WO2009040721A1 - Composant microélectronique de capteur comprenant un porteur avec des conducteurs électriques - Google Patents

Composant microélectronique de capteur comprenant un porteur avec des conducteurs électriques Download PDF

Info

Publication number
WO2009040721A1
WO2009040721A1 PCT/IB2008/053840 IB2008053840W WO2009040721A1 WO 2009040721 A1 WO2009040721 A1 WO 2009040721A1 IB 2008053840 W IB2008053840 W IB 2008053840W WO 2009040721 A1 WO2009040721 A1 WO 2009040721A1
Authority
WO
WIPO (PCT)
Prior art keywords
carrier
contact surface
sensor device
light beam
conductor wire
Prior art date
Application number
PCT/IB2008/053840
Other languages
English (en)
Inventor
Coen Adrianus Verschuren
Albert Hendrik Jan Immink
Derk Jan Wilfred Klunder
Menno Willem Jose Prins
Original Assignee
Koninklijke Philips Electronics N.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics N.V. filed Critical Koninklijke Philips Electronics N.V.
Publication of WO2009040721A1 publication Critical patent/WO2009040721A1/fr

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/648Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/74Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
    • G01N27/745Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids for detecting magnetic beads used in biochemical assays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/0098Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor involving analyte bound to insoluble magnetic carrier, e.g. using magnetic separation

