KR100976363B1 - Device for sensing minuteness matter - Google Patents

Abstract

According to the present invention, the cantilever is bent by a force generated when the measurable fine material is bound to the surface of the cantilever in the in-situ mode, and the voltage is changed to a piezoelectric material provided in the cantilever so as to generate a force opposite to the bending. The center axis of the electrode and the cantilever are restored to the same line, and at the moment of restoration, the electrical force applied to the piezoelectric material of the cantilever is measured to detect the force generated by the cantilever and quantitatively detect the amount of the fine material. The present invention relates to a micromaterial sensing device, comprising: a variable power supply configured to output a variable electrical signal; A first electrode; Comprising a piezoelectric material placed on the upper electrode and the lower electrode, the upper electrode and the lower electrode, when the electrical signal is supplied to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric structure is structurally converted, A second electrode restored so that the first electrode and the central axis are located on the same line; And an AC power supply connected to the second electrode.

Cantilever, piezoelectric material, fine material, sensing, deflection recovery, capacitor, capacitance

Description

Fine material sensing device {DEVICE FOR SENSING MINUTENESS MATTER}

The present invention relates to a micromaterial sensing device.

According to the present invention, the cantilever is bent by a force generated when the measurable fine material is bound to the surface of the cantilever in the in-situ mode, and the voltage is changed to a piezoelectric material provided in the cantilever so as to generate a force opposite to the bending. The center axis of the electrode and the cantilever are restored to the same line, and at the moment of restoration, the electrical force applied to the piezoelectric material of the cantilever is measured to detect the force generated by the cantilever and quantitatively detect the amount of the fine material. To fine material sensing devices

In general, a micromaterial sensing device to detect micromaterials detects a specific material using a cantilever having a micromechanical structure. Such cantilevers are made through a MEMS process and coat a receptor for binding a specific material to the cantilever surface.

The target molecule is exposed to the receptor, the receptor reacts with the specific material, and the cantilever is deformed. The micromaterial sensing device detects the deformable cantilever to detect the specific material.

Conventionally, the deformation of the cantilever is measured by using an optical method, and the embodiment is as shown in FIGS. 1 and 2.

In the conventional embodiment, as shown in FIGS. 1 and 2, after the receptor coated with the non-receptor cantilever (Reference cantilever) and the receptor coating, the light source is irradiated to the functionalized cantilever reacted with the target material and reflected from each cantilever. It is a method of measuring the light source by CCD.

That is, the light source is irradiated to the cantilever, and a beam splitter, a reflector, and a CCD are spaced apart by a predetermined distance in order to detect a change in the reflection angle that changes with the bending of the cantilever.

As described above, since the apparatus for detecting the deformation of the cantilever by using the light source has to secure a certain space in structure, there is a problem in that it is limited in achieving miniaturization and high integration.

In addition, accurate measurement is difficult because an error occurs in the measurement result according to diffraction and reflection of the light source irradiated to detect the deformation of the cantilever, and there is a problem that an error occurs in the measurement because the optical characteristics are changed according to the transparency of the analysis target. .

The present invention has been made to solve the problems of the prior art as described above, the object of the present invention is to bend the cantilever by the force generated, the voltage to the piezoelectric material provided in the cantilever to generate a force opposite the bending Variable to restore the central axis of the electrode and the cantilever to be located on the same line, and measure the electric force applied to the piezoelectric material of the cantilever at the moment of restoration to detect the force generated by the cantilever. It is to provide a fine material sensing device that can be detected quantitatively.

In addition, another object of the present invention is to provide a compact fine material sensing device to achieve miniaturization and high integration.

In addition, another object of the present invention to provide a fine material sensing device that can be used to obtain a more accurate measurement results by using an electrical measurement method.

In order to achieve the above object, an embodiment of the present invention, a fine material sensing device, a variable power supply for outputting a variable electrical signal; A first electrode; Comprising a piezoelectric material placed on the upper electrode and the lower electrode, the upper electrode and the lower electrode, when the electrical signal of the variable power supply unit is supplied to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric structure is structurally converted, A second electrode restored so that the first electrode and the central axis are located on the same line; And an AC power supply connected to the second electrode.

