WO2009093291A1 - Piezoelectric vibration plate - Google Patents

Piezoelectric vibration plate Download PDF

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Publication number
WO2009093291A1
WO2009093291A1 PCT/JP2008/003502 JP2008003502W WO2009093291A1 WO 2009093291 A1 WO2009093291 A1 WO 2009093291A1 JP 2008003502 W JP2008003502 W JP 2008003502W WO 2009093291 A1 WO2009093291 A1 WO 2009093291A1
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WO
WIPO (PCT)
Prior art keywords
vibration
piezoelectric diaphragm
shape
piezoelectric
pedestal
Prior art date
Application number
PCT/JP2008/003502
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French (fr)
Japanese (ja)
Inventor
Fujihiko Kobayashi
Original Assignee
Fujihiko Kobayashi
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Application filed by Fujihiko Kobayashi filed Critical Fujihiko Kobayashi
Publication of WO2009093291A1 publication Critical patent/WO2009093291A1/en

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Definitions

  • the present invention relates to a piezoelectric diaphragm that is used as a diaphragm for a piezoelectric speaker or the like by vibrating when an electric signal is applied to a piezoelectric body that is closely fixed to a pedestal.
  • a piezoelectric diaphragm of a piezoelectric speaker for example, the one disclosed in Patent Document 1 is known.
  • This piezoelectric diaphragm has a plurality of vibrating parts that are divided into arbitrary shapes and have different elastic moduli, and each vibrating part is integrally coupled to a pedestal formed in a circular shape, an elliptical shape, an octagonal shape, or the like.
  • a piezoelectric body formed in substantially the same shape as the pedestal portion is closely fixed to the surface of the pedestal portion.
  • the present invention has been made in view of such circumstances, and an object of the present invention is to provide a piezoelectric diaphragm capable of reducing the suppression interference generated at the coupling portion between the pedestal portion and the vibration portion and obtaining a beautiful reproduced sound. There is.
  • the invention described in claim 1 of the present invention includes a pedestal portion to which a piezoelectric body is closely fixed and fixed to a surface, and a vibration portion integrally coupled to the pedestal portion.
  • the piezoelectric diaphragm is characterized in that suppression interference preventing means for preventing suppression interference of the vibration part is provided at a coupling portion between the base part and the vibration part.
  • the suppression interference preventing means is formed in a recess formed by cutting the vibration portion side surface of the coupling portion in the thickness direction, and in a groove shape on the vibration portion surface of the coupling portion.
  • the concave portion provided is a concave portion provided by forming the vibration portion side surface of the coupling portion in a plan view curve.
  • the concave portion has its shape and position as in the invention of claim 3. Is set according to the elastic modulus of the vibration part, or the shape thereof is preferably formed in a straight line, a curved line, or a combination thereof as in the invention described in claim 4.
  • the vibration portion is formed in a uniform, stepped or tapered shape as in the invention described in claim 5, or the pedestal portion as in the invention described in claim 6. It is preferable that one or a plurality of bonds are bonded.
  • the pedestal portion is preferably formed in a circular shape, an elliptical shape, a triangular shape, a square shape, or a polygonal shape in plan view.
  • the side view shape of the side surface is formed into a linear shape extending outward from a predetermined position of the outer peripheral line of the pedestal portion, a curved shape including a parabola, or a combination thereof. It is preferable.
  • the invention according to claim 9 is divided radially by a pedestal portion having a piezoelectric body closely fixed to the surface, and a dividing line integrally coupled to the pedestal portion and extending from the pedestal portion toward the outer periphery.
  • the suppression interference preventing means is a groove formed in at least one of the front surface and the back surface of the coupling portion of the pedestal portion and the vibration portion as in the invention described in claim 10.
  • the dividing line is formed by any one of a straight line, a curved line bulging outward or inward, a parabola, or a combination thereof.
  • the outer peripheral shape of the vibrating part is formed by either a curve, a straight line, or a combination thereof, or as in the invention described in claim 13, It is preferable to have steps with different thicknesses.
  • the plurality of vibrating portions may be formed such that all or a part of the dividing edge serving as the tip of the dividing line has a circular shape, an elliptical shape, a parabolic shape, or the like in plan view. It is preferably formed in a curved shape.
  • the vibration portion is suppressed at the coupling portion between the pedestal portion to which the piezoelectric body is closely fixed to the surface and the vibration portion integrally coupled to the pedestal portion. Since the suppression interference prevention means for preventing the interference is provided, the suppression interference prevention means can reduce the suppression interference generated at the coupling portion of the base part and the vibration part, and a piezoelectric diaphragm having a beautiful reproduced sound can be obtained. be able to.
  • the suppression interference preventing means is formed by a concave portion provided on the side surface or the vibration portion of the coupling portion.
  • the suppression interference preventing means can be easily formed at the coupling portion, and the cost increase of the piezoelectric diaphragm can be suppressed.
  • the invention described in claim 3 in addition to the effect of the invention described in claim 2, since the shape and position of the recess are set according to the elastic modulus of the vibration part, the form of the vibration part, etc. Due to the concave portions corresponding to the above, suppression interference of the vibration portion can be effectively reduced.
  • the thickness of the vibrating part is formed in a uniform, stepped or tapered shape. It can be applied to a piezoelectric diaphragm having a saddle-shaped vibrating section, and can be used for various piezoelectric speakers, thereby improving versatility.
  • the vibration part is connected to the pedestal part by one or more, various numbers of vibration parts are provided.
  • the present invention can be applied to the piezoelectric diaphragm having it, and the versatility can be further improved.
  • the planar view shape of the pedestal is formed in a circle, an ellipse, a triangle, a square, or a polygon. Therefore, it can be applied to a piezoelectric diaphragm having pedestals of various shapes, and the versatility can be further improved.
  • the side surface shape of the vibration part is a straight line or a parabola extending outward from a predetermined position of the outer peripheral line of the pedestal part. Therefore, it can be applied to piezoelectric diaphragms having vibrating portions having various side-surface shapes, and the versatility can be further improved.
  • suppression interference prevention means in the thickness direction is provided at the coupling portion between the pedestal part and the vibration part, and a dividing line is formed from the suppression interference prevention means. Since it is radially extended, the suppression interference prevention means can reduce the suppression interference generated at the joint portion of the base portion and the vibration portion, and the vibration of the suppression interference is reduced. Can be smoothly propagated along the dividing line to the outer peripheral side of the vibrating portion, and a piezoelectric diaphragm having a beautiful reproduced sound can be obtained.
  • the suppression interference preventing means is a groove formed on at least one of the front surface or the back surface of the coupling portion of the base portion and the vibration portion. Therefore, by setting the height and width of the groove according to the form of the vibration part, etc., it is possible to reliably suppress the suppression interference and to easily form the suppression interference prevention means at the coupling portion. The cost increase of the piezoelectric diaphragm can be suppressed.
  • the dividing line for dividing the plurality of vibrating parts is a straight line, a curve bulging outward or inward, and a parabola. Since it is formed by either or a combination thereof, the vibration of the pedestal portion can be more smoothly propagated to the outer peripheral side of each vibration portion.
  • the outer peripheral shape of the vibration part is formed of either a curve or a straight line, or a combination thereof. Therefore, it is possible to obtain piezoelectric diaphragms having various outer shapes, and improve versatility such as being usable for various piezoelectric speakers.
  • the vibration part has a step having a different thickness, and therefore the vibration state of the vibration part is changed by the step. The versatility can be further improved, such as being usable for various types of piezoelectric speakers.
  • FIG. 16 show first to sixth embodiments of a piezoelectric diaphragm according to the present invention.
  • 1 to 3 show the first embodiment, in which FIG. 1 is a plan view, FIG. 2 is a plan view taken along the line AA in FIG. 1, and FIG. 3 is a plan view showing a modification thereof.
  • the piezoelectric diaphragm 1 includes a pedestal portion 1 a having a substantially rectangular shape (square shape) in a plan view, and a substantially rectangular shape in a plan view integrally coupled to the pedestal portion 1 a by a coupling line K. It has the shape-like vibration part 1b.
  • the pedestal portion 1a is formed to be thicker than the vibration portion 1b by a predetermined size, and the back surfaces of the pedestal portion 1a and the vibration portion 1b are flush with each other, for example, by integral molding.
  • the recessed part 3 as a suppression interference prevention means is provided in the coupling line K part of the vibration part 1b toward the inner side from the side surface of the vibration part 1b.
  • the concave portion 3 is formed by notching the end side surface of the vibrating portion 1b on the side of the pedestal portion 1a into a square shape having a width w1 and a depth (depth) h1, and having a width w1 and a depth.
  • h1 is appropriately set according to the material (elastic modulus), size, shape, and the like of the piezoelectric diaphragm 1.
  • the pedestal portion 1a and the vibration portion 1b are formed of a material capable of propagating acoustic vibration, such as iron, copper, brass, stainless steel (SUS material), titanium, carbon graphite, and polyamide resin.
  • the piezoelectric diaphragm 1 when an electric signal is applied to the piezoelectric body 4 (see FIG. 2) that is tightly fixed to the surface of the pedestal portion 1a, the piezoelectric body 4 is distorted, and this distortion is caused by the pedestal portion. It is propagated to the vibration part 1b through 1a and converted into acoustic vibration by the vibration part 1b. At this time, since the notch-shaped recess 3 is provided in the connecting line K portion of the base 1a and the vibration portion 1b, the hatched region in FIG. 1 corresponding to the depth h1 of the recess 3 is free vibration. Region R is formed.
  • the suppression interference in the coupling line K portion which is likely to occur particularly when a large electrical signal is applied to the piezoelectric body 4, does not reach the free vibration region R, and the suppression interference in the coupling line K portion is prevented.
  • FIG. 3 shows a modification of the piezoelectric diaphragm 1.
  • the piezoelectric diaphragm 1 shown in FIG. 3A is provided with the concave part 3 on one side surface of the vibration part 1b in the piezoelectric diaphragm 1 at a position that is separated from the coupling line K by a predetermined supply.
  • the piezoelectric diaphragm 1 shown in 3 (b) is formed by combining the linear portion 5 and the curved portion 6 on the side surface of the vibrating portion 1b, and having different planar views on both side surfaces. Further, the piezoelectric diaphragm 1 shown in FIG.
  • the piezoelectric diaphragm 1 shown in FIG. 3 (d) is formed so that the width of the oscillating portion 1b on the pedestal portion 1a side is narrowed and the outer peripheral side is widened, and both side surfaces extend radially in plan view.
  • the vibration part 1b having a recess 3 deeper than the recess 3 on the side opposite to the side to which the vibration part 1b of the pedestal part 1a is coupled is different from the width w1 of the recess 3 formed on the surface (that is, a total of 2 Two vibrating parts 1b) are provided. Further, in the piezoelectric diaphragm 1 shown in FIG.
  • the shape of both side surfaces of one vibrating portion 1b is made different, and the concave portion 3 of each vibrating portion 1b. The same position and shape are formed on both sides.
  • one or two vibrating portions 1b having an appropriate side surface shape and the shape and position of the concave portion 3 are coupled to the pedestal portion 1a having a substantially rectangular shape in plan view. Can do.
  • the piezoelectric diaphragm 11 of this embodiment is characterized in that, for example, four divided vibration parts 11b to 11e are coupled around a circular pedestal part 11a in plan view, and the pedestal part 11a and each of the vibration parts 11b to 11e are coupled. It is in the point which provided the recessed part 3 in the coupling line K part. That is, as shown in FIGS. 4 and 5, four planar fan-shaped vibrating portions 11b to 11e are coupled to the circular pedestal portion 11a via the coupling line K. On the side surfaces of the vibrating portions 11b to 11e of the coupling lines K of the 11b to 11e and the pedestal portion 11a, notched concave portions 3 (suppression interference preventing means) directed inward are provided.
  • the vibrating portions 11b to 11e have two steps 12 whose thickness becomes thinner toward the outer periphery, and the side surfaces of the vibrating portions 11b to 11e are connected to each other with a very small gap 13. Yes. Also in this piezoelectric diaphragm 11, the free vibration region R shown in FIG. 4 is formed by the recess 3, and the same effect as the piezoelectric diaphragm 1 of the first embodiment can be obtained.
  • FIG. 6 shows a modification of the piezoelectric diaphragm 11 of the second embodiment.
  • the piezoelectric diaphragm 11 shown in FIG. 6A is obtained by forming the side surfaces of the vibration parts 11b to 11g divided into six into various corrugated shapes having a straight part 14 and a curved part 15.
  • the piezoelectric diaphragm 11 shown in FIG. 6B has different positions and depths of the concave portions 3 provided on both side surfaces of the four vibration portions 11b to 11e, and the side surfaces of the vibration portions 11b to 11e. They are connected with a relatively large gap 16. Further, the piezoelectric diaphragm 11 shown in FIG.
  • each piezoelectric diaphragm 11 shown in FIG. 6 is an example in which the thickness of the vibrating portions 11b to 11g is uniform. However, as shown in FIG. It is also good.
  • the piezoelectric diaphragm 21 of this embodiment is characterized in that four or six vibrating portions 21b to 21g are coupled in an eccentric state to a circular pedestal portion 21a in plan view, and the pedestal portion 21a and each vibrating portion 21b.
  • a concave portion 3 is provided in the portion of the connecting line K of 21 g. That is, the piezoelectric diaphragm 21 shown in FIG. 7A has a circular outer shape by eccentrically coupling the four vibrating parts 21b to 21e having a uniform thickness to the circular base part 21a via the coupling line K.
  • a notch-like recess 3 is provided in the connecting line K portion of the pedestal 21a and the vibrating portions 21b to 21e.
  • the piezoelectric diaphragm 21 shown in FIG. 7B is obtained by providing four steps 22 on the four vibrating portions 21b to 21e in the piezoelectric diaphragm 21 shown in FIG. 7A.
  • the piezoelectric diaphragm 21 shown in FIG. 7C has six oscillating portions 21b to 21b having a radius that gradually decreases via a coupling line K and two steps 22 on a circular pedestal portion 21a. 21 g is eccentrically coupled.
  • the piezoelectric diaphragm 21 shown in FIG. 7D is obtained by eccentrically coupling six vibrating portions 21b to 21g having a gradually decreasing radius, a uniform thickness, and different side shapes.
  • the notch-shaped recesses 3 are provided in the pedestal portion 21 a and the coupling line K portion of the vibrating portions 21 b to 21 g, respectively. It has been.
  • FIG. 8 shows a modification of the third embodiment, which is characterized in that the concave portion 3 is formed by a curve as in the piezoelectric diaphragm 11 shown in FIG. 6 (c). That is, in the piezoelectric diaphragm 21 shown in FIG. 8A, among the six vibrating parts 21b to 21g having a uniform thickness and a gradually decreasing radius, five vibrating parts 21b to 21f having a large radius are connected.
  • the recesses 3 are formed by making the ends on the pedestal 21a side of the both side surfaces into a curve (parabola) having a relatively large curvature, and the side surfaces where the two oscillating portions 21f and 21g having a small radius are connected are formed in a straight line. Thus, the recess 3 is formed so as not to be provided.
  • the piezoelectric diaphragm 21 shown in FIG. 8B has a small curvature on both side surfaces of the end portions on the pedestal 21a side of each of the six vibrating sections 21b to 21g in which the radius having two steps 22 gradually decreases.
  • the concave portions 3 are respectively formed in the connecting line K portions of the vibrating portions 21b to 21g and the pedestal portion 21a.
  • the piezoelectric diaphragm 21 shown in FIG. 8C has a concave portion by curving ends on the side of the pedestal portion 21a on both sides of the four vibration portions 21b to 21e that are eccentrically coupled to the circular pedestal portion 21a.
  • the piezoelectric diaphragm 21 shown in FIG. 8 (d) has a concave shape with the side surfaces of the two vibrating portions 21d and 21e connected to each other being linear in the piezoelectric diaphragm 21 shown in FIG. 8 (c). 3 is not provided.
  • the piezoelectric diaphragm 31 shown in FIG. 9 has a pedestal portion 31a formed in a rectangular shape in plan view, and has eight vibration portions 31b to 31i coupled to the periphery of the pedestal portion 31a and linearly connected to the vibration portions 31b to 31i.
  • a notch-like recess 3 made of, a recess 3 made of a curve, a recess 3 having a combination of a straight line and a curve, and a recess 3 made of a parabola or the like are provided in the connecting line K. Further, in the piezoelectric diaphragm 31 shown in FIG.
  • the shape of the pedestal portion 31a is formed in a triangular shape in plan view, and a notch shape is formed in the coupling line K portion of the pedestal portion 31a and the three vibration portions 31b to 31d.
  • the piezoelectric diaphragm 31 shown in FIG. 10 (b) is coupled with the three oscillating portions 31b to 31d via the curved concave portion 3 to the triangular base portion 31a in plan view. It has been made.
