WO2009107922A1 - Miroir à système microélectromécanique et actionneur de balayage l'employant - Google Patents

Miroir à système microélectromécanique et actionneur de balayage l'employant Download PDF

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Publication number
WO2009107922A1
WO2009107922A1 PCT/KR2008/006798 KR2008006798W WO2009107922A1 WO 2009107922 A1 WO2009107922 A1 WO 2009107922A1 KR 2008006798 W KR2008006798 W KR 2008006798W WO 2009107922 A1 WO2009107922 A1 WO 2009107922A1
Authority
WO
WIPO (PCT)
Prior art keywords
blade
pair
hinge bars
permanent magnet
mems mirror
Prior art date
Application number
PCT/KR2008/006798
Other languages
English (en)
Inventor
Jin-Won Lee
Woo-Kyu Kim
Original Assignee
Samsung Electronics Co, . Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co, . Ltd. filed Critical Samsung Electronics Co, . Ltd.
Publication of WO2009107922A1 publication Critical patent/WO2009107922A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Definitions

  • the present invention relates to a micro electro-mechanical system (MEMS) mirror reflecting incident light, and to a scanning actuator which scans light by rotating the MEMS mirror.
  • MEMS micro electro-mechanical system
  • a beam scanning technology used to scan a beam radiated from a light source onto a predetermined area is applied to various devices such as laser printers, scanning displays, and the like.
  • FIG. 1 is a schematic view illustrating a conventional scanning apparatus using a polygon mirror.
  • light radiated from a light source 1 passing through an optical system 2 is incident on, and reflected by. a polygon mirror 3.
  • the polygon mirror 3 is installed on a spindle motor 4 so as to be rotated. As the polygon mirror 3 rotates in the direction A, the light reflected by the polygon mirror 3 is scanned along the direction B.
  • Such a scanning apparatus includes the polygon mirror 3 installed on the spindle motor 4 rotating at a high speed. However, it is difficult to increase the scanning speed of the scanning apparatus due to oscillation, noise, etc. of the spindle motor 4, and to reduce the size of the entire system.
  • Scanning apparatuses employing a micro electro-mechanical system (MEMS) structure can perform bidirectional scanning at high speed, and can also be microminiaturized using semiconductor fabrication processes.
  • MEMS structure can advantageously replace scanning apparatuses using a polygon mirror
  • various MEMS scanning apparatuses are being developed.
  • the design thereof allows a sufficient tolerance in placing the center of mass of the rotating structure at the center of rotation. It is also desirable that the design allows sufficient linearity in rotational response. Disclosure of Invention Technical Solution
  • a MEMS mirror may include: a blade configured to rotate about a rotational axis, the blade including a permanent magnet provided on a first blade surface of the blade and a light reflective surface formed on a second blade surface opposite the first blade surface , and a first pair of hinge bars supporting a first side of the blade, the first pair of hinge bars comprising a first hinge bar and a second hinge bar that are spaced apart from each other symmetrically with respect to the rotational axis.
  • the MEMS mirror may further includes: a second pair of hinge bars supporting a second side of the blade opposite the first side, the second pair of hinge bars comprising a third hinge bar and a fourth hinge bar that are spaced apart from each other symmetrically with respect to the rotational axis.
  • the MEMS mirror may further includes: a first anchor supporting the first pair of hinge bars, one end of each of the first pair of hinge bars supporting the first side of the blade, the first anchor supporting the other end of each of the first pair of hinge bars , and a second anchor supporting the second pair of hinge bars, one end of each of the second pair of hinge bars supporting the second side of the blade, the second anchor supporting the other end of each of the second pair of hinge bars.
  • each of the first, second, third and fourth hinge bars of the MEMS mirror may have a zigzag shape.
  • the MEMS mirror may further include a plurality of rigidity reinforcement ribs formed on the first blade surface of the blade.
  • the rigidity reinforcement ribs may include a first rib formed in a direction perpendicular to the rotational axis of the blade , a plurality of second ribs formed on the blade so as to form a vein pattern together with the first rib and a third rib surrounding the permanent magnet to fix the permanent magnet in place.
