WO2009131243A1

WO2009131243A1 - Stereoscopic microscope

Info

Publication number: WO2009131243A1
Application number: PCT/JP2009/058432
Authority: WO
Inventors: 大内由美子
Original assignee: 株式会社ニコン
Priority date: 2008-04-23
Filing date: 2009-04-22
Publication date: 2009-10-29

Abstract

A stereoscopic microscope (100) provided with a pair of right and left observation optical systems (I) and a pair of right and left illumination optical systems (S) is characterized in that the observation optical systems (I) have a variable magnification optical system (11) and an objective lens (7), the illumination optical systems (S) have an illumination light deflection member (5) arranged in an optical path of the observation optical systems and a variable magnification illumination lens group (3) that can make a magnification of a light source image formed at an entrance pupil of the variable magnification optical system changeable in accordance with a magnification of the variable magnification optical system, the illumination light deflection member (5) is arranged between the variable magnification optical system (11) and the objective lens (7), thereby providing a stereoscopic microscope that can irradiate suitable illumination light to a sample in accordance with a magnification operation of an observation optical system.

Description

Description Title of Invention

Stereomicroscope Technical Field

The present invention relates to a stereomicroscope. Background art

Conventionally, in stereo microscopes, coaxial epi-illumination has been proposed in order to obtain a clear observation image without shadows up to the deep part of the specimen (see, for example, Japanese Patent Laid-Open No. 10-1 4 9 37, FIG. 2). .

In conventional coaxial epi-illumination, the illumination light applied to the specimen is irradiated regardless of the variable magnification operation of the variable magnification optical system arranged in the observation optical system. There is a problem to say. Disclosure of the invention

In order to solve the above problems, the present invention has a pair of left and right observation optical systems and a pair of left and right illumination optical systems,

The pair of left and right observation optical systems has a plurality of variable magnification optical systems respectively disposed in the respective observation optical systems, and one objective lens.

The pair of left and right illumination optical systems are respectively disposed in the respective illumination optical systems, and a plurality of variable magnification illumination lenses that can be formed by changing the magnification of the light source image in accordance with the magnification of the variable magnification optical system. A group, and an illumination light deflection member disposed in the optical path of the pair of left and right observation optical systems,

The illumination light deflection member is disposed between the variable magnification optical system and the one objective lens. A stereomicroscope characterized by being provided is provided.

According to the present invention, it is possible to provide a stereomicroscope capable of irradiating a specimen with a suitable illumination light corresponding to a magnification operation of the observation optical system. Brief Description of Drawings

FIG. 1 is a schematic side view of a configuration including a partial cross section of a stereomicroscope according to an embodiment. FIGS. 28 and 2B show configuration examples of the illumination lens group of the stereomicroscope according to the embodiment. FIG. 2A shows a high magnification and FIG. 2B shows a low magnification.

FIG. 3 is a schematic side view of a configuration including a partial cross section of the stereomicroscope according to the first modification. FIG. 4 is a schematic side view of the configuration of the stereomicroscope according to the second modification including a partial cross section. Figures 5A and 5B show the entrance pupil diameter at each magnification of the variable magnification optical system. Figure 5A shows the high magnification and Figure 5B shows the low magnification. BEST MODE FOR CARRYING OUT THE INVENTION

A stereomicroscope according to an embodiment of the present invention will be described below with reference to the drawings. The following embodiments are merely for facilitating the understanding of the invention, and excluding additions / substitutions and the like that can be implemented by those skilled in the art without departing from the technical idea of the present invention. It is not intended.

FIG. 1 is a schematic side view of a configuration including a partial cross section of a stereomicroscope according to an embodiment. 2A and 2B show an example of a variable magnification illumination lens group in the illumination optical system of the stereomicroscope according to the embodiment, FIG. 2A shows a lens arrangement at high magnification, and FIG. 2B shows low magnification. Each lens arrangement is shown.