  • the piezoelectric diaphragm 31 shown in FIG. 11A is obtained by coupling six vibrating portions 31b to 31g to a hexagonal pedestal portion 31a in plan view, and to the pedestal portion 31a of each vibrating portion 31b to 31g. Are provided with notch-like recesses 3 in the connecting line K.
  • the piezoelectric diaphragm 31 shown in FIG. 11B has eight oscillating parts 31b to 31i coupled to the base part 31a having an octagonal shape in plan view with the notch-shaped recesses 3 and each oscillating part.
  • the concave portions 3 of 31b to 31i have different shapes. According to this embodiment, various shapes such as a triangle, a quadrangle, or a polygon can be used as the shape of the pedestal portion 31a.
  • FIG. 12 shows a fifth embodiment of the piezoelectric diaphragm according to the present invention.
  • the piezoelectric diaphragm 41 of this embodiment is characterized in that the pedestal portion 41a is formed in a triangular shape in plan view, the side surfaces of the three vibrating portions 41b to 41d are parabolic, and the coupling line K portion of one vibrating portion 41b Are provided with notch-like recesses 3 on both side surfaces.
  • the concave portion 3 made of a curve is provided in the coupling line K portion of the other two vibrating portions 41c and 41d, and the rising position of the vibrating portion 41d with respect to the coupling line K of the pedestal portion 41a is the other vibrating portions 41b and 41c. Is set differently.
  • both side surfaces of each of the vibration parts 41b to 41c are completely separated, and a predetermined vibration region R formed by the recess 3 or a parabolic shape or the like is used. Suppression interference of the vibration parts 41b to 41d is prevented.
  • FIGS. 13 to 16 show a sixth embodiment of a piezoelectric diaphragm according to the present invention and its modification.
  • a feature of the piezoelectric diaphragm 51 of this embodiment is that a groove-like recess 53 serving as a suppression interference prevention means is provided on the surface of each of the vibration parts 51b to 51e at the coupling line K between the base part 51a and the vibration parts 51b to 51e.
  • a groove-like recess 53 serving as a suppression interference prevention means is provided on the surface of each of the vibration parts 51b to 51e at the coupling line K between the base part 51a and the vibration parts 51b to 51e.
  • FIGS. 13 and 14 four vibrating parts 51b to 51e having two steps 52 are coupled to a circular pedestal part 51a in plan view, and the pedestal part 51a side of each of the vibrating parts 51b to 51e is connected.
  • recesses 53 are respectively formed at both ends of the coupling line K portion. With this recess 53, free vibration regions R are formed on both side surfaces of each of the vibration portions 51b to 51e, and it is possible to obtain the same effect as the piezoelectric diaphragm 11 provided with the notch-shaped recess 3 described above. .
  • FIG. 15 and 16 show a modification of this embodiment, and FIG. 15 shows that the concave portion 53 has a uniform thickness (or a tapered shape in which the outer peripheral side is thin as shown by a two-dot chain line in FIG. 15). They are respectively provided on both the front and back sides of the coupling line K of the vibration parts 51b to 51e. Further, in the sixth embodiment, the position where the groove-like recess 53 is formed is not limited to the surface or front and back surfaces of the vibration parts 51b to 51e, but as shown in FIG. 16 (a), the vibration parts 51b to 51e are formed.
  • the groove-like recess 53 provided in the coupling line K can be provided in an appropriate form at an appropriate position depending on the form of the pedestal 51a and the vibrating parts 51b to 51e.
  • the piezoelectric body 4 is firmly fixed to the surface.
  • the recesses 3 and 53 serving as suppression interference preventing means for preventing the suppression interference of the vibration part are formed on a connecting line K portion between the base part to be connected and the vibration part integrally connected to the base part by integral molding or the like.
  • the free vibration region R can be formed on both side surfaces of the vibration portion by the concave portions 3 and 53, and the free vibration region R can reduce the suppression interference generated in the coupling line K portion between the base portion and the vibration portion. Therefore, it is possible to obtain the piezoelectric diaphragm 1 or the like having a beautiful reproduced sound.
  • the concave portions 3 and 53 as suppression interference preventing means are formed in a curved shape on the side surface of the notch-shaped concave portion 3 and the vibration portion provided by cutting the side surface of the vibration portion of the coupling line K in the thickness direction. Therefore, the suppression interference preventing means can be easily formed in the coupling line K portion, and the piezoelectric interference can be reduced. The cost increase of the diaphragm 1 etc. can be suppressed.
  • the shape and position of the recesses 3 and 53 are set in accordance with the elastic modulus of the vibration part, or the shape of the recesses 3 and 53 itself is a straight line, a curve, or a combination thereof, By means of the recesses 3 and 53 corresponding to the shape of the part, the suppression interference of the vibration part can be effectively reduced.
  • the thickness of the vibration part is uniform or formed in a stepped shape or a taper shape
  • the vibration part is coupled to the pedestal part by one or more
  • the pedestal part is a circle, an ellipse, Since it is formed in a triangular, square, or polygonal shape, it can be applied to piezoelectric diaphragms having various thickness shapes and various numbers of vibration parts, and various pedestal-shaped piezoelectric diaphragms, and can be used for various piezoelectric speakers. Further, the versatility of the piezoelectric diaphragm 1 and the like can be improved.
  • the side surface of the vibration part is formed in a shape including a straight line or a parabola extending outward from a predetermined position of the outer peripheral line of the pedestal part in a plan view, or a combination of these, the vibration part of various side shapes Can be applied to the piezoelectric diaphragm 1 having the above, and the versatility can be further improved.
  • FIGS. 17 to 29 show seventh to ninth embodiments according to the present invention.
  • 17 to 22 show the seventh embodiment, in which FIG. 17 is a plan view, FIG. 18 is a cross-sectional view taken along line EE of FIG. 17, FIG. 19 is an enlarged plan view of a coupling portion, and FIG. 22 are a plan view and an explanatory view showing a modification.
  • the piezoelectric diaphragm 101 has a circular outer peripheral shape, and is integrally coupled to the pedestal portion 102 having a circular shape in plan view and a coupling line K (coupling portion) to the pedestal portion 102.
  • a plurality of (six in the figure) vibrating portions 103a to 103f are respectively divided by dividing lines 104 extending radially from the coupling line K toward the outer periphery.
  • the pedestal portion 102 is formed to have a plate thickness that is greater than the plate thickness of the vibrating portions 103a to 103f, and the back surface of the pedestal portion 102 and the back surface of the vibrating portion 103 are substantially flush with each other. It is formed by.
  • the coupling line K that couples the base portion 102 and the vibrating portions 103a to 103f has a width as a suppression interference preventing means formed by notching a predetermined depth on the front surface and the back surface.
  • a groove 105 having a depth of h3 and h4 at w3 is provided.
  • the groove 105 is formed in an annular shape on the outer peripheral portion of the circular pedestal portion 102, and the dividing lines 104 of the vibrating portions 103a to 103f extend from the groove 105 in the outer peripheral direction.
  • each dividing line 104 is formed by a straight line 104a, the ends of the pair of adjacent dividing lines 104 facing each other with a predetermined dimension are opposed to each other, and the outer peripheral side of the pair of adjacent dividing lines 104 The end portions are set so as to face each other or substantially contact with a very small gap.
  • a substantially wedge-shaped gap 106 is formed between a pair of adjacent dividing lines 104 in plan view, and each dividing line 104 is continuously extended in the outer circumferential direction from the groove 105 as the suppression interference preventing means. It is in a state.
  • the piezoelectric diaphragm 101 when an electrical signal is applied to the piezoelectric body 107 (see FIG. 18) that is closely fixed to the surface of the pedestal portion 102, the piezoelectric body 107 is distorted, and this distortion is caused by the pedestal portion. It is propagated to each of the vibration parts 103a to 103f via 102 and converted into acoustic vibration by the vibration parts 103a to 103f.
  • the grooves 105 are respectively formed on the front and back surfaces of the coupling line K between the pedestal portion 102 and the vibration portions 103a to 103f, the opening edge corners and the like of the groove 105 become free vibration regions, and as a result, In particular, the suppression interference in the coupling line K portion, which is likely to occur when a large electrical signal is applied to the piezoelectric body 107, does not reach the free vibration region, and the suppression interference in the coupling line K portion is prevented.
  • the dividing lines 104 of the vibrating portions 103a to 103f are continuously extended from the both ends in the longitudinal direction of the groove 105 in the outer peripheral direction, the vibration in which the suppression interference is prevented by the groove 105 is generated. Propagated well to each of the vibrating portions 103a to 103f. This vibration propagates well toward the outer periphery of each of the vibrating portions 103a to 103f having the dividing line 104, that is, the vibration is smoothly transmitted from the pedestal portion 102 to the outer periphery of each of the vibrating portions 103a to 103f. It will be.
  • the piezoelectric body 107 is formed by forming a piezoelectric ceramic into a disk shape, but is not limited to this.
  • a vibration using a voice coil drive type vibration speaker or a super magnetostrictive element is used.
  • Appropriate vibration means capable of applying vibration to the pedestal 102 of the piezoelectric diaphragm 1 such as a speaker can be employed.
  • the grooves 105 having substantially the same depths h3, h4 and width w3 are formed on the front and back surfaces of the coupling line K.
  • the width and depth of the groove 105 may be different on the front and back surfaces.
  • the groove 105 may be provided only on the front surface side (or the back surface side). Further, in the above description, the groove 105 is provided in an annular shape in the entire outer periphery of the pedestal portion 102. However, for example, the groove 105 is provided only in the coupling line K with each of the vibrating portions 103a to 103f and provided in the gap 106 portion. It can also be set as the structure which is not. The same applies to the piezoelectric diaphragms of the respective embodiments described above and the modifications described later.
  • FIG. 20 (a) is formed by a curved line 104b that is recessed inward, and FIG. It is formed by a curved line 104c bulging outward.
  • a substantially wedge-shaped gap 106 is formed between the adjacent dividing lines 104 in plan view.
  • the piezoelectric diaphragm 101 shown in FIG. 21 is formed by forming the dividing line 104 with a parabola 104d bulging outward. That is, for example, as shown in FIG. 22, a parabola formed by the focal point F and the quasi-line L, for example, between P0 and P1 is used as the dividing line 104. A gap 106 is also formed between the adjacent dividing lines 104 by this dividing line 104.
  • the parabola 104d bulging outward is used, but a parabola concave inward can be used, and the shape of the parabola 104d is not limited to P0 and P1 of the parabola shown in FIG. For example, between P1 and P2 can be used, or any other suitable parabola can be used.
  • the piezoelectric diaphragm 111 of this embodiment is characterized in that the length of the dividing line 104 composed of a straight line 104a that is the diameter of a plurality of (four in the figure) vibrating portions 103a to 103d is the longest.
  • the pedestal portion 102 having a circular shape in plan view is provided to be eccentric from the center position of the piezoelectric diaphragm 111 having a circular outer peripheral shape, and the vibrating portions 103a and 103d and the vibrating portion are set by gradually shortening from the portion along the left and right outer periphery.
  • 103b and 103c are formed in a symmetrical shape.
  • each dividing line 104 formed of a straight line 104a extends radially from the coupling line K in which the groove 105 is formed, and a gap 106 is formed between the adjacent dividing lines 104.
  • the same effects as those of the piezoelectric diaphragm 101 of the seventh embodiment can be obtained.
  • the piezoelectric diaphragm 111 of the eighth embodiment since the areas of the vibrating parts 103 to 103d are different, the elastic moduli of the vibrating parts 103a to 103d are set to be different.
  • the shape of the dividing line 104 is not limited to the straight line 104a, and all the dividing lines 104 are curved inwardly as shown in FIG. As shown in FIG. 25B, the curve 104c bulging outward, all the dividing lines 104 are formed as appropriate parabolas 104d, or as shown in FIG. 104b and 104c and the parabola 104d can be used in appropriate combination.
  • the piezoelectric diaphragm 111 shown in FIG. 24A a plurality of (three in the figure) steps 108 are provided so that the thickness of the vibrating portions 103a to 103d decreases in order toward the outer periphery.
  • the step 108 can also be applied to the piezoelectric diaphragms of the embodiments and modifications thereof.
  • the outer peripheral shape is not limited to a perfect circle, and may be formed in an elliptical shape.
  • the center O1 of the pedestal portion 102 having a circular shape in plan view passes through the center O2 of the piezoelectric diaphragm 111 having a circular shape in plan view.
  • the vibrating parts 103a and 103d and the vibrating parts 103b and 103c are symmetrically positioned on the center line CL.
  • the present invention is not limited to this form.
  • the center O1 of the pedestal part 102 is used.
  • the piezoelectric diaphragm 121 of this embodiment is characterized in that the length of the dividing line 104 composed of the straight lines 104a of a plurality (five in the figure) of the vibrating parts 103a to 103e is the longest part and the shortest part. Is gradually changed so as to have a predetermined depression angle, and the outer shape of the piezoelectric diaphragm 121 is not a circle but an irregular shape.
  • the piezoelectric diaphragm 121 of this embodiment is set so that the elastic modulus of each of the vibrating portions 103a to 103e is different.
  • the dividing line 104 is not limited to the straight line 104a, and all the dividing lines 104 are inwardly curved as shown in FIG. As shown in b), the curve 104c bulges outward, all the dividing lines 104 are formed as appropriate parabolas 104d, or as shown in FIG. 28, the dividing lines 104 are straight lines 104a and curves 104b, 104c.
  • the parabola 104d can be used in appropriate combination.
  • the same operational effects as those of the piezoelectric diaphragm 101 of the seventh embodiment can be obtained.
  • a feature of the piezoelectric diaphragm 101 of the tenth embodiment shown in FIG. 30 is that the outer peripheral shape of the four vibrating portions 103a to 103d divided by the dividing line 104, that is, the outer shape of the piezoelectric diaphragm 101 is determined from the center line CL.
  • the shape is such that approximately half of the circle of the center O3 eccentric to the left side and approximately half of the circle of the center O4 eccentric to the right side from the center line CL are combined.
  • the piezoelectric diaphragm 101 of the eleventh embodiment shown in FIG. 31 is characterized in that the shape of the tip of the dividing line 104 (referred to as the dividing edge 110) of the four vibrating parts 103a to 103d is in plan view.
  • the curved line or the straight line does not have a sharp shape intersecting at an acute angle in a plan view, but is formed in a plan view curved shape. That is, the dividing edge portion 110 of the dividing line 104 composed of the straight line 104a, the curves 104b and 104c, or the parabola 104d is enlarged in a two-dot chain line a to have an elliptical shape or a parabolic curved shape in plan view. As shown in an enlarged view by a two-dot chain line b, a circular curved shape is obtained in plan view.
  • all the dividing edges 110 of the dividing lines 104 of the vibrating parts 103a to 103d have a curved shape in plan view.
  • a planar view curve shape may be used, and the other part may be an acute angle shape. With this configuration, it is sufficient to process only the necessary divided edge portion 110 into a curved shape, and it is possible to easily obtain desired vibration characteristics and obtain a piezoelectric diaphragm 101 that is advantageous in terms of cost.
  • the configuration in which the divided edge portion 110 is formed in a curved shape in plan view is not limited to the piezoelectric diaphragm 101 of the embodiment shown in FIG. 31, and for example, as shown in FIG. 32, the piezoelectric of the ninth embodiment is used. It can also be applied to the diaphragm 121. That is, as shown in FIGS. 32 (a) and 32 (b), the dividing edge portion 110 of the dividing line 104 of each of the vibrating portions 103a to 103f is formed in a curved shape in plan view. Also in this case, all the divided edge portions 110 may be formed in a planar view curve shape, or a part of the divided edge portions 110 may be formed in a plan view curve shape.
  • the coupling line K between the pedestal portion 102 and the vibrating portions 103a to 103g is provided.
  • a groove 105 is provided as a suppression interference prevention means, and the dividing line 104 extends radially from the groove 105. Therefore, the groove 105 causes a coupling line K portion between the base portion 102 and the vibrating portions 103a to 103g.
  • the suppression interference can be reduced, and the vibration with the suppression interference reduced can be smoothly propagated along the dividing line 104 from the longitudinal end of the groove 105 to the outer periphery of each of the vibration parts 103a to 103g. It is possible to obtain the piezoelectric diaphragm 101 and the like having a beautiful reproduced sound.
  • each vibration part is formed in a curved shape in plan view, generation of high-frequency vibrations at the dividing edge 110 can be suppressed, and a more beautiful and clear reproduction sound can be generated on the piezoelectric diaphragm. Can be obtained.
  • the suppression interference preventing means is the groove 105 formed in at least one of the front surface or the back surface of the coupling line K portion of the pedestal portion 102 and each of the vibration portions 103a to 103g, the form of each of the vibration portions 103a to 103g, etc. Accordingly, by setting the depths h3 and h4 and the width w3 of the groove 105 to predetermined values, it is possible to reliably suppress the suppression interference, and it is possible to easily form the suppression interference prevention means in the coupling line K portion. Thus, an increase in cost of the piezoelectric diaphragm 101 and the like can be suppressed.
