WO2009063820A1 - ドライポンプ - Google Patents

ドライポンプ Download PDF

Info

Publication number
WO2009063820A1
WO2009063820A1 PCT/JP2008/070393 JP2008070393W WO2009063820A1 WO 2009063820 A1 WO2009063820 A1 WO 2009063820A1 JP 2008070393 W JP2008070393 W JP 2008070393W WO 2009063820 A1 WO2009063820 A1 WO 2009063820A1
Authority
WO
WIPO (PCT)
Prior art keywords
dry pump
rotor
shaft
heat transfer
rotor shaft
Prior art date
Application number
PCT/JP2008/070393
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Toshio Suzuki
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Publication of WO2009063820A1 publication Critical patent/WO2009063820A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
PCT/JP2008/070393 2007-11-14 2008-11-10 ドライポンプ WO2009063820A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007296013 2007-11-14
JP2007-296013 2007-11-14

Publications (1)

Publication Number Publication Date
WO2009063820A1 true WO2009063820A1 (ja) 2009-05-22

Family

ID=40638670

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070393 WO2009063820A1 (ja) 2007-11-14 2008-11-10 ドライポンプ

Country Status (2)

Country Link
TW (1) TW200938732A (zh)
WO (1) WO2009063820A1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109026709A (zh) * 2018-09-18 2018-12-18 世通海泰泵业（天津）股份有限公司 多级压缩式真空泵
CN111911386A (zh) * 2020-08-12 2020-11-10 安徽高坚机械科技有限公司 一种制冷压缩机用曲柄连杆机构及其工作方法
FR3103862A1 (fr) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor et pompe à vide sèche multiétagée
WO2023223031A1 (en) * 2022-05-18 2023-11-23 Edwards Limited Multi-stage vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
JPS62200191U (zh) * 1986-06-11 1987-12-19
JPS63126576U (zh) * 1987-02-12 1988-08-18
JPH11230060A (ja) * 1998-02-18 1999-08-24 Ebara Corp 回転式気体機械用ロータ及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
JPS62200191U (zh) * 1986-06-11 1987-12-19
JPS63126576U (zh) * 1987-02-12 1988-08-18
JPH11230060A (ja) * 1998-02-18 1999-08-24 Ebara Corp 回転式気体機械用ロータ及びその製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109026709A (zh) * 2018-09-18 2018-12-18 世通海泰泵业（天津）股份有限公司 多级压缩式真空泵
FR3103862A1 (fr) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor et pompe à vide sèche multiétagée
WO2021110447A1 (en) * 2019-12-03 2021-06-10 Pfeiffer Vacuum Rotor and multistage dry vacuum pump
CN114729642A (zh) * 2019-12-03 2022-07-08 普发真空公司 转子和多级干式真空泵
CN111911386A (zh) * 2020-08-12 2020-11-10 安徽高坚机械科技有限公司 一种制冷压缩机用曲柄连杆机构及其工作方法
WO2023223031A1 (en) * 2022-05-18 2023-11-23 Edwards Limited Multi-stage vacuum pump

Also Published As

Publication number Publication date
TW200938732A (en) 2009-09-16

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