In FIG. 1, light from an external light source 1 is guided to a pair of left and right illumination optical systems SL and SR by an optical fiber 2 A. In such a configuration, the emission end 2 R of the optical fiber 2 A of the right illumination optical system SR becomes the right light source 2 R of the right illumination optical system SR. Similarly, the left end of the left illumination optical system SL is 2 L. Source 2 L. In addition, a semiconductor light emitting element such as an LED may be disposed on the right light source 2 R and the left light source 2 L to serve as a light source.

The light from the right light source 2R is incident on the right variable magnification illumination lens group 3R that forms a light source image at (or near) the entrance pupil position of the variable magnification optical system included in the observation optical system described later. The magnification is changed to a predetermined magnification by moving a zoom lens group, which will be described later, by the magnification mechanism 3 Ra, and enters the right diffuser plate 4 R.

Light diffused by the right diffusing plate 4 R is a half mirror 5 that is disposed at an angle of approximately 45 degrees with respect to the optical axis of the right observation optical system IR. Reflected in the direction.

The light reflected by the half mirror 5 illuminates the specimen 8 placed on the stand 9 via the objective lens 7 coaxially with the optical axis of the right observation optical system IR.

The light from the specimen 8 is collected by the objective lens 7, passes through the half mirror 5, and enters the right variable optical system 1 1 R of the right observation optical system IR.

The light incident on the right variable magnification optical system 1 1 R is subjected to a predetermined variable magnification action by the right variable magnification optical system 1 1 R, and is formed on an image plane (not shown) of the right observation optical system IR by an imaging lens (not shown). Form an image.

The light from the image plane is magnified by the eyepiece lens 14 (14 R) through the right eyepiece optical system 13 R that performs erecting of the image in the eyepiece tube 13 as a real image to the observer. Observed. Similarly, light from the left light source 2 L is incident on the left variable illumination lens group 3 L that forms a light source image at (or near) the entrance pupil position of the variable magnification optical system included in the left observation optical system IL. Then, the magnification is changed to a predetermined magnification by moving a zoom lens group, which will be described later, by the zoom mechanism 3 La, and enters the left diffuser 4 L.

The light diffused by the left diffusing plate 4 L is reflected in the direction of the objective lens 7 by the half mirror 5 disposed at an angle of approximately 45 degrees to the optical axis of the left observation optical system IL.

The light reflected by the half mirror 5 illuminates the specimen 8 placed on the stand 9 via the objective lens 7 coaxially with the left observation optical system IL. The light from the specimen 8 is collected by the objective lens 7, passes through the half mirror 5, and enters the left magnification optical system 11L of the left observation optical system IL.

The light incident on the left zoom optical system 11 L is subjected to a predetermined zoom action by the left zoom optical system 11 L, and an image is formed on an image plane (not shown) of the left observation optical system IL by an imaging lens (not shown). Form an image.

The light from the image plane is magnified by the eyepiece 14 (14L) through the left eyepiece optical system 13L for erecting the image in the eyepiece tube 13 and observed as a real image by the observer. As described above, the illumination device 6 includes the left and right illumination optical systems SL and SR, the left and right light sources 2L and 2R, the left and right variable magnification illumination lens groups 3 L and 3R, the left and right diffusion plates 4 L and 4R, and the half mirror 5. Has been configured. The illumination device 6 is configured to be detachable between the variable magnification optical systems 11 R and 11 L and the objective lens 7.

The right zoom optical system 1 1R and the left zoom optical system 1 1 L rotate the zoom dial 12 to zoom lens groups (eg, ll Ra, 11 Rb, ll L) along their optical axes. a, 1 1 L b) can be moved continuously by a cam mechanism (not shown) and continuously scaled.

Further, the focusing operation on the specimen 8 can be performed by rotating the focusing dial 10 and moving up and down the entire stereomicroscope main body 20.

As the half mirror 5, one half mirror can be used for the right illumination optical system S R and the left illumination optical system S L, or individual half mirrors can be used. In the above description, the case where one common half mirror 5 is inserted into the left and right observation optical systems I L and I R is described. In this way, the real microscope 100 according to the embodiment is configured.

