WO2009035411A1 - Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication - Google Patents

Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication Download PDF

Info

Publication number
WO2009035411A1
WO2009035411A1 PCT/SG2007/000309 SG2007000309W WO2009035411A1 WO 2009035411 A1 WO2009035411 A1 WO 2009035411A1 SG 2007000309 W SG2007000309 W SG 2007000309W WO 2009035411 A1 WO2009035411 A1 WO 2009035411A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic recording
layer
recording medium
medium according
nucleation
Prior art date
Application number
PCT/SG2007/000309
Other languages
English (en)
Inventor
S. N. Piramanayagam
Kumar Srinivasan
Original Assignee
Agency For Science, Technology And Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency For Science, Technology And Research filed Critical Agency For Science, Technology And Research
Priority to PCT/SG2007/000309 priority Critical patent/WO2009035411A1/fr
Publication of WO2009035411A1 publication Critical patent/WO2009035411A1/fr

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
    • G11B5/674—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having differing macroscopic or microscopic structures, e.g. differing crystalline lattices, varying atomic structures or differing roughnesses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
    • G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/72—Protective coatings, e.g. anti-static or antifriction
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/736—Non-magnetic layer under a soft magnetic layer, e.g. between a substrate and a soft magnetic underlayer [SUL] or a keeper layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
    • G11B5/737—Physical structure of underlayer, e.g. texture
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7373—Non-magnetic single underlayer comprising chromium
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7377—Physical structure of underlayer, e.g. texture

