WO2009041774A3 - Electrospray vaporizer - Google Patents

Electrospray vaporizer Download PDF

Info

Publication number
WO2009041774A3
WO2009041774A3 PCT/KR2008/005691 KR2008005691W WO2009041774A3 WO 2009041774 A3 WO2009041774 A3 WO 2009041774A3 KR 2008005691 W KR2008005691 W KR 2008005691W WO 2009041774 A3 WO2009041774 A3 WO 2009041774A3
Authority
WO
WIPO (PCT)
Prior art keywords
reagent liquid
nozzle
electrospray
vaporizer
housing
Prior art date
Application number
PCT/KR2008/005691
Other languages
French (fr)
Other versions
WO2009041774A2 (en
Inventor
Kang-Ho Ahn
Yong-Taek Kwon
Jeong-Suk Choi
Jin-Hong Ahn
Original Assignee
Hyundai Calibration & Certific
Kang-Ho Ahn
Yong-Taek Kwon
Jeong-Suk Choi
Jin-Hong Ahn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020070097672A external-priority patent/KR20090032427A/en
Priority claimed from KR1020070128917A external-priority patent/KR100929866B1/en
Application filed by Hyundai Calibration & Certific, Kang-Ho Ahn, Yong-Taek Kwon, Jeong-Suk Choi, Jin-Hong Ahn filed Critical Hyundai Calibration & Certific
Publication of WO2009041774A2 publication Critical patent/WO2009041774A2/en
Publication of WO2009041774A3 publication Critical patent/WO2009041774A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles

Abstract

An electrospray vaporizer is capable of producing fine spray droplets and vapor molecules through electrohydrodynamic spraying of a reagent liquid. The electrospray vaporizer includes a housing with a flow path, a reagent liquid supplying device, a nozzle, a perforated plate, a power supply device and a heating device. The reagent liquid supplying device is designed to supply a reagent liquid containing precursors to the upstream end of the housing. The nozzle is mounted to the upstream end of the housing and connected to the reagent liquid supplying device so that it can spray the reagent liquid into the flow path. The perforated plate is arranged on the downstream side of the nozzle. The power supply device is adapted to apply a high voltage to one of the nozzle and the perforated plate. The heating device is designed to apply thermal energy to the flow path.
PCT/KR2008/005691 2007-09-28 2008-09-25 Electrospray vaporizer WO2009041774A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2007-0097672 2007-09-28
KR1020070097672A KR20090032427A (en) 2007-09-28 2007-09-28 Electrospray vaporizer
KR10-2007-0128917 2007-12-12
KR1020070128917A KR100929866B1 (en) 2007-12-12 2007-12-12 Electrostatic spray vaporizer

Publications (2)

Publication Number Publication Date
WO2009041774A2 WO2009041774A2 (en) 2009-04-02
WO2009041774A3 true WO2009041774A3 (en) 2009-05-28

Family

ID=40512019

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2008/005691 WO2009041774A2 (en) 2007-09-28 2008-09-25 Electrospray vaporizer

Country Status (1)

Country Link
WO (1) WO2009041774A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110171398A1 (en) * 2010-01-12 2011-07-14 Oladeji Isaiah O Apparatus and method for depositing alkali metals
CN103035471B (en) * 2011-09-29 2015-07-29 江苏天瑞仪器股份有限公司 ESI ion source, for its controllable high-voltage DC power supply
GB2555125B (en) 2016-10-19 2020-05-13 Univ Cape Town Coating system
EP3529847A1 (en) 2016-10-21 2019-08-28 QuantumScape Corporation Electrolyte separators including lithium borohydride and composite electrolyte separators of lithium-stuffed garnet and lithium borohydride

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999493A (en) * 1990-04-24 1991-03-12 Vestec Corporation Electrospray ionization interface and method for mass spectrometry
JPH09316644A (en) * 1996-05-23 1997-12-09 Nippon Sanso Kk Shower head nozzle of cvd device
KR20010098715A (en) * 2000-04-18 2001-11-08 안강호 Apparatus for manufacturing ultra-fine particles using electrospray device and method thereof
JP2004160388A (en) * 2002-11-14 2004-06-10 Matsushita Electric Ind Co Ltd Production method and equipment for thin film

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999493A (en) * 1990-04-24 1991-03-12 Vestec Corporation Electrospray ionization interface and method for mass spectrometry
JPH09316644A (en) * 1996-05-23 1997-12-09 Nippon Sanso Kk Shower head nozzle of cvd device
KR20010098715A (en) * 2000-04-18 2001-11-08 안강호 Apparatus for manufacturing ultra-fine particles using electrospray device and method thereof
JP2004160388A (en) * 2002-11-14 2004-06-10 Matsushita Electric Ind Co Ltd Production method and equipment for thin film

Also Published As

Publication number Publication date
WO2009041774A2 (en) 2009-04-02

Similar Documents

Publication Publication Date Title
CN101932881B (en) Split-flow pre-filming fuel nozzle
WO2007098438A3 (en) Direct liquid injector device
MX2019002196A (en) Electronic vapour provision device with absorbent element.
IN2014DN08107A (en)
DE602007000353D1 (en) Heat Guns
MX2019006898A (en) Aerosol-generating system having a cartridge with a side aperture.
WO2008041139A3 (en) Controlled formation of vapor and liquid droplet jets from liquids
JP2013527020A5 (en)
EP1964616A3 (en) Paint spray gun with a base plate, replaceable paint head and assembly comprising a paint spray gun, a replaceable paint head and a paint container
WO2004063416A3 (en) Apparatus and method for solution plasma spraying
WO2008146808A1 (en) Beauty device
WO2010083513A3 (en) Continuous droplet generator devices and methods
GB2469587A8 (en) Spray gun
US7997689B2 (en) Droplet ejection device for a highly viscous liquid
WO2009041774A3 (en) Electrospray vaporizer
JP2010531729A5 (en)
ATE405357T1 (en) DEVICE FOR LIQUID ATOMIZATION WITH REDUCED DEPOSITION OF ATOMIZED LIQUID DROPS
BR0308624B1 (en) apparatus and method for fuel preparation and distribution.
WO2012020340A3 (en) Iron featuring liquid phase garment moisturization
PL2190587T3 (en) Multi-hole or cluster nozzle
DK2134475T3 (en) Apparatus for spraying pigmented liquids
WO2009025362A1 (en) Vaporizer, material gas supply system including vaporizer and film forming apparatus using such system
EA201001399A1 (en) DEVICE FOR OBTAINING AEROSOL, METHOD AND DEVICE FOR COATING GLASS
MX2014003144A (en) A nebulizer, a control unit for controlling the same, a nebulizing element and a method of operating a nebulizer.
MX2010009915A (en) Controlling temperature in air-powered electrostatically aided coating material atomizer.

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08834212

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08834212

Country of ref document: EP

Kind code of ref document: A2