  • the pedestal The vibration of the part 102 can be more smoothly propagated to the outer peripheral side of each of the vibration parts 103a to 103g. Further, if each of the vibration parts 103a to 103g is formed to have a step 108 having a different thickness, the vibration state of each of the vibration parts 103a to 103g can be changed by the step 108, and various types of piezoelectric speakers can be obtained. The versatility can be further improved.
  • each of the vibrating portions 103a to 103g is formed with a curve
  • the outer peripheral shape of the piezoelectric vibration plate 101 or the like is circular or elliptical.
  • FIG. As shown in FIG.
  • the shape of a part (or all) of the outer periphery of the vibrating portions 103d to 103f is not a circular arc (curve) but a straight line 109, various uneven curves including a parabola,
  • the piezoelectric diaphragm 101 having various outer shapes can be obtained and can be used for various piezoelectric speakers.
  • the dividing line 104 is formed by the straight line 104a, the curves 104b and 104c, and the parabola 104d that are continuous from the coupling line K to the outer periphery of each of the vibrating portions 103a to 103g.
  • a dividing line 104 having a shape in which straight lines and curves of various shapes are continuously used such as a dividing line 104 in which a curved line 104b that is recessed inward and a curved line 104c that is expanded outward is used.
  • the suppression interference preventing means is formed by providing the notched groove 105 continuously in the longitudinal direction in the coupling line K, but for example, the groove 105 is provided in a divided state in the longitudinal direction.
  • An appropriate configuration can be employed according to the form of the vibrating portions 103a to 103g, such as using a ridge instead of the groove 105, or using both the groove and the ridge.
  • the plate portions of the vibrating portions 103a to 103g are formed in the same flat plate shape in the entire region, or a plate is formed from the pedestal portion 2 side toward the outer periphery by the step 108.
  • the plate thickness of the vibrating portions 103a to 103g may be a tapered shape that continuously decreases from the base portion 2 side toward the outer periphery.
  • the shape of the pedestal portion 102 and the like in each of the seventh to eleventh embodiments is not limited to a circle. For example, as shown in FIG.
  • a pedestal portion 102 such as a polygonal shape such as a hexagon, a square shape, or a rectangular shape.
  • the overall shape of the piezoelectric diaphragm itself is not limited to the shape in which the outer peripheries of the vibrating parts 103a to 103g are substantially continuous.
  • it is applied to a piezoelectric diaphragm in which the outer peripheries of the vibrating parts 103a to 103g are not continuous. can do.
  • the form of the piezoelectric diaphragm, the shape of the pedestal, the shape of the recess and the groove, the shape and the number of the vibrating parts, etc. are the gist of each invention related to the present invention. Changes can be made as appropriate without departing from the scope.
  • the present invention can be used for all piezoelectric diaphragms having a pedestal portion to which a piezoelectric body is closely fixed and a vibration portion integrally coupled to the pedestal portion.
  • AA line arrow view of FIG. The top view which shows the modification example The top view which shows 2nd Embodiment of the piezoelectric diaphragm concerning this invention.
  • BB arrow view of Fig. 4 The top view which shows the modification example The top view which shows 3rd Embodiment of the piezoelectric diaphragm concerning this invention.
  • the top view which shows the modification example The top view which shows 4th Embodiment of the piezoelectric diaphragm concerning this invention.
  • the top view of the principal part which shows the modification example The top view of the principal part which shows the other modification same as the above
  • CC line arrow view of Fig. 13 (A) is a cross-sectional view similar to FIG. 14, and (b) is a cross-sectional view taken along the line DD of (a), showing a modification thereof.
  • Sectional drawing of the principal part which shows the other modification same as the above The top view which shows 7th Embodiment of the piezoelectric diaphragm which concerns on this invention.

Abstract

[PROBLEMS TO BE SOLVED] This object aims to provide a piezoelectric vibration plate configured to reduce a suppressive interference caused at a coupling portion between a base unit and a vibration unit, so that beautiful reproduced sounds can be obtained. [MEANS FOR SOLVING THE PROBLEMS] A piezoelectric vibration plate is provided with a base unit on the surface of which a piezoelectric member is closely fixed and a vibration unit that is integrally coupled to the base unit, wherein the piezoelectric vibration plate is characterized in comprising a suppressive interference prevention means to prevent a suppressive interference of the vibration unit is provided at a coupling portion between the base unit and the vibration unit. The suppressive interference prevention means has a concave portion made by cutting out a side surface of the vibration unit in the coupling unit in a thickness direction and a groove-like concave portion provided on a surface of the vibration unit or a concave unit by forming the side surface of the vibration unit with a planar view curve. Further, the vibration unit is radially divided into a plurality of portions and the dividing lines are provided to reach toward an outer circumference from the suppressive interference prevention means.

Description

圧電振動板Piezoelectric diaphragm
　本発明は、台座部に密着固定された圧電体に電気信号が印加されることにより振動して、圧電スピーカ等の振動板として使用される圧電振動板に関する。 The present invention relates to a piezoelectric diaphragm that is used as a diaphragm for a piezoelectric speaker or the like by vibrating when an electric signal is applied to a piezoelectric body that is closely fixed to a pedestal.
　従来、圧電スピーカの圧電振動板としては、例えば特許文献１に開示のものが知られている。この圧電振動板は、任意形状に分割されてそれぞれ弾性率が異なる複数の振動部を有し、各振動部は、円形状、楕円形状あるいは八角形状等に形成された台座部に一体的に結合されており、台座部の表面に例えば該台座部と略同一形状に形成された圧電体が密着固定されるようになっている。
特許第３７９９００１号公報 Conventionally, as a piezoelectric diaphragm of a piezoelectric speaker, for example, the one disclosed in Patent Document 1 is known. This piezoelectric diaphragm has a plurality of vibrating parts that are divided into arbitrary shapes and have different elastic moduli, and each vibrating part is integrally coupled to a pedestal formed in a circular shape, an elliptical shape, an octagonal shape, or the like. For example, a piezoelectric body formed in substantially the same shape as the pedestal portion is closely fixed to the surface of the pedestal portion.
Japanese Patent No. 3799001
　しかしながら、このような圧電振動板においては、台座部と振動部が連続状態で一体的に結合されているため、圧電体に印加される電気信号が大きく（強く）て振動部の振幅が大きくなると、圧電体が密着固定される台座部と振動部の結合部分で十分な振幅がとれず、振動部全体の振幅運動に抑圧干渉が生じてしまい、圧電振動板から得られる振動音が濁って不快な音になり易いという不都合を有している。 However, in such a piezoelectric diaphragm, since the pedestal part and the vibration part are integrally coupled in a continuous state, when the electrical signal applied to the piezoelectric body is large (strong) and the amplitude of the vibration part increases. Insufficient amplitude is obtained at the joint between the pedestal and the vibration part where the piezoelectric body is closely fixed, and the suppression movement occurs in the amplitude movement of the entire vibration part, and the vibration sound obtained from the piezoelectric diaphragm becomes turbid and uncomfortable. It has the disadvantage that it is easy to make a sound.
　本発明は、このような事情に鑑みてなされたもので、その目的は、台座部と振動部の結合部分に生じる抑圧干渉を軽減させて、綺麗な再生音が得られる圧電振動板を提供することにある。 The present invention has been made in view of such circumstances, and an object of the present invention is to provide a piezoelectric diaphragm capable of reducing the suppression interference generated at the coupling portion between the pedestal portion and the vibration portion and obtaining a beautiful reproduced sound. There is.
　かかる目的を達成すべく、本発明のうち請求項１に記載の発明は、表面に圧電体が密着固定される台座部と、該台座部に一体的に結合される振動部と、を備えた圧電振動板であって、前記台座部と振動部の結合部分に、振動部の抑圧干渉を防止する抑圧干渉防止手段を設けたことを特徴とする。 In order to achieve such an object, the invention described in claim 1 of the present invention includes a pedestal portion to which a piezoelectric body is closely fixed and fixed to a surface, and a vibration portion integrally coupled to the pedestal portion. The piezoelectric diaphragm is characterized in that suppression interference preventing means for preventing suppression interference of the vibration part is provided at a coupling portion between the base part and the vibration part.
　そして、前記抑圧干渉防止手段は、請求項２に記載の発明のように、前記結合部分の振動部側面を厚さ方向に切欠くことで設けた凹部、結合部分の振動部表面に溝状に設けた凹部もしくは結合部分の振動部側面を平面視曲線に形成することで設けた凹部であることが好ましく、この場合、前記凹部は、請求項３に記載の発明のように、その形状や位置が前記振動部の弾性率に応じて設定されていたり、請求項４に記載の発明のように、その形状が直線もしくは曲線もしくはこれらを組み合わせた形状で形成されていることが好ましい。 And, as in the invention described in claim 2, the suppression interference preventing means is formed in a recess formed by cutting the vibration portion side surface of the coupling portion in the thickness direction, and in a groove shape on the vibration portion surface of the coupling portion. It is preferable that the concave portion provided is a concave portion provided by forming the vibration portion side surface of the coupling portion in a plan view curve. In this case, the concave portion has its shape and position as in the invention of claim 3. Is set according to the elastic modulus of the vibration part, or the shape thereof is preferably formed in a straight line, a curved line, or a combination thereof as in the invention described in claim 4.
　また、前記振動部は、請求項５に記載の発明のように、その厚さが、均一、段差状もしくはテーパー状に形成されていたり、請求項６に記載の発明のように、前記台座部に対して単数もしくは複数結合されていることが好ましい。さらに、前記台座部は、請求項７に記載の発明のように、その平面視形状が、円、楕円、三角形、四角、もしくは多角形状に形成されていることが好ましく、また、前記振動部は、請求項８に記載の発明のように、その側面の平面視形状が前記台座部の外周線の所定位置から外方に延びる直線形状もしくは放物線を含む曲線形状もしくはこれらを組み合わせた形状に形成されていることが好ましい。 In addition, the vibration portion is formed in a uniform, stepped or tapered shape as in the invention described in claim 5, or the pedestal portion as in the invention described in claim 6. It is preferable that one or a plurality of bonds are bonded. Further, as in the invention described in claim 7, the pedestal portion is preferably formed in a circular shape, an elliptical shape, a triangular shape, a square shape, or a polygonal shape in plan view. As in the eighth aspect of the invention, the side view shape of the side surface is formed into a linear shape extending outward from a predetermined position of the outer peripheral line of the pedestal portion, a curved shape including a parabola, or a combination thereof. It is preferable.
　また、請求項９に記載の発明は、表面に圧電体が密着固定される台座部と、該台座部に一体的に結合されると共に台座部から外周に向かって延びる分割線により放射状に分割された複数の振動部と、を備えた圧電振動板であって、前記台座部と振動部の結合部分に厚さ方向の抑圧干渉防止手段を設けると共に、該抑圧干渉防止手段から外周に向かって前記分割線が延設されていることを特徴とする。 Further, the invention according to claim 9 is divided radially by a pedestal portion having a piezoelectric body closely fixed to the surface, and a dividing line integrally coupled to the pedestal portion and extending from the pedestal portion toward the outer periphery. A plurality of vibrating portions, wherein a suppression interference preventing means in the thickness direction is provided at a joint portion of the pedestal portion and the vibrating portion, and from the suppression interference preventing means toward the outer periphery, The dividing line is extended.
　この場合、前記抑圧干渉防止手段は、請求項１０に記載の発明のように、前記台座部と振動部の結合部分の表面もしくは裏面の少なくとも一方に形成された溝であることが好ましい。また、前記分割線は、請求項１１に記載の発明のように、直線、外側または内側に膨らんだ曲線、放物線のいずれかかもしくはこれらの組み合わせで形成されていることが好ましい。さらに、前記振動部は、請求項１２に記載の発明のように、その外周形状が曲線、直線のいずれかかもしくはこれらの組み合わせで形成されていたり、請求項１３に記載の発明のように、厚さが異なる段差を有することが好ましい。 In this case, it is preferable that the suppression interference preventing means is a groove formed in at least one of the front surface and the back surface of the coupling portion of the pedestal portion and the vibration portion as in the invention described in claim 10. Further, as in the invention described in claim 11, it is preferable that the dividing line is formed by any one of a straight line, a curved line bulging outward or inward, a parabola, or a combination thereof. Further, as in the invention described in claim 12, the outer peripheral shape of the vibrating part is formed by either a curve, a straight line, or a combination thereof, or as in the invention described in claim 13, It is preferable to have steps with different thicknesses.
　また、前記複数の振動部は、請求項１４に記載の発明のように、前記分割線の先端となる分割縁部の全てもしくは一部が、平面視で円形状、楕円形状、放物線形状等の曲線形状で形成されていることが好ましい。 In addition, as in the invention described in claim 14, the plurality of vibrating portions may be formed such that all or a part of the dividing edge serving as the tip of the dividing line has a circular shape, an elliptical shape, a parabolic shape, or the like in plan view. It is preferably formed in a curved shape.
　本発明のうち請求項１に記載の発明によれば、表面に圧電体が密着固定される台座部と、この台座部に一体的に結合される振動部との結合部分に、振動部の抑圧干渉を防止する抑圧干渉防止手段が設けられているため、抑圧干渉防止手段により台座部と振動部の結合部分に生じる抑圧干渉を軽減させることができて、綺麗な再生音の圧電振動板を得ることができる。 According to the first aspect of the present invention, the vibration portion is suppressed at the coupling portion between the pedestal portion to which the piezoelectric body is closely fixed to the surface and the vibration portion integrally coupled to the pedestal portion. Since the suppression interference prevention means for preventing the interference is provided, the suppression interference prevention means can reduce the suppression interference generated at the coupling portion of the base part and the vibration part, and a piezoelectric diaphragm having a beautiful reproduced sound can be obtained. be able to.
　また、請求項２に記載の発明によれば、請求項１に記載の発明の効果に加え、抑圧干渉防止手段が、結合部分の振動部側面や表面に設けた凹部等で形成されているため、抑圧干渉防止手段を結合部分に簡単に形成できて、圧電振動板のコストアップを抑えることができる。また、請求項３に記載の発明によれば、請求項２に記載の発明の効果に加え、凹部の形状や位置が振動部の弾性率に応じて設定されているため、振動部の形態等に応じた凹部により、振動部の抑圧干渉を効果的に軽減することができる。 Further, according to the invention described in claim 2, in addition to the effect of the invention described in claim 1, the suppression interference preventing means is formed by a concave portion provided on the side surface or the vibration portion of the coupling portion. In addition, the suppression interference preventing means can be easily formed at the coupling portion, and the cost increase of the piezoelectric diaphragm can be suppressed. According to the invention described in claim 3, in addition to the effect of the invention described in claim 2, since the shape and position of the recess are set according to the elastic modulus of the vibration part, the form of the vibration part, etc. Due to the concave portions corresponding to the above, suppression interference of the vibration portion can be effectively reduced.
　また、請求項４に記載の発明によれば、請求項２または３に記載の発明の効果に加え、凹部の形状が直線もしくは曲線もしくはこれらを組み合わせた形状で形成されているため、振動部に応じた形状の凹部により、振動部の抑圧干渉を一層効果的に軽減することができる。また、請求項５に記載の発明によれば、請求項１ないし４に記載の発明の効果に加え、振動部の厚さが、均一、段差状もしくはテーパー状に形成されているため、各種厚さ形状の振動部を有する圧電振動板に適用できて、各種圧電スピーカに使用できる等、汎用性の向上を図ることができる。 According to the invention described in claim 4, in addition to the effects of the invention described in claim 2 or 3, since the shape of the recess is a straight line, a curve, or a combination of these, The suppression interference of the vibration part can be more effectively reduced by the concave part having the corresponding shape. According to the invention described in claim 5, in addition to the effects of the invention described in claims 1 to 4, the thickness of the vibrating part is formed in a uniform, stepped or tapered shape. It can be applied to a piezoelectric diaphragm having a saddle-shaped vibrating section, and can be used for various piezoelectric speakers, thereby improving versatility.
　また、請求項６に記載の発明によれば、請求項１ないし５に記載の発明の効果に加え、振動部が台座部に対して単数もしくは複数結合されているため、各種個数の振動部を有する圧電振動板に適用できて、汎用性の一層の向上を図ることができる。さらに、請求項７に記載の発明によれば、請求項１ないし６に記載の発明の効果に加え、台座部の平面視形状が、円、楕円、三角形、四角、多角形状に形成されているため、各種形状の台座部を有する圧電振動板に適用できて、汎用性のより一層の向上を図ることができる。 Further, according to the invention described in claim 6, in addition to the effects of the invention described in claims 1 to 5, since the vibration part is connected to the pedestal part by one or more, various numbers of vibration parts are provided. The present invention can be applied to the piezoelectric diaphragm having it, and the versatility can be further improved. Furthermore, according to the invention described in claim 7, in addition to the effects of the invention described in claims 1 to 6, the planar view shape of the pedestal is formed in a circle, an ellipse, a triangle, a square, or a polygon. Therefore, it can be applied to a piezoelectric diaphragm having pedestals of various shapes, and the versatility can be further improved.