  • a scanning actuator may include : a blade configured to rotate about a rotational axis, the blade including a permanent magnet provided on a first blade surface of the blade and a light reflective surface formed on a second blade surface opposite the first blade surface , a first pair of hinge bars supporting a first side of the blade, the first pair of hinge bars comprising a first hinge bar and a second hinge bar that are spaced apart from each other symmetrically with respect to the rotational axis and an electromagnet portion comprising a yoke and a coil surrounding the yoke, the yoke comprising a first end portion and a second end portion facing the first end portion, an application of current to the coil causing the first end portion to become a magnetic pole of a first polarity and the second end portion to become a magnetic pole of a second polarity.
  • a scanning actuator may include : a blade comprising a permanent magnet attached to one side of the blade and a reflective surface formed on the other side of the blade , a first anchor and a second anchor which are formed to be spaced apart from both sides of the blade, respectively , a plurality of hinge bars supporting rotation of the blade and connecting the blade and the first and second anchors; and an electromagnet portion providing a torque to the permanent magnet and comprising a yoke and a coil surrounding the yoke, wherein shapes of portions of the yoke which face the permanent magnet correspond to a shape of the permanent magnet.
  • a method of assembling a MEMS mirror may includes: providing a frame defining an inner opening to which a first tab and a second tab of a MEMS mirror are attached, the MEMS mirror comprising a mirror movably supported on ends thereof by two anchors, each of the two anchors having a mounting hole formed thereon, the first tab and the second tab each being formed on an end of respective one of the two anchors , providing a jig comprising a mirror opening and a plurality of bosses , connecting the MEMS mirror to the jig by inserting one ore more of the plurality of bosses into the mounting hole of at least one of the two anchors and separating the first and second tabs from the inner opening of the frame to remove the frame from the MEMS mirror.
  • FIG. 1 is a schematic view illustrating a conventional scanning apparatus using a polygon mirror
  • FIG. 2 is a schematic perspective view illustrating a scanning actuator according to an embodiment of the present invention
  • FIGS. 3 A and 3B are respectively a front perspective view and a rear perspective view illustrating a MEMS mirror employed in the scanning actuator of FIG. 2, according to an embodiment of the present invention
  • FIGS. 4A and 4B are cross-sectional views, taken along a line IV - IV of FIG. 2, for describing a driving principle of the scanning actuator of FIG. 2, according to an embodiment of the present invention
  • FIGS. 5 A and 5B are conceptual diagrams for describing influences on driving characteristics when the center of mass and the center of rotation do not correspond with each other, by respectively exemplifying a case where one hinge is formed on a rotation axis and a case where two hinges are symmetrically spaced apart from each other with respect to a rotation axis;
  • FIGS. 6 and 7 are graphs illustrating torque characteristics of a scanning actuator with respect to a scanning actuator according to an embodiment of the present invention and a comparative example, respectively;
  • FIG. 8 is a diagram illustrating shapes of yokes according to an embodiment of the present invention and a comparative example, respectively.
  • FIGS. 9 A through 9D are perspective views illustrating a method of assembling a
  • FIG. 2 is a schematic perspective view illustrating a scanning actuator 300 according to an embodiment of the present invention.
  • FIGS. 3 A and 3B are respectively a front perspective view and a rear perspective view illustrating a MEMS mirror 200 employed in the scanning actuator of FIG. 2, according to an embodiment of the present invention.
  • the scanning actuator 300 includes the MEMS mirror 200 serving as a rotor and an electromagnet portion 100 serving as a stator.
  • the MEMS mirror 200 includes a permanent magnet 240 disposed in a magnetic field formed by the electromagnet portion 100.
  • the MEMS mirror 200 includes a blade 230, a plurality of hinge bars 221, 222, 223, and 224, a first anchor 211, and a second anchor 212.
  • the permanent magnet 240 is disposed to one side of the blade 230, and a reflective surface 230a capable of reflecting light is formed on the other side of the blade 230.
