WO2009053027A3 - Pumpe, pumpenanordnung und pumpenmodul - Google Patents

Pumpe, pumpenanordnung und pumpenmodul Download PDF

Info

Publication number
WO2009053027A3
WO2009053027A3 PCT/EP2008/008895 EP2008008895W WO2009053027A3 WO 2009053027 A3 WO2009053027 A3 WO 2009053027A3 EP 2008008895 W EP2008008895 W EP 2008008895W WO 2009053027 A3 WO2009053027 A3 WO 2009053027A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
arrangement
module
causes
opening
Prior art date
Application number
PCT/EP2008/008895
Other languages
English (en)
French (fr)
Other versions
WO2009053027A2 (de
Inventor
Martin Wackerle
Jürgen KRUCKOW
Martin Richter
Klaus Heinrich
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority to EP08842526.9A priority Critical patent/EP2207963B1/de
Priority to US12/739,031 priority patent/US9217426B2/en
Publication of WO2009053027A2 publication Critical patent/WO2009053027A2/de
Publication of WO2009053027A3 publication Critical patent/WO2009053027A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Eine Pumpe besitzt eine Einlassöffnung, eine Auslassöffnung, eine Pumpmembran, die eine mit einem passiven Rückschlagventil versehene Öffnung durch die Pumpmembran aufweist, und eine Betätigungseinrichtung, die ausgelegt ist, um die Pumpmembran zwischen einer ersten Position und einer zweiten Position zu bewegen. Das passive Rückschlagventil ist derart ausgelegt, das eine Bewegung von der ersten Position in Richtung zu der zweiten Position schließend wirkt und eine Bewegung von der zweiten Position in Richtung zu der ersten Position öffnend wirkt, so dass ein Pumpzyklus, bei dem die Pumpmembran von der ersten in die zweite Position und zurück bewegt wird, einen Nettofluss von der Einlassöffnung zu der Auslassöffnung bewirkt.
PCT/EP2008/008895 2007-10-22 2008-10-21 Pumpe, pumpenanordnung und pumpenmodul WO2009053027A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08842526.9A EP2207963B1 (de) 2007-10-22 2008-10-21 Pumpe und pumpenanordnung pumpenmodul
US12/739,031 US9217426B2 (en) 2007-10-22 2008-10-21 Pump, pump arrangement and pump module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007050407A DE102007050407A1 (de) 2007-10-22 2007-10-22 Pumpe, Pumpenanordnung und Pumpenmodul
DE102007050407.3 2007-10-22

Publications (2)

Publication Number Publication Date
WO2009053027A2 WO2009053027A2 (de) 2009-04-30
WO2009053027A3 true WO2009053027A3 (de) 2009-11-05

Family

ID=40458948

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/008895 WO2009053027A2 (de) 2007-10-22 2008-10-21 Pumpe, pumpenanordnung und pumpenmodul

Country Status (4)

Country Link
US (1) US9217426B2 (de)
EP (1) EP2207963B1 (de)
DE (1) DE102007050407A1 (de)
WO (1) WO2009053027A2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010051743B4 (de) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmierbares Hydrocephalusventil
GB201101870D0 (en) * 2011-02-03 2011-03-23 The Technology Partnership Plc Pump
AU2012312898B2 (en) * 2011-09-21 2016-11-17 Solventum Intellectual Properties Company Dual -cavity pump
DE102012013681A1 (de) * 2012-07-11 2014-01-16 Pfeiffer Vacuum Gmbh Pumpenmodul, sowie Verdrängerpumpe
CN106062364B (zh) 2014-02-21 2018-03-13 株式会社村田制作所 鼓风机
US10030641B2 (en) 2015-03-16 2018-07-24 Cummins Emission Solutions, Inc. Valve system
GB2554293B (en) * 2015-06-11 2020-08-19 Murata Manufacturing Co Pump
JP6292359B2 (ja) 2016-02-01 2018-03-14 株式会社村田製作所 気体制御装置
US10563642B2 (en) * 2016-06-20 2020-02-18 The Regents Of The University Of Michigan Modular stacked variable-compression micropump and method of making same
FR3054861B1 (fr) * 2016-08-02 2019-08-23 Zodiac Aerotechnics Procede de pilotage d'une pompe a membrane ondulante, et systeme pilote de pompe a membrane ondulante
CA3033057A1 (en) * 2016-08-05 2018-02-08 Stephen Alan MARSH Micro pressure sensor
TWI613367B (zh) 2016-09-05 2018-02-01 研能科技股份有限公司 流體控制裝置
TWI602995B (zh) * 2016-09-05 2017-10-21 研能科技股份有限公司 流體控制裝置
TWI625468B (zh) 2016-09-05 2018-06-01 研能科技股份有限公司 流體控制裝置
WO2018098505A1 (en) * 2016-11-28 2018-05-31 Massachusetts Institute Of Technology Vacuum pumps and methods of manufacturing the same
CN107339228A (zh) * 2017-06-26 2017-11-10 歌尔股份有限公司 微流泵浦结构、系统及制作方法
CN109958606B (zh) * 2017-12-26 2021-12-21 中蓝连海设计研究院有限公司 适用于多台隔膜泵并联输送条件下的相位角控制方法
WO2019138676A1 (ja) * 2018-01-10 2019-07-18 株式会社村田製作所 ポンプおよび流体制御装置
JP6904436B2 (ja) 2018-01-10 2021-07-14 株式会社村田製作所 ポンプおよび流体制御装置
CN112219026B (zh) * 2018-04-27 2022-05-13 顺从能源系统有限责任公司 用于利用流体流的能量来发电或泵送流体的设备、方法和系统
WO2020185576A1 (en) * 2019-03-08 2020-09-17 Advanced Solutions Life Sciences, Llc Modular and expandable low flow pumping assemblies
EP3722625A1 (de) 2019-04-08 2020-10-14 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Vorrichtung und verfahren mit konfigurierbarer haftung
DE112020004365B4 (de) * 2019-10-21 2023-11-23 Murata Manufacturing Co., Ltd. Fluidsteuervorrichtung
US20220372965A1 (en) * 2019-11-08 2022-11-24 Sony Group Corporation Valve module, fluid control apparatus, and electronic apparatus
DE102020209593B4 (de) 2020-07-30 2022-02-17 Festo Se & Co. Kg Fluidgerät