　また、請求項８に記載の発明によれば、請求項１ないし７に記載の発明の効果に加え、振動部の側面形状が、台座部の外周線の所定位置から外方に延びる直線もしくは放物線を含む曲線もしくはこれらを組み合わせた形状に形成されているため、各種側面形状の振動部を有する圧電振動板に適用できて、汎用性のより一層の向上を図ることができる。 According to the invention described in claim 8, in addition to the effects of the invention described in claims 1 to 7, the side surface shape of the vibration part is a straight line or a parabola extending outward from a predetermined position of the outer peripheral line of the pedestal part. Therefore, it can be applied to piezoelectric diaphragms having vibrating portions having various side-surface shapes, and the versatility can be further improved.
　また、本発明のうち請求項９に記載の発明によれば、台座部と振動部との結合部分に、厚さ方向の抑圧干渉防止手段が設けられると共に、この抑圧干渉防止手段から分割線が放射状に延設されているため、抑圧干渉防止手段により台座部と振動部の結合部分に生じる抑圧干渉を軽減させることができると共に、この抑圧干渉が軽減された振動を抑圧干渉防止手段の端部から分割線に沿って振動部の外周側にスムーズに伝搬させることができて、綺麗な再生音の圧電振動板を得ることができる。 According to the ninth aspect of the present invention, suppression interference prevention means in the thickness direction is provided at the coupling portion between the pedestal part and the vibration part, and a dividing line is formed from the suppression interference prevention means. Since it is radially extended, the suppression interference prevention means can reduce the suppression interference generated at the joint portion of the base portion and the vibration portion, and the vibration of the suppression interference is reduced. Can be smoothly propagated along the dividing line to the outer peripheral side of the vibrating portion, and a piezoelectric diaphragm having a beautiful reproduced sound can be obtained.
　また、請求項１０に記載の発明によれば、請求項９に記載の発明の効果に加え、抑圧干渉防止手段が台座部と振動部の結合部分の表面もしくは裏面の少なくとも一方に形成された溝であるため、振動部の形態等に応じて溝の高さや幅を所定に設定することにより、抑圧干渉を確実に抑制することができると共に、抑圧干渉防止手段を結合部分に簡単に形成できて、圧電振動板のコストアップを抑えることができる。 According to the invention described in claim 10, in addition to the effect of the invention described in claim 9, the suppression interference preventing means is a groove formed on at least one of the front surface or the back surface of the coupling portion of the base portion and the vibration portion. Therefore, by setting the height and width of the groove according to the form of the vibration part, etc., it is possible to reliably suppress the suppression interference and to easily form the suppression interference prevention means at the coupling portion. The cost increase of the piezoelectric diaphragm can be suppressed.
　さらに、請求項１１に記載の発明によれば、請求項９または１０に記載の発明の効果に加え、複数の振動部を分割する分割線が、直線、外側または内側に膨らんだ曲線、放物線のいずれかかもしくはこれらの組み合わせで形成されているため、台座部の振動を各振動部の外周側に一層スムーズに伝搬させることができる。 Further, according to the invention described in claim 11, in addition to the effect of the invention described in claim 9 or 10, the dividing line for dividing the plurality of vibrating parts is a straight line, a curve bulging outward or inward, and a parabola. Since it is formed by either or a combination thereof, the vibration of the pedestal portion can be more smoothly propagated to the outer peripheral side of each vibration portion.
　また、請求項１２に記載の発明によれば、請求項９ないし１１に記載の発明の効果に加え、振動部の外周形状が、曲線、直線のいずれかかもしくはこれらの組み合わせで形成されているため、各種外形形状の圧電振動板を得ることができて、各種圧電スピーカに使用できる等、その汎用性を向上させることができる。また、請求項１３に記載の発明によれば、請求項９ないし１２に記載の発明の効果に加え、振動部が厚さの異なる段差を有するため、段差により振動部の振動状態に変化を持たせることができて、各種形態の圧電スピーカに使用できる等、汎用性を一層向上させることができる。 According to the twelfth aspect of the invention, in addition to the effects of the ninth to eleventh aspects of the invention, the outer peripheral shape of the vibration part is formed of either a curve or a straight line, or a combination thereof. Therefore, it is possible to obtain piezoelectric diaphragms having various outer shapes, and improve versatility such as being usable for various piezoelectric speakers. According to the invention described in claim 13, in addition to the effects of the inventions described in claims 9 to 12, the vibration part has a step having a different thickness, and therefore the vibration state of the vibration part is changed by the step. The versatility can be further improved, such as being usable for various types of piezoelectric speakers.
　また、請求項１４に記載の発明によれば、請求項９ないし１３に記載の発明の効果に加え、分割線で複数に分割された各振動部の先端となる分割縁部の全てもしくは必要な一部が平面視で曲線形状に形成されているため、分割縁部が鋭端形状になるのを防止できて、特に分割線が短い場合に生じ易い分割縁部における高周波振動の発生を抑制できて、より明瞭な再生音を得ることができる。 According to the invention described in claim 14, in addition to the effects of the invention described in claims 9-13, all or necessary of the divided edge portions which become the tips of the vibration portions divided into a plurality of lines by the dividing line. Part of it is formed in a curved shape in plan view, so that it is possible to prevent the dividing edge from becoming a sharp end, and to suppress the occurrence of high-frequency vibration at the dividing edge that is likely to occur especially when the dividing line is short. Thus, a clearer playback sound can be obtained.
　以下、本発明の実施の形態を図面に基づいて詳細に説明する。
　図１～図１６は、本発明に係る圧電振動板の第１～第６の実施形態を示している。図１～図３は、その第１の実施形態を示し、図１が平面図、図２が図１のＡ－Ａ線矢視図、図３がその変形例を示す平面図である。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 to 16 show first to sixth embodiments of a piezoelectric diaphragm according to the present invention. 1 to 3 show the first embodiment, in which FIG. 1 is a plan view, FIG. 2 is a plan view taken along the line AA in FIG. 1, and FIG. 3 is a plan view showing a modification thereof.
　図１及び図２に示すように、圧電振動板１は、平面視略長方形状（四角形状）の台座部１ａと、この台座部１ａに結合線Ｋにより一体的に結合された平面視略長方形状の振動部１ｂを有している。台座部１ａは振動部１ｂより所定寸法厚く形成されると共に、台座部１ａと振動部１ｂの裏面は面一状態で、例えば一体成形等により形成されている。そして、振動部１ｂの結合線Ｋ部分には、振動部１ｂの側面から内側方向に向けて抑圧干渉防止手段としての凹部３が設けられている。 As shown in FIGS. 1 and 2, the piezoelectric diaphragm 1 includes a pedestal portion 1 a having a substantially rectangular shape (square shape) in a plan view, and a substantially rectangular shape in a plan view integrally coupled to the pedestal portion 1 a by a coupling line K. It has the shape-like vibration part 1b. The pedestal portion 1a is formed to be thicker than the vibration portion 1b by a predetermined size, and the back surfaces of the pedestal portion 1a and the vibration portion 1b are flush with each other, for example, by integral molding. And the recessed part 3 as a suppression interference prevention means is provided in the coupling line K part of the vibration part 1b toward the inner side from the side surface of the vibration part 1b.
　この凹部３は、振動部１ｂの台座部１ａ側の端部側面を幅ｗ１と深さ（奥行き）ｈ１を有して板厚方向に方形状に切欠くことにより形成され、幅ｗ１と深さｈ１は、圧電振動板１の材質（弾性率）や大きさ、形状等に応じて適宜に設定されている。なお、台座部１ａと振動部１ｂは、例えば　鉄、銅、黄銅、ステンレス鋼（ＳＵＳ材）、チタン、カーボングラファイト、ポリアミド樹脂等の音響振動を伝搬可能な材質により形成されている。 The concave portion 3 is formed by notching the end side surface of the vibrating portion 1b on the side of the pedestal portion 1a into a square shape having a width w1 and a depth (depth) h1, and having a width w1 and a depth. h1 is appropriately set according to the material (elastic modulus), size, shape, and the like of the piezoelectric diaphragm 1. The pedestal portion 1a and the vibration portion 1b are formed of a material capable of propagating acoustic vibration, such as iron, copper, brass, stainless steel (SUS material), titanium, carbon graphite, and polyamide resin.
　この圧電振動板１によれば、台座部１ａの表面に密着固定された圧電体４（図２参照）に電気信号が印加されると、この圧電体４に歪みが生じ、この歪みが台座部１ａを介して振動部１ｂに伝搬されて該振動部１ｂで音響振動に変換される。このとき、台座部１ａと振動部１ｂの結合線Ｋ部分に切欠き状の凹部３が設けられていることから、この凹部３の深さｈ１に対応した図１のハッチングで示す領域が自由振動領域Ｒとなる。その結果、特に圧電体４に大きな電気信号が印加された場合に生じ易い、結合線Ｋ部分の抑圧干渉が自由振動領域Ｒには及ばず、結合線Ｋ部分における抑圧干渉が防止されることになる。 According to the piezoelectric diaphragm 1, when an electric signal is applied to the piezoelectric body 4 (see FIG. 2) that is tightly fixed to the surface of the pedestal portion 1a, the piezoelectric body 4 is distorted, and this distortion is caused by the pedestal portion. It is propagated to the vibration part 1b through 1a and converted into acoustic vibration by the vibration part 1b. At this time, since the notch-shaped recess 3 is provided in the connecting line K portion of the base 1a and the vibration portion 1b, the hatched region in FIG. 1 corresponding to the depth h1 of the recess 3 is free vibration. Region R is formed. As a result, the suppression interference in the coupling line K portion, which is likely to occur particularly when a large electrical signal is applied to the piezoelectric body 4, does not reach the free vibration region R, and the suppression interference in the coupling line K portion is prevented. Become.
　図３は、前記圧電振動板１の変形例を示している。図３（ａ）に示す圧電振動板１は、前記圧電振動板１において、振動部１ｂの一方の側面の凹部３を結合線Ｋから所定供給離した位置に設けたものであり、また、図３（ｂ）に示す圧電振動板１は、振動部１ｂの側面を直線部５と曲線部６を組み合わせて形成すると共に、両側面の平面視形状を異ならせたものである。また、図３（ｃ）に示す圧電振動板１は、振動部１ｂの側面を平面視で放物線形状に形成すると共に、一方の側面に形成される凹部３を台座部１ａの結合線Ｋに連接し、他方の凹部３を結合線Ｋから所定距離離した位置に設けたものである。 FIG. 3 shows a modification of the piezoelectric diaphragm 1. The piezoelectric diaphragm 1 shown in FIG. 3A is provided with the concave part 3 on one side surface of the vibration part 1b in the piezoelectric diaphragm 1 at a position that is separated from the coupling line K by a predetermined supply. The piezoelectric diaphragm 1 shown in 3 (b) is formed by combining the linear portion 5 and the curved portion 6 on the side surface of the vibrating portion 1b, and having different planar views on both side surfaces. Further, the piezoelectric diaphragm 1 shown in FIG. 3 (c) has a side surface of the vibration part 1b formed in a parabolic shape in plan view, and a concave part 3 formed on one side surface is connected to the coupling line K of the base part 1a. The other concave portion 3 is provided at a position separated from the coupling line K by a predetermined distance.
　さらに、図３（ｄ）に示す圧電振動板１は、前記振動部１ｂの台座部１ａ側の幅を狭くし外周側を広く、両側面が平面視で放射状に延びるように形成すると共に、両側面に形成される凹部３の幅ｗ１と位置を異ならせ、かつ台座部１ａの振動部１ｂが結合される側と反対側に、前記凹部３より深い凹部３を有する振動部１ｂ（つまり合計２つの振動部１ｂ）を設けたものである。また、図３（ｅ）に示す圧電振動板１は、２つの振動部１ｂを有する圧電振動板１において、一方の振動部１ｂの両側面の形状を異ならせると共に、各振動部１ｂの凹部３の位置や形状を両側面で同一に形成したものである。このように、前記圧電振動板１においては、平面視略長方形状の台座部１ａに対して、側面形状や凹部３の形状及び位置等が適宜の振動部１ｂを一つもしくは二つ結合させることができる。 Furthermore, the piezoelectric diaphragm 1 shown in FIG. 3 (d) is formed so that the width of the oscillating portion 1b on the pedestal portion 1a side is narrowed and the outer peripheral side is widened, and both side surfaces extend radially in plan view. The vibration part 1b having a recess 3 deeper than the recess 3 on the side opposite to the side to which the vibration part 1b of the pedestal part 1a is coupled is different from the width w1 of the recess 3 formed on the surface (that is, a total of 2 Two vibrating parts 1b) are provided. Further, in the piezoelectric diaphragm 1 shown in FIG. 3E, in the piezoelectric diaphragm 1 having two vibrating portions 1b, the shape of both side surfaces of one vibrating portion 1b is made different, and the concave portion 3 of each vibrating portion 1b. The same position and shape are formed on both sides. As described above, in the piezoelectric diaphragm 1, one or two vibrating portions 1b having an appropriate side surface shape and the shape and position of the concave portion 3 are coupled to the pedestal portion 1a having a substantially rectangular shape in plan view. Can do.
　図４～図６は、本発明に係わる圧電振動板の第２の実施形態及びその変形例を示している。この実施形態の圧電振動板１１の特徴は、平面視円形の台座部１１ａの周囲に、分割された例えば４つの振動部１１ｂ～１１ｅを結合させると共に、台座部１１ａと各振動部１１ｂ～１１ｅの結合線Ｋ部分に凹部３をそれぞれ設けた点にある。すなわち、図４及び図５に示すように、平面視円形の台座部１１ａに、結合線Ｋを介して４つの平面視略扇形状の振動部１１ｂ～１１ｅが結合されており、この各振動部１１ｂ～１１ｅと台座部１１ａの各結合線Ｋ部分の振動部１１ｂ～１１ｅの側面に、内側方向に向けた切欠き状の凹部３（抑圧干渉防止手段）がそれぞれ設けられている。 4 to 6 show a second embodiment of the piezoelectric diaphragm according to the present invention and its modification. The piezoelectric diaphragm 11 of this embodiment is characterized in that, for example, four divided vibration parts 11b to 11e are coupled around a circular pedestal part 11a in plan view, and the pedestal part 11a and each of the vibration parts 11b to 11e are coupled. It is in the point which provided the recessed part 3 in the coupling line K part. That is, as shown in FIGS. 4 and 5, four planar fan-shaped vibrating portions 11b to 11e are coupled to the circular pedestal portion 11a via the coupling line K. On the side surfaces of the vibrating portions 11b to 11e of the coupling lines K of the 11b to 11e and the pedestal portion 11a, notched concave portions 3 (suppression interference preventing means) directed inward are provided.
　なお、振動部１１ｂ～１１ｅは、その厚さが外周に向かうにしたがい肉薄となる２つの段差１２を有すると共に、各振動部１１ｂ～１１ｅの側面はごく僅かな間隙１３を有して連接されている。この圧電振動板１１においても、凹部３によって図４に示す自由振動領域Ｒが形成され、前記第１の実施形態の圧電振動板１と同様の作用効果を得ることができる。 The vibrating portions 11b to 11e have two steps 12 whose thickness becomes thinner toward the outer periphery, and the side surfaces of the vibrating portions 11b to 11e are connected to each other with a very small gap 13. Yes. Also in this piezoelectric diaphragm 11, the free vibration region R shown in FIG. 4 is formed by the recess 3, and the same effect as the piezoelectric diaphragm 1 of the first embodiment can be obtained.
　図６は、第２の実施形態の圧電振動板１１の変形例を示している。図６（ａ）に示す圧電振動板１１は、６つに分割された振動部１１ｂ～１１ｇの側面を、直線部１４と曲線部１５を有する各種波形形状に形成したものである。また、図６（ｂ）に示す圧電振動板１１は、４つの振動部１１ｂ～１１ｅの両側面に設けられる各凹部３の位置や深さを異ならせると共に、各振動部１１ｂ～１１ｅの側面を比較的大きな間隙１６を有して連接させたものである。また、図６（ｃ）に示す圧電振動板１１は、６つの振動部１１ｂ～１１ｇの両側面の台座部側端部を曲線（放物線）で形成することにより、両側面の端部に内側に凹んだ凹部３を形成したものである。なお、図６に示す各圧電振動板１１は、振動部１１ｂ～１１ｇの厚さが均一な例としたが、図４に示すように段差１２を有する構成か、あるいは外周側が薄くなる断面テーパー状としても良い。 FIG. 6 shows a modification of the piezoelectric diaphragm 11 of the second embodiment. The piezoelectric diaphragm 11 shown in FIG. 6A is obtained by forming the side surfaces of the vibration parts 11b to 11g divided into six into various corrugated shapes having a straight part 14 and a curved part 15. In addition, the piezoelectric diaphragm 11 shown in FIG. 6B has different positions and depths of the concave portions 3 provided on both side surfaces of the four vibration portions 11b to 11e, and the side surfaces of the vibration portions 11b to 11e. They are connected with a relatively large gap 16. Further, the piezoelectric diaphragm 11 shown in FIG. 6 (c) is formed inwardly at the end portions of both side surfaces by forming the pedestal side end portions on both side surfaces of the six vibrating portions 11b to 11g with curves (parabolas). A recessed portion 3 is formed. Note that each piezoelectric diaphragm 11 shown in FIG. 6 is an example in which the thickness of the vibrating portions 11b to 11g is uniform. However, as shown in FIG. It is also good.