  • the first and second anchors 211 and 212 are formed on either side of the blade 230 to be spaced apart from each other.
  • the hinge bars 221, 222, 223, and 224 which support rotation of the blade 230, are disposed between the first and second anchors 221 and 222 and the blade 230.
  • a pair of hinge bars 221 and 222 symmetrically formed with respect to a rotation axis R connect one side of the blade 230 with the first anchor 211
  • a pair of hinge bars 223 and 224 symmetrically formed with respect to the rotation axis R connect the other side of the blade 230 with the second anchor 212.
  • the hinge bars 221 and 222 and the hinge bars 223 and 224 allow the blade 230 to rotate by forces acting in opposite directions with respect to each other.
  • the hinge bars 221, 222, 223, and 224 may each have a zigzag shape to reduce stress generated during the rotation of the blade 230 by allowing the stress to be distributed effectively within the limited space.
  • the first and second anchors 211 and 212 may respectively include first and second holes 213 and 214 facilitating assembly of the MEMS mirror 200 onto other structures.
  • First and second tabs 215 and 216 may be respectively formed in each of end portions of the first and second anchors 211 and 212 to facilitate handling and/or assembly of the MEMS mirror 200 as will be described later.
  • a plurality of rigidity reinforcement ribs for reinforcing the rigidity of the blade 230 may be formed on the surface of the blade 230 to which the permanent magnet 240 is provided.
  • the rigidity reinforcement ribs are formed in order to ensure high frequency characteristics by decreasing rotational inertia moment and increasing rigidity of the blade 230.
  • a first rib 231 may be formed on the blade 230 to extend in a direction perpendicular to the rotation axis R of the blade 230.
  • the first rib 231 prevents the blade 230 from bending in the direction of rotation during the rotation of the blade 230.
  • a plurality of second ribs 232 may be formed on the blade 230 so as to form a vein pattern together with the first rib 231.
  • the second ribs 232 function to reinforce rigidity of the blade 230 in a direction perpendicular to the rotation direction of the blade 230.
  • a third rib 233 may be formed so as to surround the permanent magnet 240 in order to fix the permanent magnet 240 in place.
  • the resonance mode of the blade 230 may be allowed to increase to, e.g., about several hundreds kHz, as compared to the relatively lower resonance mode, e.g., of about several kHz, of the hinge bars 221, 222, 223, and 224. Therefore, the resonance mode of the hinge bars 221, 222, 223, and 224 and the resonance mode of the blade 230 can be sufficiently apart from each other, reducing the possible coupling that can occur during a scanning operation.
  • the electromagnet portion 100 may include a yoke 120 and a coil portion 150 surrounding the yoke 120.
  • the yoke 120 forms a magnetic path of a magnetic field generated by the current.
  • the yoke 120 may be formed of magnetic materials. Both end portions of the yoke 120 are spaced a predetermined distance from each other and face each other.
  • First and second end portions 120a and 120b of the yoke 120 facing the permanent magnet 240 are formed in shapes corresponding to the shape of the permanent magnet 240.
  • the permanent magnet 240 may have a cylindrical shape, and the first and second end portions 120a and 120b may also have cylindrical surface shapes of the same axis as the permanent magnet 240.
  • FIGS. 4A and 4B are cross-sectional views, taken along a line IV - IV of FIG. 2, and which will be referenced to describe an operation of the scanning actuator 300 of FIG. 2 according to an embodiment of the present invention.
  • the first and second end portions 120a and 120b of the yoke 120 have respectively S and N polarities as illustrated in FIG. 4A or have respectively N and S polarities as illustrated in FIG. 4B, according to the direction of the current. That is, when current is applied to the coil portion 150, a magnetic field is formed between the first end portion 120a and the second end portion 120b of the yoke 120 in the direction from the N pole to the S pole.
  • a magnetic moment formed in the magnetic field receives a torque which acts on the magnetic moment to be aligned along the direction of the magnetic field.
  • the lower surface of the permanent magnet 240 constitutes the N pole, and accordingly, the blade 230 is rotated in the direction indicated by the arrow.
