WO2009044447A1 - 磁気抵抗効果型ヘッドの製造方法 - Google Patents

磁気抵抗効果型ヘッドの製造方法 Download PDF

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Publication number
WO2009044447A1
WO2009044447A1 PCT/JP2007/069232 JP2007069232W WO2009044447A1 WO 2009044447 A1 WO2009044447 A1 WO 2009044447A1 JP 2007069232 W JP2007069232 W JP 2007069232W WO 2009044447 A1 WO2009044447 A1 WO 2009044447A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
magnetoresistance effect
resist pattern
resist
manufacturing
Prior art date
Application number
PCT/JP2007/069232
Other languages
English (en)
French (fr)
Inventor
Junichi Hashimoto
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/069232 priority Critical patent/WO2009044447A1/ja
Publication of WO2009044447A1 publication Critical patent/WO2009044447A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3912—Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Magnetic Heads (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)

Abstract

　光学限界以上の線幅を備えるリフトオフパターンを、ドライプロセスにより安定して形成し、トラック幅の大幅な狭小化が可能となる磁気抵抗効果型ヘッドの製造方法を提供する。 　本発明に係る磁気抵抗効果型ヘッドの製造方法は、下部シールド層上に積層される磁気抵抗効果膜の上に、アッシング処理に対するエッチングレートが相対的に大きなレジスト層を下層とし、エッチングレートが相対的に小さなレジスト層を上層とする二層レジスト層を形成し、二層レジスト層を露光して現像した後、アッシング処理によって、アンダーカット形状を備えるレジストパターンを形成する工程と、レジストパターンの幅のスリミングを行う工程とが同時に行われ、レジストパターンが形成された状態で磁気抵抗効果膜をイオンミリング処理した後、絶縁層および磁区制御層を成膜したうえで、レジストパターンのリフトオフ処理が行われる。  
PCT/JP2007/069232 2007-10-02 2007-10-02 磁気抵抗効果型ヘッドの製造方法 WO2009044447A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/069232 WO2009044447A1 (ja) 2007-10-02 2007-10-02 磁気抵抗効果型ヘッドの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/069232 WO2009044447A1 (ja) 2007-10-02 2007-10-02 磁気抵抗効果型ヘッドの製造方法

Publications (1)

Publication Number Publication Date
WO2009044447A1 true WO2009044447A1 (ja) 2009-04-09

Family

ID=40525880

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/069232 WO2009044447A1 (ja) 2007-10-02 2007-10-02 磁気抵抗効果型ヘッドの製造方法

Country Status (1)

Country Link
WO (1) WO2009044447A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9299369B1 (en) 2014-10-29 2016-03-29 International Business Machines Corporation Multichannel data storage apparatus having abrasion resistant barrier
US9418683B2 (en) 2014-10-29 2016-08-16 International Business Machines Corporation Mass production of multichannel current perpendicular to plane head modules via preferred milling
US9449622B2 (en) 2014-10-29 2016-09-20 International Business Machines Corporation Differing magnetic read sensors on a magnetic head

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002323775A (ja) * 2001-04-26 2002-11-08 Fujitsu Ltd パターン形成方法
JP2004005923A (ja) * 2002-03-29 2004-01-08 Fujitsu Ltd 磁気ヘッドの製造方法および磁気ヘッド、パターン形成方法
JP2004152334A (ja) * 2002-10-29 2004-05-27 Hitachi Ltd 磁気センサ及びその製造方法、並びにこれを搭載した磁気記録再生装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002323775A (ja) * 2001-04-26 2002-11-08 Fujitsu Ltd パターン形成方法
JP2004005923A (ja) * 2002-03-29 2004-01-08 Fujitsu Ltd 磁気ヘッドの製造方法および磁気ヘッド、パターン形成方法
JP2004152334A (ja) * 2002-10-29 2004-05-27 Hitachi Ltd 磁気センサ及びその製造方法、並びにこれを搭載した磁気記録再生装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9299369B1 (en) 2014-10-29 2016-03-29 International Business Machines Corporation Multichannel data storage apparatus having abrasion resistant barrier
US9418683B2 (en) 2014-10-29 2016-08-16 International Business Machines Corporation Mass production of multichannel current perpendicular to plane head modules via preferred milling
US9449622B2 (en) 2014-10-29 2016-09-20 International Business Machines Corporation Differing magnetic read sensors on a magnetic head
US9911440B2 (en) 2014-10-29 2018-03-06 International Business Machines Corporation Differing magnetic read sensors on a magnetic head
US9940954B2 (en) 2014-10-29 2018-04-10 International Business Machines Corporation Mass production of multichannel current perpendicular to plane head modules via preferred milling
US10008221B2 (en) 2014-10-29 2018-06-26 International Business Machines Corporation Multichannel data storage apparatus having abrasion resistant barrier
US10079034B2 (en) 2014-10-29 2018-09-18 International Business Machines Corporation Mass production of multichannel current perpendicular to plane head modules via preferred milling

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