Definitions

  • This invention relates generally to magnetic recording media, and more particularly to a magnetic recording medium with a synthetic nucleation layer and a magnetic recording layer.
  • Perpendicular magnetic recording media have been developed to provide higher recording density in data storage devices such as disk drives.
  • a typical perpendicular magnetic recording medium includes a substrate and a magnetic recording layer formed over the substrate.
  • a factor that determines the recording density of the perpendicular magnetic recording media is the size of the magnetic grains in the magnetic recording layer. Reduction of grain size can pack more grains in a bit, which may increase the storage density and the signal-noise ratio at a given density. Therefore, a key objective in the design of perpendicular magnetic recording media is to tailor the grain size.
  • the intermediate layer which consists of two or more elements, is sputtered in the presence of oxygen, for example, with a RuCr alloy target.
  • oxygen for example
  • oxide regions for example Cr oxide
  • the magnetic recording layer grows on these intermediate layers with smaller grain sizes, it also develops a smaller grain size.
  • a magnetic recording medium comprises a base structure, a nucleation layer over the base structure, wherein the nucleation layer is primarily carbon by atomic weight, and a magnetic recording layer over the nucleation layer, wherein the nucleation layer provides nucleation sites that determine a grain size and a grain size distribution of magnetic grains in the magnetic recording layer.
  • the nucleation layer is carbon based and provides nucleation sites that determine a grain size and a grain size distribution of magnetic grains in the magnetic recording layer.
  • the nucleation layer can contact the magnetic recording layer, or alternatively, the nucleation layer can be spaced from the magnetic recording layer and an intermediate layer such as ruthenium can contact and be sandwiched between the nucleation layer and the magnetic recording layer.
  • the nucleation layer may be hydrogenated carbon or nitrogenated carbon.
  • the grain size may have a mean of less than 6 nm, and the grain size distribution has a standard deviation of less than 15%.
  • the magnetic recording media may be a disk that provides perpendicular magnetic recording for a disk drive.
  • a method of making a magnetic recording medium comprises providing a base structure, depositing a nucleation layer that is primarily carbon by atomic weight formed over the base structure, and sputtering a magnetic recording layer over the nucleation layer, wherein the nucleation layer provides nucleation sites that determine a grain size and a grain size distribution of magnetic grains in the magnetic recording layer.
  • a magnetic recording medium comprises a substrate, a soft magnetic underlayer over the substrate, a seedlayer, a first or lower intermediate layer over the soft magnetic underlayer and a nucleation layer over the first intermediate layer
  • the nucleation layer may consist essentially of hydrogenated carbon or nitrogenated carbon and is primarily carbon by atomic weight
  • a second or upper intermediate layer over the nucleation layer and a magnetic recording layer over the second intermediate layer
  • the nucleation layer provides nucleation sites that determine a grain size and a grain size distribution of the second intermediate layer which determines the size and distribution of magnetic grains in the magnetic recording layer
  • the magnetic recording layer provides perpendicular magnetic recording for a disk drive.
  • FIG. 1 illustrates the structure of a magnetic recording medium in accordance with an embodiment of the invention
  • FIG. 2 illustrates the structure of a magnetic recording medium in accordance with an embodiment of the invention
  • FIGS. 3A-3D illustrates the case of random nucleation sites and the formation of grains in FIGS. 3A-3B, and the case of uniformly spaced nucleation sites and the formation of grains in FIGS. 3C-3D in accordance with an embodiment of the invention
  • FIGS. 4A-4C illustrates the formation of a nucleation layer and the formation of clusters in accordance with an embodiment of the invention
  • FIGS. 5A-5C are TEM images showing grain structure formed in an upper intermediate layer in accordance an embodiment of the invention.
  • FIG. 6 is a graph showing grain size and grain size distribution curves of a second intermediate layer according to embodiments of the invention, compared to those of a conventional magnetic recording medium.
  • FIGS. 7A-7B are graphs showing the change of C-axis orientation ( ⁇ 50 ), coercivity (H 0 ) and nucleation field(-H ⁇ ) upon insertion of a carbon-based nucleation layer in accordance with an embodiment of the invention.
  • Grain size and grain size distribution in polycrystalline thin films are determined by the number and the arrangement of nucleation sites.
  • the number of nucleation sites is increased to decrease the resulting grain size, and the nucleation sites are arranged uniformly to ensure that the grain size distribution is narrower. This also is to prevent varying distribution of the size of grains that is observed in the conventional methods of deposition where nucleation and film growth take place simultaneously which has the implication that leads to an increased mean grain size.
  • the number of nucleation sites and the arrangement of the nucleation sites are controlled in the formation of the nucleation layer. In this manner, the grain size can be tailored for the specific application.
  • the dedicated synthetic nucleation layer is formed. When suitable materials are used as synthetic nucleation layer, the nucleation sites could be uniformly and densely distributed. This will lead to a reduction in the grain size and grain size distribution.
  • a perpendicular magnetic recording medium 10 includes a base structure 12, lower intermediate layer 14 disposed on the base structure 12, a synthetic nucleation layer 20 disposed between the lower intermediate layer 14, and an upper intermediate layer 16, and a magnetic recording layer 22 disposed on the upper intermediate layer 16.
