WO2009136771A3 - Ferroelectric material and a ferroelectric layer formation method using the same - Google Patents
Ferroelectric material and a ferroelectric layer formation method using the same Download PDFInfo
- Publication number
- WO2009136771A3 WO2009136771A3 PCT/KR2009/002449 KR2009002449W WO2009136771A3 WO 2009136771 A3 WO2009136771 A3 WO 2009136771A3 KR 2009002449 W KR2009002449 W KR 2009002449W WO 2009136771 A3 WO2009136771 A3 WO 2009136771A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ferroelectric
- formation method
- existing
- layer formation
- same
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 12
- 230000015572 biosynthetic process Effects 0.000 title abstract 2
- 230000010287 polarization Effects 0.000 abstract 2
- 239000003989 dielectric material Substances 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/10—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances metallic oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead based oxides
- H10N30/8554—Lead zirconium titanate based
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8561—Bismuth based oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/516—Insulating materials associated therewith with at least one ferroelectric layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
Abstract
The present invention relates to a ferroelectric material used as a component of an electronic and electrical material and a ferroelectric layer formation method using the same. In one embodiment of the present invention, a metallic material is added to an existing ferroelectric material to form a novel ferroelectric material. Such a ferroelectric material of the present invention has a very high or low value of remanent polarization, compared with existing ferroelectric materials. A ferroelectric material having a higher value of remanent polarization than existing ferroelectric materials is suitable for use as a dielectric material, and a ferroelectric material having a somewhat lower value than existing ferroelectric materials is suitable for use as a material for a ferroelectric transistor gate.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2008-0042854 | 2008-05-08 | ||
KR20080042854 | 2008-05-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009136771A2 WO2009136771A2 (en) | 2009-11-12 |
WO2009136771A3 true WO2009136771A3 (en) | 2010-03-04 |
Family
ID=41265184
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2009/002449 WO2009136771A2 (en) | 2008-05-08 | 2009-05-08 | Ferroelectric material and a ferroelectric layer formation method using the same |
PCT/KR2009/002445 WO2009136767A2 (en) | 2008-05-08 | 2009-05-08 | A ferroelectric material and a ferroelectric layer formation method using the same |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2009/002445 WO2009136767A2 (en) | 2008-05-08 | 2009-05-08 | A ferroelectric material and a ferroelectric layer formation method using the same |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR20090117665A (en) |
WO (2) | WO2009136771A2 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0657412A (en) * | 1992-03-30 | 1994-03-01 | Anelva Corp | Production of pzt thin film and sputtering device |
US20010053740A1 (en) * | 2000-06-05 | 2001-12-20 | Chang-Jung Kim | Bismuth lanthanum titanate (BLT), BLT thin film, and electronic device including the BLT thin film |
JP2004079691A (en) * | 2002-08-14 | 2004-03-11 | Sumitomo Metal Mining Co Ltd | Blt ferrodielectric thin film capacitor and method of manufacturing the same |
US20060223931A1 (en) * | 2005-04-01 | 2006-10-05 | Samsung Electro-Mechanics Co., Ltd. | High-dielectric constant metal-ceramic-polymer composite material and method for producing embedded capacitor using the same |
-
2009
- 2009-05-08 WO PCT/KR2009/002449 patent/WO2009136771A2/en active Application Filing
- 2009-05-08 WO PCT/KR2009/002445 patent/WO2009136767A2/en active Application Filing
- 2009-05-08 KR KR1020090040491A patent/KR20090117665A/en not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0657412A (en) * | 1992-03-30 | 1994-03-01 | Anelva Corp | Production of pzt thin film and sputtering device |
US20010053740A1 (en) * | 2000-06-05 | 2001-12-20 | Chang-Jung Kim | Bismuth lanthanum titanate (BLT), BLT thin film, and electronic device including the BLT thin film |
JP2004079691A (en) * | 2002-08-14 | 2004-03-11 | Sumitomo Metal Mining Co Ltd | Blt ferrodielectric thin film capacitor and method of manufacturing the same |
US20060223931A1 (en) * | 2005-04-01 | 2006-10-05 | Samsung Electro-Mechanics Co., Ltd. | High-dielectric constant metal-ceramic-polymer composite material and method for producing embedded capacitor using the same |
Also Published As
Publication number | Publication date |
---|---|
KR20090117665A (en) | 2009-11-12 |
WO2009136771A2 (en) | 2009-11-12 |
WO2009136767A2 (en) | 2009-11-12 |
WO2009136767A3 (en) | 2010-03-04 |
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