WO2010002056A1 - Device for sensing minuteness matter - Google Patents

Device for sensing minuteness matter Download PDF

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Publication number
WO2010002056A1
WO2010002056A1 PCT/KR2008/004275 KR2008004275W WO2010002056A1 WO 2010002056 A1 WO2010002056 A1 WO 2010002056A1 KR 2008004275 W KR2008004275 W KR 2008004275W WO 2010002056 A1 WO2010002056 A1 WO 2010002056A1
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WO
WIPO (PCT)
Prior art keywords
electrode pair
signal
power supply
electrode
fine material
Prior art date
Application number
PCT/KR2008/004275
Other languages
French (fr)
Inventor
Won-Woo Jo
Sang-Kyung Kim
Kyo-Seon Hwang
Tae-Song Kim
Original Assignee
Cantis
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Publication date
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Publication of WO2010002056A1 publication Critical patent/WO2010002056A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Definitions

  • the present invention relates to a device for sensing a fine material. More specifically, the present invention relates to a device for sensing a fine material which is capable of quantitatively detecting an amount of the fine material.
  • the device is constructed to sequentially perform the following operations. For example, a cantilever is bent by the force generated when a fine material detectable in an in-situ mode binds to a surface of the cantilever. Then, in order to generate an opposing force against bending of the cantilever, a voltage is modified with a piezoelectric material provided on the cantilever and the modified voltage is applied to return central axes of the electrode and cantilever to be collinear.
  • an electrical force applied to the piezoelectric material of the cantilever is measured to sense the force exerted on the cantilever by the fine material, such that an amount of the fine material can be quantitatively detected.
  • a fine material-sensing device which is intended to detect fine particulate materials detects a certain material of interest using a cantilever having a mi- cromechanical structure.
  • a cantilever is fabricated by a MEMS process, and is coated with receptors for binding of target molecules to the cantilever surface.
  • the reaction between receptors and target molecules results in deformation of the cantilever. Then, the fine material-sensing device measures such cantilever deformation to thereby detect a certain material of interest.
  • a non-receptor coated cantilever (reference cantilever) is coated with receptors, a target material is reacted with another cantilever (functionalized cantilever), a light source is irradiated to two different cantilevers, and then a light source reflected from each cantilever is measured by CCD.
  • a conventional device in order to detect changes in an angle of reflection in response to bending of the cantilever after irradiation of a light source to the cantilever, a conventional device is composed of a beam splitter, a reflecting mirror and CCD, which are spaced apart at a given distance from one another.
  • the device for detecting deformation of the cantilever using a light source as described above structurally requires a given space, which results in limitations associated with miniaturization and high integration of the device.
  • the conventional art suffers from various problems in that accurate measurement is difficult due to the risk of possible measurement error resulting from diffraction and reflection of a light source irradiated to sense the cantilever deformation, and measurement error may take place due to variation of optical properties depending on the degree of transparency of an analyte.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a device for sensing a fine material which is capable of quantitatively detecting an amount of the fine material.
  • the device is constructed to sequentially perform the following operations. For example, a cantilever is bent by the force generated when a fine material detectable in an in-situ mode binds to a surface of the cantilever. Then, in order to generate an opposing force against bending of the cantilever, a voltage is modified with a piezoelectric material provided on the cantilever and the modified voltage is applied to return central axes of the electrode and cantilever to be collinear.
  • an electrical force applied to the piezoelectric material of the cantilever is measured to sense the force exerted on the cantilever by the fine material, such that an amount of the fine material can be quantitatively detected.
  • a device for sensing a fine material comprising: [17] a variable power supply for outputting variable electrical signals;
  • second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair, due to structural transformation of a piezoelectric material of the piezoelectric body occurring when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode;
  • a device for sensing a fine material comprising:
  • [25] second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween, and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair, due to structural transformation of a piezoelectric material of the piezoelectric body occurring when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode.
  • a device for sensing a fine material comprising:
  • second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween and which is returned to its original position due to structural transformation of a piezoelectric material of the piezoelectric body when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode, thus resulting in close contact with one end of the first electrode pair, and outputting electrical signals of the variable power supply to an output terminal through the first electrode pair.
  • a device for sensing a fine material in accordance with the present invention is capable of achieving more accurate detection of the fine material by application of electrical signals to sense the fine material.
  • the present invention provides a portable device for sensing a fine material which is capable of achieving miniaturization and lower power consumption of the device through an electrical measurement method.
  • FIGS. 1 and 2 are views illustrating a device for sensing a fine material in accordance with the conventional art
  • FIG. 3 is a view illustrating Embodiment 1 of a device for sensing a fine material in accordance with the present invention
  • FIG. 4 is a view illustrating Embodiment 2 of a device for sensing a fine material in accordance with the present invention
  • FIG. 5 is a view illustrating Embodiment 3 of a device for sensing a fine material in accordance with the present invention.
  • FIG. 6 is a view showing tip shapes of a cantilever which is applied to the present invention.
  • FIG. 7 is a graph illustrating quality factors depending on tip shapes of a cantilever which is applied to the present invention.
  • a device for sensing a fine material in accordance with the present invention includes a variable power supply 100 for outputting variable electrical signals in response to variable signals being output from a signal analysis section 140 which will be illustrated hereinafter; first electrode pair 110 connected to an AC power supply 130; second electrode pair 120 which is composed of an upper electrode 121, a lower electrode 123 and a piezoelectric body 125 disposed therebetween and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair 110, due to structural transformation of a piezoelectric material of the piezoelectric body 125 occurring when an electrical signal of the variable power supply 100 is applied to the upper electrode 121 and the lower electrode 123; and a signal analysis section 140 that receives and scans an AC signal having a value varying in response to an electrical signal being output from the variable power supply 100 and being input through the first electrode pair 110, and senses an amount of the fine material using the electrical signal of the variable power supply 100 at a point of time a received value of the AC signal
  • the electrical signal of the variable power supply 100 is variable in response to the variable signal of the signal analysis section 140 and is a DC voltage.