  • Base structure 12 includes a substrate 32, and an adhesion layer 34, a soft magnetic layer 36 and a seed layer or a growth inducing layer 38 sequentially formed on a substrate 32.
  • the lower intermediate layer 14 is deposited at a pressure of about 0.1-1 Pa. By depositing at such a pressure, lower intermediate layer 14 possesses a relatively narrow dispersion of crystallographic orientation of the grains.
  • a synthetic nucleation layer 20 is deposited on the lower intermediate layer 14.
  • an upper intermediate layer 16 is formed on the synthetic nucleation layer 20, at a pressure higher than the pressure used to deposit lower intermediate layer 14.
  • the lower intermediate layer 14 helps to improve the crystallographic texture, and the upper intermediate layer 16, acting as a template for separating the densely packed grains, helps to obtain segregated grain structure in the recording layer to improve signal to noise ratio from the magnetic recording layer 22.
  • the synthetic nucleation layer 20 is responsible for producing fine grains in upper intermediate layer 16, which controls the grain size in the recording layer 22.
  • the synthetic nucleation layer is deposited for a nominal thickness ranging from a quarter to two monolayers of material.
  • Several materials or elements may be candidates for the nucleation layer, such as for example any one or combinations of C, Ta, W, Ru, Pt, Pd, Nb, Mo, Re, Os, Ir and the like.
  • Additional element and/or elements may be included in the nucleation layer.
  • additional elements may be gasses such as hydrogen, nitrogen, oxygen, and the like, or metals such as Cr, Ti, Zr, Ag, Au, In, Cu, Al, Mn, Mg and the like.
  • the nucleation layer may be a hydrogenated carbon based layer.
  • the nucleation layer may be a nitrogenated carbon based layer.
  • magnetic grains in layer 22 grow following the structure of grains in layer 16. From this process, magnetic recording layer having reduced grain size is successfully obtained. It should be appreciated, that since excessive oxygen, or other gases are not added during the formation of the magnetic layer, the magnetic recording layer is formed with less presence of these substances. As such, generation of superparamagnetic grains in the magnetic recording layer is successfully avoided by the solutions provided according to embodiments of the present invention.
  • a perpendicular magnetic recording medium 30 includes a base structure 12, lower intermediate layer 14 disposed on the base structure 12, a synthetic nucleation layer 20 disposed between the lower intermediate layer 14, and a magnetic recording layer 22.
  • Base structure 12 includes a substrate 32, and an adhesion layer 34, a soft magnetic layer 36 and a seed layer 38 sequentially formed on a substrate 32.
  • the synthetic nucleation layer 20 is directly responsible for producing fine grains in the recording layer 22.
  • the perpendicular magnetic recording medium 10 includes a base structure 12, which may consist of amorphous or crystalline or a combination of soft magnetic underlayers 36.
  • the layer 14 disposed on the base structure 12 could be magnetic or non-magnetic layer with an hcp(00.2) or fcc(111 ) texture or a derivative of these.
  • a synthetic nucleation layer 20 is disposed on the lower intermediate layer 14, and a magnetic recording layer 22 could be disposed directly on synthetic nucleation layer 20 or on another intermediate layer 16 which is disposed on nucleation layer 20.
  • Base structure 12 includes a substrate 32, and an adhesion layer 34, a soft magnetic layer 36 and a seed layer 38 sequentially formed on a substrate 32.
  • the lower intermediate layer 14 helps to improve the crystallographic texture
  • upper intermediate layer 16 acting as a template for separating the densely packed grains, helps to obtain segregated grain structure in the recording layer to improve signal to noise ratio from the magnetic recording layer 22. If the lower intermediate layer 14 is made of a magnetic or metamagnetic layer, it also helps to direct the flux from the writing head, which helps in improving the writability.
  • the soft magnetic layer 36 i.e. soft underlayers
  • the soft underlayers may be a combination of one or several layers which may or may not necessarily be crystalline.
  • the soft underlayers may be made of a material from one or more elements such as for example Fe, Co, Ni, B, Ta, Zr, Nb, Si, Ti, Ru 1 Cu, Pt, Pd, Cr, and the like.
  • the soft underlayers may also be a combination of one or several layers which may or may not necessarily be antiferromagnetically coupled synthetically.
  • the soft underlayers may be pinned by antiferromagnetic material such as for example IrMn, FeMn, NiO, IrMnCr, PtMn, and the like.
  • the growth inducing layer may consist of one or a mixture of for example Ta, Cu, CrTi, Ag, Au, and the like.
  • the lower intermediate layer may be formed from one or a mixture of elements such as for example Cr, Co, Fe, Ni, Cu, Ru, Pd, Pt, and the like.
  • the upper intermediate layer may be of a material such as for example Ru, Cr, Co, Cu, Re, Os, alloys thereof, and the like.
  • the upper intermediate layer may be sputtered in the presence of a reactive gas such as oxygen, nitrogen, hydrogen and the like.
  • the lower intermediate layer may be formed under lower pressure parameters to obtain more narrowly-dispersed grains than in forming the upper intermediate layer to obtain smaller-sized grains.
  • the recording layer 22 is an alloy of two or more elements such as for example Co, Cr, Pt, B, Ta, Pd, Sm, Fe, Ni and the like.
  • the recording layer may have an oxide based grain boundary to separate the grains from each other.
  • the oxide based grain boundary may be obtained from one or more elements such as for example Si, Cr, Ta, Ti, Al, Mg and the like.
  • the recording layer may be coated with a protective layer or a cover layer 42 such as for example carbon, nitrogenated carbon, hydrogenated carbon, silicon nitride and the like to improve resistance to corrosion.
  • the recording layer 22 and the protective layer 42 may be coated with a lubricant material 44 such as PFPE to improve wear resistance.
