WO2010008344A3 - Extended sensor back volume - Google Patents

Extended sensor back volume Download PDF

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Publication number
WO2010008344A3
WO2010008344A3 PCT/SG2009/000243 SG2009000243W WO2010008344A3 WO 2010008344 A3 WO2010008344 A3 WO 2010008344A3 SG 2009000243 W SG2009000243 W SG 2009000243W WO 2010008344 A3 WO2010008344 A3 WO 2010008344A3
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
back volume
pedestal
sensor back
extended sensor
Prior art date
Application number
PCT/SG2009/000243
Other languages
French (fr)
Other versions
WO2010008344A2 (en
Inventor
Kitt-Way Kok
Gengusamy Naidu Srini
Keith Patmon Bryan
Sooriakumar Kathirgamasundaram
KARTHIKEYAN Kumaraswamy
Original Assignee
Sensfab Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensfab Pte Ltd filed Critical Sensfab Pte Ltd
Publication of WO2010008344A2 publication Critical patent/WO2010008344A2/en
Publication of WO2010008344A3 publication Critical patent/WO2010008344A3/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Abstract

A microelectromechanical system (MEMS) transducer (1000) comprises a diaphragm (705) and a back plate (604). The diaphragm and back plate are spaced apart and are made of semiconductor material using microelectronic fabrication techniques. The transducer also includes a pedestal (601) comprising a cavity. The pedestal has a first end and a second end, and the back plate of the transducer is affixed to the first end, substantially covering the cavity. An extension member is affixed to the second end of the pedestal, enlarging the back volume of the transducer.
PCT/SG2009/000243 2008-07-14 2009-07-08 Extended sensor back volume WO2010008344A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG200805261-5A SG158758A1 (en) 2008-07-14 2008-07-14 Extended sensor back volume
SG200805261-5 2008-07-14

Publications (2)

Publication Number Publication Date
WO2010008344A2 WO2010008344A2 (en) 2010-01-21
WO2010008344A3 true WO2010008344A3 (en) 2010-09-10

Family

ID=41550893

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG2009/000243 WO2010008344A2 (en) 2008-07-14 2009-07-08 Extended sensor back volume

Country Status (2)

Country Link
SG (1) SG158758A1 (en)
WO (1) WO2010008344A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102264020B (en) * 2010-05-26 2013-12-25 国立清华大学 Micro-Electro-Mechanical condenser microphone
JP4893860B1 (en) * 2011-02-21 2012-03-07 オムロン株式会社 microphone
DE102013213891A1 (en) 2013-05-21 2014-11-27 Siemens Medical Instruments Pte. Ltd. microphone array

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985000495A1 (en) * 1983-07-07 1985-01-31 American Telephone & Telegraph Company Integrated electroacoustic transducer
WO2007112743A1 (en) * 2006-03-30 2007-10-11 Sonion Mems A/S Single die mems acoustic transducer and manufacturing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985000495A1 (en) * 1983-07-07 1985-01-31 American Telephone & Telegraph Company Integrated electroacoustic transducer
WO2007112743A1 (en) * 2006-03-30 2007-10-11 Sonion Mems A/S Single die mems acoustic transducer and manufacturing method

Also Published As

Publication number Publication date
WO2010008344A2 (en) 2010-01-21
SG158758A1 (en) 2010-02-26

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