WO2009045092A3 - Fully integrated isfet- valveless micropump - Google Patents

Fully integrated isfet- valveless micropump Download PDF

Info

Publication number
WO2009045092A3
WO2009045092A3 PCT/MY2008/000117 MY2008000117W WO2009045092A3 WO 2009045092 A3 WO2009045092 A3 WO 2009045092A3 MY 2008000117 W MY2008000117 W MY 2008000117W WO 2009045092 A3 WO2009045092 A3 WO 2009045092A3
Authority
WO
WIPO (PCT)
Prior art keywords
isfet
fully integrated
thru
valveless
pump
Prior art date
Application number
PCT/MY2008/000117
Other languages
French (fr)
Other versions
WO2009045092A2 (en
Inventor
Mohd Ismahadi Syono
Rani Rozina Abdul
Hing Wah Lee
Original Assignee
Mimos Berhad
Mohd Ismahadi Syono
Rani Rozina Abdul
Hing Wah Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad, Mohd Ismahadi Syono, Rani Rozina Abdul, Hing Wah Lee filed Critical Mimos Berhad
Publication of WO2009045092A2 publication Critical patent/WO2009045092A2/en
Publication of WO2009045092A3 publication Critical patent/WO2009045092A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

Abstract

The present invention relates to a fully integrated ISFET valveless micropump for use as a pH sensor and as a chemical based sensor especially intended for Wireless Sensor Network (WSN) characterized in that wherein the valveless pump with ISFET is embedded along a pump channel and temperature sensors at its inlet and wherein a membrane in the middle is the pump diaphragm and is electrostatically actuated by an electrode above it which is deposited on the glass and wherein when the membrane controlled by a microcontroller is in motion, fluid or gas would be pumped in thru the inlet and travels thru the channel where ISFET is located and out thru the outlet.
PCT/MY2008/000117 2007-10-01 2008-09-29 Fully integrated isfet- valveless micropump WO2009045092A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20071674 2007-10-01
MYPI20071674A MY178352A (en) 2007-10-01 2007-10-01 Fully integrated isfet - valveless micropump

Publications (2)

Publication Number Publication Date
WO2009045092A2 WO2009045092A2 (en) 2009-04-09
WO2009045092A3 true WO2009045092A3 (en) 2009-06-11

Family

ID=40526856

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2008/000117 WO2009045092A2 (en) 2007-10-01 2008-09-29 Fully integrated isfet- valveless micropump

Country Status (2)

Country Link
MY (1) MY178352A (en)
WO (1) WO2009045092A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5557960B2 (en) 2010-08-06 2014-07-23 ディ・エヌ・エイ・エレクトロニクス・リミテッド Fluid sensor on a wirelessly connected chip
CN101975154B (en) * 2010-10-12 2012-07-04 江苏大学 Valve-free piezoelectric pump of logarithmic spiral combined tube
CN101975153B (en) * 2010-10-12 2012-07-04 江苏大学 Valveless piezoelectric pump of elliptical combined pipe

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143649A (en) * 1990-10-05 1992-05-18 Toshiba Corp Apparatus for measuring concentration of component of solution
WO2004052540A2 (en) * 2002-12-05 2004-06-24 Protasis Corporation Configurable microfluidic substrate assembly
US20070045128A1 (en) * 2005-08-19 2007-03-01 Honeywell International Inc. Chlorine dioxide sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143649A (en) * 1990-10-05 1992-05-18 Toshiba Corp Apparatus for measuring concentration of component of solution
WO2004052540A2 (en) * 2002-12-05 2004-06-24 Protasis Corporation Configurable microfluidic substrate assembly
US20070045128A1 (en) * 2005-08-19 2007-03-01 Honeywell International Inc. Chlorine dioxide sensor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
STEMME E. ET AL.: "A valveless diffuser nozzle based fluid pump", SENS. ACTUATORS A, vol. 39, November 1993 (1993-11-01), pages 159 - 167 *
VAN DER SCHOOT B. ET AL.: "A silicon integrated miniature chemical analysis system", SENSORS AND ACTUATORS B, vol. 6, January 1992 (1992-01-01), pages 57 - 60 *
VAN DER SCHOOT B. ET AL.: "Modular setup for a miniaturized chemical analysis system", SENS. ACTUATORS B, vol. 15-16, August 1993 (1993-08-01), pages 211 - 213 *

Also Published As

Publication number Publication date
MY178352A (en) 2020-10-08
WO2009045092A2 (en) 2009-04-09

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