WO2009041117A1 - 減圧熱処理用治具及び減圧熱処理方法 - Google Patents

減圧熱処理用治具及び減圧熱処理方法 Download PDF

Info

Publication number
WO2009041117A1
WO2009041117A1 PCT/JP2008/059663 JP2008059663W WO2009041117A1 WO 2009041117 A1 WO2009041117 A1 WO 2009041117A1 JP 2008059663 W JP2008059663 W JP 2008059663W WO 2009041117 A1 WO2009041117 A1 WO 2009041117A1
Authority
WO
WIPO (PCT)
Prior art keywords
heat treatment
vacuum heat
jig
coating
treatment
Prior art date
Application number
PCT/JP2008/059663
Other languages
English (en)
French (fr)
Inventor
Susumu Kato
Nozomu Shinkou
Moriyuki Tabata
Keita Taguchi
Kazuaki Okada
Original Assignee
Aisin Aw Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Aw Co., Ltd. filed Critical Aisin Aw Co., Ltd.
Priority to EP08764696.4A priority Critical patent/EP2133435A4/en
Publication of WO2009041117A1 publication Critical patent/WO2009041117A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/04—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor characterised by the coating material
    • C23C2/12—Aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C21D9/0025—Supports; Baskets; Containers; Covers
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/32—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for gear wheels, worm wheels, or the like
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/40—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for rings; for bearing races
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/26—After-treatment
    • C23C2/28—Thermal after-treatment, e.g. treatment in oil bath
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20—Carburising
    • C23C8/22—Carburising of ferrous surfaces
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/08—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for tubular bodies or pipes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Heat Treatment Of Articles (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

　鉄系の被処理材８を大気圧よりも減圧した減圧雰囲気中において熱処理する際に被処理材８を支持するために用いる減圧熱処理用治具１であって、治具１は、鉄系材料よりなると共に、少なくとも被処理材８と接触する表面に、熱処理中において残存する材料よりなる皮膜２が形成されている。皮膜２は、減圧雰囲気での熱処理温度よりも蒸発温度が高い金属酸化物を含有してなることが好ましい。皮膜２は、アルミナを含有することが好ましい。
PCT/JP2008/059663 2007-09-28 2008-05-26 減圧熱処理用治具及び減圧熱処理方法 WO2009041117A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP08764696.4A EP2133435A4 (en) 2007-09-28 2008-05-26 VACUUM HEAT TREATMENT DEVICE AND METHOD OF VACUUM HEAT TREATMENT

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007253191A JP2009084607A (ja) 2007-09-28 2007-09-28 減圧熱処理用治具及び減圧熱処理方法
JP2007-253191 2007-09-28

Publications (1)

Publication Number Publication Date
WO2009041117A1 true WO2009041117A1 (ja) 2009-04-02

Family

ID=40506838

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059663 WO2009041117A1 (ja) 2007-09-28 2008-05-26 減圧熱処理用治具及び減圧熱処理方法

Country Status (6)

Country Link
US (1) US20090084470A1 (ja)
EP (1) EP2133435A4 (ja)
JP (1) JP2009084607A (ja)
KR (1) KR20090132611A (ja)
CN (1) CN101663409A (ja)
WO (1) WO2009041117A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013504686A (ja) * 2009-09-10 2013-02-07 エーエルデー・バキューム・テクノロジーズ・ゲーエムベーハー ワークピースを硬化する方法及び装置、並びに該方法により硬化されたワークピース

