WO2009131674A3 - Bolometric sensor with high tcr and tunable low resistivity - Google Patents

Bolometric sensor with high tcr and tunable low resistivity Download PDF

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Publication number
WO2009131674A3
WO2009131674A3 PCT/US2009/002484 US2009002484W WO2009131674A3 WO 2009131674 A3 WO2009131674 A3 WO 2009131674A3 US 2009002484 W US2009002484 W US 2009002484W WO 2009131674 A3 WO2009131674 A3 WO 2009131674A3
Authority
WO
WIPO (PCT)
Prior art keywords
phase
operating
resistivity
tcr
nhbs
Prior art date
Application number
PCT/US2009/002484
Other languages
French (fr)
Other versions
WO2009131674A2 (en
Inventor
Michael A. Gurvitch
Aleksandr Y. Polyakov
Serge Luryi
Aleksandr Shabalov
Original Assignee
Research Foundation Of State University Of New York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Foundation Of State University Of New York filed Critical Research Foundation Of State University Of New York
Publication of WO2009131674A2 publication Critical patent/WO2009131674A2/en
Priority to US12/924,930 priority Critical patent/US8158941B2/en
Publication of WO2009131674A3 publication Critical patent/WO2009131674A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804—Shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Thermistors And Varistors (AREA)

Abstract

The present invention provides a novel way of operating sensing elements or bolometers in the resistive hysteresis region of a phase-transitioning VO2 (or doped VO2) films. The invention is based on a novel principle that minor hysteresis loops inside the major loop become single-valued or non-hysteretic for sufficiently small temperature excursions. This single valued R(T) branches being characterized by essentially the same temperature coefficient of resistivity (TCR) as the semiconducting phase at room temperature. These non-hysteretic branches (NHB) can be located close to the metallic-phase end of the major loop, thus providing for tunable resistivity orders of magnitude lower than that of a pure semiconducting phase. Operating the Focal Plan Array in one of these NHBs allows for having high TCR and low resistivity simultaneously. Means for measuring of the sensor R(T) characteristic is provided together with the means of achieving and controlling the correct sensor positioning at the operating temperature inside one of these NHBs.
PCT/US2009/002484 2008-04-21 2009-04-21 Bolometric sensor with high tcr and tunable low resistivity WO2009131674A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/924,930 US8158941B2 (en) 2009-04-21 2010-10-08 Bolometric sensor with high TCR and tunable low resistivity

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12508008P 2008-04-21 2008-04-21
US61/125,080 2008-04-21

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/924,930 Continuation US8158941B2 (en) 2009-04-21 2010-10-08 Bolometric sensor with high TCR and tunable low resistivity

Publications (2)

Publication Number Publication Date
WO2009131674A2 WO2009131674A2 (en) 2009-10-29
WO2009131674A3 true WO2009131674A3 (en) 2011-02-17

Family

ID=41217333

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/002484 WO2009131674A2 (en) 2008-04-21 2009-04-21 Bolometric sensor with high tcr and tunable low resistivity

Country Status (1)

Country Link
WO (1) WO2009131674A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8871363B2 (en) * 2009-09-03 2014-10-28 National Institute Of Advanced Industrial Science And Technology Resistor film for bolometer
FR3061549B1 (en) * 2016-12-30 2020-10-02 Commissariat Energie Atomique ELECTROMAGNETIC RADIATION DETECTOR AND ESPECIALLY INFRARED RADIATION DETECTOR AND PROCESS FOR ITS REALIZATION
US20240003751A1 (en) * 2022-07-01 2024-01-04 International Business Machines Corporation Adjustable transition edge thermometer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6346703B1 (en) * 1999-03-27 2002-02-12 Lg Electronics Inc. Resistive bolometer sensor
US20030168599A1 (en) * 2000-07-25 2003-09-11 Kevin Liddiard Active or self-biasing micro-bolometer infrared detector
US20070029484A1 (en) * 1999-10-07 2007-02-08 Infrared Solutions, Inc. Microbolometer focal plane array with temperature compensated bias
US20080237467A1 (en) * 2007-03-27 2008-10-02 Nec Corporation Bolometer-type thz-wave detector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6346703B1 (en) * 1999-03-27 2002-02-12 Lg Electronics Inc. Resistive bolometer sensor
US20070029484A1 (en) * 1999-10-07 2007-02-08 Infrared Solutions, Inc. Microbolometer focal plane array with temperature compensated bias
US20030168599A1 (en) * 2000-07-25 2003-09-11 Kevin Liddiard Active or self-biasing micro-bolometer infrared detector
US20080237467A1 (en) * 2007-03-27 2008-10-02 Nec Corporation Bolometer-type thz-wave detector

Also Published As

Publication number Publication date
WO2009131674A2 (en) 2009-10-29

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