Next, the left and right variable magnification illumination lens groups 3 L and 3 R of the left and right illumination optical systems SL and SR will be described with reference to FIGS. 2A and 2B. As described above, the left and right configurations are the same, and in the following description, L and R indicating the left are omitted from each reference except for a part.

Figure 2A shows the various lenses of the variable magnification illumination lens group 3 when the variable magnification optical system 11 is changed to a high magnification. The arrangement of the process group is shown.

When the variable magnification optical system 1 1 is high magnification, among the light beams converted into parallel light by the objective lens 7, a light beam with a larger diameter can pass through the variable magnification optical system 1 1, and the variable magnification optical system 1 1 When the magnification is low, only a narrow parallel beam enters the variable magnification optical system 11 as compared with the high magnification. In other words, the numerical aperture NA of the objective lens 7 changes depending on the magnification of the variable magnification optical system 11 (see FIGS. 5A and 5B).

In order to make the NA of the illumination light from the illumination optical system S and the observation light from the specimen 8 approximately the same, the diameter of the light beam emitted by the action of the variable magnification illumination lens group 3 in the illumination optical system S is The observation light must be equivalent to NA.

In the stereomicroscope 100 according to the embodiment, the variable magnification illumination lens group 3 has a three-group configuration, and the second lens group has a variable magnification mechanism (3 La, 3 Ra (see FIG. 1)) in the optical axis direction. By moving to, the beam diameter of the illumination light emitted from the variable magnification illumination lens group 3 can be changed.

The variable magnification illumination lens group 3 includes, in order from the diffuser 4 side toward the light source 2, a first lens group 3 1 having a positive refractive power, a second lens group 3 2 having a negative refractive power, and a third lens having a positive refractive power. It consists of a lens group 33.

When the variable magnification optical system 11 is changed to a high magnification, as shown in FIG. 2A, the second lens group 3 2 is moved by the moving mechanism (3 La, 3 Ra (see FIG. 1)). 1 Lens group 3 It is moved along the optical axis to the 1 side, and the illumination light beam emitted from the variable magnification illumination lens group 3 can be thickened to be equivalent to NA of the observation light.

On the other hand, when the variable magnification optical system 11 is changed to a low magnification, as shown in Fig. 2B, the second lens group 3 2 is moved (3 La, 3 Ra (see Fig. 1)). ) Is moved toward the third lens group 33 along the optical axis, and the illumination light beam emitted from the variable magnification illumination lens group 3 can be narrowed to be equivalent to NA of the observation light.

Thus, the combined focal length of the variable magnification illumination lens group 3 can be changed by moving the second lens group 32 of the variable magnification illumination lens group 3 along the optical axis. The movement of the variable magnification optical system 11 due to the variable magnification and the movement of the second lens group of the variable magnification illumination optical system 3 are configured to be linked by a mechanism (not shown). For example, the interlocking mechanism is a mechanical device such as a cam mechanism, or the position of the zoom lens group (11 La, 11 Lb, ll Ra, l lRb) of the variable magnification optical system 11 is detected by a sensor, etc. This can be achieved by a device that electrically controls the movement mechanism (3La, 3Ra) of the tunnel group 3.

Next, the relationship between the light source image and the entrance pupil diameter will be described with reference to FIGS. 2A and 2B, FIGS. 5A and 5B.

When the maximum magnification from the end face 2 of the Fino 2 A to the light source image is i3H and the diameter of the fiber 2A is φ f at the high magnification of Fig. 2A, it is formed on the exit side of the variable magnification illumination lens group 3. The diameter of the light source image φ iH is

φ i Η = ι3ΗΧ φ f

It becomes.

On the other hand, when the minimum magnification from the end face 2 of the fiber 2 A to the light source image is ^ L and the diameter of the fiber 2 A is φ f at the low magnification in Fig. 2B, the exit of the variable magnification illumination lens group 3 The diameter φ i L of the light source image formed on the side is

φ i L = i3 L X φ f

It becomes.