  • the magnetic recording media may be buffed or undergo other post-sputter treatments in order to achieve a smooth surface.
  • base structure 12 shown in FIG. 1-2 may comprise of different configurations.
  • base structure may comprise a substrate 32.
  • the base structure or may not include an adhesion layer 34 and/or growth inducing layer 38.
  • FIGS. 3A-3D shows two cases of nucleation and growth mechanisms in thin film deposition processes.
  • nucleation sites 52 are formed randomly on the substrate 56.
  • FIG. 3B when further deposition occurs, the grains 54 formed on nucleation sites 52 are of random sizes.
  • FIG. 3C illustrates the case of more uniformly and densely arranged 82 nucleation sites 52 according to an embodiment of this invention.
  • the grains 54 formed on nucleation sites 52 are of uniform and smaller sizes 84 than in FIG. 3B.
  • FIGS. 4A-4C shows a schematic illustration of the predicted mechanism of nucleation site formation.
  • the layer shown in FIGS. 4A-4C is of the lower intermediate layer 14 shown in FIG. 1-2.
  • the material that would form the synthetic nucleation layer 20 is deposited. If there is no movement of atoms from the material of the nucleation layer 20, the material of the nucleation layer 20 would be scattered around lower intermediate layer 14, as shown in FIG. 4A showing the lower intermediate layer immediately after deposition 60.
  • the material of the nucleation layer 20 moves around and forms clusters 58 within a short time after deposition 62.
  • the clusters 58 of atoms from the material of the nucleation layer 20 act as the synthetic nucleation sites 52, as shown in FIG. 3C.
  • intermediate layer grains 54 in the range of 5-6 nm with a grain boundary 54 are formed as shown 64 in FIG. 4C.
  • a comparison is shown in FIGS.
  • TEM images 68,69 (FIG. 5B and 5C) of upper intermediate layers of magnetic recording medium residing on a nucleation layer 20 as discussed and shown in FIG. 1-3 in accordance with an embodiment of the invention, with a TEM image 66 (FIG. 5A) of an upper intermediate layer of a magnetic recording medium where the a nucleation layer is absent from the magnetic recording medium.
  • the magnetic recording medium from which the TEM image 66 of intermediate layer is shown in FIG. 5A is not in accordance with an embodiment of the invention, and is provided only for illustrating the significance of the nucleation layer 20.
  • FIG. 5B and 5C are of two different types -I and II.
  • type I and type Il is in the reactive gas used in the sputter deposition of the carbon layer, being for example hydrogen and nitrogen, respectively. It can be noticed that the insertion of nucleation layer of both types I and Il helps to achieve segregation of grains in the intermediate layer.
  • FIG. 6 is a graph 70 showing grain size and grain size distribution curves 74, 76, 78 of the upper intermediate layer 16 according to embodiments of the present invention, compared to one curve 72 of the upper intermediate layer 16 of a conventional magnetic recording medium without nucleation layer.
  • the magnetic recording media from which the grain size curves of intermediate layer of curve 72 as shown in FIG. 6 is not in accordance with an embodiment of the invention, and is provided only for illustrating the significance of the nucleation layer 20.
  • Curve 74 is for 0.24nm nucleation layer
  • curve 76 is for 0.18nm nucleation layer
  • curve 78 is for O.O ⁇ nm nucleation layer in accordance with embodiments of the invention. It can be noticed that, with the introduction of nucleation layer, the mean grain size is reduced by about 1 nm to below 6 nm and the grain size distribution also narrows. The distribution is also reduced to about 13 % in the case of upper intermediate layer 16 deposited on nucleation layer 20, as compared to about 15% for upper intermediate layer 16 deposited without nucleation layer. These results clearly indicate the effectiveness of inserting a nucleation layer to reduce the grain size and distribution required for high-density recording media. It will be appreciated that this technique can be used in several applications that require small and uniform grains.
  • FIGS. 7A-7B are graphs showing the change of C-axis orientation ( ⁇ 50 ), coercivity (Hc) and nucleation field (-Hn) upon insertion of a synthetic nucleation layer in accordance with an embodiment of the invention.
  • ⁇ 50 C-axis orientation
  • Hc coercivity
  • -Hn nucleation field
  • FIG. 7 A shows the dispersion in the perpendicular orientation of the Co-grains as measured from the full width at half maximum ( ⁇ 50 ) of rocking curves using X-Ray Diffraction (XRD).
  • ⁇ 50 increases by about 0.6°, which indicates a slight deterioration in the texture.
  • type I nucleation layer the increase, is about 0.4°.
  • this increase is not significant in affecting the performance of the media and may be overcome by using other methods that help improve the orientation. Indeed, measurements recorded indicated that the media with nucleation layer possess a signal to noise ratio significantly larger by about 1.5 dB than the media without the nucleation layers, which points towards the potential effectiveness of the proposed technique.
  • FIG. 7B shows the change in the coercivity (H c ) and nucleation field (-H n ) upon inserting the type Il nucleation layer.
  • Empirical data obtained with the embodiments of the invention have shown that grain sizes below 5.5 nm with a standard deviation of 13% were obtained and signal to noise ratio improvement of about 1.5 dB has been observed.
  • the embodiments of the invention can help to solve a major problem for high-density recording media and can also be applicable in several other fields requiring stringent grain size control.
  • embodiments of the invention may be applied to different magnetic recording media.
  • the invention may be embodied in magnetic recording media materials such as CoCrPt, CoPt, FePt, CoPt 3 , Co 3 Pt, SmCo 5 and the like.
  • magnetic recording media materials such as CoCrPt, CoPt, FePt, CoPt 3 , Co 3 Pt, SmCo 5 and the like.
  • Applied in different magnetic material media it will be appreciated that different grain diameters may be achieved.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

