WO2009054087A1 - Inspection device - Google Patents

Inspection device Download PDF

Info

Publication number
WO2009054087A1
WO2009054087A1 PCT/JP2008/002521 JP2008002521W WO2009054087A1 WO 2009054087 A1 WO2009054087 A1 WO 2009054087A1 JP 2008002521 W JP2008002521 W JP 2008002521W WO 2009054087 A1 WO2009054087 A1 WO 2009054087A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
region
ray
inspection device
scintillator
Prior art date
Application number
PCT/JP2008/002521
Other languages
French (fr)
Japanese (ja)
Inventor
Takuyu Kubo
Original Assignee
Ishida Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishida Co., Ltd. filed Critical Ishida Co., Ltd.
Publication of WO2009054087A1 publication Critical patent/WO2009054087A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20—Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20188—Auxiliary details, e.g. casings or cooling
    • G01T1/2019—Shielding against direct hits

Landscapes

  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)

Abstract

Disclosed is an inspection device wherein durability deterioration of a light-receiving element or generation of noise due to influence of radiation can be avoided. Specifically, an X-ray line sensor (8) comprises a scintillator (31), which is arranged within a region (R1) that is irradiated with X-rays (K1, K2) from an X-ray irradiator (7) and converts a received X-ray into a light (K3), an optical waveguide (33) for guiding the light (K3) emitted from the scintillator (31) to a region (R2) that is not irradiated with X-rays (K1, K2), and a light-receiving element (32) arranged within the region (R2) for receiving the light (K3) guided by the optical waveguide (33).
PCT/JP2008/002521 2007-10-26 2008-09-11 Inspection device WO2009054087A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-279165 2007-10-26
JP2007279165A JP2009109227A (en) 2007-10-26 2007-10-26 Inspection device

Publications (1)

Publication Number Publication Date
WO2009054087A1 true WO2009054087A1 (en) 2009-04-30

Family

ID=40579197

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002521 WO2009054087A1 (en) 2007-10-26 2008-09-11 Inspection device

Country Status (2)

Country Link
JP (1) JP2009109227A (en)
WO (1) WO2009054087A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013002910A (en) * 2011-06-15 2013-01-07 Toshiba Corp Pattern checking method and pattern checking apparatus
GB201213827D0 (en) * 2012-08-03 2012-09-19 Artemis Diagnostics Ltd Method and apparatus for imaging

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63314492A (en) * 1987-06-18 1988-12-22 Seiko Instr & Electronics Ltd X-ray image sensor
JPH0587934A (en) * 1991-04-16 1993-04-09 Hitachi Metals Ltd Scintillator, manufacture thereof and radiation detector
JP2005292721A (en) * 2004-04-05 2005-10-20 Canon Inc Element structure and display element with same
JP2006243452A (en) * 2005-03-04 2006-09-14 Ricoh Co Ltd Manufacturing method of periodic structural body and optical element using the periodic structural body

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63314492A (en) * 1987-06-18 1988-12-22 Seiko Instr & Electronics Ltd X-ray image sensor
JPH0587934A (en) * 1991-04-16 1993-04-09 Hitachi Metals Ltd Scintillator, manufacture thereof and radiation detector
JP2005292721A (en) * 2004-04-05 2005-10-20 Canon Inc Element structure and display element with same
JP2006243452A (en) * 2005-03-04 2006-09-14 Ricoh Co Ltd Manufacturing method of periodic structural body and optical element using the periodic structural body

Also Published As

Publication number Publication date
JP2009109227A (en) 2009-05-21

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