In addition, another embodiment of the present invention, the fine material sensing device, the first electrode; A variable power supply for outputting a variable electrical signal; An AC power supply unit connected to the negative terminal of the variable power supply unit; And a piezoelectric material disposed on the upper electrode and the lower electrode, and the upper electrode and the lower electrode. When the electrical signal is supplied to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric body is structurally converted. And a second electrode which is restored to be positioned on the same line as the first electrode and the central axis.

In addition, another embodiment of the present invention, a fine material sensing device, a variable power supply for outputting a variable electrical signal; A first electrode; And a piezoelectric material disposed on the upper electrode and the lower electrode, and the upper electrode and the lower electrode. When the electrical signal is supplied to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric body is structurally converted. And a second electrode restored and in close contact with one end of the first electrode, and outputting an electrical signal to the output terminal through the first electrode.

As described above, the micromaterial sensing device according to the present invention has an effect of detecting the micromaterial more accurately by applying an electrical signal to sense the micromaterial.

In addition, the present invention has the effect of providing a portable micro-material sensing device to achieve a miniaturization and low power through an electrical measurement method.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention in detail.

Referring to the drawings with respect to the configuration of the fine material sensing apparatus according to the present invention will be described.

Example 1

The fine material sensing device of the present invention includes a variable power supply unit 100 for outputting a variable electrical signal in response to a variable signal output from the signal analysis unit 140 to be described later, and a first electrode 110 to which an AC power supply unit 130 is connected. And an upper electrode 121, a lower electrode 123, and a piezoelectric member 125 disposed on the upper electrode 121 and the lower electrode 123, and the upper electrode 121 and the lower electrode 123. When the electrical signal of the variable power supply unit 100 is supplied, the piezoelectric material constituting the piezoelectric member 125 is structurally converted to restore the first electrode 110 and the central axis to be located on the same line. The value is changed according to the electrode 120 and the electrical signal output from the variable power supply unit 100, and receives and scans an AC signal input through the first electrode 110, so that the AC signal is maximized. Electrical signals of the variable power supply unit 100 Use consists of signal analysis unit 140 for sensing the amount of the fine material.

The electrical signal of the variable power supply unit 100 is variable in response to the variable signal of the signal analyzer 140 and is a DC voltage.

On the other hand, in another embodiment of the signal analysis unit 140, the magnitude of the line signal is compared with the magnitude of the line signal with respect to the AC signal input through the second electrode 120, the magnitude of the line signal is the rear signal Sensing the amount of fine material by recognizing the inputted post-signal at the instant of being smaller than the size as the maximum value, and recognizing the DC voltage which is the electrical signal of the variable power supply unit 100 generating the post-signal recognized as the maximum value. You can also implement it.

In addition, the signal analyzer 140 stores a value corresponding to a conductivity that varies depending on the type of the solution in which the first electrode 110 and the second electrode 120 are immersed and the concentration of the solution. In order to sense the amount of, it is desirable to implement a value capable of sensing the amount of the fine material by applying a value corresponding to the conductivity to the recognized DC voltage. That is, since the conductivity due to ions varies depending on the type and concentration of the solution, a difference occurs in the waveform of the maximum value indicated by the signal analyzer 140 depending on the solution.

The second electrode 120 is a cantilever whose one end is bent downward by the mass of the fine material when the fine material is bound, and the cantilever preferably has a pointed tip. In other words, the cantilever can be twisted laterally in addition to the warping phenomenon. When the cantilever end is flat, the shape of the cantilever is sensitive to the equilibrium state because the section that is the maximum point of the received AC signal occurs widely near the equilibrium state. This can be hard to do.

In addition, the fine material sensing device to which the present invention is applied blocks the DC voltage, which is an electrical signal of the variable power supply unit 100 output to the signal analyzer 140, and only the AC signal input through the first electrode 110. A blocking element C for outputting to the signal analyzer 140 is preferably connected to and provided to the second electrode 120, and the blocking element C is a capacitor.

The action of the fine material sensing device configured as described above is as follows.

As shown in FIG. 3, the biomaterial, which is a biomaterial, to be inspected on the receptor layer 127 coated on the tip of the second electrode 120, which is a cantilever, while the AC power source 130 is connected to the first electrode 110. When the material 129 is bound, the second electrode 120 is bent by the mass of the fine material.

Accordingly, the central axis of the second electrode 120, which is a cantilever, is formed in parallel with the first electrode 110 in parallel with the central axis so that the central axis of the second electrode 120 is downward. As a result, the opposite distance that is very close to each other in the structure in which the second electrode 120 and the first electrode 110 face side by side becomes far from each other.

