WO2009018999A3 - Material transport and event monitoring in systems featuring piezoelectrically activated emission of droplets, and possible combinations of a matrix and material to be metered - Google Patents

Material transport and event monitoring in systems featuring piezoelectrically activated emission of droplets, and possible combinations of a matrix and material to be metered Download PDF

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Publication number
WO2009018999A3
WO2009018999A3 PCT/EP2008/006434 EP2008006434W WO2009018999A3 WO 2009018999 A3 WO2009018999 A3 WO 2009018999A3 EP 2008006434 W EP2008006434 W EP 2008006434W WO 2009018999 A3 WO2009018999 A3 WO 2009018999A3
Authority
WO
WIPO (PCT)
Prior art keywords
matrix
metering
droplets
metered
event monitoring
Prior art date
Application number
PCT/EP2008/006434
Other languages
German (de)
French (fr)
Other versions
WO2009018999A2 (en
Inventor
Klaus Breuer
Stefan Mair
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority to EP08785359.4A priority Critical patent/EP2191341B1/en
Priority to US12/672,205 priority patent/US20110061440A1/en
Publication of WO2009018999A2 publication Critical patent/WO2009018999A2/en
Publication of WO2009018999A3 publication Critical patent/WO2009018999A3/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means

Abstract

The invention relates to material transport and event monitoring in systems featuring piezoelectrically activated emission of droplets. Disclosed is an apparatus for metering a material into a matrix, comprising a matrix source (0) for producing and/or feeding a matrix, a storage vessel (1) that can be or is filled with the material in a preferably liquid form, and a metering unit (3, 4) encompassing a metering chamber (4) that is located downstream of the matrix source and a metering head (3) which is located downstream of the storage vessel and is preferably designed to emit droplets in a piezoelectrically activated manner. The matrix can be fed to the metering chamber from the matrix source while the material can be fed to the metering head from the storage vessel, can be discharged into the metering chamber via the metering head, and can be metered to the matrix through the metering chamber. Said apparatus is characterized by a pressure regulating mechanism that is designed to regulate the pressure on and/or inside the storage vessel (1) and/or the pressure on and/or inside the metering unit.
PCT/EP2008/006434 2007-08-08 2008-08-05 Material transport and event monitoring in systems featuring piezoelectrically activated emission of droplets, and possible combinations of a matrix and material to be metered WO2009018999A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08785359.4A EP2191341B1 (en) 2007-08-08 2008-08-05 Material transport and event monitoring in systems featuring piezoelectrically activated emission of droplets, and possible combinations of a matrix and material to be metered
US12/672,205 US20110061440A1 (en) 2007-08-08 2008-08-05 Device and method for metering materials into a carrier matrix

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007038278A DE102007038278B4 (en) 2007-08-08 2007-08-08 Mass transport and event control in systems with piezoelectrically activated droplet emission and combinations of carrier matrix and dosing agent
DE102007038278.4 2007-08-08

Publications (2)

Publication Number Publication Date
WO2009018999A2 WO2009018999A2 (en) 2009-02-12
WO2009018999A3 true WO2009018999A3 (en) 2010-03-25

Family

ID=40196886

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/006434 WO2009018999A2 (en) 2007-08-08 2008-08-05 Material transport and event monitoring in systems featuring piezoelectrically activated emission of droplets, and possible combinations of a matrix and material to be metered

Country Status (4)

Country Link
US (1) US20110061440A1 (en)
EP (1) EP2191341B1 (en)
DE (1) DE102007038278B4 (en)
WO (1) WO2009018999A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104749321A (en) * 2015-01-21 2015-07-01 铜仁中能天然气有限公司 Shale gas desorption pressure tester

Citations (3)

* Cited by examiner, † Cited by third party
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US5339673A (en) * 1992-04-06 1994-08-23 Shimadzu Corporation Gas chromatograph and method of using same
US5637787A (en) * 1994-05-31 1997-06-10 Shimadzu Corporation Gas chromatograph
US20040149012A1 (en) * 2002-01-10 2004-08-05 Masanao Furukawa Method of analyzing sample

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
US4911101A (en) * 1988-07-20 1990-03-27 General Electric Company Metal organic molecular beam epitaxy (MOMBE) apparatus
DE69312436T2 (en) * 1992-12-15 1998-02-05 Applied Materials Inc Evaporation of liquid reactants for CVD
JP3601153B2 (en) * 1995-12-27 2004-12-15 東京エレクトロン株式会社 Cleaning method for processing gas supply device
JP3905678B2 (en) * 2000-02-28 2007-04-18 株式会社堀場製作所 Thin film deposition method and apparatus, FTIR gas analyzer used for thin film deposition method, and mixed gas supply apparatus used for thin film deposition method
US7163197B2 (en) * 2000-09-26 2007-01-16 Shimadzu Corporation Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method
DE10114947B4 (en) * 2001-03-27 2004-08-19 Gerstel Systemtechnik Gmbh & Co.Kg Method and device for producing a gas mixture containing at least one gaseous component, in particular a calibration gas
JP2004223379A (en) * 2003-01-22 2004-08-12 Shimada Phys & Chem Ind Co Ltd Liquid drop jet device
ITMI20032325A1 (en) * 2003-11-27 2005-05-28 Consiglio Nazionale Ricerche SYSTEM FOR THE GENERATION OF A REFERENCE GAS
US7484315B2 (en) * 2004-11-29 2009-02-03 Tokyo Electron Limited Replaceable precursor tray for use in a multi-tray solid precursor delivery system
US7846499B2 (en) * 2004-12-30 2010-12-07 Asm International N.V. Method of pulsing vapor precursors in an ALD reactor
FR2899502B1 (en) * 2006-04-06 2009-04-10 Macdermid Printing Solutions E EMBOSSING DEVICE, SUCH AS A CYLINDER OR SLEEVE
FR2900070B1 (en) * 2006-04-19 2008-07-11 Kemstream Soc Par Actions Simp DEVICE FOR INTRODUCING OR INJECTING OR SPRAYING A MIXTURE OF VECTOR GAS AND LIQUID COMPOUNDS AND METHOD FOR CARRYING OUT SAID DEVICE.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339673A (en) * 1992-04-06 1994-08-23 Shimadzu Corporation Gas chromatograph and method of using same
US5637787A (en) * 1994-05-31 1997-06-10 Shimadzu Corporation Gas chromatograph
US20040149012A1 (en) * 2002-01-10 2004-08-05 Masanao Furukawa Method of analyzing sample

Also Published As

Publication number Publication date
DE102007038278A1 (en) 2009-02-19
US20110061440A1 (en) 2011-03-17
DE102007038278B4 (en) 2013-09-12
EP2191341B1 (en) 2015-11-18
EP2191341A2 (en) 2010-06-02
WO2009018999A2 (en) 2009-02-12

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