Definitions

  • the invention relates to a microelectronic sensor device and a method for making optical examinations at the contact surface of a carrier. Moreover, it relates to an associated carrier and to the use of such a device and/or carrier.
  • the US 2005/0048599 Al discloses a method for the investigation of microorganisms that are tagged with particles such that a (e.g. magnetic) force can be exerted on them.
  • a light beam is directed through a transparent material to a surface where it is totally internally reflected.
  • Light of this beam that leaves the transparent material as an evanescent wave is scattered by microorganisms and/or other components at the surface and then detected by a photodetector or used to illuminate the microorganisms for visual observation.
  • a problem of this and similar devices is that magnetic actuation fields for moving magnetic particles require either comparatively high electrical currents in external electromagnets or even the presence of electrical wires close to the examination region, where they may however hinder the optical measurements.
  • microelectronic sensor device serves for optical examinations, wherein the term "examinations" is to be understood in a broad sense, comprising any kind of manipulation and/or interaction of light with some entity.
  • the examinations may preferably comprise the qualitative or quantitative detection of target components comprising label particles, wherein the target components may for example be biological substances like biomolecules, complexes, cell fractions or cells.
  • the microelectronic sensor device comprises the following components: a) A carrier with a "contact surface” and with at least one conductor wire that is embedded in the carrier.
  • the carrier will usually be made from a transparent material, for example glass or poly-styrene, to allow the propagation of light of a given spectrum.
  • the term "contact surface” is chosen primarily as a unique reference to a particular part of the surface of the carrier, and though particles will in many applications actually contact (and bind to) said surface, this does not necessarily need to be the case.
  • the term "conductor wire” shall comprise any elongated structure that conducts electrical current; it is typically made from a metal like aluminum, chromium, gold, or some alloy.
  • the conductor wire usually has a constant cross section along its axial extension, particularly a circular, elliptical or rectangular cross section. It may serve for different purposes, for example the sensing of physical quantities (e.g.
  • conductor wire is usually not an isolated object inside the carrier but connected at its ends via leads to some electrical circuitry.
  • the term “conductor wire” will therefore often refer to a limited subsection of some longer electrical lead, wherein this subsection is however disposed in a region where an interference with the light beam mentioned below may occur.
  • the "plane of incidence” is in this context a plane that comprises the wave vector of the input light beam and that is perpendicular to the contact surface.
  • two lines or planes are considered as being “substantially parallel” if they include an angle of less than 20 degree, preferably less than 10 degree.
  • the light source may for example be a laser or a light emitting diode (LED), optionally provided with some optics for shaping and directing the input light beam.
  • LED light emitting diode
  • the proposed design of the microelectronic sensor device has the advantage that disturbing effects of the conductor wire on the input light beam are minimized due to the described alignment of wire and beam.
  • the shadow (if any) that is cast by the conductor wire onto the contact surface by the light of the input light beam is independent of the angle of incidence of the input light beam as long as the plane of incidence remains constant.
  • a possible diffraction of the input light beam at the conductor wire will imply diffraction orders with perpendicular components with respect to the plane of incidence of the input light beam, which can readily be filtered out by spatial filtering.
  • the input light beam that is directed towards the contact surface may be used for many different purposes, for example to initiate chemical reactions, to heat fluid or particles, to stimulate fluorescence, or just to illuminate some region for visual inspection.
  • the input light beam is reflected at the contact surface as a beam that will be called “output light beam” in the following.
  • TIR total internal reflection
  • the term “total internal reflection” shall include the case called “frustrated total internal reflection” (FTIR), where some of the incident light is lost (absorbed, scattered etc.) during the reflection process.
  • the carrier comprises an array of one or more apertures in a nontransparent material that is disposed on the contact surface of the carrier, wherein the apertures have a first dimension (parallel to the plane of the contact surface) that is below the diffraction limit of the medium that fills the apertures and allow the generation of an evanescent field upon illumination with light.
  • This enables highly surface specific detection of luminescently labeled particles (such as luminescently labeled biomolecules) inside the apertures by imaging the generated luminescence on a detector, as disclosed in WO 2006136991 Al and PCT/IB2006/054940, which are incorporated into the present text by reference.
  • the diffraction limit in a medium is defined as the ratio between half the wavelength of the light that illuminates the apertures (i.e. here light of the input light beam) and the index of refraction of the medium that fills the apertures.
  • the generation of evanescent fields requires illumination with R- polarized light that is characterized in that the projection of the electric field on the contact surface of the carrier is parallel to the second dimension of the aperture.
