WO2009115071A3 - Planar motor - Google Patents

Planar motor Download PDF

Info

Publication number
WO2009115071A3
WO2009115071A3 PCT/DE2009/000286 DE2009000286W WO2009115071A3 WO 2009115071 A3 WO2009115071 A3 WO 2009115071A3 DE 2009000286 W DE2009000286 W DE 2009000286W WO 2009115071 A3 WO2009115071 A3 WO 2009115071A3
Authority
WO
WIPO (PCT)
Prior art keywords
coil system
coil
windings
planar motor
encompassing
Prior art date
Application number
PCT/DE2009/000286
Other languages
German (de)
French (fr)
Other versions
WO2009115071A2 (en
Inventor
Berend Denkena
Peter Hesse
Original Assignee
Gottfried Wilhelm Leibniz Universität Hannover
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gottfried Wilhelm Leibniz Universität Hannover filed Critical Gottfried Wilhelm Leibniz Universität Hannover
Priority to EP09723262A priority Critical patent/EP2260569A2/en
Publication of WO2009115071A2 publication Critical patent/WO2009115071A2/en
Publication of WO2009115071A3 publication Critical patent/WO2009115071A3/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/28—Layout of windings or of connections between windings

Abstract

The invention relates to a planar motor having a planar secondary part (20) which comprises a plurality of permanent magnets (16, 18) that are disposed in fours and adjoin each other in pairs, and a primary part (14) which comprises an x-coil arrangement (30) encompassing at least one first x-coil system (32) that has three independently energizable first x-coil system windings (L132, L232 and L332) and a tooth winding, and a y-coil arrangement (40) encompassing at least one first y-coil system (42) that has three independently energizable first y-coil system windings (L142, L242 and L342), and a yoke (10) which comprises a common yoke element (46) for the first x-coil system (32) and the first y-coil system (42). The primary part (14) can be displaced in two dimensions relative to the secondary part (20) by successively energizing windings of the coil systems (32, 42).
PCT/DE2009/000286 2008-03-20 2009-03-03 Planar motor WO2009115071A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09723262A EP2260569A2 (en) 2008-03-20 2009-03-03 Planar motor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008015384.2 2008-03-20
DE102008015384A DE102008015384A1 (en) 2008-03-20 2008-03-20 Multicoordinate engine

Publications (2)

Publication Number Publication Date
WO2009115071A2 WO2009115071A2 (en) 2009-09-24
WO2009115071A3 true WO2009115071A3 (en) 2010-01-21

Family

ID=41010994

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2009/000286 WO2009115071A2 (en) 2008-03-20 2009-03-03 Planar motor

Country Status (3)

Country Link
EP (1) EP2260569A2 (en)
DE (1) DE102008015384A1 (en)
WO (1) WO2009115071A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012002141A1 (en) 2012-01-26 2013-08-01 Gottfried Wilhelm Leibniz Universität Hannover Surface motor for e.g. grinding machine, has primary part including respective electromagnets arranged relative to plane so that force is generated between electromagnets and plate, and sensors regulating primary part to desired position
DE102015216199A1 (en) 2015-08-25 2017-03-02 Physik Instrumente (Pi) Gmbh & Co. Kg Planar positioning device and positioning table
DE102015222482A1 (en) 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar positioning device and positioning table

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2945269A1 (en) * 1979-11-09 1981-05-21 Teldix Gmbh, 6900 Heidelberg Hardware item positioning unit - has permanent magnet layer positioned on drive part and uses stator with crossing windings
DE19530341A1 (en) * 1995-08-18 1997-02-20 Markus Vos Electrodynamic two=coordinate drive for generation of thrust in two directions e.g. for robotics engineering
DE19722814A1 (en) * 1997-05-30 1998-12-03 Dirk Dipl Ing Prust Multiple axis drive with variable rotor or stator poles
US6452292B1 (en) * 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US20060049699A1 (en) * 2004-08-20 2006-03-09 Tsinghua University Synchronous permanent magnet planar motor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956888A (en) 1982-09-22 1984-04-02 Tokyo Erekutoron Kk Two-dimension drive device
DE19531520A1 (en) * 1995-07-20 1997-01-23 Heisel Uwe Prof Dr Ing Dr H C Device for positioning and fixing bodies
US7336006B2 (en) * 2002-09-19 2008-02-26 Fuji Xerox Co., Ltd. Magnetic actuator with reduced magnetic flux leakage and haptic sense presenting device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2945269A1 (en) * 1979-11-09 1981-05-21 Teldix Gmbh, 6900 Heidelberg Hardware item positioning unit - has permanent magnet layer positioned on drive part and uses stator with crossing windings
DE19530341A1 (en) * 1995-08-18 1997-02-20 Markus Vos Electrodynamic two=coordinate drive for generation of thrust in two directions e.g. for robotics engineering
DE19722814A1 (en) * 1997-05-30 1998-12-03 Dirk Dipl Ing Prust Multiple axis drive with variable rotor or stator poles
US6452292B1 (en) * 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US20060049699A1 (en) * 2004-08-20 2006-03-09 Tsinghua University Synchronous permanent magnet planar motor

Also Published As

Publication number Publication date
WO2009115071A2 (en) 2009-09-24
EP2260569A2 (en) 2010-12-15
DE102008015384A1 (en) 2009-10-01

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