WO2009024478A3 - Verfahren zum reinigen von polykristallinem silicium - Google Patents

Verfahren zum reinigen von polykristallinem silicium Download PDF

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Publication number
WO2009024478A3
WO2009024478A3 PCT/EP2008/060424 EP2008060424W WO2009024478A3 WO 2009024478 A3 WO2009024478 A3 WO 2009024478A3 EP 2008060424 W EP2008060424 W EP 2008060424W WO 2009024478 A3 WO2009024478 A3 WO 2009024478A3
Authority
WO
WIPO (PCT)
Prior art keywords
polycrystalline silicon
purifying polycrystalline
purifying
ozone
relates
Prior art date
Application number
PCT/EP2008/060424
Other languages
English (en)
French (fr)
Other versions
WO2009024478A2 (de
Inventor
Hanns Wochner
Christian Gossmann
Herbert Lindner
Original Assignee
Wacker Chemie Ag
Hanns Wochner
Christian Gossmann
Herbert Lindner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie Ag, Hanns Wochner, Christian Gossmann, Herbert Lindner filed Critical Wacker Chemie Ag
Publication of WO2009024478A2 publication Critical patent/WO2009024478A2/de
Publication of WO2009024478A3 publication Critical patent/WO2009024478A3/de

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Detergent Compositions (AREA)

Abstract

Die vorliegende Erfindung betrifft ein Verfahren zum Reinigen von polykristallinem Silicium mit Ozon.
PCT/EP2008/060424 2007-08-22 2008-08-08 Verfahren zum reinigen von polykristallinem silicium WO2009024478A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007039638.6 2007-08-22
DE200710039638 DE102007039638A1 (de) 2007-08-22 2007-08-22 Verfahren zum Reinigen von polykristallinem Silicium

Publications (2)

Publication Number Publication Date
WO2009024478A2 WO2009024478A2 (de) 2009-02-26
WO2009024478A3 true WO2009024478A3 (de) 2009-06-04

Family

ID=40276009

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/060424 WO2009024478A2 (de) 2007-08-22 2008-08-08 Verfahren zum reinigen von polykristallinem silicium

Country Status (2)

Country Link
DE (1) DE102007039638A1 (de)
WO (1) WO2009024478A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007039626A1 (de) * 2007-08-22 2009-02-26 Wacker Chemie Ag Verfahren zum Reinigen von polykristallinem Silicium
DE102010040836A1 (de) * 2010-09-15 2012-03-15 Wacker Chemie Ag Verfahren zur Herstellung von Silicium-Dünnstäben
DE102010042869A1 (de) * 2010-10-25 2012-04-26 Wacker Chemie Ag Verfahren zur Herstellung von polykristallinen Siliciumstäben
DE102012200992A1 (de) 2012-01-24 2013-07-25 Wacker Chemie Ag Dotierstoffarmes polykristallines Siliciumstück
DE102012213869A1 (de) * 2012-08-06 2014-02-06 Wacker Chemie Ag Polykristalline Siliciumbruchstücke und Verfahren zu deren Herstellung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0905796A1 (de) * 1997-09-19 1999-03-31 Wacker-Chemie GmbH Polykristallines Silicium
US20020168880A1 (en) * 2001-05-08 2002-11-14 Mitsubishi Materials Silicon Corporation Method for cleaning polysilicon
EP1876143A1 (de) * 2006-07-05 2008-01-09 Wacker Chemie AG Verfahren zur Reinigung von Polysilicium-Bruch
EP1894887A2 (de) * 2006-08-31 2008-03-05 Wacker Chemie AG Verfahren zur Aufarbeitung einer Ätzmischung, die bei der Herstellung von hochreinem Silizium anfällt

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0905796A1 (de) * 1997-09-19 1999-03-31 Wacker-Chemie GmbH Polykristallines Silicium
US20020168880A1 (en) * 2001-05-08 2002-11-14 Mitsubishi Materials Silicon Corporation Method for cleaning polysilicon
EP1876143A1 (de) * 2006-07-05 2008-01-09 Wacker Chemie AG Verfahren zur Reinigung von Polysilicium-Bruch
EP1894887A2 (de) * 2006-08-31 2008-03-05 Wacker Chemie AG Verfahren zur Aufarbeitung einer Ätzmischung, die bei der Herstellung von hochreinem Silizium anfällt

Also Published As

Publication number Publication date
DE102007039638A1 (de) 2009-02-26
WO2009024478A2 (de) 2009-02-26

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