  • the first dimension is less than 50 % of the diffraction limit, more preferably less than 40 % of the diffraction limit, and most preferably less than 30 % of the diffraction limit.
  • the non-transparent material may particularly be made from some electrically conducting metal like aluminum, copper, gold and/or some alloy.
  • the array of apertures can also be composed of an array of wires (also referred to as a wire-grid), in which case the second dimension (parallel to the plane of the contact surface) of the aperture is substantially above the diffraction limit in the medium that fills the space between the wires.
  • the non-transparent material is a metal. Therefore, these wires could in principle be supplied with currents that generate for example magnetic fields for particle manipulation.
  • the microelectronic sensor device may optionally comprise a light detector for detecting a characteristic parameter of the output light beam.
  • the characteristic parameter may particularly be related to the amount of light in the output light beam, expressed for example as the intensity of this beam in its cross section or part of its cross section.
  • the light detector may comprise any suitable sensor or plurality of sensors by which light of a given spectrum can be detected, for example photodiodes, photo resistors, photocells, a CCD chip, or a photo multiplier tube.
  • the microelectronic sensor device comprises a control module that is connected to the at least one conductor wire for selectively exchanging electrical signals (e.g. currents and/or voltages) with said wire to achieve some desired effect.
  • This effect may particularly be the generation of magnetic fields at the contact surface and in a sample volume adjacent to said surface, wherein the magnetic fields can for example be used to move or otherwise manipulate magnetic particles.
  • Another effect of electrical signals supplied to the conductor wire by the control module may be the generation of heat for a temperature control in a sample adjacent to the contact surface. Electrical signals provided by the conductor wire can be sensed by the control module and for instance be used for temperature detection, because the electrical resistance of the conductor wire is a function of the temperature.
  • the microelectronic sensor device may further comprise at least one electrode, which will be called “complementary-electrode” in the following, disposed a distance away from the carrier above the contact surface.
  • This complementary-electrode can cooperate with the conductor wire in the carrier and for example generate an electrical field across the intermediate free space.
  • This free space comprises the contact surface and will typically be used as a sample chamber where a sample to be examined can be provided.
  • the complementary-electrode can be used for heating purposes. The sample space between the complementary-electrode and the conductor wire can then be heated from two opposite sides, yielding a uniform temperature profile throughout the sample.
  • the invention also relates to a carrier for optical examinations, particularly a carrier that is suited for a use in a microelectronic sensor device, wherein said carrier comprises the following components: a) An array of apertures in a non-transparent material that is disposed on a contact surface of the carrier, wherein the apertures have a first dimension below the diffraction limit and allow the generation of evanescent field inside the aperture upon illumination. b) At least one conductor wire embedded within the carrier.
  • the conductor wire may have an arbitrary, e.g. inclined orientation with respect to the contact surface and/or it may be curved. In a preferred embodiment, the conductor wire runs however substantially parallel to the contact surface and/or is substantially straight.
  • the conductor wire will have to be chosen according to the requirements of the particular application it is intended for.
  • the conductor wire will have a cross section that ranges between about 0.1 ⁇ m 2 to about 10 ⁇ m 2 . With these cross sections and a material like aluminum or gold, a reasonable compromise between space requirement and electrical resistance can be achieved.
  • the conductor wire will be used to interact physically at the contact surface with some sample that is disposed beyond said surface (e.g. generate magnetic fields inside the sample or sense magnetic fields originating in the sample). It is therefore preferred that the distance of the conductor wire to the contact surface (measured from a peripheral point of the conductor wire, not from its central axis) has a value between about 0.1 to 100 times the maximal diameter of the conductor wire, wherein said diameter is measured perpendicularly to the axis of the wire.
  • microelectronic sensor devices were considered that may comprise just one single conductor wire.
  • the carrier comprises a plurality of conductor wires of the kind mentioned above that are embedded in the carrier and run parallel to each other.
  • Such a plurality of conductor wires is for example required to generate magnetic fields in a sample adjacent to the contact surface that cover a sufficient volume without requiring too large currents in the wires.
  • currents can be switched on and off in different conductor wires. In this way lateral magnetic forces can be generated that can be used to move magnetic particles over the contact surface. This may be needed for stringency during a magnetic washing step or to let the magnetic particles interact with a larger surface area in order to increase binding probability.
  • the invention further relates to a method for making optical examinations in a carrier which has a contact surface and at least one embedded conductor wire.
  • the method comprises the emission of an input light beam into the carrier such that it impinges onto the contact surface, wherein the conductor wire runs substantially parallel to the plane of incidence of the input light beam.