At this time, the signal analyzing unit 140 outputs a variable signal to the variable power supply unit 100, and the variable power supply unit 100 varies the DC voltage which is an electrical signal in response to the variable signal, and the upper and lower electrodes of the second electrode 120 ( 121) 123 to be output.

Then, a DC voltage, which is an electrical signal, is applied to the piezoelectric material 125 interposed between the upper and lower electrodes 121 and 123, and the piezoelectric material 125 made of a piezoelectric material to which the DC voltage is applied causes a structural change due to the piezoelectric material. The second electrode 120, which is a cantilever, returns to its original position to achieve an equilibrium state.

That is, when the force exerted by the piezoelectric material 125 of the piezoelectric material and the force of the fine material are the same, the second electrode 120, which is a cantilever, is completely returned to its original position and returned to an equilibrium state. As described above, since the distance between the second electrode 120 of the cantilever and the first electrode 110, which is a parallel electrode, is closest to the equilibrium state, the reception value of the AC signal is largest. Therefore, the electrical energy applied to the piezoelectric member 125 is the same as the mechanical energy applied to the cantilever so that the AC signal received by the signal analyzer 140 is the largest, thereby converting the mechanical energy generated by the micromaterial into electrical energy and thereby converting the minute energy into electrical energy. The amount of material can be measured.

In this case, the signal analysis unit 140 has a value corresponding to the conductivity that varies depending on the type and concentration of the solution in which the first electrode 110 and the second electrode 120 are immersed, and sense the amount of the fine material. In order to do so, a value corresponding to the conductivity should be considered with respect to the DC voltage which is an electrical signal of the variable power supply unit 100 received. The reason for considering the conductivity as described above is that the conductivity due to the ions is different depending on the type and concentration of the solution, because the difference in the waveform of the maximum value indicated by the signal analysis unit 140 depending on the solution.

On the other hand, the general capacitance can be obtained through the following formula.

[Equation]

C = ε0 × ε × S / d

Where C is the capacitance, ε 0 × ε is the relative permittivity, S is the cross section, and d is the distance between the two electrodes.

As can be seen from the above equation, it can be seen that the capacitance (capacitance) increases as the distance between the two electrodes gets closer. Accordingly, since the separation distance is closest when the central axes of the first electrode 110 and the second electrode 120 are positioned on the same line, DC, which is an electrical signal of the variable power supply unit 100, to maximize the capacitance. The voltage is supplied to the second electrode 120.

Then, the distance between the second electrode 120, which is a cantilever, and the first electrode 110 is minimized, and the AC signal applied to the second electrode 120, which is a cantilever, through the first electrode 110 is a maximum value (Power). Will have

At this time, the sensing device is implemented so that the result value corresponding to the same phase as the AC signal can be measured from the second electrode 120 to the maximum value measured by the second electrode 120 which is the cantilever.

Meanwhile, a blocking capacitor C is connected and configured between the signal analyzer 140 and the second electrode 120 which is a cantilever, and the blocking capacitor C is a variable power supply unit 100 to which a cantilever is applied as the cantilever is bent. DC voltage, which is an electrical signal of), is not transmitted to the signal analyzer 140 and is blocked.

The tip of the cantilever, which is the second electrode 120, has a pointed shape as shown in FIG. 6, and the selectivity according to the signal transmitted between the second electrode 120 and the first electrode 110 is selected. Can increase. As described above, when the tip of the cantilever has a sharp shape, the quality factor is increased as shown in the second graph 2 and the third graph 3 of FIG. The selectivity may be increased, and thus the sensor function of the micromaterial sensing device may be improved.

If the tip shape of the cantilever has a wide shape without having a pointed shape as shown in FIG. 6, although the cantilever is structurally deformed such as bending or twisting, the cantilever second electrode 120 and the first electrode As the signal is transmitted between the 110, as shown in the first graph 1 of FIG. 7, the quality factor is lowered and the selectivity of the micromaterial sensing device is lowered. The sensor function of the material sensing device is also degraded.

Finally, in the present invention, the structural deformation of the cantilever is limited to only the warpage phenomenon, but the cantilever may react with the micromaterial as the target material, and not only the warpage phenomenon but also structural deformation such as twisting may occur.

