricating
self
aligning
cantilever
Prior art date
Application number
PCT/SG2009/000259
Other languages
French (fr)
Other versions
WO2010011186A1 (en
Inventor
Yee Chong Loke
Kuan Song Yeong
Erik Johansson Cox
Original Assignee
Agency For Science, Technology And Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency For Science, Technology And Research filed Critical Agency For Science, Technology And Research
Publication of WO2010011186A1 publication Critical patent/WO2010011186A1/en
Publication of WO2010011186A9 publication Critical patent/WO2010011186A9/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

A method of fabricating a cantilever structure and a cantilever structure is provided. The method comprises the steps of providing a self-aligning marker on a beam of the cantilever structure; and forming a tip of the cantilever structure based on self-aligning a tip material at the self-aligning marker.
PCT/SG2009/000259 2008-07-25 2009-07-22 A method of fabricating a cantilever structure and a cantilever structure WO2010011186A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US8354908P 2008-07-25 2008-07-25
US61/083,549 2008-07-25

Publications (2)

Publication Number Publication Date
WO2010011186A1 WO2010011186A1 (en) 2010-01-28
WO2010011186A9 true WO2010011186A9 (en) 2010-04-22

Family

ID=41570502

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG2009/000259 WO2010011186A1 (en) 2008-07-25 2009-07-22 A method of fabricating a cantilever structure and a cantilever structure

Country Status (1)

Country Link
WO (1) WO2010011186A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1397108B1 (en) * 2008-09-23 2012-12-28 Calmed S R L PROCESS OF MANUFACTURE OF A PHOTONIC CRYSTAL DEVICE PROVIDED WITH A PLASMON WAVE GUIDE.
WO2013112608A1 (en) 2012-01-23 2013-08-01 The Regents Of The University Of Michigan Photoconductive device with plasmonic electrodes
WO2018195429A1 (en) * 2017-04-20 2018-10-25 The Regents Of The University Of California Systems and methods for high frequency nanoscopy
US10802045B2 (en) 2018-03-26 2020-10-13 Bruker Nano, Inc. Large radius probe
CN109374928B (en) * 2018-09-12 2020-10-27 东南大学 Near-field scanning probe based on plasma focusing
WO2021067635A1 (en) 2019-10-01 2021-04-08 The Regents Of The University Of California Method for identifying chemical and structural variations through terahertz time-domain spectroscopy

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005271142A (en) * 2004-03-25 2005-10-06 Sii Nanotechnology Inc Micro-projecting structure
EP1672648B1 (en) * 2004-12-14 2007-03-14 Nanoworld AG SPM-probe with an EBD-tip.
JP2007114154A (en) * 2005-10-24 2007-05-10 Denso Corp Probe for scanning probe microscope and method of manufacturing same
JP4660726B2 (en) * 2006-03-16 2011-03-30 セイコーインスツル株式会社 Cantilever and method for producing cantilever

Also Published As

Publication number Publication date
WO2010011186A1 (en) 2010-01-28

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