  • the method comprises in general form the steps that can be executed with a microelectronic sensor device of the kind described above. Therefore, reference is made to the preceding description for more information on the details, advantages and improvements of that method.
  • the invention further relates to the use of the microelectronic device and/or the carrier described above for molecular diagnostics, biological sample analysis, or chemical sample analysis, food analysis, and/or forensic analysis.
  • Molecular diagnostics may for example be accomplished with the help of magnetic beads or luminescent particles such as fluorescent particles that are directly or indirectly attached to target molecules.
  • Figure 1 shows schematically a microelectronic sensor device according to a first embodiment of the present invention
  • Figure 2 shows schematically a luminescent microelectronic sensor device according to a second embodiment of the present invention.
  • Figure 3 illustrates the shadowing of the contact surface by conductor wires running perpendicular to an input light beam;
  • Figure 4 illustrates in a perspective view the geometry of conductor wires and light beams at the contact surface for a setup according to the invention.
  • Figure 1 shows a general setup with a microelectronic sensor device according to the first embodiment of the present invention.
  • a central component of this setup is the carrier 11 that may for example be made from glass or transparent plastic like poly-styrene.
  • the carrier 11 is located next to a sample chamber 2 in which a sample fluid with target components to be detected (e.g. drugs, antibodies, DNA, etc.) can be provided.
  • the sample further comprises magnetic particles, for example superparamagnetic beads, wherein these particles are usually bound as labels to the aforementioned target components.
  • target particle 1 For simplicity only the combination of target components and magnetic particles is shown in the Figure and will be called "target particle 1" in the following.
  • target particle 1 instead of magnetic particles other label particles, for example electrically charged or fluorescent particles, could be used as well.
  • the interface between the carrier 11 and the sample chamber 2 is formed by a surface called "contact surface” 12.
  • This contact surface 12 may be coated with capture elements (not shown), e.g. antibodies, which can specifically bind the target particles.
  • the sensor device may comprise a magnetic field generator 41, for example an electromagnet with a coil and a core, for controllably generating a magnetic field at the contact surface 12 and in the adjacent space of the sample chamber 2. With the help of this magnetic field, the target particles 1 can be manipulated, i.e. be magnetized and particularly be moved (if magnetic fields with gradients are used). Thus it is for example possible to attract target particles 1 to the contact surface 12 in order to accelerate the binding of the associated target particle to said surface.
  • the sensor device further comprises a light source 21, for example a laser or an LED, that generates an input light beam Ll which is transmitted into the carrier 11 through an "entrance window".
  • a light source 21 for example a laser or an LED
  • a collimator lens may be used to make the input light beam Ll parallel, and a pinhole of e.g. 0.5 mm may be used to reduce the beam diameter.
  • the input light beam Ll arrives at the contact surface 12 at an angle larger than the critical angle ⁇ c of total internal reflection (TIR) and is therefore totally internally reflected as an "output light beam” L2.
  • the output light beam L2 leaves the carrier 11 through another surface ("exit window") and is detected by a light detector 31.
  • the light detector 31 determines the amount of light of the output light beam L2 (e.g. expressed by the light intensity of this light beam in the whole spectrum or a certain part of the spectrum).
  • the measured sensor signals are evaluated and optionally monitored over an observation period by an evaluation and recording module 32 that is coupled to the detector 31.
  • the device according to the first embodiment can alternatively be used for sampling fluorescence light emitted by fluorescent particles 1 which are stimulated by the evanescent wave of the input light beam Ll .
  • This fluorescence light may for example be spectrally discriminated from reflected light L2.
  • the principles discussed here can mutatis mutandis be applied to the detection of fluorescence.
  • the person skilled in the art will be able to adapt easily this first embodiment of the invention to a luminescent sensor.
  • the detector 31 may be placed with respect to the carrier at a position that enables detection of luminescence generated by the luminophores instead of reflected light.
  • the output light may correspond to said luminescent light.
  • the described microelectronic sensor device applies optical means for the detection of target particles 1.
  • the detection technique should be surface-specific. As indicated above, this is achieved by using the principle of frustrated total internal reflection. This principle is based on the fact that an evanescent wave penetrates (exponentially dropping) into the sample 2 when the incident light beam Ll is totally internally reflected. If this evanescent wave then interacts with another medium like the bound target particles 1, part of the input light will be coupled into the sample fluid (this is called “frustrated total internal reflection"), and the reflected intensity will be reduced (while the reflected intensity will be 100% for a clean interface and no interaction).
  • the reflected intensity will drop accordingly.
  • This intensity drop is a direct measure for the amount of bonded target particles 1, and therefore for the concentration of target particles in the sample.