　図７及び図８は、本発明に係わる圧電振動板の第３の実施形態及びその変形例を示している。この実施形態の圧電振動板２１の特徴は、平面視円形の台座部２１ａに対して、４つもしくは６つの振動部２１ｂ～２１ｇが偏心状態で結合されると共に、台座部２１ａと各振動部２１ｂ～２１ｇの結合線Ｋ部分に凹部３を設けたものである。すなわち、図７（ａ）に示す圧電振動板２１は、平面視円形の台座部２１ａに、結合線Ｋを介して均一厚さの４つの振動部２１ｂ～２１ｅを偏心結合させて外形形状を円形に形成すると共に、台座部２１ａと各振動部２１ｂ～２１ｅの結合線Ｋ部分に切欠き状の凹部３をそれぞれ設けたものである。 7 and 8 show a third embodiment of a piezoelectric diaphragm according to the present invention and a modification thereof. The piezoelectric diaphragm 21 of this embodiment is characterized in that four or six vibrating portions 21b to 21g are coupled in an eccentric state to a circular pedestal portion 21a in plan view, and the pedestal portion 21a and each vibrating portion 21b. A concave portion 3 is provided in the portion of the connecting line K of 21 g. That is, the piezoelectric diaphragm 21 shown in FIG. 7A has a circular outer shape by eccentrically coupling the four vibrating parts 21b to 21e having a uniform thickness to the circular base part 21a via the coupling line K. In addition, a notch-like recess 3 is provided in the connecting line K portion of the pedestal 21a and the vibrating portions 21b to 21e.
　また、図７（ｂ）に示す圧電振動板２１は、図７（ａ）に示す圧電振動板２１において、４つの振動部２１ｂ～２１ｅに４つの段差２２を設けたものである。また、図７（ｃ）に示す圧電振動板２１は、平面視円形の台座部２１ａに、結合線Ｋを介してその半径が徐々に減少しかつ２つの段差２２を有する６つの振動部２１ｂ～２１ｇを偏心結合させたものである。また、図７（ｄ）に示す圧電振動板２１は、半径が徐々に減少し均一厚さで側面形状がそれぞれ異なる６つの振動部２１ｂ～２１ｇを偏心結合させたものである。そして、これらの圧電振動板２１においても、図７（ａ）の圧電振動板２１と同様に、台座部２１ａと各振動部２１ｂ～２１ｇの結合線Ｋ部分に切欠き状の凹部３がそれぞれ設けられている。 Further, the piezoelectric diaphragm 21 shown in FIG. 7B is obtained by providing four steps 22 on the four vibrating portions 21b to 21e in the piezoelectric diaphragm 21 shown in FIG. 7A. In addition, the piezoelectric diaphragm 21 shown in FIG. 7C has six oscillating portions 21b to 21b having a radius that gradually decreases via a coupling line K and two steps 22 on a circular pedestal portion 21a. 21 g is eccentrically coupled. Further, the piezoelectric diaphragm 21 shown in FIG. 7D is obtained by eccentrically coupling six vibrating portions 21b to 21g having a gradually decreasing radius, a uniform thickness, and different side shapes. Also in these piezoelectric diaphragms 21, similarly to the piezoelectric diaphragm 21 in FIG. 7A, the notch-shaped recesses 3 are provided in the pedestal portion 21 a and the coupling line K portion of the vibrating portions 21 b to 21 g, respectively. It has been.
　図８は、第３の実施形態の変形例を示し、その特徴は、図６（ｃ）に示す圧電振動板１１と同様に、前記凹部３を曲線により形成した点にある。すなわち、図８（ａ）に示す圧電振動板２１は、厚さが均一で半径が徐々に減少する６つの振動部２１ｂ～２１ｇのうち、半径が大きい５つの各振動部２１ｂ～２１ｆの連接される両側面の台座部２１ａ側の端部を比較的曲率が大きい曲線（放物線）とすることで凹部３を形成し、半径が小さい２つの振動部２１ｆ、２１ｇの連接される側面を直線で形成して、凹部３を設けないように形成したものである。 FIG. 8 shows a modification of the third embodiment, which is characterized in that the concave portion 3 is formed by a curve as in the piezoelectric diaphragm 11 shown in FIG. 6 (c). That is, in the piezoelectric diaphragm 21 shown in FIG. 8A, among the six vibrating parts 21b to 21g having a uniform thickness and a gradually decreasing radius, five vibrating parts 21b to 21f having a large radius are connected. The recesses 3 are formed by making the ends on the pedestal 21a side of the both side surfaces into a curve (parabola) having a relatively large curvature, and the side surfaces where the two oscillating portions 21f and 21g having a small radius are connected are formed in a straight line. Thus, the recess 3 is formed so as not to be provided.
　また、図８（ｂ）に示す圧電振動板２１は、２つの段差２２を有する半径が徐々に減少する６つの各振動部２１ｂ～２１ｇの台座部２１ａ側の端部の両側面を曲率の小さな曲面とすることで、各振動部２１ｂ～２１ｇと台座部２１ａの結合線Ｋ部分に凹部３をそれぞれ形成したものである。また、図８（ｃ）に示す圧電振動板２１は、円形の台座部２１ａに偏心結合させた４つの振動部２１ｂ～２１ｅの両側面の台座部２１ａ側の端部を曲線とすることで凹部３を形成したものであり、図８（ｄ）に示す圧電振動板２１は、図８（ｃ）に示す圧電振動板２１において、２つの振動部２１ｄ、２１ｅの連接する側面を直線状として凹部３を設けないように形成したものである。 In addition, the piezoelectric diaphragm 21 shown in FIG. 8B has a small curvature on both side surfaces of the end portions on the pedestal 21a side of each of the six vibrating sections 21b to 21g in which the radius having two steps 22 gradually decreases. By forming the curved surface, the concave portions 3 are respectively formed in the connecting line K portions of the vibrating portions 21b to 21g and the pedestal portion 21a. Further, the piezoelectric diaphragm 21 shown in FIG. 8C has a concave portion by curving ends on the side of the pedestal portion 21a on both sides of the four vibration portions 21b to 21e that are eccentrically coupled to the circular pedestal portion 21a. 8 (d), the piezoelectric diaphragm 21 shown in FIG. 8 (d) has a concave shape with the side surfaces of the two vibrating portions 21d and 21e connected to each other being linear in the piezoelectric diaphragm 21 shown in FIG. 8 (c). 3 is not provided.
　図９～図１１は、本発明に係わる圧電振動板の第４の実施形態及びその変形例を示している。図９に示す圧電振動板３１は、台座部３１ａを平面視長方形状に形成すると共に、この台座部３１ａの周囲に８つの振動部３１ｂ～３１ｉを結合させると共に、各振動部３１ｂ～３１ｉに直線からなる切欠き状の凹部３や曲線からなる凹部３、あるいは直線と曲線を組み合わせた形状の凹部３、さらには放物線等からなる凹部３を、結合線Ｋ部分にそれぞれ設けたものである。また、図１０（ａ）に示す圧電振動板３１は、台座部３１ａの形状を平面視三角形状に形成し、この台座部３１ａと３つの振動部３１ｂ～３１ｄの結合線Ｋ部分に切欠き状の凹部３を設けたものであり、図１０（ｂ）に示す圧電振動板３１は、平面視三角形状の台座部３１ａに、曲線状の凹部３を介して３つの振動部３１ｂ～３１ｄを結合させたものである。 9 to 11 show a fourth embodiment of a piezoelectric diaphragm according to the present invention and its modification. The piezoelectric diaphragm 31 shown in FIG. 9 has a pedestal portion 31a formed in a rectangular shape in plan view, and has eight vibration portions 31b to 31i coupled to the periphery of the pedestal portion 31a and linearly connected to the vibration portions 31b to 31i. A notch-like recess 3 made of, a recess 3 made of a curve, a recess 3 having a combination of a straight line and a curve, and a recess 3 made of a parabola or the like are provided in the connecting line K. Further, in the piezoelectric diaphragm 31 shown in FIG. 10A, the shape of the pedestal portion 31a is formed in a triangular shape in plan view, and a notch shape is formed in the coupling line K portion of the pedestal portion 31a and the three vibration portions 31b to 31d. 10B, the piezoelectric diaphragm 31 shown in FIG. 10 (b) is coupled with the three oscillating portions 31b to 31d via the curved concave portion 3 to the triangular base portion 31a in plan view. It has been made.
　さらに、図１１（ａ）に示す圧電振動板３１は、平面視六角形状の台座部３１ａに６つの振動部３１ｂ～３１ｇを結合させたものであり、各振動部３１ｂ～３１ｇの台座部３１ａへの結合線Ｋ部分に切欠き状の凹部３をそれぞれ設けたものである。また、図１１（ｂ）に示す圧電振動板３１は、平面視八角形状の台座部３１ａに、８つの振動部３１ｂ～３１ｉを切欠き状の凹部３を有して結合させると共に、各振動部３１ｂ～３１ｉの凹部３の形状が異なるようにしたものである。この実施形態によれば、台座部３１ａの形状として三角形や四角形あるいは多角形等の各種形状を使用できることになる。 Furthermore, the piezoelectric diaphragm 31 shown in FIG. 11A is obtained by coupling six vibrating portions 31b to 31g to a hexagonal pedestal portion 31a in plan view, and to the pedestal portion 31a of each vibrating portion 31b to 31g. Are provided with notch-like recesses 3 in the connecting line K. In addition, the piezoelectric diaphragm 31 shown in FIG. 11B has eight oscillating parts 31b to 31i coupled to the base part 31a having an octagonal shape in plan view with the notch-shaped recesses 3 and each oscillating part. The concave portions 3 of 31b to 31i have different shapes. According to this embodiment, various shapes such as a triangle, a quadrangle, or a polygon can be used as the shape of the pedestal portion 31a.
　図１２は、本発明に係わる圧電振動板の第５の実施形態を示している。この実施形態の圧電振動板４１の特徴は、台座部４１ａを平面視三角形状に形成すると共に、３つの振動部４１ｂ～４１ｄの側面を放物線形状とし、かつ一つの振動部４１ｂの結合線Ｋ部分の両側面に切欠き状の凹部３を設けたものである。この場合、他の２つの振動部４１ｃ、４１ｄの結合線Ｋ部分には曲線からなる凹部３を設けると共に、振動部４１ｄの台座部４１ａの結合線Ｋに対する立ち上がり位置が他の振動部４１ｂ、４１ｃと異なるように設定されている。 FIG. 12 shows a fifth embodiment of the piezoelectric diaphragm according to the present invention. The piezoelectric diaphragm 41 of this embodiment is characterized in that the pedestal portion 41a is formed in a triangular shape in plan view, the side surfaces of the three vibrating portions 41b to 41d are parabolic, and the coupling line K portion of one vibrating portion 41b Are provided with notch-like recesses 3 on both side surfaces. In this case, the concave portion 3 made of a curve is provided in the coupling line K portion of the other two vibrating portions 41c and 41d, and the rising position of the vibrating portion 41d with respect to the coupling line K of the pedestal portion 41a is the other vibrating portions 41b and 41c. Is set differently.
　なお、この例の場合、各振動部４１ｂ～４１ｄに凹部３を設けたり、全ての振動部４１ｂ～４１ｄの形状や立ち上がり位置を異ならせることも可能である。この実施形態の圧電振動板４１によれば、各振動部４１ｂ～４１ｃの両側面が完全に離れた状態となっており、凹部３や放物線形状等で形成される自由振動領域Ｒにより、所定の振動部４１ｂ～４１ｄの抑圧干渉が防止されることになる。 In the case of this example, it is also possible to provide the recesses 3 in the respective vibration parts 41b to 41d, or to change the shapes and rising positions of all the vibration parts 41b to 41d. According to the piezoelectric diaphragm 41 of this embodiment, both side surfaces of each of the vibration parts 41b to 41c are completely separated, and a predetermined vibration region R formed by the recess 3 or a parabolic shape or the like is used. Suppression interference of the vibration parts 41b to 41d is prevented.
　図１３～図１６は、本発明に係わる圧電振動板の第６の実施形態及びその変形例を示している。この実施形態の圧電振動板５１の特徴は、台座部５１ａと振動部５１ｂ～５１ｅの結合線Ｋ部分で各振動部５１ｂ～５１ｅの表面に、抑圧干渉防止手段としての溝状の凹部５３を設けた点にある。すなわち、図１３及び図１４に示すように、平面視円形の台座部５１ａに、２つの段差５２を有する４つの振動部５１ｂ～５１ｅを結合させ、この各振動部５１ｂ～５１ｅの台座部５１ａ側の端部側面の表面に振動部５１ｂ～５１ｅの板厚方向に所定深さｈ２で所定幅ｗ２の溝を設けることにより結合線Ｋ部分の両端部に凹部５３がそれぞれ形成されている。この凹部５３により、各振動部５１ｂ～５１ｅの両側面に自由振動領域Ｒが形成されて、前述した切欠き状の凹部３を設けた圧電振動板１１等と同様の作用効果を得ることができる。 13 to 16 show a sixth embodiment of a piezoelectric diaphragm according to the present invention and its modification. A feature of the piezoelectric diaphragm 51 of this embodiment is that a groove-like recess 53 serving as a suppression interference prevention means is provided on the surface of each of the vibration parts 51b to 51e at the coupling line K between the base part 51a and the vibration parts 51b to 51e. There is in point. That is, as shown in FIGS. 13 and 14, four vibrating parts 51b to 51e having two steps 52 are coupled to a circular pedestal part 51a in plan view, and the pedestal part 51a side of each of the vibrating parts 51b to 51e is connected. By forming grooves with a predetermined depth h2 and a predetermined width w2 in the plate thickness direction of the vibrating portions 51b to 51e on the surface of the side surfaces of the end portions, recesses 53 are respectively formed at both ends of the coupling line K portion. With this recess 53, free vibration regions R are formed on both side surfaces of each of the vibration portions 51b to 51e, and it is possible to obtain the same effect as the piezoelectric diaphragm 11 provided with the notch-shaped recess 3 described above. .
　図１５及び図１６は、この実施形態の変形例を示し、図１５は、前記凹部５３を、均一な厚さ（もしくは図１５に二点鎖線で示すように外周側が薄肉となるテーパー状）の振動部５１ｂ～５１ｅの結合線Ｋ部分の表面側と裏面側の両面全体にそれぞれ設けたものである。また、この第６の実施形態において、溝状の凹部５３の形成位置は、振動部５１ｂ～５１ｅの表面あるいは表裏面に限らず、図１６（ａ）に示すように、振動部５１ｂ～５１ｅの表面（もしくは裏面）と両側面に設けたり、図１６（ｂ）に示すように、振動部５１ｂ～５１ｅの表裏面と両側面に設けることもできる。つまり、結合線Ｋ部分に設けられる溝状の凹部５３は、台座部５１ａや振動部５１ｂ～５１ｅの形態等に応じて、適宜位置に適宜の形態で設けることができる。 15 and 16 show a modification of this embodiment, and FIG. 15 shows that the concave portion 53 has a uniform thickness (or a tapered shape in which the outer peripheral side is thin as shown by a two-dot chain line in FIG. 15). They are respectively provided on both the front and back sides of the coupling line K of the vibration parts 51b to 51e. Further, in the sixth embodiment, the position where the groove-like recess 53 is formed is not limited to the surface or front and back surfaces of the vibration parts 51b to 51e, but as shown in FIG. 16 (a), the vibration parts 51b to 51e are formed. It can also be provided on the front surface (or back surface) and both side surfaces, or on the front and back surfaces and both side surfaces of the vibrating portions 51b to 51e as shown in FIG. In other words, the groove-like recess 53 provided in the coupling line K can be provided in an appropriate form at an appropriate position depending on the form of the pedestal 51a and the vibrating parts 51b to 51e.
