WO2009086976A3 - Micromechanical component and production method for a micromechanical component - Google Patents
Micromechanical component and production method for a micromechanical component Download PDFInfo
- Publication number
- WO2009086976A3 WO2009086976A3 PCT/EP2008/065524 EP2008065524W WO2009086976A3 WO 2009086976 A3 WO2009086976 A3 WO 2009086976A3 EP 2008065524 W EP2008065524 W EP 2008065524W WO 2009086976 A3 WO2009086976 A3 WO 2009086976A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- micromechanical component
- lateral surface
- production method
- electrode
- subjected
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/033—Comb drives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
Abstract
The invention relates to a micromechanical component, comprising at least one stator electrode (21) with at least one lateral surface, divided into at least two electrically conducting sections (26, 27, 29, 30) which are electrically insulated from each other and which are subjected to differing voltages. The micromechanical component further comprises at least one moving actuator electrode (22), which has a lateral surface divided into at least two electrically conducting sections (32, 34; 80, 82) which are electrically insulated from each other and which are subjected to differing voltages. The lateral surface of the actuator electrode (22) is arranged to face the lateral surface of the stator electrode (21; 71a, 71b; 103, 104).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200810003344 DE102008003344A1 (en) | 2008-01-07 | 2008-01-07 | Micromechanical component and production method for a micromechanical component |
DE102008003344.8 | 2008-01-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009086976A2 WO2009086976A2 (en) | 2009-07-16 |
WO2009086976A3 true WO2009086976A3 (en) | 2010-01-07 |
Family
ID=40719441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/065524 WO2009086976A2 (en) | 2008-01-07 | 2008-11-14 | Micromechanical component and production method for a micromechanical component |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102008003344A1 (en) |
WO (1) | WO2009086976A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008042967B4 (en) | 2008-10-20 | 2017-04-06 | Robert Bosch Gmbh | Cascaded micromechanical actuator structure |
DE102017215276B4 (en) * | 2017-08-31 | 2023-02-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Multi-directional translation and tilt platform using flexure actuators as the active entity |
US11101746B2 (en) * | 2018-12-13 | 2021-08-24 | Beijing Voyager Technology Co., Ltd. | Bipolar staggered comb drive for bidirectional MEMS actuation |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020005976A1 (en) * | 2000-03-24 | 2002-01-17 | Behrang Behin | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
US20040232107A1 (en) * | 2002-10-24 | 2004-11-25 | Fujitsu Limited | Method for manufacturing microstructure |
WO2005068353A1 (en) * | 2004-01-20 | 2005-07-28 | National University Of Singapore | Optical scanning using vibratory diffraction gratings |
US20070054433A1 (en) * | 2005-09-08 | 2007-03-08 | Rockwell Scientific Licensing Llc | High temperature microelectromechanical (MEM) devices and fabrication method |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7479402B2 (en) | 2006-03-20 | 2009-01-20 | Honeywell International Inc. | Comb structure fabrication methods and systems |
-
2008
- 2008-01-07 DE DE200810003344 patent/DE102008003344A1/en not_active Ceased
- 2008-11-14 WO PCT/EP2008/065524 patent/WO2009086976A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020005976A1 (en) * | 2000-03-24 | 2002-01-17 | Behrang Behin | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
US20040232107A1 (en) * | 2002-10-24 | 2004-11-25 | Fujitsu Limited | Method for manufacturing microstructure |
WO2005068353A1 (en) * | 2004-01-20 | 2005-07-28 | National University Of Singapore | Optical scanning using vibratory diffraction gratings |
US20070054433A1 (en) * | 2005-09-08 | 2007-03-08 | Rockwell Scientific Licensing Llc | High temperature microelectromechanical (MEM) devices and fabrication method |
Also Published As
Publication number | Publication date |
---|---|
DE102008003344A1 (en) | 2009-07-09 |
WO2009086976A2 (en) | 2009-07-16 |
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