WO2009132719A3 - Piezoresistive element for use in a micromechanical component, method for operating the micromechanical component and method for producing the micromechanical component - Google Patents

Piezoresistive element for use in a micromechanical component, method for operating the micromechanical component and method for producing the micromechanical component Download PDF

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Publication number
WO2009132719A3
WO2009132719A3 PCT/EP2008/066535 EP2008066535W WO2009132719A3 WO 2009132719 A3 WO2009132719 A3 WO 2009132719A3 EP 2008066535 W EP2008066535 W EP 2008066535W WO 2009132719 A3 WO2009132719 A3 WO 2009132719A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical component
producing
operating
anchoring section
piezoresistive element
Prior art date
Application number
PCT/EP2008/066535
Other languages
German (de)
French (fr)
Other versions
WO2009132719A2 (en
Inventor
Joerg Muchow
Joachim Fritz
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009132719A2 publication Critical patent/WO2009132719A2/en
Publication of WO2009132719A3 publication Critical patent/WO2009132719A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Abstract

The invention relates to a micromechanical component comprising an adjusting element (10) which can be adjusted in relation to a fixture and which is connected to said fixture by at least one spring element (16), a first end of said spring element (16) being fastened to a first anchoring section which is a subsection of the fixture, and a second end of the spring element (16) being fastened to a second anchoring section (20) which is a subsection of the adjusting element (10). The micromechanical component further comprises at least one piezoresistive element (22) which is arranged on a surface and/or inside a volume of the first anchoring section and/or the second anchoring section (20) in such a manner that a deformation of the spring element (16) causes a change in the resistance of the piezoresistive element (22). The invention additionally relates to a method for operating a micromechanical component. The invention further relates to a method for producing a micromechanical component.
PCT/EP2008/066535 2008-04-30 2008-12-01 Micromechanical component, method for operating a micromechanical component and method for producing a micromechanical component WO2009132719A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810001465 DE102008001465A1 (en) 2008-04-30 2008-04-30 Micromechanical component, method for operating a micromechanical component and production method for a micromechanical component
DE102008001465.6 2008-04-30

Publications (2)

Publication Number Publication Date
WO2009132719A2 WO2009132719A2 (en) 2009-11-05
WO2009132719A3 true WO2009132719A3 (en) 2010-05-27

Family

ID=41130686

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/066535 WO2009132719A2 (en) 2008-04-30 2008-12-01 Micromechanical component, method for operating a micromechanical component and method for producing a micromechanical component

Country Status (2)

Country Link
DE (1) DE102008001465A1 (en)
WO (1) WO2009132719A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014182227A (en) * 2013-03-18 2014-09-29 Seiko Epson Corp Optical scanner, image display device, and head-mounted display

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050035682A1 (en) * 2003-08-12 2005-02-17 Fujitsu Limited Micro-oscillation element and method for driving the same
US20050078169A1 (en) * 2003-10-08 2005-04-14 Tumer Arthur Monroe Apparatus and methods for adjusting the rotational frequency of a scanning device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050035682A1 (en) * 2003-08-12 2005-02-17 Fujitsu Limited Micro-oscillation element and method for driving the same
US20050078169A1 (en) * 2003-10-08 2005-04-14 Tumer Arthur Monroe Apparatus and methods for adjusting the rotational frequency of a scanning device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
RISTIC, LUBISA: "Sensor Technology and devices", 1994, ARTECH HOUSE, Norwood, US, ISBN: 0890065322, XP002573402 *

Also Published As

Publication number Publication date
WO2009132719A2 (en) 2009-11-05
DE102008001465A1 (en) 2009-11-05

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