L'invention concerne un support d'enregistrement magnétique et un procédé de fabrication d'un support d'enregistrement magnétique. Le support d'enregistrement magnétique comprend une couche de nucléation formée sur une structure de base et une couche d'enregistrement magnétique formée sur la couche de nucléation. La couche de nucléation à base de carbone forme des sites de nucléation pour la couche magnétique pour obtenir des grains cristallins régulièrement distribués et dimensionnés.
PCT/SG2007/000309 2007-09-12 2007-09-12 Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication WO2009035411A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/SG2007/000309 WO2009035411A1 (fr) 2007-09-12 2007-09-12 Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG2007/000309 WO2009035411A1 (fr) 2007-09-12 2007-09-12 Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication

Publications (1)

Publication Number Publication Date
WO2009035411A1 true WO2009035411A1 (fr) 2009-03-19

Family

ID=40452262

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG2007/000309 WO2009035411A1 (fr) 2007-09-12 2007-09-12 Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication

Country Status (1)

Country Link
WO (1) WO2009035411A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9412404B2 (en) 2009-12-15 2016-08-09 HGST Netherlands B.V. Onset layer for perpendicular magnetic recording media
US9966096B2 (en) 2014-11-18 2018-05-08 Western Digital Technologies, Inc. Self-assembled nanoparticles with polymeric and/or oligomeric ligands

