WO2009044463A1 - Drying device for coating film - Google Patents

Drying device for coating film Download PDF

Info

Publication number
WO2009044463A1
WO2009044463A1 PCT/JP2007/069368 JP2007069368W WO2009044463A1 WO 2009044463 A1 WO2009044463 A1 WO 2009044463A1 JP 2007069368 W JP2007069368 W JP 2007069368W WO 2009044463 A1 WO2009044463 A1 WO 2009044463A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
coating film
supporting means
supporting
drying device
Prior art date
Application number
PCT/JP2007/069368
Other languages
French (fr)
Japanese (ja)
Inventor
Teruyuki Nakano
Yasuhiro Kozawa
Original Assignee
Kabushiki Kaisha Ishiihyoki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Ishiihyoki filed Critical Kabushiki Kaisha Ishiihyoki
Priority to KR1020077026217A priority Critical patent/KR101378049B1/en
Priority to PCT/JP2007/069368 priority patent/WO2009044463A1/en
Publication of WO2009044463A1 publication Critical patent/WO2009044463A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B23/00—Heating arrangements
    • F26B23/04—Heating arrangements using electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

By disposing a substrate (4) whose upper surface is coated with a coating liquid in a drying area for drying by heating by a heating means (hot plate) (3) and relatively moving two supporting means (5, 6) for supporting the substrate by driving means (7), switching between a mode in which one supporting means (5) supports the lower surface of the substrate (4) at points and a mode in which the other supporting means (6) supports the surface of the substrate (4) at points different from those of the one supporting means (5) is performed. The driving means (7) are arranged in regions (S) outside the edge of the drying area (2) in plan view.
PCT/JP2007/069368 2007-10-03 2007-10-03 Drying device for coating film WO2009044463A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020077026217A KR101378049B1 (en) 2007-10-03 2007-10-03 Drying device for coated film
PCT/JP2007/069368 WO2009044463A1 (en) 2007-10-03 2007-10-03 Drying device for coating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/069368 WO2009044463A1 (en) 2007-10-03 2007-10-03 Drying device for coating film

Publications (1)

Publication Number Publication Date
WO2009044463A1 true WO2009044463A1 (en) 2009-04-09

Family

ID=40525896

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/069368 WO2009044463A1 (en) 2007-10-03 2007-10-03 Drying device for coating film

Country Status (2)

Country Link
KR (1) KR101378049B1 (en)
WO (1) WO2009044463A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01300519A (en) * 1988-05-27 1989-12-05 Tokyo Electron Ltd Heating method
JP2006222401A (en) * 2005-02-14 2006-08-24 Noritake Co Ltd Walking-beam heat treatment apparatus
JP3917994B2 (en) * 2004-08-24 2007-05-23 株式会社石井表記 Coating film drying oven

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01300519A (en) * 1988-05-27 1989-12-05 Tokyo Electron Ltd Heating method
JP3917994B2 (en) * 2004-08-24 2007-05-23 株式会社石井表記 Coating film drying oven
JP2006222401A (en) * 2005-02-14 2006-08-24 Noritake Co Ltd Walking-beam heat treatment apparatus

Also Published As

Publication number Publication date
KR20100082392A (en) 2010-07-19
KR101378049B1 (en) 2014-03-27

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