Example 2

Unlike the first embodiment, the second embodiment outputs the first electrode 210 and a variable electrical signal by connecting the AC power supply 230 and the variable power supply 200 to the second electrode 220 in series. The variable power supply unit 200, the AC power supply unit 230 connected to the negative terminal of the variable power supply unit 200, the upper electrode 221, the lower electrode 223, the upper electrode 221, and the lower electric field. The piezoelectric body 225 is formed of the piezoelectric material 225 disposed on the pole 223, and the piezoelectric material 225 is supplied to the upper electrode 221 and the lower electrode 223 by supplying a DC voltage, which is an electrical signal of the variable power supply unit 200. Piezoelectric material constituting the structure is structurally converted, the second electrode 220 is restored so that the first axis 210 and the central axis is located on the same line, and the first electrode 210 through the second electrode 220 The variable power supply unit 200 receives and scans an AC signal outputted by the input signal at the time when the reception value of the AC signal is maximized. And a signal analyzer 240 for sensing the DC voltage as the electrical signal.

On the other hand, in another embodiment of the signal analysis unit 240, by comparing the magnitude of the line signal and the magnitude of the after signal with respect to the AC signal input to the first electrode 210 through the second electrode 220 Recognize the input post-signal at the moment when the magnitude of the line signal becomes smaller than the post-signal as the maximum value, and recognize the DC voltage which is the electrical signal of the variable power supply unit 200 that generated the post-signal recognized as the maximum value. It can also be implemented to sense the amount of fine material.

In addition, the signal analyzer 240 stores a value corresponding to conductivity depending on the type of the solution in which the first electrode 210 and the second electrode 220 are immersed and the concentration of the solution. In order to sense the amount, it is preferable to apply the value corresponding to the conductivity to the DC voltage which is the electrical signal of the variable power supply unit 200 to sense the amount of the fine material. That is, since the conductivity due to ions varies depending on the type and concentration of the solution, a difference occurs in the waveform of the maximum value indicated by the signal analyzer 240 depending on the solution.

The second electrode 220 is a cantilever whose one end is bent downward by the mass of the micromaterial when the micromaterial is bound, and the tip of the cantilever that is the second electrode 220 has a pointed shape as shown in FIG. 6. Having such a structure may increase selectivity according to a signal transmitted between the second electrode 220 and the first electrode 210. As described above, when the tip of the cantilever has a sharp shape, as can be seen from the second graph 2 and the third graph 3 of FIG. 7, the quality factor is increased, so that the fine material sensing device is provided. It is possible to increase the selectivity of the, thereby improving the sensor function of the micromaterial sensing device.

The action of the fine material sensing device configured as described above is as follows.

In the second embodiment of the present invention, after forming the receptor layer 227 by coating the receptor on the cantilever, when binding the fine material 229 as a target material, a nonspecific material is formed on the cantilever. This is to minimize the impact on the measurement results.

That is, as shown in FIG. 4, the AC voltage is applied to the cantilever which is the second electrode 220 together with the DC variable voltage which is the electrical signal of the variable power supply unit 200. The cantilever is the upper and lower electrodes 221 as described above. A piezoelectric body 225 made of a piezoelectric material is interposed between the 223 and 223, and when the DC voltage, which is an electrical signal of the variable power supply unit 200, is output to the upper and lower electrodes 221 and 223, the piezoelectric body 225 is provided. When the piezoelectric material forming the structure is structurally converted to bind the micromaterial 229 to the receptor layer 227, the cantilever, which is the second electrode 220, is bent downward with the mass of the micromaterial 229 to its original position. Restore to maintain equilibrium. That is, as described in the first embodiment, when the force exerted by the piezoelectric material 225 made of the piezoelectric material and the force of the fine material are the same, the second metal 220 which is the cantilever is completely returned to its original position and returned to the equilibrium state.

As described above, since the distance between the second electrode 220 of the cantilever and the first electrode 210 which is a parallel electrode is closest in the equilibrium state, the reception value of the AC signal is largest. Therefore, since the electrical energy of the direct current applied to the piezoelectric body 225 matches the mechanical energy applied to the cantilever by the micromaterial so that the AC signal received from the signal analyzer 240 is the largest, the mechanical energy emitted by the micromaterial is changed into electrical energy. The amount of fine material can be measured.

At this time, the DC voltage is not transmitted to the first electrode 210.

Since the description of the signal analyzer 240 is the same as that of the first embodiment, a detailed description thereof will be omitted herein. In addition, when the components of the second embodiment perform the same function as the components of the first embodiment, detailed description thereof will be omitted.

Example 3

Unlike the first and second embodiments, the third embodiment is a DC that is an electrical signal of the variable power supply unit 300 to the second electrode 320 which is a cantilever bent downward when the fine material 329 is bound to the receptor layer 327. The second electrode 320, which is a cantilever, is returned to its original position by applying a voltage to equilibrate, and one end of the second electrode 320 is tightly coupled to the first electrode 310 to form one electrode. The signal analyzer 340 receives the DC voltage, which is an electrical signal of the variable power supply unit 300, directly through the formed new electrode to sense the amount of fine material bound to the second electrode 320, which is a cantilever. .

Embodiment 3 according to the present invention is a variable power supply unit 300 for outputting a variable electrical signal as shown in Figure 5, the first electrode 310, the upper electrode 321 and the lower electrode 323, the Comprising a piezoelectric body 325 interposed between the upper electrode 321 and the lower electrode 323, when the electrical signal of the variable power supply unit 300 is applied to the upper electrode 321 and the lower electrode 323, The piezoelectric material constituting the piezoelectric body 325 is structurally converted, and is restored to its original position, and has one end thereof as a second electrode 320 that is tightly coupled to the first electrode 310.

The second electrode 320 is a cantilever bent downward by the mass of the binding fine material when bound to the fine material.

The lower end of the first electrode 310 is bent to form a bent surface (a), and the bent surface (a) is opposed to the surface connected to the upper side (b) and the variable power supply unit 300 of the second electrode Side c is in close contact with each other.

The action of the fine material sensing device configured as described above is as follows.

According to the third embodiment of the present invention, as shown in FIG. 5, the DC variable voltage is applied to the cantilever which is the second electrode 320. First, the receptor layer 327 is formed on the cantilever which is the second electrode 320. After binding the fine material 329, which is a target material, physical bending occurs in the cantilever.

At this time, if the electrical signal of the variable power supply unit 300 is supplied to the upper and lower electrodes 321 and 323 of the second electrode 320, the piezoelectric element 325 interposed between the upper and lower electrodes 321 and 323. The piezoelectric material constituting the structure is structurally converted, and the cantilever, which is the second electrode 320, is restored to its original position to achieve an equilibrium state. Thus, one end of the second electrode 320 is in close contact with the first electrode 310, The electrode is coupled to form one electrode, and the newly formed electrode outputs the variable voltage output from the variable power supply unit 300 to the signal analyzer 340.

Then, the signal analyzer 340 senses the amount of fine material by sensing the input DC voltage. That is, since the electrical energy of the direct current applied to the piezoelectric body 325 matches the mechanical energy applied to the cantilever by the micromaterial, the amount of the micromaterial can be measured by changing the mechanical energy emitted by the micromaterial into electrical energy.

Since the description of the signal analyzer 340 is the same as that of the first embodiment, a detailed description thereof will be omitted herein. In addition, when the components of the second embodiment perform the same function as the components of the first embodiment, detailed description thereof will be omitted.

The micromaterial sensing device according to the present invention described above through Examples 1 to 3 identifies a compound in a biological sample including nucleic acid, protein, teptide, polypeptide, toxin, pharmaceutical, poison, allergen, and infectious agent. In addition to being able to do so, it is implemented to measure carcinogens, in particular PSA, an expression factor of prostate cancer in the blood.

As mentioned above, although preferred embodiments of the present invention have been described in detail, those skilled in the art to which the present invention pertains may make the present invention without departing from the spirit and scope of the present invention as defined in the appended claims. It will be appreciated that various modifications or changes can be made.

1 and 2 are views for explaining a fine material sensing device according to the prior art.

3 is a view for explaining the first embodiment of the fine material sensing apparatus according to the present invention.

4 is a view for explaining a second embodiment of the micromaterial sensing device according to the present invention.

5 is a view for explaining a third embodiment of the fine material sensing apparatus according to the present invention.

6 is a view showing the tip shape of the cantilever applied to the present invention.

7 is a graph for explaining the quality factor according to the tip shape of the cantilever applied to the present invention.