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5846648A (en) * 1994-01-28 1998-12-08 Komag, Inc. Magnetic alloy having a structured nucleation layer and method for manufacturing same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5846648A (en) * 1994-01-28 1998-12-08 Komag, Inc. Magnetic alloy having a structured nucleation layer and method for manufacturing same

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
ONOUE T. ET AL.: "CoCrPtTa and Co/Pd perpendicular magnetic recording media with amorphous underlayers", IEEE TRANSACTIONS ON MAGNETICS, vol. 37, no. 4, July 2001 (2001-07-01), pages 1594, XP011033686 *
ONOUE T. ET AL.: "CoCrPtTa single layer perpendicular magnetic recording media with carbon underlayer", JOURNAL OF APPLIED PHYSICS, vol. 88, no. 11, 1 December 2000 (2000-12-01), pages 6645 - 6651, XP012051028, DOI: doi:10.1063/1.1323532 *
TONEY M.F. ET. AL.: "X-ray diffraction studies of materials for magnetic recording technology", IBM ALMADEN RESEARCH CENTER&IBM STORAGE TECHNOLOGY DIVISION,NSLS ACTIVITY REPORT 2001, pages 2-7 TO 2-9 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9412404B2 (en) 2009-12-15 2016-08-09 HGST Netherlands B.V. Onset layer for perpendicular magnetic recording media
US9966096B2 (en) 2014-11-18 2018-05-08 Western Digital Technologies, Inc. Self-assembled nanoparticles with polymeric and/or oligomeric ligands

Similar Documents

Publication Publication Date Title
JP4893853B2 (ja) 垂直磁気記録媒体の製造方法
EP1635335B1 (fr) Moyen d'enregistrement magnétique perpendiculaire et fabrication de celui-ci
CN100440325C (zh) 垂直磁记录介质、其制造方法及磁存储器件
KR100894790B1 (ko) 캡층과 사전-오버코트 에칭에 의한 개선된 부식 저항을갖는 입자상 자기 기록 매체
US8771849B2 (en) Perpendicular magnetic recording medium and magnetic recording/reproducing apparatus using the same
US7781079B2 (en) Perpendicular magnetic recording medium, its manufacturing method, and a magnetic storage apparatus
EP0696027B1 (fr) Alliage magnétique et sa procédé de fabrication
US20070082231A1 (en) Magnetic recording medium
US20080198512A1 (en) Perpendicular magnetic recording medium and manufacturing method thereof, magnetic recording apparatus
US20180040346A1 (en) Method for producing magnetic recording medium
WO2002039433A1 (fr) Support d'enregistrement magnetique et appareil d'enregistrement magnetique
US20060249371A1 (en) Manufacturing of magnetic recording medium
CN101256779A (zh) 垂直磁记录介质和磁记录/再现装置
US20100209741A1 (en) Perpendicular magnetic recording medium, process for production thereof, and magnetic recording/reproduction apparatus
JP3988117B2 (ja) 垂直磁気記録媒体及び垂直磁気記録媒体の製造方法
CN100440323C (zh) 垂直磁记录介质及其制造方法和磁存储装置
JPS60157715A (ja) 磁気記録媒体
US7138196B2 (en) Layered thin-film media for perpendicular magnetic recording
US20090226764A1 (en) Magnetic Recording Medium with Iridum-Manganese Based Intermediate Layer and Method of Manufacturing Same
WO2009035411A1 (fr) Support d'enregistrement magnétique avec couche de nucléation synthétique et procédé de fabrication
US7183013B2 (en) Magnetic recording medium and manufacturing method thereof
US20080118780A1 (en) Magnetic recording medium and method of manufacturing the same
US6878439B2 (en) Magnetic recording medium, its production process and magnetic recording device
US20140178714A1 (en) Method and Manufacture Process for Exchange Decoupled First Magnetic Layer
JP4993296B2 (ja) 垂直磁気記録媒体

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07808938

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07808938

Country of ref document: EP

Kind code of ref document: A1