As shown in Figs. 5A and 5B, when the conditions of φ i H = EPH (incident pupil diameter at maximum magnification) and φ i L = EPL (incidence pupil diameter at minimum magnification) are satisfied, the light source image Provides sufficient illumination to cover the entrance pupil diameter. Here, FIGS. 5A and 5B show the entrance pupil diameter at each magnification of the variable magnification optical system, FIG. 5A shows the maximum magnification, and FIG. 5B shows the minimum magnification.

Therefore,

By satisfying the conditions, illumination light equivalent to NA can be obtained. On the other hand, if an attempt is made to achieve the same zoom ratio as the zoom optical system 1 1 of the observation optical system I, the number of lenses of the zoom illumination lens group 3 will increase, and the zoom lens group in the zoom illumination lens group 3 32 This increases the cost of the variable magnification illumination lens group 3, such as a longer travel distance. Therefore, as a simple variable magnification illumination lens group 3 that does not cost much, it is preferable that the illumination light beam has an entrance pupil diameter of about 1Z4, more preferably about 1Z2 at the maximum magnification.

In such a configuration, the illumination beam system Φ i H at the maximum magnification is

φ i H> 0.25 XEPH

Should be satisfied. At this time,

3H / 3L> 0.25 X (EPH / EPL)

Satisfied.

Also,

Φ i H> 0.5 XEPH

Is more preferable. At this time,

H βL> 0.5 X (EPH / EPL)

Satisfied.

From the above results, it is desirable to satisfy the following condition (1).

(1) 0. 25 <(/ 3HXEPL) / (/ 3LXEPH) ≤ 1.0

Note that the variable magnification illumination lens group 3 described above has one movable lens group 32 that controls the magnification change, so it is difficult to accurately maintain the position of the light source at the entrance pupil position of the variable magnification optical system 11. If the movable lens group 32 of the illumination lens group 3 is composed of two or more, when the light source image position is spatially immovable or the entrance pupil position of the variable magnification optical system 11 changes depending on the magnification, The light source image position can be set to a position suitable for the position. Table 1 below shows a numerical example of the illumination lens group 3.

In (surface data) in the table, i is the number of the surface from the object side, r is the radius of curvature, d is the surface spacing, nd is the refractive index at the d-line (wavelength λ-587. 6 nm), and d is d line The Abbe number at (wavelength λ = 587.6 nm), di represents the variable surface distance during zooming, and the image surface represents the image surface. Note that the refractive index of air nd = 1.00000 is omitted. In addition, “∞” in the radius of curvature r column indicates a plane.

t

In (variable interval data), d i represents the variable surface interval value for surface number i. (Conditional expression corresponding value) indicates the corresponding value of each conditional expression.

In all the following specifications, “mm” is generally used for the focal length f, radius of curvature r, surface spacing d and other lengths, etc. unless otherwise specified, but the optical system is proportional. Since the same optical performance can be obtained even if it is enlarged or proportionally reduced, it is not limited to this. Further, the unit is not limited to “mm”, and other appropriate units can be used.

(table 1)

(Surface data)

ί r d yd yd

1 oo 1.0 1. 51680 64.1

2 oo 5.0

3 50.000 5.0 1. 60311 60.6

4 -50.000 d4

5 -90.000 2.0 1. 67 163 38.8

6 45.000 d6

7 5.0 1. 51 680 64.1

8 20.0

(Variable gap data)

High magnification Low magnification

d4 = 1.0 100.0

d6 = 100.0 1.0 (Values for conditional expressions)

| 3 L = 1.2

EPH = 25 (at maximum magnification)

EPL = 3.0 (at minimum magnification)

(1) (] 3HXEPL) / (LXEPH) = 0.64

As described above, according to the stereomicroscope according to the embodiment, zooming of the observation optical system is performed by moving a part of the zoom lens group in conjunction with the zooming of the optical system. To provide a stereo microscope that can change the optical system and set the illumination light emitted from the illumination optical system to be equivalent to the NA of the imaging optical system, and obtain a good observation image from low to high magnification. Can do.

Further, in the case of the stereomicroscope 100 of the above numerical example, the entrance pupil position of the variable magnification optical system 11 is as follows when the magnification is high, medium, and low. Here, the light source side is positive (ten) and the objective lens side is negative (one) from a predetermined plane.