  • medium A of the carrier 11 can be glass and/or some transparent plastic with a typical refractive index of 1.52.
  • the carrier 11 can consist of a relatively simple, injection-molded piece of polymer material.
  • Large multiplexing possibilities for multi-analyte testing The contact surface 12 in a disposable cartridge can be optically scanned over a large area. Alternatively, large-area imaging is possible allowing a large detection array. Such an array (located on an optical transparent surface) can be made by e.g. ink-jet printing of different binding molecules on the optical surface.
  • the method also enables high-throughput testing in well-plates by using multiple beams and multiple detectors and multiple actuation magnets (either mechanically moved or electro -magnetically actuated).
  • Actuation and sensing are orthogonal: Magnetic actuation of the target particles (by large magnetic fields and magnetic field gradients) does not influence the sensing process.
  • the optical method therefore allows a continuous monitoring of the signal during actuation. This provides a lot of insights into the assay process and it allows easy kinetic detection methods based on signal slopes.
  • the system is really surface sensitive due to the exponentially decreasing evanescent field.
  • Figure 1 shows an improvement in which a plurality of parallel conductor wires 14 runs parallel to the contact surface 12 through the investigation region 13 (only one wire can be seen in the drawing because the other wires lie hidden behind it). As schematically indicated, these conductor wires 14 are connected to a control module 51 that supplies them with appropriate currents I and/or voltages according to the specific purposes the conductor wires are intended for.
  • One such purpose may be the generation of local magnetic fields (or field-gradients) for the manipulation (e.g. attraction, transportation and/or washing) of the magnetic particles 1.
  • An alternative use of the conductor wires 14 embedded in the carrier 11 is for example local heating to control temperature, binding speed, viscosity, etc.
  • the control module 51 may be adapted to sense signals form the conductor wires 14, e.g. their electrical resistance that provides information about the temperature prevailing in the investigation region 13.
  • the cross-sectional dimensions of the wires 14 should be sufficiently large in order to keep the resistance at an acceptable level.
  • the conductor wires 14 have a thickness of a few hundred nanometers or more, and a width in the range of 0.1 to 10 ⁇ m.
  • a gold wire with a length of 100 ⁇ m (x-direction), a thickness of 0.5 ⁇ m (z- direction) and a width of 1 ⁇ m (y-direction) has a resistance R of:
  • a low resistance is important (except for the local heating purpose) for several reasons:
  • Typical diameters of investigation regions 13 can be as small as 10 ⁇ m, thus limiting the allowed wire width and pitch to a few ⁇ m.
  • wire embedding should be robust: contact between wires and the liquid sample is not allowed to avoid wire-to-wire current leakage and/or electrolysis of the liquid.
  • the detection surface should preferably be smooth and flat. This may require lapping/polishing of the surface after covering the wires with an electrically isolating layer, e.g. by spin coating (UV curable polymer, spin-on glass, etc.) or sputter deposition.
  • conductor wires 14 that are aligned substantially parallel to the plane of incidence of the input light beam Ll and the output light beam L2, as shown in Figure 1. In this way, shadowing effects and beam blocking are avoided for all relevant investigation regions, i.e. between the wires. This allows a much improved freedom in designing wire dimensions and spacing, while maximizing the useable detection area.
  • Figure 4 illustrates in a perspective view the geometrical relations at the contact surface 12.
  • the geometrical, perpendicular projections Pw and P L of the conductor wires 14 and the light beams Ll, L2, respectively, onto the contact surface 12 run at least substantially parallel.
  • FIG. 1 shows a microelectronic sensor device according to a second embodiment of the invention.
  • a grid of non-transparent lines e.g. metal wires 15, is disposed on the contact surface 12.
  • This "wire-grid biosensor concept" is an attractive concept for highly surface specific detection of luminescently labeled biomolecules.
  • the rapid decay of the evanescent field above the wire-grid yields a detection depth of the order of 30 nm.
  • luminescent particles 53 in the space between the wires generate luminescent light, which corresponds in this second embodiment to the output light beam L3.
  • This output light is imaged on a detector 33 by an imaging system 60 composed of two lenses 61, 63 and an emission filter 62 that blocks the excitation wavelength while substantially transmitting the luminescent light.
  • Luminescent particles 51 outside the space between the wires 15 experience a substantially lower excitation power and therefore generate a substantially lower luminescent signal than luminescent particles 53.
  • the detector 33 is typically a 1D/2D CCD array, Avalanche Photodiode, or Photomultiplier tube and is connected with a recording module 34.
  • magnetic beads When using magnetic beads, one can use magnetic fields for the actuation of the luminescently labeled magnetic particles (i.e. luminescently labeled biomolecules plus magnetic beads) in order to manipulate them into the space between the wires 15 of the wire-grid, i.e. into the space where the detection occurs.
  • wires 15 of the wire-grid as electrodes for generating the magnetic field gradient, however without proper shielding of the wires with an isolating material (such as an oxide) the risk of short circuiting between the wires and electrolysis due to high current flowing through the fluid on top of the wires is high.
  • an isolating material such as an oxide