<Description of the symbols for the main parts of the drawings>

100, 200, 300: variable power supply

110, 210, 310: first electrode (balanced electrode)

120, 220, 320: second electrode (cantilever)

130, 230: AC power supply

140, 240, 340: signal analysis unit

Claims (14)

In the fine material sensing device, A variable power supply for outputting a variable electrical signal; A first electrode to which an AC power supply is connected; And Comprising an upper electrode and a lower electrode, a piezoelectric interposed between the upper electrode and the lower electrode, and outputs an electrical signal of the variable power supply to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric is structurally converted, A second electrode restored so that the first electrode and the central axis are located on the same line; Fine material sensing device, characterized in that configured to include. The method of claim 1, The fine material sensing device changes its value according to an electrical signal output from the variable power supply unit, scans an AC signal input through the first electrode, and scans the electrical signal at a time when the AC signal is maximized. Fine material sensing device further comprises a signal analyzer for sensing the amount of the fine material using a DC voltage. The method of claim 1, The fine material sensing device compares the magnitude of the pre-signal with the magnitude of the pre-signal with respect to an alternating current signal input through the second electrode, and at the moment when the magnitude of the pre-signal becomes smaller than the magnitude of the post-signal. And a signal analyzer configured to recognize the inputted after signal as a maximum value and to sense a DC voltage, which is an electrical signal of the variable power supply unit generating the after signal recognized as the maximum value, to sense an amount of fine material. Fine material sensing device, characterized in that. The method of claim 2, Blocking the DC voltage, which is an electrical signal of the variable power supply output to the signal analyzer, and a blocking element for connecting only the AC signal input through the first electrode to the signal analyzer is connected to the second electrode, Fine material sensing device characterized in that. The method of claim 4, wherein The blocking element is a fine material sensing device, characterized in that the capacitor. In the fine material sensing device, A first electrode; A variable power supply for outputting a variable electrical signal; An AC power supply unit connected to the negative terminal of the variable power supply unit; And It consists of a piezoelectric material interposed between the upper electrode and the lower electrode, the upper electrode and the lower electrode, and when the electrical signal is supplied to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric structure is structurally converted, A second electrode restored so that the first electrode and the central axis are located on the same line; Fine material sensing device, characterized in that configured to include. The method of claim 6, The fine material sensing device changes its value according to an electrical signal output from the variable power supply, receives and scans an AC signal input to the first electrode through the second electrode, and the AC signal is maximized. The fine material sensing device further comprises a signal analyzer for sensing the amount of the fine material using the electrical signal of the. The method of claim 7, wherein The fine material sensing device compares the magnitude of the pre-signal and the magnitude of the pre-signal with respect to an alternating current signal input to the first electrode through the second electrode. A signal analysis unit for sensing the amount of fine material by recognizing the electrical signal of the variable power supply unit generating the after signal recognized as the maximum value, the input after signal at the moment becomes smaller as the maximum value; Fine material sensing device, characterized in that. In the fine material sensing device, A variable power supply for outputting a variable electrical signal; A first electrode; And Comprising a piezoelectric material placed on the upper electrode and the lower electrode, the upper electrode and the lower electrode, when the electrical signal of the variable power supply unit is supplied to the upper electrode and the lower electrode, the piezoelectric material forming the piezoelectric structure is structurally converted A second electrode returning downward to its original position to be in close contact with one end of the first electrode and receiving an electrical signal of the variable power supply unit and outputting the electrical signal to the output terminal through the first electrode; Fine material sensing device, characterized in that configured to include. The method of claim 9, The lower end of the first electrode is bent to form a bent surface, A fine material sensing device, characterized in that the side opposite to the surface connected to the upper side and the variable power supply of the second electrode is in close contact with the bent surface. The method of claim 9, The micromaterial sensing device further includes a signal analyzer configured to receive an electrical signal output from the variable power supply unit and sense an amount of the micromaterial. The method according to claim 1 or 5 or 9, The second electrode is a fine material sensing device, characterized in that the one end bent downward by the mass of the fine material when the fine material is bound. 13. The method of claim 12, The cantilever is fine material sensing device, characterized in that it comprises a pointed tip. The method according to claim 2 or 3 or 7 or 8 or 11, The signal analyzer may store a value corresponding to conductivity depending on a type of a solution in which the first electrode and the second electrode are immersed and a concentration of the solution. The fine material sensing device, characterized in that for sensing the amount of the fine material by applying a value corresponding to the conductivity.

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