　このように、前記第１～第６の各実施形態の圧電振動板１、１１、２１、３１、４１、５１（圧電振動板１等という）にあっては、表面に圧電体４が密着固定される台座部と、この台座部に一体成形等により一体的に結合される振動部との結合線Ｋ部分に、該振動部の抑圧干渉を防止する抑圧干渉防止手段としての凹部３、５３が設けられているため、この凹部３、５３により振動部の両側面に自由振動領域Ｒを形成できて、この自由振動領域Ｒにより台座部と振動部の結合線Ｋ部分に生じる抑圧干渉を軽減させることができ、綺麗な再生音の圧電振動板１等を得ることができる。 Thus, in the piezoelectric diaphragms 1, 11, 21, 31, 41, 51 (referred to as the piezoelectric diaphragm 1) of the first to sixth embodiments, the piezoelectric body 4 is firmly fixed to the surface. The recesses 3 and 53 serving as suppression interference preventing means for preventing the suppression interference of the vibration part are formed on a connecting line K portion between the base part to be connected and the vibration part integrally connected to the base part by integral molding or the like. Thus, the free vibration region R can be formed on both side surfaces of the vibration portion by the concave portions 3 and 53, and the free vibration region R can reduce the suppression interference generated in the coupling line K portion between the base portion and the vibration portion. Therefore, it is possible to obtain the piezoelectric diaphragm 1 or the like having a beautiful reproduced sound.
　また、抑圧干渉防止手段としての凹部３、５３が、結合線Ｋ部分の振動部の側面に板厚方向に切欠きを入れることで設けた切欠き状の凹部３や振動部の側面を曲線形状にすることで得られた凹部３、あるいは振動部の表面に設けた溝状の凹部５３で形成されているため、抑圧干渉防止手段を結合線Ｋ部分に簡単に形成することができて、圧電振動板１等のコストアップを抑えることができる。また、凹部３、５３の形状や位置が振動部の弾性率等に応じて設定されていたり、凹部３、５３自体の形状が直線もしくは曲線もしくはこれらを組み合わせた形状で形成されているため、振動部の形状等に応じた凹部３、５３により、振動部の抑圧干渉を効果的に軽減することができる。 In addition, the concave portions 3 and 53 as suppression interference preventing means are formed in a curved shape on the side surface of the notch-shaped concave portion 3 and the vibration portion provided by cutting the side surface of the vibration portion of the coupling line K in the thickness direction. Therefore, the suppression interference preventing means can be easily formed in the coupling line K portion, and the piezoelectric interference can be reduced. The cost increase of the diaphragm 1 etc. can be suppressed. In addition, the shape and position of the recesses 3 and 53 are set in accordance with the elastic modulus of the vibration part, or the shape of the recesses 3 and 53 itself is a straight line, a curve, or a combination thereof, By means of the recesses 3 and 53 corresponding to the shape of the part, the suppression interference of the vibration part can be effectively reduced.
　さらに、振動部の厚みが、均一であったり段差状もしくはテーパー状に形成されていたり、また、振動部が台座部に対して単数もしくは複数結合されていたり、さらに、台座部が円、楕円、三角形、四角、もしくは多角形状に形成されているため、各種厚さ形状や各種個数の振動部を有する圧電振動板や各種台座部形状の圧電振動板に適用できて、各種圧電スピーカに使用できる等、圧電振動板１等の汎用性の向上を図ることができる。また、振動部の側面が、平面視で台座部の外周線の所定位置から外方に延びる直線もしくは放物線を含む曲線及びもしくはこれらを組み合わせた形状に形成されているため、各種側面形状の振動部を有する圧電振動板１等に適用することができて、その汎用性のより一層の向上を図ることができる。 Furthermore, the thickness of the vibration part is uniform or formed in a stepped shape or a taper shape, the vibration part is coupled to the pedestal part by one or more, and the pedestal part is a circle, an ellipse, Since it is formed in a triangular, square, or polygonal shape, it can be applied to piezoelectric diaphragms having various thickness shapes and various numbers of vibration parts, and various pedestal-shaped piezoelectric diaphragms, and can be used for various piezoelectric speakers. Further, the versatility of the piezoelectric diaphragm 1 and the like can be improved. In addition, since the side surface of the vibration part is formed in a shape including a straight line or a parabola extending outward from a predetermined position of the outer peripheral line of the pedestal part in a plan view, or a combination of these, the vibration part of various side shapes Can be applied to the piezoelectric diaphragm 1 having the above, and the versatility can be further improved.
　図１７～図２９は、本発明に係わる第７～第９の実施形態を示している。図１７～図２２は、その第７の実施形態を示し、図１７が平面図、図１８が図１７のＥ－Ｅ線に沿った断面図、図１９が結合部分の拡大平面図、図２０～図２２が変形例を示す平面図及び説明図である。 FIGS. 17 to 29 show seventh to ninth embodiments according to the present invention. 17 to 22 show the seventh embodiment, in which FIG. 17 is a plan view, FIG. 18 is a cross-sectional view taken along line EE of FIG. 17, FIG. 19 is an enlarged plan view of a coupling portion, and FIG. 22 are a plan view and an explanatory view showing a modification.
　図１７～図１９に示すように、圧電振動板１０１は、外周形状が円形に形成され、平面視円形の台座部１０２と、この台座部１０２に結合線Ｋ（結合部分）で一体的に結合され、結合線Ｋより外周に向けて放射状に延びた分割線１０４でそれぞれ分割された複数個（図では６個）の振動部１０３ａ～１０３ｆを有している。前記台座部１０２は、その板厚が振動部１０３ａ～１０３ｆの板厚より所定寸法厚く形成されると共に、この台座部１０２の裏面と振動部１０３の裏面は略面一状態で、例えば一体成形等により形成されている。そして、台座部１０２と振動部１０３ａ～１０３ｆを結合する前記結合線Ｋは、図１８に示すように、表面及び裏面に所定深さ切欠くことで形成された抑圧干渉防止手段としての、幅がｗ３で深さがｈ３、ｈ４の溝１０５を有している。 As shown in FIGS. 17 to 19, the piezoelectric diaphragm 101 has a circular outer peripheral shape, and is integrally coupled to the pedestal portion 102 having a circular shape in plan view and a coupling line K (coupling portion) to the pedestal portion 102. In addition, a plurality of (six in the figure) vibrating portions 103a to 103f are respectively divided by dividing lines 104 extending radially from the coupling line K toward the outer periphery. The pedestal portion 102 is formed to have a plate thickness that is greater than the plate thickness of the vibrating portions 103a to 103f, and the back surface of the pedestal portion 102 and the back surface of the vibrating portion 103 are substantially flush with each other. It is formed by. Then, as shown in FIG. 18, the coupling line K that couples the base portion 102 and the vibrating portions 103a to 103f has a width as a suppression interference preventing means formed by notching a predetermined depth on the front surface and the back surface. A groove 105 having a depth of h3 and h4 at w3 is provided.
　この溝１０５は、円形の台座部１０２の外周部に円環状に形成されており、この溝１０５から前記各振動部１０３ａ～１０３ｆの各分割線１０４が外周方向に延設されている。このとき、各分割線１０４は直線１０４ａで形成され、隣接する一対の分割線１０４の台座部１０側の端部間が所定寸法を有して対向し、隣接する一対の分割線１０４の外周側端部が極僅かの隙間を有して対向するか略当接するように設定されている。これにより、隣接する一対の分割線１０４間に平面視で略楔形状の隙間１０６が形成されて、抑圧干渉防止手段としての溝１０５から各分割線１０４が連続状態で外周方向に延設された状態となっている。 The groove 105 is formed in an annular shape on the outer peripheral portion of the circular pedestal portion 102, and the dividing lines 104 of the vibrating portions 103a to 103f extend from the groove 105 in the outer peripheral direction. At this time, each dividing line 104 is formed by a straight line 104a, the ends of the pair of adjacent dividing lines 104 facing each other with a predetermined dimension are opposed to each other, and the outer peripheral side of the pair of adjacent dividing lines 104 The end portions are set so as to face each other or substantially contact with a very small gap. As a result, a substantially wedge-shaped gap 106 is formed between a pair of adjacent dividing lines 104 in plan view, and each dividing line 104 is continuously extended in the outer circumferential direction from the groove 105 as the suppression interference preventing means. It is in a state.
　この圧電振動板１０１によれば、台座部１０２の表面に密着固定された圧電体１０７（図１８参照）に電気信号が印加されると、この圧電体１０７に歪みが生じ、この歪みが台座部１０２を介して各振動部１０３ａ～１０３ｆに伝搬されて該振動部１０３ａ～１０３ｆで音響振動に変換される。このとき、台座部１０２と各振動部１０３ａ～１０３ｆの結合線Ｋの表裏面に溝１０５がそれぞれ形成されていることから、この溝１０５の開口縁角部等が自由振動領域となり、その結果、特に圧電体１０７に大きな電気信号が印加された場合に生じ易い、結合線Ｋ部分の抑圧干渉が前記自由振動領域に及ばず、結合線Ｋ部分における抑圧干渉が防止されることになる。 According to the piezoelectric diaphragm 101, when an electrical signal is applied to the piezoelectric body 107 (see FIG. 18) that is closely fixed to the surface of the pedestal portion 102, the piezoelectric body 107 is distorted, and this distortion is caused by the pedestal portion. It is propagated to each of the vibration parts 103a to 103f via 102 and converted into acoustic vibration by the vibration parts 103a to 103f. At this time, since the grooves 105 are respectively formed on the front and back surfaces of the coupling line K between the pedestal portion 102 and the vibration portions 103a to 103f, the opening edge corners and the like of the groove 105 become free vibration regions, and as a result, In particular, the suppression interference in the coupling line K portion, which is likely to occur when a large electrical signal is applied to the piezoelectric body 107, does not reach the free vibration region, and the suppression interference in the coupling line K portion is prevented.
　また、溝１０５の長手方向の両端部から各振動部１０３ａ～１０３ｆの分割線１０４が溝１０５に連続状態で外周方向にそれぞれ延設されているため、溝１０５により抑圧干渉が防止された振動が各振動部１０３ａ～１０３ｆに良好に伝搬される。そして、この振動は、分割線１０４が直線形状の各振動部１０３ａ～１０３ｆの外周に向かって良好に伝搬、すなわち台座部１０２から各振動部１０３ａ～１０３ｆの外周への振動伝搬がスムーズに行われることになる。 Further, since the dividing lines 104 of the vibrating portions 103a to 103f are continuously extended from the both ends in the longitudinal direction of the groove 105 in the outer peripheral direction, the vibration in which the suppression interference is prevented by the groove 105 is generated. Propagated well to each of the vibrating portions 103a to 103f. This vibration propagates well toward the outer periphery of each of the vibrating portions 103a to 103f having the dividing line 104, that is, the vibration is smoothly transmitted from the pedestal portion 102 to the outer periphery of each of the vibrating portions 103a to 103f. It will be.
　なお、前記圧電体１０７としては、圧電性セラミックを円盤状に成形することにより形成されるが、これに限定されるものではなく、例えばボイスコイル駆動式振動スピーカや超磁撓素子を使用した振動スピーカ等、圧電振動板１の台座部１０２に振動を与えることが可能な適宜の振動手段を採用することができる。また、以上の例では、結合線Ｋの表裏面に深さｈ３、ｈ４と幅ｗ３が略同一の溝１０５をそれぞれ形成したが、例えば溝１０５の幅や深さを表裏面で異ならせても良いし、図１８の二点鎖線で示すように、溝１０５を表面側（もしくは裏面側）のみに設けても良い。さらに、以上の説明では、溝１０５を台座部１０２の外周全域に円環状に設ける構成としたが、例えば各振動部１０３ａ～１０３ｆとの結合線Ｋにのみ設けて、前記隙間１０６部分には設けない構成とすることもできる。これらのことは、前述した各実施形態や後述する変形例等の各実施形態の圧電振動板についても同様である。 The piezoelectric body 107 is formed by forming a piezoelectric ceramic into a disk shape, but is not limited to this. For example, a vibration using a voice coil drive type vibration speaker or a super magnetostrictive element is used. Appropriate vibration means capable of applying vibration to the pedestal 102 of the piezoelectric diaphragm 1 such as a speaker can be employed. In the above example, the grooves 105 having substantially the same depths h3, h4 and width w3 are formed on the front and back surfaces of the coupling line K. However, for example, the width and depth of the groove 105 may be different on the front and back surfaces. Alternatively, as indicated by a two-dot chain line in FIG. 18, the groove 105 may be provided only on the front surface side (or the back surface side). Further, in the above description, the groove 105 is provided in an annular shape in the entire outer periphery of the pedestal portion 102. However, for example, the groove 105 is provided only in the coupling line K with each of the vibrating portions 103a to 103f and provided in the gap 106 portion. It can also be set as the structure which is not. The same applies to the piezoelectric diaphragms of the respective embodiments described above and the modifications described later.
　図２０～図２１は、前記第７の実施形態の変形例を示している。この変形例の圧電振動板１０１の特徴は、全ての分割線１０４を曲線１０４ｂ、１０４ｃとしたものであり、図２０（ａ）が内側に凹んだ曲線１０４ｂで形成され、図２０（ｂ）が外側に膨らんだ曲線１０４ｃで形成されている。そして、隣接する分割線１０４間には平面視で略楔形状の隙間１０６が形成されている。 20 to 21 show modifications of the seventh embodiment. The characteristic of the piezoelectric diaphragm 101 of this modification is that all the dividing lines 104 are curved lines 104b and 104c. FIG. 20 (a) is formed by a curved line 104b that is recessed inward, and FIG. It is formed by a curved line 104c bulging outward. A substantially wedge-shaped gap 106 is formed between the adjacent dividing lines 104 in plan view.
　また、図２１に示す圧電振動板１０１は、前記分割線１０４を外側に膨らんだ放物線１０４ｄで形成した点にある。すなわち、例えば図２２に示すように、焦点Ｆと準線Ｌで形成される放物線の例えばＰ０とＰ１間を分割線１０４として使用する。この分割線１０４によっても隣接する分割線１０４間に隙間１０６が形成される。なお、図２１においては、外側に膨らんだ放物線１０４ｄを使用したが、内側に凹んだ放物線を使用することもできるし、放物線１０４ｄの形状も、図２２に示す放物線のＰ０とＰ１間に限らず、例えばＰ１とＰ２間を使用したり、他の適宜の放物線を使用することもできる。 Further, the piezoelectric diaphragm 101 shown in FIG. 21 is formed by forming the dividing line 104 with a parabola 104d bulging outward. That is, for example, as shown in FIG. 22, a parabola formed by the focal point F and the quasi-line L, for example, between P0 and P1 is used as the dividing line 104. A gap 106 is also formed between the adjacent dividing lines 104 by this dividing line 104. In FIG. 21, the parabola 104d bulging outward is used, but a parabola concave inward can be used, and the shape of the parabola 104d is not limited to P0 and P1 of the parabola shown in FIG. For example, between P1 and P2 can be used, or any other suitable parabola can be used.
　図２３～図２５は、本発明に係わる圧電振動板の第８の実施形態及びその変形例を示している。この実施形態の圧電振動板１１１の特徴は、図２３に示すように、複数個（図では４個）の振動部１０３ａ～１０３ｄの径である直線１０４ａからなる分割線１０４の長さを、最長部分から左右外周に沿って徐々に短く設定することにより、平面視円形の台座部１０２を外周形状が円形の圧電振動板１１１の中心位置より偏心させて設けると共に、振動部１０３ａ、１０３ｄと振動部１０３ｂ、１０３ｃを左右対称形状に形成したものである。 23 to 25 show an eighth embodiment of the piezoelectric diaphragm according to the present invention and its modification. As shown in FIG. 23, the piezoelectric diaphragm 111 of this embodiment is characterized in that the length of the dividing line 104 composed of a straight line 104a that is the diameter of a plurality of (four in the figure) vibrating portions 103a to 103d is the longest. The pedestal portion 102 having a circular shape in plan view is provided to be eccentric from the center position of the piezoelectric diaphragm 111 having a circular outer peripheral shape, and the vibrating portions 103a and 103d and the vibrating portion are set by gradually shortening from the portion along the left and right outer periphery. 103b and 103c are formed in a symmetrical shape.
　この実施形態の圧電振動板１１１においても、溝１０５が形成された結合線Ｋから、直線１０４ａからなる各分割線１０４が外周方向に放射状に延びて隣接する分割線１０４間に隙間１０６が形成されており、前記第７の実施形態の圧電振動板１０１と同様の作用効果が得られることになる。また、この第８実施形態の圧電振動板１１１の場合は、各振動部１０３～１０３ｄの面積が異なることから、各振動部１０３ａ～１０３ｄの弾性率が異なるように設定されている。 Also in the piezoelectric diaphragm 111 of this embodiment, each dividing line 104 formed of a straight line 104a extends radially from the coupling line K in which the groove 105 is formed, and a gap 106 is formed between the adjacent dividing lines 104. Thus, the same effects as those of the piezoelectric diaphragm 101 of the seventh embodiment can be obtained. In the case of the piezoelectric diaphragm 111 of the eighth embodiment, since the areas of the vibrating parts 103 to 103d are different, the elastic moduli of the vibrating parts 103a to 103d are set to be different.