  • the preferred orientation of the embedded conductor wires 14 is the same as in Figure 1, i.e. such that the blocking of the incident input light beam Ll and related shadowing and diffraction effects are minimized, which can be achieved by arranging the conductor wires 14 parallel to the plane of incidence of the input light beam Ll .
  • Typical dimensions and parameters of the microelectronic sensor devices of Figures 1 and 2 are:
  • Conductor wires 14 width: a few micrometers; height: 100 nm; material: aluminum, gold, chromium, silver, copper and alloys.
  • Typical currents through the conductor wires 14 are 100-500 mA (time averaged) and up to 1.5 A peak at low duty cycle (10-20%). These currents allow magnetic beads with sizes in the order of a few 100 nanometers (e.g. Ademtech 300 nm and 500 nm beads) to be attracted over a distance of a few 100 ⁇ ms within 1 minute.
  • Isolation layer 17 above conductor wires 14 Typical thickness 100 nm, up to a few microns. The layer should be sufficiently thick to avoid strong currents (0.1 A or more) in the fluid on top that could result in electrolysis.
  • the isolating layer 17 has an index of refraction that is similar to the substrate below in order to avoid parasitic reflections. Suitable candidates for the isolating layer are oxides which have an extraordinarily high resistivity (e.g. gold: 2.4-10 "8 ⁇ -m; SiC ⁇ : MO 13 ⁇ -m) and index of refraction similar to the (glass) substrate.
  • a material that can be spun over the conductor wires 14, because this results in the desired planarization of the isolating layer e.g. spin-on-glass, sol-gel, but also UV-curable polymers).
  • the configuration of Figure 2 can also be used for temperature control by flowing a current through the conductor wires 14 and the resulting Joule heating. Temperature control is especially relevant for applications involving DNA, where increasing the initial concentration of DNA by a Polymerase Chain Reaction requires accurate control of the temperature of the sample fluid. An important requirement is a uniform temperature throughout the chamber. A method to achieve this is by combining the conductor wires 14 that are embedded in the carrier 11 with a second top-electrode, called “complementary-electrode" 16 in the following. Though Figure 2 shows a uniform complementary-electrode 16, this might also be a structured electrode.
  • Both the conductor wires 14 and the complementary-electrode 16 are fed with a current that results in Joule heating.
  • a single heating wire it is well known that the temperature decreases away from the wire resulting in a non-uniform temperature. Uniformity can however be improved by using two heating wires, such as the conductor wires 14 and the complementary-electrode 16.
  • This can be easily understood for a material between two identical uniform wires with a length and width substantially larger than the distance between the wires and with identical currents flowing through them, where the upper wire generates a heat flux in the downwards direction and the lower wire generates a heat flux of the same magnitude in the upwards direction resulting in a canceling net flux. Because the temperature gradient is proportional to the flux, this results in a uniform temperature distribution.
  • the device may comprise any suitable sensor to detect the presence of particles on or near to a sensor surface, based on any property of the particles, e.g. it can detect via magnetic methods, optical methods (e.g. imaging, fluorescence, chemiluminescence, absorption, scattering, surface plasmon resonance, Raman, etc.), sonic detection (e.g. surface acoustic wave, bulk acoustic wave, cantilever, quartz crystal etc), electrical detection (e.g. conduction, impedance, amperometric, redox cycling), etc.
  • optical methods e.g. imaging, fluorescence, chemiluminescence, absorption, scattering, surface plasmon resonance, Raman, etc.
  • sonic detection e.g. surface acoustic wave, bulk acoustic wave, cantilever, quartz crystal etc
  • electrical detection e.g. conduction, impedance, amperometric, redox cycling
  • larger moieties can be detected with sensor devices according to the invention
  • the detection can occur with or without scanning of the sensor element with respect to the sensor surface.
  • Measurement data can be derived as an end-point measurement, as well as by recording signals kinetically or intermittently.
  • the particles serving as labels can be detected directly by the sensing method.
  • the particles can be further processed prior to detection.
  • An example of further processing is that materials are added or that the (bio)chemical or physical properties of the label are modified to facilitate detection.
  • the device and method can be used with several biochemical assay types, e.g. binding/unbinding assay, sandwich assay, competition assay, displacement assay, enzymatic assay, etc. It is especially suitable for DNA detection because large scale multiplexing is easily possible and different oligos can be spotted via ink-jet printing on the optical substrate.
  • biochemical assay types e.g. binding/unbinding assay, sandwich assay, competition assay, displacement assay, enzymatic assay, etc.
  • the device and method are suited for sensor multiplexing (i.e. the parallel use of different sensors and sensor surfaces), label multiplexing (i.e. the parallel use of different types of labels) and chamber multiplexing (i.e. the parallel use of different reaction chambers).
  • the device and method can be used as rapid, robust, and easy to use point-of-care biosensors for small sample volumes.
  • the reaction chamber can be a disposable item to be used with a compact reader, containing the one or more field generating means and one or more detection means.
  • the device, methods and systems of the present invention can be used in automated high-throughput testing.
  • the reaction chamber is e.g. a well-plate or cuvette, fitting into an automated instrument.