  • the first and second end portions 120a and 120b facing the permanent magnet 240 have shapes that correspond to that of the permanent magnet 240, which may allow a distribution of the magnetic field that results in an increase in the torque generated and a reduction of the variation in the torque.
  • the distribution of the magnetic field is influenced by a property of matter and shape of the yoke 120 and by a distribution of magnetic flux generated from the permanent magnet 240. Also, the magnetic flux generated from the permanent magnet 240 varies according to the displacement of the permanent magnet 240.
  • the above described configuration allows a reduced variation of the distribution of the magnetic field formed between the first end portion 120a and the second end portion 120b of the yoke 120, which may result from a variation of the distribution of the magnetic flux according to the displacement of the permanent magnet 240 when it rotates.
  • the above described configuration may also increase linearity and thrust as will be further described later with reference to graphs of FIGS. 6 and 7.
  • the hinge bars 221, 222, 223, and 224 are fixed to the first and second anchors 211 and 212 so as to support the rotation of the blade 230.
  • the hinge bars 221 and 222 which are spaced apart by a predetermined distance from each other symmetrically with respect to the rotation axis R, connect one side of the blade 230 and the first anchor 211
  • the hinge bars 223 and 224 which are also spaced apart by a predetermined distance from each other symmetrically with respect to the rotation axis R, connect the other side of the blade 230 and the second anchor 212.
  • This configuration may reduce a deterioration in the rotational characteristics that may result due to discordance between the center of mass and the center of rotation of the blade 230 during the rotation of the blade 230.
  • FIGS. 5A and 5B are conceptual views for describing influences on driving characteristics when the center of mass and the center of rotation do not correspond with each other, by comparing examples of a case where one hinge is formed on a rotation axis and a case where two hinges are symmetrically spaced apart from each other with respect to the rotation axis.
  • FIG. 5B also illustrates a case where misalignment distance e exists between the center of rotation G of a blade 230 and the center of mass M of a permanent magnet 240 formed above the blade 230.
  • hinge bars 221 and 222 are disposed symmetrically with respect to a rotation axis, and are spaced apart by a distance r from each other. Accordingly, when the misalignment distance e is within the distance r, T is 0, that is, an internal torque is not generated.
  • the misalignment may be caused due to the mismatching between the center of mass
  • FIGS. 6 and 7 are graphs illustrating torque characteristics of a scanning actuator with respect to a scanning actuator according to an embodiment of the present invention, and of a comparative example.
  • FIG. 8 is a diagram illustrating shapes of yokes according to an embodiment of the present invention, and a comparative example, the shape of the yoke of which being illustrated by the dotted lines.
  • the horizontal axis of the graph represents the current [A] applied to the coil portion 150 of the actuator 300 of FIG. 2, and the vertical axis represents the torque generated per unit current [Nm/A].
  • survey points ⁇ and ⁇ are fitted on straight lines.
  • the correlation between the survey points ⁇ and the straight line of the embodiment of the present invention is greater than that of the survey points ⁇ and the straight line of the comparative example, that is, linearity of the embodiment of the present invention is better than that of the comparative example.
  • the generated torque of the embodiment of the present invention is greater than that of the comparative example.
  • FIG. 7 is a graph illustrating a generated torque [Nm/A] with respect to time, from which can be seen that the torque characteristics of the embodiment are superior over that of the comparative example.
  • FIGS. 9 A through 9D are perspective views illustrating an example assembly of a
  • the method of assembling the MEMS mirror 200 is provided to safely handle a microminiaturized MEMS mirror and to attach the microminiaturized MEMS mirror to a desired position without damaging the microminiaturized MEMS mirror.
  • the MEMS mirror 200' further includes a frame 250 compared to the MEMS mirror 200 of FIG. 2A, and first and second tabs 215 and 216, which are formed in each end portion of first and second anchors 211 and 212, are respectively connected to inner surfaces of the frame 250.
  • Such structure is employed to provide convenient handling during assembly or transport of the MEMS mirror 200.
  • a jig 260 includes a hole 262 and first and second bosses 263 and 264.
  • the first boss 263 is inserted into a first hole 213 of the first anchor 211, and the second boss 264 is inserted into a second hole 214 of the second anchor 212, and thus, the MEMS mirror 200' is installed in the jig 260.
  • first and second tabs 215 and 216 are detached from the inner surface of the frame 250, and thus, the frame 250 is separated from the jig 260.
  • the MEMS mirror 200 can be assembled to a desired position according to the above processes.
  • the shape of the jig 260 described above is only an example, and the jig 260 may include a structure to which a drive source for driving the MEMS mirror 200, for example, the electromagnet portion 100 of FIG. 2, can be mounted.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention porte sur un miroir à système microélectromécanique (MEMS) et sur un actionneur de balayage employant le miroir à MEMS. Le miroir à MEMS comprend : une lame comprenant un aimant permanent et une surface réfléchissant ; au moins deux barres d'articulation supportant de façon mobile un côté de la lame. Les barres d'articulation sont conçues pour être symétrique autour de l'axe de rotation de la lame.
PCT/KR2008/006798 2008-02-25 2008-11-19 Miroir à système microélectromécanique et actionneur de balayage l'employant WO2009107922A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0016975 2008-02-25
KR1020080016975A KR20090091610A (ko) 2008-02-25 2008-02-25 멤스 미러 및 이를 채용한 스캐닝 액츄에이터

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WO2009107922A1 true WO2009107922A1 (fr) 2009-09-03

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015014753A (ja) * 2013-07-08 2015-01-22 パイオニア株式会社 アクチュエータ
WO2015109273A3 (fr) * 2014-01-19 2015-09-24 Apple Inc. Schémas de couplage pour réseaux de miroirs de balayage à cardan
EP2817586A4 (fr) * 2012-02-15 2016-02-17 Apple Inc Dispositif de balayage tridimensionnel
US9435638B2 (en) 2012-03-22 2016-09-06 Apple Inc. Gimbaled scanning mirror array
JP2016170376A (ja) * 2015-03-16 2016-09-23 スタンレー電気株式会社 光偏向器
US9525863B2 (en) 2015-04-29 2016-12-20 Apple Inc. Time-of-flight depth mapping with flexible scan pattern
US9677878B2 (en) 2010-08-11 2017-06-13 Apple Inc. Scanning projectors and image capture modules for 3D mapping
US9715107B2 (en) 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US10639066B2 (en) 2014-10-14 2020-05-05 Us Patent Innovations, Llc System for controlling displacement of an intervention device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6757092B2 (en) * 2001-12-10 2004-06-29 Nayef M. Abu-Ageel Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6757092B2 (en) * 2001-12-10 2004-06-29 Nayef M. Abu-Ageel Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9677878B2 (en) 2010-08-11 2017-06-13 Apple Inc. Scanning projectors and image capture modules for 3D mapping
US9651417B2 (en) 2012-02-15 2017-05-16 Apple Inc. Scanning depth engine
EP2817586A4 (fr) * 2012-02-15 2016-02-17 Apple Inc Dispositif de balayage tridimensionnel
US9435638B2 (en) 2012-03-22 2016-09-06 Apple Inc. Gimbaled scanning mirror array
US9715107B2 (en) 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
JP2015014753A (ja) * 2013-07-08 2015-01-22 パイオニア株式会社 アクチュエータ
WO2015109273A3 (fr) * 2014-01-19 2015-09-24 Apple Inc. Schémas de couplage pour réseaux de miroirs de balayage à cardan
CN106415361B (zh) * 2014-01-19 2018-11-13 苹果公司 用于装有万向接头的扫描镜阵列的耦接方案
US10639066B2 (en) 2014-10-14 2020-05-05 Us Patent Innovations, Llc System for controlling displacement of an intervention device
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
JP2016170376A (ja) * 2015-03-16 2016-09-23 スタンレー電気株式会社 光偏向器
US9525863B2 (en) 2015-04-29 2016-12-20 Apple Inc. Time-of-flight depth mapping with flexible scan pattern

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