  • the signal analysis section 140 may be configured such that it compares the magnitude and phase of a preceding signal and the magnitude and phase of a succeeding signal for AC signals input through the second electrode pair 120, recognizes the input succeeding signal at a point of time the preceding signal magnitude and phase are smaller than the succeeding signal magnitude and phase, as a maximum value, and senses an amount of the fine material by recognizing a DC voltage which is an electrical signal of the variable power supply 100 that had generated the succeeding signal recognized as a maximum value.
  • the signal analysis section 140 stores values corresponding to the conductivity varying depending on kinds and concentrations of solutions in which the first electrode pair 110 and the second electrode pair 120 are dipped, so it may be preferably configured to sense an amount of the fine material by applying a value corresponding to the conductivity for the DC voltage recognized to sense an amount of the fine material. That is, this is because there is a solution-dependent difference in the waveform of a maximum value appearing in the signal analysis section 140, since the ionic conductivity is variable depending on kinds and concentrations of the solutions.
  • the second electrode pair 120 is a cantilever whose one end is bent downward due to a weight of the fine material when it binds thereto.
  • the cantilever has a sharp-pointed tip.
  • the cantilever may undergo lateral distortion in addition to bending event.
  • the cantilever tip has a flat shape, it may be difficult to sensitively identify a balanced state because the region corresponding to a maximum point of the received AC signal is broad near the balanced state due to such a flat shape of the tip.
  • the device for sensing a fine material is preferably provided with a blocking element
  • the blocking element (C) that blocks a DC voltage which is an electrical signal of the variable power supply 100 being output to the signal analysis section 140, and outputs only an AC signal being input through the first electrode pair 110 to the signal analysis section 140.
  • the blocking element (C) is connected to second electrode pair 120 and is a capacitor.
  • a central axis of the second electrode pair 120 is bent downward from an opposite parallel structural configuration where a central axis of the second electrode pair 120 corresponding to the cantilever is collinear with that of the first electrode pair 110.
  • a distance between the second electrode pair 120 and the first electrode pair 110, which were in very close vicinity to each other in the opposite parallel structure, will increase.
  • the signal analysis section 140 outputs a variable signal to the variable power supply 100, and the variable power supply 100 modifies an electrical signal, i.e. DC voltage, in response to the variable signal and outputs the modified DC voltage to upper and lower electrodes 121,123 of the second electrode pair 120.
  • an electrical signal i.e. DC voltage
  • a DC voltage which is an electrical signal is applied to a piezoelectric body 125 interposed between the upper and lower electrodes 121,123, and then the piezoelectric body 125 made of the DC voltage-applied piezoelectric material undergoes a structural change due to the piezoelectric material.
  • the cantilever i.e. second electrode pair 120, returns to its original position to thereby result in a balanced state.
  • the magnitude and phase of the electric energy applied to the piezoelectric body 125 are identical to those of the mechanical energy applied to the cantilever by the fine material such that the AC signal received in the signal analysis section 140 has the largest value or special pattern, it is possible to measure an amount of the fine material by converting the mechanical energy exerted by the fine material into electric energy.
  • the signal analysis section 140 contains values corresponding to the conductivity varying depending on kinds and concentrations of solutions where the first electrode pair 110 and the second electrode pair 120 are soaked, and the values corresponding to the conductivity should be considered for a DC voltage which is an electrical signal of the variable power supply 100 input to sense an amount of the fine material. Taking into consideration the conductivity is because there is a solution- dependent difference in the waveform of a maximum value appearing in the signal analysis section 140, since the ionic conductivity is variable depending on kinds and concentrations of the solutions. [58]
  • C is a capacitance
  • ⁇ Ox ⁇ is a relative dielectric constant
  • S is a sectional area
  • d is a distance between two electrodes.
  • the capacitance increases as the spacing distance between two electrodes becomes shorter. Accordingly, since the electrode spacing is closest when central axes of the first electrode pair 110 and the second electrode pair 120 are collinear to each other, a DC voltage which is an electrical signal of the variable power supply 100 is supplied to the second electrode pair 120 such that the capacitance becomes the maximum.
  • the distance between the second electrode cantilever 120 and the first electrode pair 110 becomes shortest, and the AC signal applied to the second electrode cantilever 120 through the first electrode pair 110 will have a maximum value (Power).
  • the sensor device is embodied such that the result value corresponding to the same phase of the AC signal can be measured from the second electrode pair 120, as a maximum value measured through the second electrode pair 120 which is a cantilever.
  • the blocking capacitor (C) blocks transmission of a DC voltage, which is an electrical signal of the variable power supply 100 applied in response to bending of the cantilever, to the signal analysis section 140.
  • a tip of the second electrode pair 120 which is a cantilever is configured to have a sharp-pointed shape as shown in FIG. 6, it is possible to increase the selectivity for signals transmitted between the second electrode pair 120 and the first electrode pair 110.
  • the cantilever has a sharp-pointed tip as above, it is possible to augment the selectivity of the fine material-sensing device because the quality factor increases as can be seen from the second graph (2) and the third graph (3) of FIG. 7. Accordingly, a sensor function of the device can also be improved.