　この第８の実施形態の圧電振動板１１１においても、分割線１０４の形状は直線１０４ａに限らず、全ての分割線１０４を図２４（ａ）に示すように内側に凹んだ曲線１０４ｂや図２４（ｂ）に示すように外側に膨らんだ曲線１０４ｃで形成したり、全ての分割線１０４を適宜の放物線１０４ｄで形成したり、あるいは、図２５に示すように、分割線１０４として直線１０４ａや曲線１０４ｂ、１０４ｃ、放物線１０４ｄを適宜に組み合わせて使用することもできる。 Also in the piezoelectric diaphragm 111 of the eighth embodiment, the shape of the dividing line 104 is not limited to the straight line 104a, and all the dividing lines 104 are curved inwardly as shown in FIG. As shown in FIG. 25B, the curve 104c bulging outward, all the dividing lines 104 are formed as appropriate parabolas 104d, or as shown in FIG. 104b and 104c and the parabola 104d can be used in appropriate combination.
　なお、図２４（ａ）に示す圧電振動板１１１においては、振動部１０３ａ～１０３ｄの厚さが外周に向かうにしたがい順に薄くなるように複数（図では３つ）の段差１０８が設けられている。この段差１０８は、各実施形態の圧電振動板やその変形例にも適用できることは言うまでもない。また、この第８の実施形態の圧電振動板１１１においては、その外周形状が真円形に限らず、楕円形状で形成することも可能である。 Note that in the piezoelectric diaphragm 111 shown in FIG. 24A, a plurality of (three in the figure) steps 108 are provided so that the thickness of the vibrating portions 103a to 103d decreases in order toward the outer periphery. . Needless to say, the step 108 can also be applied to the piezoelectric diaphragms of the embodiments and modifications thereof. Further, in the piezoelectric diaphragm 111 of the eighth embodiment, the outer peripheral shape is not limited to a perfect circle, and may be formed in an elliptical shape.
　さらに、この第８の実施形態においては、例えば図２３の圧電振動板１１１の場合、平面視円形の台座部１０２の中心Ｏ１を、平面視円形の圧電振動板１１１の中心Ｏ２を通る上下方向の中心線ＣＬ上に位置させて、振動部１０３ａ、１０３ｄと振動部１０３ｂ、１０３ｃとを左右対称形状としたが、この形態に限定されず、例えば図２３に示すように、台座部１０２の中心Ｏ１をＯ１－１やＯ１－２のように中心線ＣＬに対して左右に所定量ずらし、すなわち偏心させて、各振動部１０３ａ～１０３ｄを左右非対称とすることも可能である。この場合、台座部１０２の中心Ｏ１を、左右方向の中心線ＣＬ１に対して上下方向に偏心させることも勿論可能である。 Further, in the eighth embodiment, for example, in the case of the piezoelectric diaphragm 111 of FIG. 23, the center O1 of the pedestal portion 102 having a circular shape in plan view passes through the center O2 of the piezoelectric diaphragm 111 having a circular shape in plan view. The vibrating parts 103a and 103d and the vibrating parts 103b and 103c are symmetrically positioned on the center line CL. However, the present invention is not limited to this form. For example, as shown in FIG. 23, the center O1 of the pedestal part 102 is used. As shown by O1-1 and O1-2, it is also possible to shift the vibration parts 103a to 103d asymmetrically left and right by shifting them by a predetermined amount with respect to the center line CL. In this case, it is of course possible to decenter the center O1 of the pedestal portion 102 in the vertical direction with respect to the center line CL1 in the left-right direction.
　図２６～図２８は、本発明に係わる圧電振動板の第９の実施形態及びその変形例を示している。この実施形態の圧電振動板１２１の特徴は、図２６に示すように、複数個（図では５個）の振動部１０３ａ～１０３ｅの直線１０４ａからなる分割線１０４の長さを最長部分と最短部分が所定の俯角を有するように徐々に変化させたものであり、圧電振動板１２１の外形形状が円形ではなく異形形状に形成されている。この実施形態の圧電振動板１２１も、前記圧電振動板１１１と同様に、各振動部１０３ａ～１０３ｅの弾性率が異なるように設定されている。 26 to 28 show a ninth embodiment of a piezoelectric diaphragm according to the present invention and its modification. As shown in FIG. 26, the piezoelectric diaphragm 121 of this embodiment is characterized in that the length of the dividing line 104 composed of the straight lines 104a of a plurality (five in the figure) of the vibrating parts 103a to 103e is the longest part and the shortest part. Is gradually changed so as to have a predetermined depression angle, and the outer shape of the piezoelectric diaphragm 121 is not a circle but an irregular shape. Similarly to the piezoelectric diaphragm 111, the piezoelectric diaphragm 121 of this embodiment is set so that the elastic modulus of each of the vibrating portions 103a to 103e is different.
　この第９の実施形態の圧電振動板１２１においても、分割線１０４は、直線１０４ａに限らず、全ての分割線１０４を図２７（ａ）に示すように内側に凹んだ曲線１０４ｂや図２７（ｂ）に示すよう外側に膨らんだ曲線１０４ｃで形成したり、全ての分割線１０４を適宜の放物線１０４ｄで形成したり、あるいは図２８に示すように、分割線１０４として直線１０４ａや曲線１０４ｂ、１０４ｃ、放物線１０４ｄを適宜に組み合わて使用することもできる。この実施形態の圧電振動板１２１においても、前記第７の実施形態の圧電振動板１０１と同様の作用効果を得ることができる。 Also in the piezoelectric diaphragm 121 of the ninth embodiment, the dividing line 104 is not limited to the straight line 104a, and all the dividing lines 104 are inwardly curved as shown in FIG. As shown in b), the curve 104c bulges outward, all the dividing lines 104 are formed as appropriate parabolas 104d, or as shown in FIG. 28, the dividing lines 104 are straight lines 104a and curves 104b, 104c. The parabola 104d can be used in appropriate combination. Also in the piezoelectric diaphragm 121 of this embodiment, the same operational effects as those of the piezoelectric diaphragm 101 of the seventh embodiment can be obtained.
　図３０と図３１は、本発明に係わる圧電振動板の第１０と第１１の実施形態を示している。図３０に示す第１０の実施形態の圧電振動板１０１の特徴は、分割線１０４で分割された４つの振動部１０３ａ～１０３ｄの外周形状、すなわち圧電振動板１０１の外形形状を、中心線ＣＬより左側に偏心した中心Ｏ３の円の略半分と、中心線ＣＬより右側に偏心した中心Ｏ４の円の略半分を合わせた状態の形状に形成した点にある。 30 and 31 show the tenth and eleventh embodiments of the piezoelectric diaphragm according to the present invention. A feature of the piezoelectric diaphragm 101 of the tenth embodiment shown in FIG. 30 is that the outer peripheral shape of the four vibrating portions 103a to 103d divided by the dividing line 104, that is, the outer shape of the piezoelectric diaphragm 101 is determined from the center line CL. The shape is such that approximately half of the circle of the center O3 eccentric to the left side and approximately half of the circle of the center O4 eccentric to the right side from the center line CL are combined.
　また、図３１に示す第１１の実施形態の圧電振動板１０１の特徴は、４つの振動部１０３ａ～１０３ｄの分割線１０４の先端（分割縁部１１０という）の平面視形状を、前記各実施形態のように、平面視で曲線や直線が鋭角に交差する尖った形状ではなく、平面視曲線形状に形成した点にある。すなわち、直線１０４ａや曲線１０４ｂ、１０４ｃあるいは放物線１０４ｄからなる分割線１０４の分割縁部１１０を、二点鎖線ａで拡大して示すように、平面視で楕円形形状や放物線形状の曲線形状としたり、二点鎖線ｂで拡大して示すように、平面視で円形の曲線形状とする。 Further, the piezoelectric diaphragm 101 of the eleventh embodiment shown in FIG. 31 is characterized in that the shape of the tip of the dividing line 104 (referred to as the dividing edge 110) of the four vibrating parts 103a to 103d is in plan view. In this way, the curved line or the straight line does not have a sharp shape intersecting at an acute angle in a plan view, but is formed in a plan view curved shape. That is, the dividing edge portion 110 of the dividing line 104 composed of the straight line 104a, the curves 104b and 104c, or the parabola 104d is enlarged in a two-dot chain line a to have an elliptical shape or a parabolic curved shape in plan view. As shown in an enlarged view by a two-dot chain line b, a circular curved shape is obtained in plan view.
　これにより、各振動部１０３ａ～１０３ｄの分割縁部１１０に尖った鋭角部がなくなり、鋭角部に発生し易い高周波振動の発生を抑制することができる。特に、高周波振動が発生し易い分割線１０４が最短となる、例えば図２３の振動部１０３ｃと振動部１０３ｄの分割縁部１１０における高周波振動の発生が効果的に抑制される。これらの第１０及び第１１の実施形態の圧電振動板１０１においても、前記第８の実施形態の圧電振動板と同様の作用効果を得ることができる。 As a result, there are no sharp sharp corners at the divided edge portions 110 of the vibrating portions 103a to 103d, and generation of high-frequency vibrations that are likely to occur at the sharp corners can be suppressed. In particular, the generation of high-frequency vibrations at the dividing edge portion 110 of the vibration part 103c and the vibration part 103d in FIG. In the piezoelectric diaphragm 101 of the tenth and eleventh embodiments, the same function and effect as the piezoelectric diaphragm of the eighth embodiment can be obtained.
　なお、図３１に示す圧電振動板１０１においては、各振動部１０３ａ～１０３ｄの各分割線１０４の全ての分割縁部１１０を平面視曲線形状としたが、例えば一部の分割縁部１１０のみを平面視曲線形状とし、他の部分は鋭角な形状とすることもできる。このように構成すれば、必要な分割縁部１１０のみを曲線形状に加工すれば良く、所望の振動特性が容易に得られたりコスト的に有利な圧電振動板１０１を得ることが可能となる。 In the piezoelectric diaphragm 101 shown in FIG. 31, all the dividing edges 110 of the dividing lines 104 of the vibrating parts 103a to 103d have a curved shape in plan view. However, for example, only some of the dividing edges 110 are formed. A planar view curve shape may be used, and the other part may be an acute angle shape. With this configuration, it is sufficient to process only the necessary divided edge portion 110 into a curved shape, and it is possible to easily obtain desired vibration characteristics and obtain a piezoelectric diaphragm 101 that is advantageous in terms of cost.
　また、この分割縁部１１０を平面視曲線形状に形成する構成は、図３１に示す実施形態の圧電振動板１０１に限定されず、例えば図３２に示すように、前記第９の実施形態の圧電振動板１２１に適用することもできる。すなわち、図３２（ａ）（ｂ）に示すように、各振動部１０３ａ～１０３ｆの分割線１０４の分割縁部１１０を平面視曲線形状に形成する。この場合も、全ての分割縁部１１０を平面視曲線形状に形成しても良いし、一部の分割縁部１１０を平面視曲線形状に形成することができる。 Further, the configuration in which the divided edge portion 110 is formed in a curved shape in plan view is not limited to the piezoelectric diaphragm 101 of the embodiment shown in FIG. 31, and for example, as shown in FIG. 32, the piezoelectric of the ninth embodiment is used. It can also be applied to the diaphragm 121. That is, as shown in FIGS. 32 (a) and 32 (b), the dividing edge portion 110 of the dividing line 104 of each of the vibrating portions 103a to 103f is formed in a curved shape in plan view. Also in this case, all the divided edge portions 110 may be formed in a planar view curve shape, or a part of the divided edge portions 110 may be formed in a plan view curve shape.
　このように、前記第７～第１１の各実施形態の圧電振動板１０１、１１１、１２１（圧電振動板１０１等という）においては、台座部１０２と振動部１０３ａ～１０３ｇとの結合線Ｋ部分に抑圧干渉防止手段としての溝１０５が設けられると共に、この溝１０５から分割線１０４が放射状に延設されているため、溝１０５により台座部１０２と各振動部１０３ａ～１０３ｇの結合線Ｋ部分に生じる抑圧干渉を軽減させることができると共に、この抑圧干渉が軽減された振動を溝１０５の長手方向の端部から分割線１０４に沿って各振動部１０３ａ～１０３ｇの外周側にスムーズに伝搬させて、綺麗な再生音の圧電振動板１０１等を得ることができる。 As described above, in the piezoelectric diaphragms 101, 111, and 121 (referred to as the piezoelectric diaphragm 101 and the like) of the seventh to eleventh embodiments, the coupling line K between the pedestal portion 102 and the vibrating portions 103a to 103g is provided. A groove 105 is provided as a suppression interference prevention means, and the dividing line 104 extends radially from the groove 105. Therefore, the groove 105 causes a coupling line K portion between the base portion 102 and the vibrating portions 103a to 103g. The suppression interference can be reduced, and the vibration with the suppression interference reduced can be smoothly propagated along the dividing line 104 from the longitudinal end of the groove 105 to the outer periphery of each of the vibration parts 103a to 103g. It is possible to obtain the piezoelectric diaphragm 101 and the like having a beautiful reproduced sound.
　特に、分割線１０４として結合線Ｋから外周に向けて連続状態の放物線１０４ｄや曲線１０４ｂ、１０４ｃを使用することにより、一層綺麗で明瞭な再生音の圧電振動板１０１等を得ることが可能になると共に、分割線１０４として直線１０４ａや曲線１０４ｂ、１０４ｃ及び放物線１０４ｄを適宜に組み合わせて使用すれば、分割線１０４の形状により各振動部１０３ａ～１０３ｇの弾性率を微妙に変化させることができて、所望の音質の圧電振動板１０１等を容易に得ることが可能になる。また、各振動部の分割縁部１１０を平面視曲線形状に形成すれば、分割縁部１１０における高周波振動の発生を抑制することができて、圧電振動板に、より綺麗で明瞭な再生音を得ることが可能となる。 In particular, by using a continuous parabola 104d and curves 104b and 104c from the coupling line K to the outer circumference as the dividing line 104, it becomes possible to obtain the piezoelectric diaphragm 101 and the like of a more beautiful and clear reproduced sound. At the same time, if the straight line 104a, the curves 104b and 104c, and the parabola 104d are used in an appropriate combination as the dividing line 104, the elastic modulus of each of the vibrating portions 103a to 103g can be slightly changed depending on the shape of the dividing line 104. It becomes possible to easily obtain the piezoelectric diaphragm 101 having a desired sound quality. In addition, if the dividing edge 110 of each vibration part is formed in a curved shape in plan view, generation of high-frequency vibrations at the dividing edge 110 can be suppressed, and a more beautiful and clear reproduction sound can be generated on the piezoelectric diaphragm. Can be obtained.
　また、抑圧干渉防止手段が、台座部１０２と各振動部１０３ａ～１０３ｇの結合線Ｋ部分の表面もしくは裏面の少なくとも一方に形成された溝１０５であるため、各振動部１０３ａ～１０３ｇの形態等に応じて溝１０５の深さｈ３、ｈ４や幅ｗ３を所定に設定することにより、抑圧干渉を確実に抑制することができると共に、抑圧干渉防止手段を結合線Ｋ部分に簡単に形成することができて、圧電振動板１０１等のコストアップを抑えることができる。 Further, since the suppression interference preventing means is the groove 105 formed in at least one of the front surface or the back surface of the coupling line K portion of the pedestal portion 102 and each of the vibration portions 103a to 103g, the form of each of the vibration portions 103a to 103g, etc. Accordingly, by setting the depths h3 and h4 and the width w3 of the groove 105 to predetermined values, it is possible to reliably suppress the suppression interference, and it is possible to easily form the suppression interference prevention means in the coupling line K portion. Thus, an increase in cost of the piezoelectric diaphragm 101 and the like can be suppressed.
　さらに、各振動部１０３ａ～１０３ｇを放射状に分割する分割線１０４が、直線１０４ａ、外側または内側に膨らんだ曲線１０４ｂ、１０４ｃ、放物線１０４ｄのいずれかかもしくはこれらの組み合わせで形成されているため、台座部１０２の振動を各振動部１０３ａ～１０３ｇの外周側に一層スムーズに伝搬させることができる。また、各振動部１０３ａ～１０３ｇが厚さの異なる段差１０８を有するように形成すれば、段差１０８で各振動部１０３ａ～１０３ｇの振動状態に変化を持たせることができて、各種形態の圧電スピーカに使用できる等、汎用性を一層向上させることができる。 Further, since the dividing line 104 that divides each of the vibrating portions 103a to 103g radially is formed by any one of the straight line 104a, the curved lines 104b and 104c bulging outward or inward, the parabola 104d, or a combination thereof, the pedestal The vibration of the part 102 can be more smoothly propagated to the outer peripheral side of each of the vibration parts 103a to 103g. Further, if each of the vibration parts 103a to 103g is formed to have a step 108 having a different thickness, the vibration state of each of the vibration parts 103a to 103g can be changed by the step 108, and various types of piezoelectric speakers can be obtained. The versatility can be further improved.