Abstract

L'invention se rapporte à un composant microélectronique de capteur et à un procédé destiné à des examens optiques au niveau de la surface de contact (12) d'un porteur (11), ledit porteur (11) comprenant au moins un fil conducteur (14). Le dispositif microélectronique de capteur comprend de préférence une source lumineuse (21) destinée à émettre un faisceau lumineux d'entrée (L1) dans le porteur (11) de telle sorte qu'il vienne frapper la surface de contact (12), le fil conducteur (14) courant de manière sensiblement parallèle au plan d'incidence du faisceau lumineux d'entrée (L1). Le ou les fils conducteurs (14) peuvent, par exemple, être utilisés pour générer des champs magnétiques ou pour un chauffage local. Grâce à l'orientation d'alignement décrite du ou des fils conducteurs (14) et du faisceau lumineux d'entrée (L1), on obtient une interférence (un ombrage) minimale du faisceau lumineux d'entrée (L1).
PCT/IB2008/053840 2007-09-28 2008-09-22 Composant microélectronique de capteur comprenant un porteur avec des conducteurs électriques WO2009040721A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07117455.1 2007-09-28
EP07117455 2007-09-28

Publications (1)

Publication Number Publication Date
WO2009040721A1 true WO2009040721A1 (fr) 2009-04-02

Family

ID=40202931

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/053840 WO2009040721A1 (fr) 2007-09-28 2008-09-22 Composant microélectronique de capteur comprenant un porteur avec des conducteurs électriques

Country Status (1)

Country Link
WO (1) WO2009040721A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009083884A1 (fr) * 2007-12-26 2009-07-09 Koninklijke Philips Electronics N.V. Dispositif de capteur microélectronique
WO2012035462A1 (fr) 2010-09-17 2012-03-22 Koninklijke Philips Electronics N.V. Système magnétique pour l'attraction des particules dans une pluralité de chambres
JP2019158768A (ja) * 2018-03-15 2019-09-19 東芝テック株式会社 検出装置及び測定装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10126152A1 (de) * 2001-05-30 2002-12-12 Inst Mikrotechnik Mainz Gmbh Ortsaufgelöste Ellipsometrie-Verfahren zur quantitativen und/oder qualitativen Bestimmung von Probenänderungen, Biochip und Meßanordnung
DE10202713A1 (de) * 2002-01-24 2003-08-14 Fraunhofer Ges Forschung Biomolekularer Erkennungstest
US20050048599A1 (en) * 2003-07-12 2005-03-03 Goldberg David A. Sensitive and rapid determination of antimicrobial susceptibility
US20060055042A1 (en) * 2002-09-27 2006-03-16 Micronas Holding Gmbh Method and device for the detection of at least one luminescent substance
WO2006079998A1 (fr) * 2005-01-31 2006-08-03 Koninklijke Philips Electronics N.V. Biodetection rapide et sensible
US20060197960A1 (en) * 2004-04-21 2006-09-07 Michael Bazylenko Optoelectronic biochip
WO2007072415A2 (fr) * 2005-12-22 2007-06-28 Koninklijke Philips Electronics N.V. Capteur de luminescence fonctionnant en mode reflexion