  • the cantilever tip has a broad blunt shape instead of a sharp-pointed shape as shown FIG. 6, the transmission of signals takes place between the second electrode cantilever 120 and the first electrode pair 110 even upon the occurrence of structural deformation such as bending or distortion of the cantilever. As a consequence, as can be seen from the first graph (1) of FIG. 7, this may result in lowering of the quality factor and deterioration of the selectivity and sensor function of the fine material- sensing device.
  • the cantilever may exhibit a variety of structural deformation such as twisting and the like, resulting from the reaction of the cantilever with the target fine material, in addition to bending of the cantilever.
  • Embodiment 2 is configured in a manner that an AC power supply 230 and a variable power supply 200 are serially connected to second electrode pair 220.
  • the device of Embodiment 2 includes first electrode pair 210; a variable power supply 200 for outputting variable electrical signals; an AC power supply 230 connected to a (-) terminal of the variable power supply 200; second electrode pair 220 which is composed of an upper electrode 221, a lower electrode 223 and a piezoelectric body 225 disposed therebetween, and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair 210, due to structural transformation of a piezoelectric material of the piezoelectric body 225 occurring when a DC voltage, which is an electrical signal of the variable power supply 200, is applied to the upper electrode 221 and the lower electrode 223; and a signal analysis section 240 that receives and scans AC signals being output to the first electrode pair 210 through the second electrode pair 220, and senses an amount of the
  • the signal analysis section 240 may be configured such that it compares the magnitude and phase of a preceding signal and the magnitude and phase of a succeeding signal for AC signals being input to the first electrode pair 210 through the second electrode pair 220, recognizes the input succeeding signal at a point of time the preceding signal magnitude and phase are smaller than the succeeding signal magnitude and phase, as a maximum value, and senses an amount of the fine material by recognizing a DC voltage which is an electrical signal of the variable power supply 200 that had generated the succeeding signal recognized as a maximum value.
  • the signal analysis section 240 stores values corresponding to the conductivity varying depending on kinds and concentrations of solutions in which the first electrode pair 210 and the second electrode pair 220 are dipped, so it may be preferably configured to sense an amount of the fine material by applying a value corresponding to the conductivity for the DC voltage which is an electrical signal of the variable power supply 200 recognized to sense an amount of the fine material. That is, this is because there is a solution-dependent difference in the waveform of a maximum value appearing in the signal analysis section 240, since the ionic conductivity is variable depending on kinds and concentrations of the solutions.
  • the second electrode pair 220 is a cantilever whose one end is bent downward due to a weight of the fine material when it binds thereto.
  • a tip of the cantilever which is the second electrode pair 220 is configured to have a sharp-pointed shape as shown in FIG. 6, it is possible to increase the selectivity for the signals transmitted between the second electrode pair 220 and the first electrode pair 210.
  • the cantilever has a sharp-pointed tip as above, it is possible to enhance the selectivity of the fine material-sensing device because the quality factor increases as can be seen from the second graph (2) and the third graph (3) of FIG. 7. Accordingly, a sensor function of the device can also be improved.
  • Embodiment 2 of the present invention is intended to minimize effects of a nonspecific material formed on an upper part of the cantilever on the measurement results, when a receptor is coated on an upper part of the cantilever to form a receptor layer 227 and the fine material 229 as a target material is bound thereto.
  • an AC voltage in combination with a DC variable voltage which is an electrical signal of the variable power supply 200 is applied to the cantilever which corresponds to the second electrode pair 220.
  • the cantilever is composed of an upper electrode 221, a lower electrode 223 and a piezoelectric body 225 formed of a piezoelectric material interposed therebetween, as described hereinbefore.
  • the piezoelectric material of the piezoelectric body 225 undergoes structural transformation, which in turn leads to a recovery of the original position of the second electrode cantilever 220 which was bent downward in response to a weight of the fine material 229 when it binds to the receptor layer 227, consequently maintaining a balanced state. That is, as also illustrated in Embodiment 1, the second metal 220 which is a cantilever completely returns to its original position, resulting in recovery of a balanced state, when the force exerted by the piezoelectric body 225 formed of a piezoelectric material and the force of the fine material are the same in magnitude.
  • Embodiment 3 is configured to sequentially perform the following operations.
  • a DC voltage which is an electrical signal of the variable power supply 300 is applied to the second electrode pair 320 which is a cantilever that was bent downward due to a weight of the fine material 329 when it binds to the receptor layer 327, this results in a recovery of the original position of the second electrode pair 320 which is a cantilever, consequently leading to a balanced state.
  • one end of the second electrode pair 320 intimately combines with the first electrode pair 310 to thereby form a single electrode.
  • the signal analysis section 340 directly receives application of a DC voltage which is an electrical signal of the variable power supply 300, through the newly formed electrode, such that an amount of the fine material bound to the second electrode cantilever 320 can be detected.
  • the device of Embodiment 3 in accordance with the present invention includes a variable power supply 300 for outputting variable electrical signals; first electrode pair 310; and second electrode pair 320 which is composed of an upper electrode 321, a lower electrode 323 and a piezoelectric body 325 disposed therebetween and which is returned to its original position due to structural transformation of a piezoelectric material of the piezoelectric body 325 when electrical signals of the variable power supply 300 are applied to the upper electrode 321 and the lower electrode 323, consequently resulting in intimate contact of one end of the second electrode pair with the first electrode pair 310.
  • the second electrode pair 320 is a cantilever that is bent downward in response to a weight of the fine material when it binds thereto.
  • a lower end of the first electrode pair 310 is bent to form a bent surface (a) which is then intimately combined with an upper side surface (b) of the second electrode pair and a lateral side opposite to the side to which the variable power supply 300 is connected.
  • Embodiment 3 of the present invention is constructed in a manner that a DC variable voltage is applied to the cantilever which is the second electrode pair 320.
  • a DC variable voltage is applied to the cantilever which is the second electrode pair 320.
  • physical bending of the cantilever is developed when a receptor layer 327 is formed on an upper part of the cantilever which is the second electrode pair 320, and the fine material 329 as a target material is bound thereto.
  • the second electrode cantilever 320 When an electrical signal of the variable power supply 300 is variably applied to the upper and lower electrodes 321,323 of the second electrode pair 320, the second electrode cantilever 320 returns to its original position to recover a balanced state due to structural transformation of a piezoelectric material of the piezoelectric body 325 disposed between the upper and lower electrodes 321,323. As a result, one end of the second electrode pair 320 intimately combines with the first electrode pair 310 to thereby form a single electrode. Then, the newly formed electrode outputs a modified voltage being output from the variable power supply 300 to the signal analysis section 340.
  • the signal analysis section 340 senses the input DC voltage to thereby sense an amount of the fine material. That is, since the magnitude and phase of the DC electric energy applied to the piezoelectric body 325 are identical to those of the mechanical energy applied to the cantilever by the fine material, it is possible to measure an amount of the fine material by converting the mechanical energy exerted by the fine material into electric energy.
  • the devices for sensing a fine material in accordance with the present invention are constructed to identify compounds in biological samples containing nucleic acids, proteins, peptides, polypeptides, toxins, pharmaceuticals, venom, allergens, and infectious agents, as well as carcinogens, particularly serum PSA which is a prognostic factor for prostate cancer.

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Abstract

Provided is a device for sensing a fine material which is capable of quantitatively detecting an amount of the fine material. For this purpose, the device is constructed to sequentially perform the following operations. For example, a cantilever is bent by the force generated when a fine material detectable in an in-situ mode binds to a surface of the cantilever. Then, in order to generate an opposing force against bending of the cantilever, a voltage is modified with a piezoelectric material provided on the cantilever and the modified voltage is applied to return central axes of the electrode and cantilever to be collinear. Upon recovery of collinearity between the electrode and cantilever, an electrical force applied to the piezoelectric material of the cantilever is measured to sense the force exerted on the cantilever by the fine material, such that an amount of the fine material can be quantitatively detected.

Description

Description
DEVICE FOR SENSING MINUTENESS MATTER
Technical Field
[1] The present invention relates to a device for sensing a fine material. More specifically, the present invention relates to a device for sensing a fine material which is capable of quantitatively detecting an amount of the fine material. For this purpose, the device is constructed to sequentially perform the following operations. For example, a cantilever is bent by the force generated when a fine material detectable in an in-situ mode binds to a surface of the cantilever. Then, in order to generate an opposing force against bending of the cantilever, a voltage is modified with a piezoelectric material provided on the cantilever and the modified voltage is applied to return central axes of the electrode and cantilever to be collinear. Upon recovery of collinearity between the electrode and cantilever, an electrical force applied to the piezoelectric material of the cantilever is measured to sense the force exerted on the cantilever by the fine material, such that an amount of the fine material can be quantitatively detected.
[2]
Background Art
[3] Generally, a fine material-sensing device which is intended to detect fine particulate materials detects a certain material of interest using a cantilever having a mi- cromechanical structure. Such a cantilever is fabricated by a MEMS process, and is coated with receptors for binding of target molecules to the cantilever surface.
[4] When the receptors are exposed to the target molecules, the reaction between receptors and target molecules results in deformation of the cantilever. Then, the fine material-sensing device measures such cantilever deformation to thereby detect a certain material of interest.
[5] Conventionally, deformation of the cantilever has been measured using an optical method, as exemplified in FIGS. 1 and 2.
[6] According to a conventional method as shown in FIGS. 1 and 2, a non-receptor coated cantilever (reference cantilever) is coated with receptors, a target material is reacted with another cantilever (functionalized cantilever), a light source is irradiated to two different cantilevers, and then a light source reflected from each cantilever is measured by CCD.
[7]
[8] That is, in order to detect changes in an angle of reflection in response to bending of the cantilever after irradiation of a light source to the cantilever, a conventional device is composed of a beam splitter, a reflecting mirror and CCD, which are spaced apart at a given distance from one another.
[9] The device for detecting deformation of the cantilever using a light source as described above structurally requires a given space, which results in limitations associated with miniaturization and high integration of the device.
[10] Further, the conventional art suffers from various problems in that accurate measurement is difficult due to the risk of possible measurement error resulting from diffraction and reflection of a light source irradiated to sense the cantilever deformation, and measurement error may take place due to variation of optical properties depending on the degree of transparency of an analyte.
[H]
Disclosure of Invention Technical Problem
[12] Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a device for sensing a fine material which is capable of quantitatively detecting an amount of the fine material. For this purpose, the device is constructed to sequentially perform the following operations. For example, a cantilever is bent by the force generated when a fine material detectable in an in-situ mode binds to a surface of the cantilever. Then, in order to generate an opposing force against bending of the cantilever, a voltage is modified with a piezoelectric material provided on the cantilever and the modified voltage is applied to return central axes of the electrode and cantilever to be collinear. Upon recovery of collinearity between the electrode and cantilever, an electrical force applied to the piezoelectric material of the cantilever is measured to sense the force exerted on the cantilever by the fine material, such that an amount of the fine material can be quantitatively detected.
[13] It is another object of the present invention to provide a compact device for sensing a fine material which is capable of achieving miniaturization and high integration of the device.
[14] It is yet another object of the present invention to provide a device for sensing a fine material which is capable of obtaining more accurate measurement results using an electrical measurement method.
[15]
Technical Solution
[16] In accordance with an aspect of the present invention, the above and other objects can be accomplished by the provision of a device for sensing a fine material, comprising: [17] a variable power supply for outputting variable electrical signals;
[18] first electrode pair;
[19] second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair, due to structural transformation of a piezoelectric material of the piezoelectric body occurring when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode; and
[20] an AC power supply connected to the second electrode pair.
[21] In accordance with another aspect of the present invention, there is provided a device for sensing a fine material, comprising:
[22] first electrode pair;
[23] a variable power supply for outputting variable electrical signals;
[24] an AC power supply connected to a (-) terminal of the variable power supply; and
[25] second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween, and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair, due to structural transformation of a piezoelectric material of the piezoelectric body occurring when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode.
[26] In accordance with yet another aspect of the present invention, there is provided a device for sensing a fine material, comprising:
[27] a variable power supply for outputting variable electrical signals;
[28] first electrode pair; and
[29] second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween and which is returned to its original position due to structural transformation of a piezoelectric material of the piezoelectric body when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode, thus resulting in close contact with one end of the first electrode pair, and outputting electrical signals of the variable power supply to an output terminal through the first electrode pair.
[30]
Advantageous Effects
[31] As illustrated hereinbefore, a device for sensing a fine material in accordance with the present invention is capable of achieving more accurate detection of the fine material by application of electrical signals to sense the fine material.
[32] Further, the present invention provides a portable device for sensing a fine material which is capable of achieving miniaturization and lower power consumption of the device through an electrical measurement method. [33]
Brief Description of the Drawings
[34] FIGS. 1 and 2 are views illustrating a device for sensing a fine material in accordance with the conventional art;
[35] FIG. 3 is a view illustrating Embodiment 1 of a device for sensing a fine material in accordance with the present invention;
[36] FIG. 4 is a view illustrating Embodiment 2 of a device for sensing a fine material in accordance with the present invention;
[37] FIG. 5 is a view illustrating Embodiment 3 of a device for sensing a fine material in accordance with the present invention;
[38] FIG. 6 is a view showing tip shapes of a cantilever which is applied to the present invention; and
[39] FIG. 7 is a graph illustrating quality factors depending on tip shapes of a cantilever which is applied to the present invention.
[40]
Mode for the Invention
[41] Now, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings, such that those skilled in the art can easily practice the present invention.
[42] Hereinafter, configuration of a device for sensing a fine material in accordance with the present invention will be given with reference to the accompanying drawings.
[43]
[44] Embodiment 1
[45] A device for sensing a fine material in accordance with the present invention includes a variable power supply 100 for outputting variable electrical signals in response to variable signals being output from a signal analysis section 140 which will be illustrated hereinafter; first electrode pair 110 connected to an AC power supply 130; second electrode pair 120 which is composed of an upper electrode 121, a lower electrode 123 and a piezoelectric body 125 disposed therebetween and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair 110, due to structural transformation of a piezoelectric material of the piezoelectric body 125 occurring when an electrical signal of the variable power supply 100 is applied to the upper electrode 121 and the lower electrode 123; and a signal analysis section 140 that receives and scans an AC signal having a value varying in response to an electrical signal being output from the variable power supply 100 and being input through the first electrode pair 110, and senses an amount of the fine material using the electrical signal of the variable power supply 100 at a point of time a received value of the AC signal is largest or has a special pattern.
[46] The electrical signal of the variable power supply 100 is variable in response to the variable signal of the signal analysis section 140 and is a DC voltage.
[47] In another embodiment of the present invention, the signal analysis section 140 may be configured such that it compares the magnitude and phase of a preceding signal and the magnitude and phase of a succeeding signal for AC signals input through the second electrode pair 120, recognizes the input succeeding signal at a point of time the preceding signal magnitude and phase are smaller than the succeeding signal magnitude and phase, as a maximum value, and senses an amount of the fine material by recognizing a DC voltage which is an electrical signal of the variable power supply 100 that had generated the succeeding signal recognized as a maximum value.
[48] Further, the signal analysis section 140 stores values corresponding to the conductivity varying depending on kinds and concentrations of solutions in which the first electrode pair 110 and the second electrode pair 120 are dipped, so it may be preferably configured to sense an amount of the fine material by applying a value corresponding to the conductivity for the DC voltage recognized to sense an amount of the fine material. That is, this is because there is a solution-dependent difference in the waveform of a maximum value appearing in the signal analysis section 140, since the ionic conductivity is variable depending on kinds and concentrations of the solutions.
[49] The second electrode pair 120 is a cantilever whose one end is bent downward due to a weight of the fine material when it binds thereto. Preferably, the cantilever has a sharp-pointed tip. The cantilever may undergo lateral distortion in addition to bending event. When the cantilever tip has a flat shape, it may be difficult to sensitively identify a balanced state because the region corresponding to a maximum point of the received AC signal is broad near the balanced state due to such a flat shape of the tip.
[50] The device for sensing a fine material is preferably provided with a blocking element
(C) that blocks a DC voltage which is an electrical signal of the variable power supply 100 being output to the signal analysis section 140, and outputs only an AC signal being input through the first electrode pair 110 to the signal analysis section 140. The blocking element (C) is connected to second electrode pair 120 and is a capacitor.
[51] The operation of the fine material-sensing device constructed as above will be described hereinafter.
[52] As shown in FIG. 3, when the first electrode pair 110 is connected to the AC power supply 130 and a fine material 129 as a test biological material is then bound to a receptor layer 127 coated on the tip of the second electrode pair 120 which is a cantilever, the second electrode pair 120 bends correspondingly to a weight of the fine material.
[53] As a result, a central axis of the second electrode pair 120 is bent downward from an opposite parallel structural configuration where a central axis of the second electrode pair 120 corresponding to the cantilever is collinear with that of the first electrode pair 110. Finally, a distance between the second electrode pair 120 and the first electrode pair 110, which were in very close vicinity to each other in the opposite parallel structure, will increase.