Magnification of variable magnification optical system 11 1 Distance from entrance pupil position of variable magnification optical system 11 to variable magnification illumination Surface from surface number 3 of lens group 3 High magnification 1 140

Medium double 1 120mm

Low time 1 32iM

Here, when all the variable magnification illumination lens groups 3 in the illumination optical system S are fixed, the position of the conjugate image of the entrance pupil of the variable magnification optical system 11 formed in the illumination optical system S (Position)

Magnification optical system 1 Magnification illumination 1 Magnification illumination lens group 3 surface number 8 1 1 1 magnification Lens group 3 surface to entrance pupil conjugate position High magnification d4 = l, d6 = 100 +20

Medium time d4 = l, d6 = 100 +25 讓 At low magnification, d4 = l, d6 = 100 + 140mm. If a light source image (light source) is placed at the entrance pupil conjugate position at low magnification, proper illumination is not possible at high magnification, and the light source is at the entrance pupil conjugate position at high magnification. When an image (light source) is placed, problems such as insufficient illumination occur at low magnification.

On the other hand, when the movable lens group 32 of the variable magnification illumination lens group 3 in the illumination optical system S is moved, the conjugate image position of the entrance pupil of the variable magnification optical system 11 formed in the illumination optical system S is as follows. Thus, even if the magnification of the variable magnification optical system 11 is changed, it can be formed at positions that are substantially close to each other (position change is small).

Magnification optical system 1 Magnification illumination 1 Magnification illumination lens group 3 Surface number 8 1 1 Magnification Distance from lens group 3 surface to entrance pupil conjugate position High magnification d4 = l, d6 = 100 + 20 麵

Medium time d4 = l, d6 = 100 + 25 賺

Low magnification d4 = 100, d6 = l +40 麵

As described above, according to the stereomicroscope according to the present embodiment, the magnification of the illumination optical system can be used to change the magnification of the light source image and to correct the entrance pupil conjugate position variation, which is always good. Lighting is possible.

Next, a modification of the stereomicroscope according to the embodiment will be described with reference to the drawings. In the following first and second modified examples, the configuration of the stereomicroscope main body is the same as that of the above-described embodiment, and the same components are denoted by the same reference numerals and description thereof is omitted. The left and right configurations are the same as those of the above-described embodiment, and in the following description, L and R indicating left and right are omitted from each reference except for a part.

(First variation)

FIG. 3 shows a first modification of the stereomicroscope according to the embodiment.

The stereomicroscope 200 according to the first modification enables observation with a simple polarized stereomicroscope.

In Fig. 3, diffuser plate 4 (4 L, 4 R) in the light path of lighting device 6 (6 L, 6 R) Polarizer P 1 (P 1 L, P 1R) is placed between the half mirror 5 and the variable magnification optical system 11 (11L, 11 R) in the optical path of the observation optical system I. The polarizing plate P 2 (P 2L, P2R) is arranged on the side. The polarizing plate P 1 and the polarizing plate P 2 are configured to be rotatable about the optical axis so that they can be set in a crossed Nicols state. Note that the polarizing plate P 1 and the polarizing plate P 2 may be configured to be detachable in the optical path. As a result, the polarizing plate P 1 and the polarizing plate P 2 can be shared with the above-described embodiment.

As described above, in the first modification, the two polarizing plates P 1 and P 2 can be arranged in the lighting device 6 so as to be crossed Nicols, so that it can be used as a simple polarization stereomicroscope.

Note that the variable magnification illumination lens group 3 is linked to the variable magnification optical system 11 in the same manner as in the above-described embodiment. In addition, other operations and effects are the same as those of the above-described embodiment, and redundant description is omitted.

(Second modification)

FIG. 4 shows a second modification of the stereomicroscope according to the embodiment.

The stereomicroscope 300 according to the second modification enables observation with an epifluorescence stereomicroscope.