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103680A (ja) * 1989-09-18 1991-04-30 Yokogawa Electric Corp マイクロバルブ
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
EP0546427A1 (de) * 1991-12-02 1993-06-16 Forschungszentrum Karlsruhe GmbH Mikroventil und Verfahren zu dessen Herstellung
US6142444A (en) * 1996-11-25 2000-11-07 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Piezoelectrically actuated microvalve
US6237619B1 (en) * 1996-10-03 2001-05-29 Westonbridge International Limited Micro-machined device for fluids and method of manufacture
WO2006111775A1 (en) * 2005-04-22 2006-10-26 The Technology Partnership Plc Pump
EP1754890A2 (de) * 2002-09-27 2007-02-21 Novo Nordisk A/S Membranpumpe mit dehnbarer pumpenmembran

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4830577A (en) * 1988-04-11 1989-05-16 United Technologies Corporation Impulse pump with a metal diaphragm
US5338164A (en) * 1993-05-28 1994-08-16 Rockwell International Corporation Positive displacement micropump
US6042345A (en) * 1997-04-15 2000-03-28 Face International Corporation Piezoelectrically actuated fluid pumps
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
KR100483079B1 (ko) * 2002-10-23 2005-04-14 재단법인서울대학교산학협력재단 능동형 마이크로 냉각기
US7322803B2 (en) * 2004-12-30 2008-01-29 Adaptivenergy, Llc. Pumps with diaphragms bonded as bellows
US20060232167A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Piezoelectric diaphragm with aperture(s)

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103680A (ja) * 1989-09-18 1991-04-30 Yokogawa Electric Corp マイクロバルブ
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
EP0546427A1 (de) * 1991-12-02 1993-06-16 Forschungszentrum Karlsruhe GmbH Mikroventil und Verfahren zu dessen Herstellung
US6237619B1 (en) * 1996-10-03 2001-05-29 Westonbridge International Limited Micro-machined device for fluids and method of manufacture
US6142444A (en) * 1996-11-25 2000-11-07 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Piezoelectrically actuated microvalve
EP1754890A2 (de) * 2002-09-27 2007-02-21 Novo Nordisk A/S Membranpumpe mit dehnbarer pumpenmembran
WO2006111775A1 (en) * 2005-04-22 2006-10-26 The Technology Partnership Plc Pump

Also Published As

Publication number Publication date
US20110280755A1 (en) 2011-11-17
US9217426B2 (en) 2015-12-22
DE102007050407A1 (de) 2009-04-23
EP2207963A2 (de) 2010-07-21
WO2009053027A2 (de) 2009-04-30
EP2207963B1 (de) 2015-07-29

Similar Documents

Publication Publication Date Title
WO2009053027A3 (de) Pumpe, pumpenanordnung und pumpenmodul
DE502008002545D1 (de) Kombiniertes Rückschlag- und Steuerventil
DK1848907T3 (da) Ventil til tilvejebringelse af en gas-impuls
WO2006105132A3 (en) One way valve and container
WO2008048776A3 (en) Luer activated device with compressible valve element
EP1959143A3 (de) Vorrichtung zum Steuern des Ölpumpendrucks
JP2018517476A5 (de)
WO2010039042A3 (en) Down hole valve device
WO2012066282A3 (en) Valve assembly
WO2009019264A3 (de) Ausströmventil für ein luftfahrzeug
WO2008128150A3 (en) Filter element and assembly with bypass reverse flow filter end cap
WO2011054780A3 (en) Closable throughflow member
EP2236879A3 (de) Ablassventil
WO2010048414A3 (en) Miniature pump device with an anti-free flow valve
TW200720562A (en) Fluid control device
EP2607716A3 (de) Fluidbetriebene Aktuatoranordnung
WO2011142994A3 (en) Laminar valve flow module
WO2007098431A3 (en) Thermostatic expansion valve with check valve
WO2012037348A3 (en) Molded and packaged elastomeric check valve
WO2008125267A8 (de) Hochdruckreinigungsgerät
ATE519031T1 (de) Kraftstoff-injektor
WO2009136006A8 (en) Pressure valve
DE502007000004D1 (de) Druckregelventil
WO2008146001A3 (en) Valve and dispenser
EP2607698A3 (de) Ventile mit einem an dem gestelleten Gegensitz verbundenen Ventilschlusselement und bezogenes Verfahren.

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08842526

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2008842526

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 12739031

Country of ref document: US