[54] Then, the signal analysis section 140 outputs a variable signal to the variable power supply 100, and the variable power supply 100 modifies an electrical signal, i.e. DC voltage, in response to the variable signal and outputs the modified DC voltage to upper and lower electrodes 121,123 of the second electrode pair 120.
[55] Accordingly, a DC voltage which is an electrical signal is applied to a piezoelectric body 125 interposed between the upper and lower electrodes 121,123, and then the piezoelectric body 125 made of the DC voltage-applied piezoelectric material undergoes a structural change due to the piezoelectric material. As a consequence, the cantilever, i.e. second electrode pair 120, returns to its original position to thereby result in a balanced state.
[56] That is, when the force exerted by the piezoelectric body 125 formed of a piezoelectric material and the force of the fine material are the same in magnitude, the second electrode pair 120 which is a cantilever completely returns to its original position, resulting in recovery of a balanced state. Since a distance between the second electrode pair 120 of the cantilever and the first electrode pair 110 which is a parallel electrode is shortest under the above-mentioned balanced state, a received value of the AC signal is largest or has a special pattern. Therefore, since the magnitude and phase of the electric energy applied to the piezoelectric body 125 are identical to those of the mechanical energy applied to the cantilever by the fine material such that the AC signal received in the signal analysis section 140 has the largest value or special pattern, it is possible to measure an amount of the fine material by converting the mechanical energy exerted by the fine material into electric energy.
[57] In this connection, the signal analysis section 140 contains values corresponding to the conductivity varying depending on kinds and concentrations of solutions where the first electrode pair 110 and the second electrode pair 120 are soaked, and the values corresponding to the conductivity should be considered for a DC voltage which is an electrical signal of the variable power supply 100 input to sense an amount of the fine material. Taking into consideration the conductivity is because there is a solution- dependent difference in the waveform of a maximum value appearing in the signal analysis section 140, since the ionic conductivity is variable depending on kinds and concentrations of the solutions. [58]
[59] Meanwhile, a common capacitance can be calculated by the following equation:
[60] C=εOxεxS/d Equation 1
[61] wherein C is a capacitance, εOxε is a relative dielectric constant, S is a sectional area, and d is a distance between two electrodes.
[62] As can be seen from Equation 1, the capacitance increases as the spacing distance between two electrodes becomes shorter. Accordingly, since the electrode spacing is closest when central axes of the first electrode pair 110 and the second electrode pair 120 are collinear to each other, a DC voltage which is an electrical signal of the variable power supply 100 is supplied to the second electrode pair 120 such that the capacitance becomes the maximum.
[63] Then, the distance between the second electrode cantilever 120 and the first electrode pair 110 becomes shortest, and the AC signal applied to the second electrode cantilever 120 through the first electrode pair 110 will have a maximum value (Power).
[64] Accordingly, the sensor device is embodied such that the result value corresponding to the same phase of the AC signal can be measured from the second electrode pair 120, as a maximum value measured through the second electrode pair 120 which is a cantilever.
[65] Meanwhile, a blocking capacitor (C) is connected between the signal analysis section
140 and the second electrode cantilever 120. The blocking capacitor (C) blocks transmission of a DC voltage, which is an electrical signal of the variable power supply 100 applied in response to bending of the cantilever, to the signal analysis section 140.
[66] When a tip of the second electrode pair 120 which is a cantilever is configured to have a sharp-pointed shape as shown in FIG. 6, it is possible to increase the selectivity for signals transmitted between the second electrode pair 120 and the first electrode pair 110. When the cantilever has a sharp-pointed tip as above, it is possible to augment the selectivity of the fine material-sensing device because the quality factor increases as can be seen from the second graph (2) and the third graph (3) of FIG. 7. Accordingly, a sensor function of the device can also be improved.
[67] If the cantilever tip has a broad blunt shape instead of a sharp-pointed shape as shown FIG. 6, the transmission of signals takes place between the second electrode cantilever 120 and the first electrode pair 110 even upon the occurrence of structural deformation such as bending or distortion of the cantilever. As a consequence, as can be seen from the first graph (1) of FIG. 7, this may result in lowering of the quality factor and deterioration of the selectivity and sensor function of the fine material- sensing device.
[68] Although the present invention was illustrated only with reference to bending of the cantilever for the structural deformation of the cantilever, the cantilever may exhibit a variety of structural deformation such as twisting and the like, resulting from the reaction of the cantilever with the target fine material, in addition to bending of the cantilever.
[69]
[70] Embodiment 2
[71] Unlike Embodiment 1, Embodiment 2 is configured in a manner that an AC power supply 230 and a variable power supply 200 are serially connected to second electrode pair 220. The device of Embodiment 2 includes first electrode pair 210; a variable power supply 200 for outputting variable electrical signals; an AC power supply 230 connected to a (-) terminal of the variable power supply 200; second electrode pair 220 which is composed of an upper electrode 221, a lower electrode 223 and a piezoelectric body 225 disposed therebetween, and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair 210, due to structural transformation of a piezoelectric material of the piezoelectric body 225 occurring when a DC voltage, which is an electrical signal of the variable power supply 200, is applied to the upper electrode 221 and the lower electrode 223; and a signal analysis section 240 that receives and scans AC signals being output to the first electrode pair 210 through the second electrode pair 220, and senses an amount of the fine material by recognizing a DC voltage which is an electrical signal of the variable power supply 200 at a point of time a received value of the AC signal is largest or has a special pattern.
[72] In another embodiment of the present invention, the signal analysis section 240 may be configured such that it compares the magnitude and phase of a preceding signal and the magnitude and phase of a succeeding signal for AC signals being input to the first electrode pair 210 through the second electrode pair 220, recognizes the input succeeding signal at a point of time the preceding signal magnitude and phase are smaller than the succeeding signal magnitude and phase, as a maximum value, and senses an amount of the fine material by recognizing a DC voltage which is an electrical signal of the variable power supply 200 that had generated the succeeding signal recognized as a maximum value.
[73] Further, the signal analysis section 240 stores values corresponding to the conductivity varying depending on kinds and concentrations of solutions in which the first electrode pair 210 and the second electrode pair 220 are dipped, so it may be preferably configured to sense an amount of the fine material by applying a value corresponding to the conductivity for the DC voltage which is an electrical signal of the variable power supply 200 recognized to sense an amount of the fine material. That is, this is because there is a solution-dependent difference in the waveform of a maximum value appearing in the signal analysis section 240, since the ionic conductivity is variable depending on kinds and concentrations of the solutions.
[74] The second electrode pair 220 is a cantilever whose one end is bent downward due to a weight of the fine material when it binds thereto. When a tip of the cantilever which is the second electrode pair 220 is configured to have a sharp-pointed shape as shown in FIG. 6, it is possible to increase the selectivity for the signals transmitted between the second electrode pair 220 and the first electrode pair 210. When the cantilever has a sharp-pointed tip as above, it is possible to enhance the selectivity of the fine material-sensing device because the quality factor increases as can be seen from the second graph (2) and the third graph (3) of FIG. 7. Accordingly, a sensor function of the device can also be improved.
[75] The operation of the fine material-sensing device constructed as above will be described hereinafter.
[76] Embodiment 2 of the present invention is intended to minimize effects of a nonspecific material formed on an upper part of the cantilever on the measurement results, when a receptor is coated on an upper part of the cantilever to form a receptor layer 227 and the fine material 229 as a target material is bound thereto.
[77] That is, as shown in FIG. 4, an AC voltage in combination with a DC variable voltage which is an electrical signal of the variable power supply 200 is applied to the cantilever which corresponds to the second electrode pair 220. The cantilever is composed of an upper electrode 221, a lower electrode 223 and a piezoelectric body 225 formed of a piezoelectric material interposed therebetween, as described hereinbefore. When a DC voltage which is an electrical signal of the variable power supply 200 is output to the upper/lower electrodes 221,223, the piezoelectric material of the piezoelectric body 225 undergoes structural transformation, which in turn leads to a recovery of the original position of the second electrode cantilever 220 which was bent downward in response to a weight of the fine material 229 when it binds to the receptor layer 227, consequently maintaining a balanced state. That is, as also illustrated in Embodiment 1, the second metal 220 which is a cantilever completely returns to its original position, resulting in recovery of a balanced state, when the force exerted by the piezoelectric body 225 formed of a piezoelectric material and the force of the fine material are the same in magnitude.
[78] Since a distance between the second electrode pair 220 of the cantilever and the first electrode pair 210 which is a parallel electrode is shortest under the above-mentioned balanced state, a received value of the AC signal is largest or has a special pattern. Therefore, since the magnitude and phase of AC electric energy applied to the piezoelectric body 225 are identical to those of the mechanical energy applied to the cantilever by the fine material, such that the AC signal received in the signal analysis section 240 has the largest value or special pattern, it is possible to measure an amount of the fine material by converting the mechanical energy exerted by the fine material into electric energy.
[79] The DC voltage is not transmitted to the first electrode pair 210.
[80] The description of the signal analysis section 240 is the same as in Embodiment 1, so details thereof will be omitted herein. Further, when components and elements of Embodiment 2 have the same function as those of Embodiment 1, details thereof will be omitted herein.
[81]
[82] Embodiment 3
[83] Unlike Embodiments 1 and 2, Embodiment 3 is configured to sequentially perform the following operations. When a DC voltage which is an electrical signal of the variable power supply 300 is applied to the second electrode pair 320 which is a cantilever that was bent downward due to a weight of the fine material 329 when it binds to the receptor layer 327, this results in a recovery of the original position of the second electrode pair 320 which is a cantilever, consequently leading to a balanced state. Accordingly, one end of the second electrode pair 320 intimately combines with the first electrode pair 310 to thereby form a single electrode. Then, the signal analysis section 340 directly receives application of a DC voltage which is an electrical signal of the variable power supply 300, through the newly formed electrode, such that an amount of the fine material bound to the second electrode cantilever 320 can be detected.
[84] As shown in FIG. 5, the device of Embodiment 3 in accordance with the present invention includes a variable power supply 300 for outputting variable electrical signals; first electrode pair 310; and second electrode pair 320 which is composed of an upper electrode 321, a lower electrode 323 and a piezoelectric body 325 disposed therebetween and which is returned to its original position due to structural transformation of a piezoelectric material of the piezoelectric body 325 when electrical signals of the variable power supply 300 are applied to the upper electrode 321 and the lower electrode 323, consequently resulting in intimate contact of one end of the second electrode pair with the first electrode pair 310.
[85] The second electrode pair 320 is a cantilever that is bent downward in response to a weight of the fine material when it binds thereto.
[86] A lower end of the first electrode pair 310 is bent to form a bent surface (a) which is then intimately combined with an upper side surface (b) of the second electrode pair and a lateral side opposite to the side to which the variable power supply 300 is connected.
[87] The operation of the fine material-sensing device constructed as above will be described hereinafter. [88] As shown in FIG. 5, Embodiment 3 of the present invention is constructed in a manner that a DC variable voltage is applied to the cantilever which is the second electrode pair 320. For this purpose, physical bending of the cantilever is developed when a receptor layer 327 is formed on an upper part of the cantilever which is the second electrode pair 320, and the fine material 329 as a target material is bound thereto.
[89] When an electrical signal of the variable power supply 300 is variably applied to the upper and lower electrodes 321,323 of the second electrode pair 320, the second electrode cantilever 320 returns to its original position to recover a balanced state due to structural transformation of a piezoelectric material of the piezoelectric body 325 disposed between the upper and lower electrodes 321,323. As a result, one end of the second electrode pair 320 intimately combines with the first electrode pair 310 to thereby form a single electrode. Then, the newly formed electrode outputs a modified voltage being output from the variable power supply 300 to the signal analysis section 340.
[90] Thereafter, the signal analysis section 340 senses the input DC voltage to thereby sense an amount of the fine material. That is, since the magnitude and phase of the DC electric energy applied to the piezoelectric body 325 are identical to those of the mechanical energy applied to the cantilever by the fine material, it is possible to measure an amount of the fine material by converting the mechanical energy exerted by the fine material into electric energy.
[91] The description of the signal analysis section 340 is the same as in Embodiment 1, so details thereof will be omitted herein. Further, when components and elements of Embodiment 3 have the same function as those of Embodiment 1, details thereof will be omitted herein.
[92] The devices for sensing a fine material in accordance with the present invention, as illustrated in Embodiments 1 through 3, are constructed to identify compounds in biological samples containing nucleic acids, proteins, peptides, polypeptides, toxins, pharmaceuticals, venom, allergens, and infectious agents, as well as carcinogens, particularly serum PSA which is a prognostic factor for prostate cancer.
[93] Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
[94]

Claims

Claims
[1] A device for sensing a fine material, comprising: a variable power supply for outputting variable electrical signals; first electrode pair to which an AC power supply is connected; and second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair, due to structural transformation of a piezoelectric material of the piezoelectric body occurring when electrical signals of the variable power supply are output to the upper electrode and the lower electrode.
[2] The device according to claim 1, further comprising a signal analysis section that receives and scans an AC signal having a value varying in response to an electrical signal being output from the variable power supply and being input through the first electrode pair, and senses an amount of the fine material using a DC voltage which is the electrical signal at a point of time a received value of the AC signal is largest or has a special pattern.
[3] The device according to claim 1, further comprising a signal analysis section that compares the magnitude and phase of a preceding signal and the magnitude and phase of a succeeding signal for AC signals being input through the second electrode pair, recognizes the input succeeding signal at a point of time the preceding signal magnitude and phase are smaller than the succeeding signal magnitude and phase, as a maximum value, and senses an amount of the fine material by recognizing a DC voltage which is an electrical signal of the variable power supply that had generated the succeeding signal recognized as a maximum value.
[4] The device according to claim 2, wherein the second electrode pair is provided connected with a blocking element that blocks a DC voltage which is an electrical signal of the variable power supply being output to the signal analysis section, and outputs only an AC signal being input through the first electrode pair to the signal analysis section.
[5] The device according to claim 4, wherein the blocking element is a capacitor.
[6] A device for sensing a fine material, comprising: first electrode pair; a variable power supply for outputting variable electrical signals; an AC power supply connected to a (-) terminal of the variable power supply; and second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween, and which is returned to have a central axis at the collinear position with respect to that of the first electrode pair, due to structural transformation of a piezoelectric material of the piezoelectric body occurring when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode.
[7] The device according to claim 6, further comprising a signal analysis section that receives and scans an AC signal having a value varying in response to an electrical signal being output from the variable power supply and being input to the first electrode pair through the second electrode pair, and senses an amount of the fine material using the electrical signal at a point of time a received value of the AC signal is largest or has a special pattern.
[8] The device according to claim 7, further comprising a signal analysis section that compares the magnitude and phase of a preceding signal and the magnitude and phase of a succeeding signal for AC signals being input to the first electrode pair through the second electrode pair, recognizes the input succeeding signal at a point of time the preceding signal magnitude and phase are smaller than the succeeding signal magnitude and phase, as a maximum value, and senses an amount of the fine material by recognizing an electrical signal of the variable power supply that had generated the succeeding signal recognized as a maximum value.
[9] A device for sensing a fine material, comprising: a variable power supply for outputting variable electrical signals; first electrode pair; and second electrode pair which is composed of an upper electrode, a lower electrode and a piezoelectric body disposed therebetween and whose end which was bent downward is returned to its original position due to structural transformation of a piezoelectric material of the piezoelectric body when electrical signals of the variable power supply are applied to the upper electrode and the lower electrode, thus resulting in close contact with one end of the first electrode pair, whereby the second electrode pair receives input of electrical signals of the variable power supply and outputs the electrical signals to an output terminal through the first electrode pair.
[10] The device according to claim 9, wherein a lower end of the first electrode pair is bent to form a bent surface and the bent surface is intimately combined with an upper side surface of the second electrode pair and a lateral side opposite to the side to which the variable power supply is connected.
[11] The device according to claim 9, further comprising a signal analysis section that receives input of electrical signals being output from the variable power supply to sense an amount of the fine material.
[12] The device according to claim 1, 5 or 9, wherein the second electrode pair is a cantilever whose one end is bent downward due to a weight of the fine material when it binds thereto.
[13] The device according to claim 12, wherein the cantilever has a sharp-pointed tip.
[14] The device according to claim 2, 3, 7, 8 or 11, wherein the signal analysis section stores values corresponding to the conductivity varying depending on kinds and concentrations of solutions in which the first electrode pair and the second electrode pair are dipped, and senses an amount of the fine material by applying a value corresponding to the conductivity for the DC voltage recognized to sense an amount of the fine material.
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