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9212416B2 (en) 2009-08-07 2015-12-15 Swagelok Company Low temperature carburization under soft vacuum
KR101314104B1 (ko) * 2011-06-17 2013-10-04 동화경금속공업(주) 알루미늄으로 압출성형된 박판의 열간가공을 위한 휨방지용 지그
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization
KR101498357B1 (ko) * 2013-04-15 2015-03-03 김승현 불기어의 열처리용 지그
KR101576802B1 (ko) * 2014-03-06 2015-12-21 주식회사 대경열처리 피가공물의 냉각장치
DE102015101654B4 (de) * 2015-02-05 2018-05-09 Härterei Reese Bochum Gmbh Chargiereinrichtung für die Wärmebehandlung von Werkstücken mit einer Nabe
EP3353331B1 (en) * 2015-09-23 2020-11-04 Consolidated Engineering Company, Inc. System for supporting castings during thermal treatment
FR3050812B1 (fr) * 2016-04-28 2019-11-29 Arianegroup Sas Outillage de chargement a grande modularite
CN108677134A (zh) * 2018-06-13 2018-10-19 王华银 一种腰轮的碳氮共渗方法
CN109827439A (zh) * 2018-12-26 2019-05-31 常熟市银洋陶瓷器件有限公司 适用于薄壁件输出窗陶瓷金属化的烧结装置及烧结方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045306U (ja) * 1973-08-23 1975-05-07
JPS5739952U (ja) * 1980-08-19 1982-03-03
JPH08325701A (ja) 1995-03-29 1996-12-10 Nippon Heizu:Kk 真空浸炭方法および装置ならびに浸炭処理製品
JP2003183724A (ja) * 2001-12-14 2003-07-03 Daido Steel Co Ltd 熱処理炉
JP2004535512A (ja) * 2000-12-28 2004-11-25 スネクマ・プロピュルシオン・ソリド 炉内で熱処理されるべき部品用の支持装置および金属部品の熱処理方法
JP2005249235A (ja) * 2004-03-01 2005-09-15 Yt:Kk 熱処理用さや及びその製造方法
JP2005289715A (ja) * 2004-03-31 2005-10-20 Mitsui Mining & Smelting Co Ltd 電子部品焼成用治具
JP2006057126A (ja) * 2004-08-18 2006-03-02 Sumitomo Heavy Industries Himatex Co Ltd 熱処理治具
WO2007034911A1 (ja) * 2005-09-26 2007-03-29 Aisin Aw Co., Ltd. 鋼部材、その熱処理方法、及びその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1145714C (zh) * 1995-03-29 2004-04-14 株式会社日本H 真空渗碳方法、设备及渗碳制品
JP2000204464A (ja) * 1999-01-12 2000-07-25 Komatsu Ltd 表面処理歯車とその製造方法、製造装置
JP2003213323A (ja) * 2002-01-23 2003-07-30 Ulvac Japan Ltd 搬送ローラおよび搬送トレイならびに熱処理炉
JP4920227B2 (ja) * 2005-09-28 2012-04-18 モレックス インコーポレイテド 焼成用治具
JP4760664B2 (ja) * 2006-10-26 2011-08-31 アイシン・エィ・ダブリュ株式会社 ベルト式無段変速機用シーブ部材及びその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045306U (ja) * 1973-08-23 1975-05-07
JPS5739952U (ja) * 1980-08-19 1982-03-03
JPH08325701A (ja) 1995-03-29 1996-12-10 Nippon Heizu:Kk 真空浸炭方法および装置ならびに浸炭処理製品
JP2004535512A (ja) * 2000-12-28 2004-11-25 スネクマ・プロピュルシオン・ソリド 炉内で熱処理されるべき部品用の支持装置および金属部品の熱処理方法
JP2003183724A (ja) * 2001-12-14 2003-07-03 Daido Steel Co Ltd 熱処理炉
JP2005249235A (ja) * 2004-03-01 2005-09-15 Yt:Kk 熱処理用さや及びその製造方法
JP2005289715A (ja) * 2004-03-31 2005-10-20 Mitsui Mining & Smelting Co Ltd 電子部品焼成用治具
JP2006057126A (ja) * 2004-08-18 2006-03-02 Sumitomo Heavy Industries Himatex Co Ltd 熱処理治具
WO2007034911A1 (ja) * 2005-09-26 2007-03-29 Aisin Aw Co., Ltd. 鋼部材、その熱処理方法、及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013504686A (ja) * 2009-09-10 2013-02-07 エーエルデー・バキューム・テクノロジーズ・ゲーエムベーハー ワークピースを硬化する方法及び装置、並びに該方法により硬化されたワークピース

Also Published As

Publication number Publication date
JP2009084607A (ja) 2009-04-23
CN101663409A (zh) 2010-03-03
US20090084470A1 (en) 2009-04-02
EP2133435A4 (en) 2013-07-17
KR20090132611A (ko) 2009-12-30
EP2133435A1 (en) 2009-12-16

Similar Documents

Publication Publication Date Title
WO2009041117A1 (ja) 減圧熱処理用治具及び減圧熱処理方法
WO2008087843A1 (ja) プラズマ処理装置、プラズマ処理方法及び記憶媒体
WO2004101177A3 (de) Verfahren zur beschichtung von substraten mit kohlenstoffbasiertem material
EP1344843A3 (en) Film forming method and substrate
EP1473380A3 (en) Metal barrier film production apparatus and method
TW200632995A (en) Single wafer dryer and drying methods
TW200719412A (en) Substrate processing apparatus and substrate processing method
WO2005067634A3 (en) Advanced multi-pressure worpiece processing
IL192072A0 (en) Device, system and method for the surface treatment of substrates
WO2007112454A3 (en) Apparatus and method for processing substrates using one or more vacuum transfer chamber units
EP1926126A3 (en) Substrate processing apparatus and substrate processing method
SI1747995T1 (sl) Postopek in priprava za plinotesno embaliranje predmetov s folijskim materialom, ki se tesno prilega predmetom
WO2008123431A1 (ja) プラズマ酸化処理方法、プラズマ処理装置、及び、記憶媒体
EP2009681A3 (en) Methods for high temperature etching a high-k material gate structure
EP2113939A3 (en) Semiconductor wafer processing method and apparatus
ATE387270T1 (de) Rollenwerkzeug zur linienhaften blechverformung sowie blechverformungsvorrichtung mit einem derartigen rollenwerkzeug
WO2007006850A3 (en) Radiation arrangement
TW200724572A (en) Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereof, and material for coupling a dielectric layer and a metal layer in a semiconductor device
WO2008103263A3 (en) Platen for use with a thermal attach and detach system which holds components by vacuum suction
EP1460049A3 (en) Method of manufacturing ceramic film and pressure heat treatment device used therefor
EP1719604A3 (de) Verfahren zur Beschichtung von Werkstücken
EP1211329A3 (en) Process and apparatus for high pressure gas quenching in an atmospheric furnace
WO2005033358A3 (de) Verfahren zur abscheidung eines leitfähigen materials auf einem substrat und halbleiterkontaktvorrichtung
EP1577026A3 (en) Method and device for removing dust from surface of support
GB0506034D0 (en) Apparatus and method for thermally removing coatings and/or impurities

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880012776.8

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08764696

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2008764696

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 20097021964

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE