WO2009102144A3 - 연삭휠용 유리 조성물, 이를 이용한 연삭휠 및 그 제조방법 - Google Patents

연삭휠용 유리 조성물, 이를 이용한 연삭휠 및 그 제조방법 Download PDF

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Publication number
WO2009102144A3
WO2009102144A3 PCT/KR2009/000637 KR2009000637W WO2009102144A3 WO 2009102144 A3 WO2009102144 A3 WO 2009102144A3 KR 2009000637 W KR2009000637 W KR 2009000637W WO 2009102144 A3 WO2009102144 A3 WO 2009102144A3
Authority
WO
WIPO (PCT)
Prior art keywords
polishing wheel
same
manufacturing
glass composition
polishing
Prior art date
Application number
PCT/KR2009/000637
Other languages
English (en)
French (fr)
Other versions
WO2009102144A2 (ko
Inventor
이재희
손승국
Original Assignee
이화다이아몬드공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이화다이아몬드공업 주식회사 filed Critical 이화다이아몬드공업 주식회사
Publication of WO2009102144A2 publication Critical patent/WO2009102144A2/ko
Publication of WO2009102144A3 publication Critical patent/WO2009102144A3/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C11/00—Multi-cellular glass ; Porous or hollow glass or glass particles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Glass Compositions (AREA)

Abstract

본 발명은 반도체 웨이퍼 등을 연삭하는 연삭휠을 제조하는데 사용되는 연삭휠용 유리 조성물 및 이를 이용하여 제조된 연삭휠 및 그 제조방법에 관한 것으로서, 발포유리 제법을 이용하 초사상연마에서도 충분한 연삭성, 충분한 연삭휠의 수명, 그리고 긁힌 자국(Scratch)를 발생시키지 않는 연삭휠을 제조할 수 있는 연삭휠용 유리 조성물 및 이를 이용하여 제조된 연삭휠 및 그 제조방법을 제공하고자 하는데, 그 목적이 있다. 본 발명은 무게 %로, SiO2: 55∼70%, B2O3: 10∼25%, Al2O3: 5∼15%, Na2O: 1∼5%, Li2O: 0.5∼2.5%, CaO: 1∼5%, MgO: 0~3%, 및 TiO2:0~5%를 포함하는 연삭휠용 유리 조성물 및 이를 이용하여 제조된 연삭휠 및 그 제조방법을 그 요지로 한다. 본 발명에 의하면, 초사상연마에서도 충분한 연삭성, 충분한 연삭휠의 수명, 그리고 긁힌 자국(Scratch)를 발생시키지 않는 연삭휠을 제조할 수 있는 연삭휠용 유리 조성물 및 이를 이용하여 제조된 연삭휠 및 그 제조방법을 제공할 수 있다.
PCT/KR2009/000637 2008-02-12 2009-02-11 연삭휠용 유리 조성물, 이를 이용한 연삭휠 및 그 제조방법 WO2009102144A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0012519 2008-02-12
KR1020080012519A KR100948580B1 (ko) 2008-02-12 2008-02-12 연삭휠용 유리 조성물, 이를 이용한 연삭휠 및 그 제조방법

Publications (2)

Publication Number Publication Date
WO2009102144A2 WO2009102144A2 (ko) 2009-08-20
WO2009102144A3 true WO2009102144A3 (ko) 2009-11-05

Family

ID=40957374

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/000637 WO2009102144A2 (ko) 2008-02-12 2009-02-11 연삭휠용 유리 조성물, 이를 이용한 연삭휠 및 그 제조방법

Country Status (2)

Country Link
KR (1) KR100948580B1 (ko)
WO (1) WO2009102144A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101780336B1 (ko) * 2015-06-04 2017-09-20 주식회사 인세라 발포유리-다이아몬드 복합체의 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06211542A (ja) * 1993-01-14 1994-08-02 Iwaki Glass Kk 砥粒固定用結晶化ガラス及びそれを使用した研削砥石
KR20000010725A (ko) * 1998-11-02 2000-02-25 스프레이그 로버트 월터 다공성 연마 용품의 제조 방법
JP2003062755A (ja) * 2001-08-22 2003-03-05 Noritake Co Ltd ビトリファイド砥石の製造方法、ビトリファイド砥石用ガラス質結合剤原料液及びその製造方法
WO2005072912A1 (ja) * 2004-01-28 2005-08-11 Kure-Norton Co., Ltd. ビトリファイドダイヤモンド砥石の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06211542A (ja) * 1993-01-14 1994-08-02 Iwaki Glass Kk 砥粒固定用結晶化ガラス及びそれを使用した研削砥石
KR20000010725A (ko) * 1998-11-02 2000-02-25 스프레이그 로버트 월터 다공성 연마 용품의 제조 방법
JP2003062755A (ja) * 2001-08-22 2003-03-05 Noritake Co Ltd ビトリファイド砥石の製造方法、ビトリファイド砥石用ガラス質結合剤原料液及びその製造方法
WO2005072912A1 (ja) * 2004-01-28 2005-08-11 Kure-Norton Co., Ltd. ビトリファイドダイヤモンド砥石の製造方法

Also Published As

Publication number Publication date
WO2009102144A2 (ko) 2009-08-20
KR100948580B1 (ko) 2010-03-18
KR20090087214A (ko) 2009-08-17

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