In FIG. 4, the first wavelength selective filter is an excitation filter F 1 (F 1 L) between the diffuser 4 (4L, 4R) and the half mirror 5 in the optical path of the illumination device 6 (6L, 6R). , FIR), and a barrier filter F that is a second wavelength selection filter that selects the fluorescence wavelength between the half mirror 5 in the optical path of the observation optical system I and the variable magnification optical system 11 (11L, 11 R) 2 (F 2L, F 2 R) are arranged. The barrier filter evening F 2 may be an emission filter. Further, the excitation filter F 1 and the barrier filter F 2 may be configured to be removable in the optical path. This makes it possible to share the first modified example with the above-described embodiment.

Thus, in the second modification, the two wavelength selection filters F 1 and F 2 are arranged in the illumination device 6 and can be used as an epifluorescence stereomicroscope. The variable magnification illumination lens group 3 is linked to the variable magnification optical system 11 as in the above-described embodiment. In addition, other operations and effects are the same as those of the above-described embodiment, and redundant description is omitted.

In this way, in the stereomicroscope according to the embodiment, various zooming zooms using epi-illumination can be performed by appropriately replacing the illumination device between the objective lens and the zooming optical system. Can be achieved. Further, the diffusion plates 4 R and 4 L can be constituted by a single diffusion plate.

Claims

Claim scope 1. A pair of left and right observation optical systems and a pair of left and right illumination optical systems, wherein the pair of left and right observation optical systems are arranged in each of the observation optical systems. A plurality of variable magnification optical systems and one objective lens,

The pair of left and right illumination optical systems are respectively arranged in the illumination optical systems, and a plurality of variable magnification illumination lenses that can be formed by changing the magnification of the light source image according to the magnification of the variable magnification optical system. A group, and an illumination light deflection member disposed in the optical path of the pair of left and right observation optical systems,

The stereoscopic microscope characterized in that the illumination light deflection member is disposed between the variable magnification optical system and the one objective lens. 2. The entity according to claim 1, wherein the variable magnification illumination lens group can set the magnification of the light source image in at least two states according to the variable magnification of the variable magnification optical system. microscope. 3. The plurality of variable magnification illumination lens groups may be arranged such that the light source has a predetermined relationship with an entrance pupil position of the variable magnification optical system that changes in accordance with the variable magnification of the variable magnification optical system. The stereomicroscope according to claim 1 or 2, wherein an image is formed. [Claim 4] The stereomicroscope according to claim 3, wherein the predetermined relation is at least two positions. 5. The stereomicroscope according to claim 1, wherein the illumination optical system includes a light diffusion member between the illumination light deflection member and the variable magnification illumination lens group. 6. The entrance pupil diameter of the variable magnification optical system when the variable magnification optical system is at the maximum magnification is E PH,

The entrance pupil diameter when the variable magnification optical system is at the minimum magnification is E P L,

Β Η, the maximum magnification of the light source image formed by the illumination optical system,

When the minimum magnification of the light source image formed by the illumination optical system is] 3 L, 0.25 ((3HXEPL) / (; 3 LXEPH) ≤ 1.0

2. The stereomicroscope according to claim 1, wherein the following condition is satisfied. 7. The variable magnification illumination lens group includes a plurality of lens groups,

2. The stereomicroscope according to claim 1, wherein a magnification of the light source image is changed by moving at least one lens group of the plurality of lens groups along an optical axis. The variable power illumination lens group includes, in order from the light source side, a first lens group having a positive refractive power, a second lens group having a negative refractive power, and a third lens group having a positive refractive power,

2. The stereomicroscope according to claim 1, wherein when changing the magnification of the light source image, the second lens group is moved along the optical axis. 9. The illumination optical system has a first polarizing member between the illumination light deflection member and the variable magnification illumination lens group,

The observation optical system has a second polarizing member between the illumination light deflection member and the variable magnification optical system,

The stereomicroscope according to claim 1, wherein the first polarizing member and the second polarizing member can be set in a crossed Nicol state. 10. The illumination optical system includes the illumination light deflection member and the variable magnification illumination lens group. A first wavelength selection member between and

2. The stereomicroscope according to claim 1, wherein the observation optical system includes a second wavelength selection member between the illumination light deflection member and the variable power optical system.