　なお、本発明は、前記した第１～第１１の各実施形態のそれぞれやその変形例に限定されるものではなく、各実施形態やその変形例を適宜に組み合わせることもできる。また、前記第７～第１１の各実施形態においては、各振動部１０３ａ～１０３ｇの外周形状を曲線で形成し、圧電振動板１０１等の外周形状を円形や楕円形状としたが、例えば図２９に示すように、振動部１０３ｄ～１０３ｆの外周の一部（もしくは全部）の形状を円弧形（曲線）ではなく直線１０９で形成したり、放物線を含む凹凸形状の各種曲線やこれらを適宜に組み合わせて形成することもでき、このように構成することにより、各種外形形状の圧電振動板１０１等を得ることができて、各種圧電スピーカに使用することができる。 It should be noted that the present invention is not limited to each of the first to eleventh embodiments and their modifications, and can be appropriately combined with each embodiment and its modifications. In each of the seventh to eleventh embodiments, the outer peripheral shape of each of the vibrating portions 103a to 103g is formed with a curve, and the outer peripheral shape of the piezoelectric vibration plate 101 or the like is circular or elliptical. For example, FIG. As shown in FIG. 4, the shape of a part (or all) of the outer periphery of the vibrating portions 103d to 103f is not a circular arc (curve) but a straight line 109, various uneven curves including a parabola, The piezoelectric diaphragm 101 having various outer shapes can be obtained and can be used for various piezoelectric speakers.
　さらに、前記第７～第１１の各実施形態においては、分割線１０４が結合線Ｋから各振動部１０３ａ～１０３ｇの外周まで連続した直線１０４ａや曲線１０４ｂ、１０４ｃ、放物線１０４ｄで形成したが、例えば図２９に示すように、内側に凹んだ曲線１０４ｂと外側に膨らんだ曲線１０４ｃを連続させた分割線１０４を使用する等、直線と各種形状の曲線を連続させた形状の分割線１０４を使用することもできる。また、前記各実施形態においては、抑圧干渉防止手段として、結合線Ｋ部分に切込み状の溝１０５を長手方向に連続状態で設けることにより形成したが、例えば溝１０５を長手方向に分割状態で設けたり、溝１０５の代わりに突条を使用したりあるいは溝と突条を併用する等、振動部１０３ａ～１０３ｇの形態等に応じて適宜の構成を採用することができる。 Further, in each of the seventh to eleventh embodiments, the dividing line 104 is formed by the straight line 104a, the curves 104b and 104c, and the parabola 104d that are continuous from the coupling line K to the outer periphery of each of the vibrating portions 103a to 103g. As shown in FIG. 29, a dividing line 104 having a shape in which straight lines and curves of various shapes are continuously used, such as a dividing line 104 in which a curved line 104b that is recessed inward and a curved line 104c that is expanded outward is used. You can also Further, in each of the above embodiments, the suppression interference preventing means is formed by providing the notched groove 105 continuously in the longitudinal direction in the coupling line K, but for example, the groove 105 is provided in a divided state in the longitudinal direction. An appropriate configuration can be employed according to the form of the vibrating portions 103a to 103g, such as using a ridge instead of the groove 105, or using both the groove and the ridge.
　さらにまた、前記第７～第１１の各実施形態においては、振動部１０３ａ～１０３ｇの板厚が全域において同一の平板状に形成するか、あるいは段差１０８により台座部２側から外周に向けて板厚が段階的に薄くなる形状を採用したが、例えば振動部１０３ａ～１０３ｇの板厚を台座部２側から外周に向けて連続的に薄くなる断面テーパ形状とすることも可能である。また、前記第７～第１１の各実施形態における台座部１０２等の形状も円形に限らず、例えば図２９に示すように６角形等の多角形状や正方形状、長方形状等の台座部１０２を使用することもできるし、圧電振動板自体の全体形状も、振動部１０３ａ～１０３ｇの外周が略連続した形状に限らず、例えば振動部１０３ａ～１０３ｇの外周が連続していない圧電振動板に適用することができる。このように前記第１～第１１の各実施形態における、圧電振動板の形態や台座部の形状、凹部や溝の形状、振動部の形状や個数等は、本発明に係わる各発明の要旨を逸脱しない範囲において適宜に変更することができる。 Furthermore, in each of the seventh to eleventh embodiments, the plate portions of the vibrating portions 103a to 103g are formed in the same flat plate shape in the entire region, or a plate is formed from the pedestal portion 2 side toward the outer periphery by the step 108. Although a shape in which the thickness gradually decreases is employed, for example, the plate thickness of the vibrating portions 103a to 103g may be a tapered shape that continuously decreases from the base portion 2 side toward the outer periphery. Further, the shape of the pedestal portion 102 and the like in each of the seventh to eleventh embodiments is not limited to a circle. For example, as shown in FIG. 29, a pedestal portion 102 such as a polygonal shape such as a hexagon, a square shape, or a rectangular shape is provided. The overall shape of the piezoelectric diaphragm itself is not limited to the shape in which the outer peripheries of the vibrating parts 103a to 103g are substantially continuous. For example, it is applied to a piezoelectric diaphragm in which the outer peripheries of the vibrating parts 103a to 103g are not continuous. can do. As described above, in each of the first to eleventh embodiments, the form of the piezoelectric diaphragm, the shape of the pedestal, the shape of the recess and the groove, the shape and the number of the vibrating parts, etc. are the gist of each invention related to the present invention. Changes can be made as appropriate without departing from the scope.
　本発明は、圧電体が密着固定される台座部と、この台座部に一体的に結合される振動部を有する全ての圧電振動板に利用できる。 The present invention can be used for all piezoelectric diaphragms having a pedestal portion to which a piezoelectric body is closely fixed and a vibration portion integrally coupled to the pedestal portion.
本発明に係る圧電振動板の第１の実施形態を示す平面図The top view which shows 1st Embodiment of the piezoelectric diaphragm which concerns on this invention. 同図１のＡ－Ａ線矢視図AA line arrow view of FIG. 同その変形例を示す平面図The top view which shows the modification example 本発明に係わる圧電振動板の第２の実施形態を示す平面図The top view which shows 2nd Embodiment of the piezoelectric diaphragm concerning this invention. 同図４のＢ－Ｂ線矢視図BB arrow view of Fig. 4 同その変形例を示す平面図The top view which shows the modification example 本発明に係わる圧電振動板の第３の実施形態を示す平面図The top view which shows 3rd Embodiment of the piezoelectric diaphragm concerning this invention. 同その変形例を示す平面図The top view which shows the modification example 本発明に係わる圧電振動板の第４の実施形態を示す平面図The top view which shows 4th Embodiment of the piezoelectric diaphragm concerning this invention. 同その変形例を示す要部の平面図The top view of the principal part which shows the modification example 同さらに他の変形例を示す要部の平面図The top view of the principal part which shows the other modification same as the above 本発明に係わる圧電振動板の第５の実施形態を示す平面図The top view which shows 5th Embodiment of the piezoelectric diaphragm concerning this invention. 本発明に係わる圧電振動板の第６の実施形態を示す平面図The top view which shows 6th Embodiment of the piezoelectric diaphragm concerning this invention. 同図１３のＣ－Ｃ線矢視図CC line arrow view of Fig. 13 同その変形例を示す（ａ）が図１４と同様の断面図、（ｂ）が（ａ）のＤ－Ｄ線に沿った断面図(A) is a cross-sectional view similar to FIG. 14, and (b) is a cross-sectional view taken along the line DD of (a), showing a modification thereof. 同さらに他の変形例を示す要部の断面図Sectional drawing of the principal part which shows the other modification same as the above 本発明に係る圧電振動板の第７の実施形態を示す平面図The top view which shows 7th Embodiment of the piezoelectric diaphragm which concerns on this invention. 同図１７のＥ－Ｅ線に沿った断面図Sectional view along line EE in FIG. 同結合線部分の拡大平面図An enlarged plan view of the connecting line portion 同その変形例を示す平面図The top view which shows the modification example 同他の変形例を示す平面図Plan view showing another modification 同その説明図Explanation of the same 本発明に係わる圧電振動板の第８の実施形態を示す平面図The top view which shows 8th Embodiment of the piezoelectric diaphragm concerning this invention. 同その変形例を示す平面図The top view which shows the modification example 同他の変形例を示す平面図Plan view showing another modification 本発明に係わる圧電振動板の第９の実施形態を示す平面図The top view which shows 9th Embodiment of the piezoelectric diaphragm concerning this invention. 同その変形例を示す平面図The top view which shows the modification example 同他の変形例を示す平面図Plan view showing another modification 同さらに他の変形例を示す平面図A plan view showing still another modification example 本発明に係わる圧電振動板の第１０の実施形態を示す平面図The top view which shows 10th Embodiment of the piezoelectric diaphragm concerning this invention. 本発明に係わる圧電振動板の第１１の実施形態を示す平面図The top view which shows 11th Embodiment of the piezoelectric diaphragm concerning this invention 同その変形例を示す平面図The top view which shows the modification example
符号の説明Explanation of symbols
　１、１１、２１、３１、４１、５１、１０１、１１１、１２１・・・圧電振動板、１ａ、１１ａ、２１ａ、３１ａ、４１ａ、５１ａ、１０２・・・台座部、１ｂ、１１ｂ～１１ｅ、２１ｂ～２１ｇ、３１ｂ～３１ｉ、４１ｂ～４１ｄ、５１ｂ～５１ｅ、１０３ａ～１０３ｆ・・・振動部、３、５３・・・凹部（抑圧干渉防止手段体）、４、１０７・・・圧電体、５、１４・・・直線部、６、１５・・・曲線部、１２、２２、５２、１０８・・・段差、１３、１０６・・・間隙、１０４・・・分割線、１０４ａ・・・直線、１０４ｂ、１０４ｃ・・・曲線、１０４ｄ・・・放物線、１０５・・・溝（抑圧干渉防止手段）、１０９・・・外周、１１０・・・分割縁部、Ｋ・・・結合線、Ｒ・・・自由振動領域、Ｆ・・・焦点、Ｌ・・・準線。 1, 11, 21, 31, 41, 51, 101, 111, 121 ... piezoelectric diaphragm, 1a, 11a, 21a, 31a, 41a, 51a, 102 ... pedestal, 1b, 11b to 11e, 21b 21g, 31b-31i, 41b-41d, 51b-51e, 103a-103f ... vibrating part, 3, 53 ... recessed part (suppression interference preventing means body), 4,107 ... piezoelectric body, 5, 14 ... straight line part, 6, 15 ... curved part, 12, 22, 52, 108 ... step, 13, 106 ... gap, 104 ... dividing line, 104a ... straight line, 104b 104c ... curve, 104d ... parabola, 105 ... groove (suppression interference prevention means), 109 ... outer periphery, 110 ... split edge, K ... coupling line, R ... Free vibration region, F ... focal point, L ... quasi-line.

Claims (14)

  1. 　表面に圧電体が密着固定される台座部と、該台座部に一体的に結合される振動部と、を備えた圧電振動板であって、
    　前記台座部と振動部の結合部分に、振動部の抑圧干渉を防止する抑圧干渉防止手段を設けたことを特徴とする圧電振動板。     A piezoelectric diaphragm comprising: a pedestal part to which a piezoelectric body is closely fixed to the surface; and a vibration part integrally coupled to the pedestal part,
    A piezoelectric vibration plate characterized in that suppression interference preventing means for preventing suppression interference of the vibration part is provided at a joint portion between the base part and the vibration part.
  2. 　前記抑圧干渉防止手段は、前記結合部分の振動部側面を厚さ方向に切欠くことで設けた凹部、結合部分の振動部表面に溝状に設けた凹部もしくは結合部分の振動部側面を平面視曲線で形成することで設けた凹部であることを特徴とする請求項１に記載の圧電振動板。 The suppression interference preventing means is a plan view of a concave portion provided by notching a vibration portion side surface of the coupling portion in a thickness direction, a concave portion provided in a groove shape on the vibration portion surface of the coupling portion, or a vibration portion side surface of the coupling portion. The piezoelectric diaphragm according to claim 1, wherein the piezoelectric diaphragm is a recess provided by being formed with a curve.
  3. 　前記凹部は、その形状や位置が前記振動部の弾性率に応じて設定されていることを特徴とする請求項２に記載の圧電振動板。 3. The piezoelectric diaphragm according to claim 2, wherein the shape and position of the recess are set in accordance with an elastic modulus of the vibration part.
  4. 　前記凹部は、その形状が直線もしくは曲線もしくはこれらを組み合わせた形状で形成されていることを特徴とする請求項２または３に記載の圧電振動板。 4. The piezoelectric diaphragm according to claim 2, wherein the concave portion is formed in a shape of a straight line, a curved line, or a combination thereof.
  5. 　前記振動部は、その厚さが、均一、段差状もしくはテーパー状に形成されていることを特徴とする請求項１ないし４のいずれかに記載の圧電振動板。 The piezoelectric diaphragm according to any one of claims 1 to 4, wherein the thickness of the vibrating portion is uniform, stepped or tapered.
  6. 　前記振動部は、前記台座部に対して単数もしくは複数結合されていることを特徴とする請求項１ないし５のいずれかに記載の圧電振動板。 6. The piezoelectric diaphragm according to claim 1, wherein one or a plurality of the vibration parts are coupled to the pedestal part.
  7. 　前記台座部は、その平面視形状が、円、楕円、三角形、四角、もしくは多角形状に形成されていることを特徴とする請求項１ないし６のいずれかに記載の圧電振動板。 The piezoelectric diaphragm according to any one of claims 1 to 6, wherein the pedestal is formed in a circular, elliptical, triangular, square, or polygonal shape in plan view.
  8. 　前記振動部は、その側面の平面視形状が前記台座部の外周線の所定位置から外方に延びる直線形状もしくは放物線を含む曲線形状もしくはこれらを組み合わせた形状に形成されていることを特徴とする請求項１ないし７のいずれかに記載の圧電振動板。 The vibration part is formed in a shape of a planar view of a side surface thereof in a linear shape extending outward from a predetermined position of the outer peripheral line of the pedestal part, a curved shape including a parabola, or a combination thereof. The piezoelectric diaphragm according to any one of claims 1 to 7.
  9. 　表面に圧電体が密着固定される台座部と、該台座部に一体的に結合されると共に台座部から外周に向かって延びる分割線により放射状に分割された複数の振動部と、を備えた圧電振動板であって、
    　前記台座部と振動部の結合部分に厚さ方向の抑圧干渉防止手段を設けると共に、該抑圧干渉防止手段から外周に向かって前記分割線が延設されていることを特徴とする圧電振動板。     A piezoelectric device comprising: a pedestal portion to which a piezoelectric body is closely fixed to the surface; and a plurality of vibration portions that are integrally coupled to the pedestal portion and are radially divided by dividing lines extending from the pedestal portion toward the outer periphery. A diaphragm,
    A piezoelectric diaphragm according to claim 1, wherein a suppression interference preventing means in a thickness direction is provided at a joint portion between the pedestal part and the vibration part, and the dividing line extends from the suppression interference preventing means toward the outer periphery.
  10. 　前記抑圧干渉防止手段は、前記台座部と振動部の結合部分の表面もしくは裏面の少なくとも一方に形成された溝であることを特徴とする請求項９に記載の圧電振動板。 10. The piezoelectric diaphragm according to claim 9, wherein the suppression interference preventing means is a groove formed in at least one of a front surface or a back surface of a joint portion between the base portion and the vibration portion.
  11. 　前記分割線は、直線、外側または内側に膨らんだ曲線、放物線のいずれかかもしくはこれらの組み合わせで形成されていることを特徴とする請求項９または１０に記載の圧電振動板。 11. The piezoelectric diaphragm according to claim 9, wherein the dividing line is formed of any one of a straight line, a curved line bulging outward or inward, a parabola, or a combination thereof.
  12. 　前記振動部は、その外周形状が曲線、直線のいずれかかもしくはこれらの組み合わせで形成されていることを特徴とする請求項９ないし１１のいずれかに記載の圧電振動板。 The piezoelectric diaphragm according to any one of claims 9 to 11, wherein the vibrating portion has an outer peripheral shape formed of either a curve or a straight line, or a combination thereof.
  13. 　前記振動部は、厚さが異なる段差を有することを特徴とする請求項９ないし１２のいずれかに記載の圧電振動板。 13. The piezoelectric diaphragm according to claim 9, wherein the vibration part has a step having different thicknesses.
  14. 　前記複数の振動部は、前記分割線の先端となる分割縁部の全てもしくは一部が、平面視で円形状、楕円形状、放物線形状等の曲線形状で形成されていることを特徴とする請求項９ないし１３のいずれかに記載の圧電振動板。 The plurality of vibration parts are characterized in that all or part of the dividing edge serving as the tip of the dividing line is formed in a curved shape such as a circular shape, an elliptical shape, or a parabolic shape in plan view. Item 14. The piezoelectric diaphragm according to any one of Items 9 to 13.
PCT/JP2008/003502 2008-01-21 2008-11-27 Piezoelectric vibration plate WO2009093291A1 (en)

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