MY178352A - Fully integrated isfet - valveless micropump - Google Patents

Fully integrated isfet - valveless micropump

Info

Publication number
MY178352A
MY178352A MYPI20071674A MYPI20071674A MY178352A MY 178352 A MY178352 A MY 178352A MY PI20071674 A MYPI20071674 A MY PI20071674A MY PI20071674 A MYPI20071674 A MY PI20071674A MY 178352 A MY178352 A MY 178352A
Authority
MY
Malaysia
Prior art keywords
isfet
fully integrated
thru
valveless
pump
Prior art date
Application number
MYPI20071674A
Inventor
Ismahadi Syono Mohd
Abd Rani Rozina
Hing Wah Lee
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI20071674A priority Critical patent/MY178352A/en
Priority to PCT/MY2008/000117 priority patent/WO2009045092A2/en
Publication of MY178352A publication Critical patent/MY178352A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Biochemistry (AREA)
  • Molecular Biology (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The present invention relates to a fully integrated ISFET valveless micropump for use as a pH sensor and as a chemical based sensor especially intended for Wireless Sensor Network (WSN) characterized in that wherein the valveless pump with ISFET is embedded along a pump channel and temperature sensors at its inlet and wherein a membrane in the middle is the pump diaphragm and is electrostatically actuated by an electrode above it which deposited on the glass and wherein when the membrane controlled by a microcontroller is in motion, fluid or gas would be pumped in thru the inlet and travels thru the channel where ISFET is located and out thru the outlet.
MYPI20071674A 2007-10-01 2007-10-01 Fully integrated isfet - valveless micropump MY178352A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI20071674A MY178352A (en) 2007-10-01 2007-10-01 Fully integrated isfet - valveless micropump
PCT/MY2008/000117 WO2009045092A2 (en) 2007-10-01 2008-09-29 Fully integrated isfet- valveless micropump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20071674A MY178352A (en) 2007-10-01 2007-10-01 Fully integrated isfet - valveless micropump

Publications (1)

Publication Number Publication Date
MY178352A true MY178352A (en) 2020-10-08

Family

ID=40526856

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20071674A MY178352A (en) 2007-10-01 2007-10-01 Fully integrated isfet - valveless micropump

Country Status (2)

Country Link
MY (1) MY178352A (en)
WO (1) WO2009045092A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2557108T3 (en) 2010-08-06 2016-01-22 Dnae Group Holdings Limited Fluid sensor on a wirelessly connected chip
CN101975153B (en) * 2010-10-12 2012-07-04 江苏大学 Valveless piezoelectric pump of elliptical combined pipe
CN101975154B (en) * 2010-10-12 2012-07-04 江苏大学 Valve-free piezoelectric pump of logarithmic spiral combined tube

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143649A (en) * 1990-10-05 1992-05-18 Toshiba Corp Apparatus for measuring concentration of component of solution
AU2003298938A1 (en) * 2002-12-05 2004-06-30 Protasis Corporation Configurable microfluidic substrate assembly
US20070045128A1 (en) * 2005-08-19 2007-03-01 Honeywell International Inc. Chlorine dioxide sensor

Also Published As

Publication number Publication date
WO2009045092A3 (en) 2009-06-11
WO2009045092A2 (en) 2009-04-09

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