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10126152A1 (de) * 2001-05-30 2002-12-12 Inst Mikrotechnik Mainz Gmbh Ortsaufgelöste Ellipsometrie-Verfahren zur quantitativen und/oder qualitativen Bestimmung von Probenänderungen, Biochip und Meßanordnung
DE10202713A1 (de) * 2002-01-24 2003-08-14 Fraunhofer Ges Forschung Biomolekularer Erkennungstest
US20060055042A1 (en) * 2002-09-27 2006-03-16 Micronas Holding Gmbh Method and device for the detection of at least one luminescent substance
US20050048599A1 (en) * 2003-07-12 2005-03-03 Goldberg David A. Sensitive and rapid determination of antimicrobial susceptibility
US20060197960A1 (en) * 2004-04-21 2006-09-07 Michael Bazylenko Optoelectronic biochip
WO2006079998A1 (fr) * 2005-01-31 2006-08-03 Koninklijke Philips Electronics N.V. Biodetection rapide et sensible
WO2007072415A2 (fr) * 2005-12-22 2007-06-28 Koninklijke Philips Electronics N.V. Capteur de luminescence fonctionnant en mode reflexion

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009083884A1 (fr) * 2007-12-26 2009-07-09 Koninklijke Philips Electronics N.V. Dispositif de capteur microélectronique
JP2011508232A (ja) * 2007-12-26 2011-03-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ マイクロ電子センサデバイス
US8158398B2 (en) 2007-12-26 2012-04-17 Koninklijke Philips Electronics N.V. Microelectronic sensor device
WO2012035462A1 (fr) 2010-09-17 2012-03-22 Koninklijke Philips Electronics N.V. Système magnétique pour l'attraction des particules dans une pluralité de chambres
CN103109193A (zh) * 2010-09-17 2013-05-15 皇家飞利浦电子股份有限公司 用于在多个腔室中的颗粒吸引的磁系统
US8941966B2 (en) 2010-09-17 2015-01-27 Koninklijke Philips N.V. Magnetic system for particle attraction in a plurality of chambers
US9304131B2 (en) 2010-09-17 2016-04-05 Koninklijke Philips N.V. Magnetic system for particle attraction in a plurality of chambers
JP2019158768A (ja) * 2018-03-15 2019-09-19 東芝テック株式会社 検出装置及び測定装置
JP7059057B2 (ja) 2018-03-15 2022-04-25 東芝テック株式会社 検出装置及び測定装置

Similar Documents

Publication Publication Date Title
JP6019144B2 (ja) ラベル粒子を検出するマイクロエレクトロニクスセンサデバイス
EP2208045B9 (fr) Dispositif à capteur pour particules cibles dans un échantillon
US20100188076A1 (en) Microelectronic sensor device with magnetic field generator and carrier
EP2181322A1 (fr) Dispositif de détecteur microélectronique pour détecter des particules de marqueur
EP2245462B1 (fr) Détection de composants voulus au moyen de particules indicatrices
US20100252751A1 (en) Microelectronic opiacal evanescent field sensor
EP2108938A1 (fr) Support de détection optique dans de petits volumes d'échantillons
JP2011508199A (ja) 標的粒子を検出するためのマイクロエレクトロニクスセンサデバイス
US20100187450A1 (en) Microelectronic sensor device with light source and light detector
US20100197038A1 (en) Microelectronic sensor device for optical examinations with total internal reflection
WO2008142492A1 (fr) Procédé de détection de particules marqueurs
US20100221842A1 (en) Sensor device for the detection of target components
US20110235037A1 (en) Sensor device for detecting target particles by frustrated total internal reflection
US20100253323A1 (en) Magnetic washing for biosensor
WO2009040721A1 (fr) Composant microélectronique de capteur comprenant un porteur avec des conducteurs électriques
WO2010001295A1 (fr) Appareil d'alimentation en fluide
WO2009007888A1 (fr) Agencement opto-mécanique pour fournir un accès optique à une chambre d'échantillon
EP1972927A1 (fr) Dispositif capteur microélectronique pour la détection de particules de marquage
WO2009013707A2 (fr) Support pour des examens optiques avec des réflexions de lumière
WO2009060350A1 (fr) Dispositif détecteur microélectronique

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08807753

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08807753

Country of ref document: EP

Kind code of ref document: A1