WO2009017320A3 - Mold film composition for forming pattern and mold film manufactured by using the same - Google Patents
Mold film composition for forming pattern and mold film manufactured by using the same Download PDFInfo
- Publication number
- WO2009017320A3 WO2009017320A3 PCT/KR2008/004284 KR2008004284W WO2009017320A3 WO 2009017320 A3 WO2009017320 A3 WO 2009017320A3 KR 2008004284 W KR2008004284 W KR 2008004284W WO 2009017320 A3 WO2009017320 A3 WO 2009017320A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mold film
- weight
- parts
- same
- composition
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Polymerisation Methods In General (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
Provided are a mold film composition for forming a pattern including: 30 to 70 parts by weight of each of or at least two reactive oligomers selected from the group consisting of a polyester based reactive oligomer, a silicon based reactive oligomer, an acryl based reactive oligomer, and an epoxy acrylate based oligomer; 30 to 70 parts by weight of a monofunctional or multifunctional monomer having at least one unsaturated group; and 1 to 10 parts by weight of a pho- toinitiator, based on 100 parts by weight of the composition, and a mold film manufactured by using the mold film composition.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880022012A CN101711375A (en) | 2007-07-31 | 2008-07-22 | Mold film composition for forming pattern and mold film manufactured by using the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070076984A KR100902550B1 (en) | 2007-07-31 | 2007-07-31 | Mold film composition for forming pattern and mold film composition manufactured by using the same |
KR10-2007-0076984 | 2007-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009017320A2 WO2009017320A2 (en) | 2009-02-05 |
WO2009017320A3 true WO2009017320A3 (en) | 2009-03-19 |
Family
ID=40305034
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2008/004284 WO2009017320A2 (en) | 2007-07-31 | 2008-07-22 | Mold film composition for forming pattern and mold film manufactured by using the same |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100902550B1 (en) |
CN (1) | CN101711375A (en) |
TW (1) | TWI382278B (en) |
WO (1) | WO2009017320A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102119596B1 (en) * | 2013-10-18 | 2020-06-08 | 엘지이노텍 주식회사 | Composition of resin and condunctive pattern forming mold with the same |
KR102452035B1 (en) | 2017-04-14 | 2022-10-11 | 삼성디스플레이 주식회사 | Composition for soft mold and soft mold manufactured by using the composition |
KR102297307B1 (en) * | 2020-08-18 | 2021-09-02 | 황진상 | Preparation method of embossing release film for semiconductor package mold, and embossing release film thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0980225A (en) * | 1995-01-20 | 1997-03-28 | Zeiru Synthetics Inc | Pigment-dispersion photoresist composition for liquid crystal display color filter |
KR20000021804A (en) * | 1998-09-30 | 2000-04-25 | 장용균 | Compositions hardened by ultraviolet compositions and surface protected film thereof |
KR20020020599A (en) * | 2000-09-09 | 2002-03-15 | 황성호 | Composition of Radiation Curable Silicone Materials |
JP2003345006A (en) * | 2002-05-29 | 2003-12-03 | Nippon Synthetic Chem Ind Co Ltd:The | Photosensitive resin composition |
-
2007
- 2007-07-31 KR KR1020070076984A patent/KR100902550B1/en active IP Right Grant
-
2008
- 2008-07-22 CN CN200880022012A patent/CN101711375A/en active Pending
- 2008-07-22 WO PCT/KR2008/004284 patent/WO2009017320A2/en active Application Filing
- 2008-07-30 TW TW097128912A patent/TWI382278B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0980225A (en) * | 1995-01-20 | 1997-03-28 | Zeiru Synthetics Inc | Pigment-dispersion photoresist composition for liquid crystal display color filter |
KR20000021804A (en) * | 1998-09-30 | 2000-04-25 | 장용균 | Compositions hardened by ultraviolet compositions and surface protected film thereof |
KR20020020599A (en) * | 2000-09-09 | 2002-03-15 | 황성호 | Composition of Radiation Curable Silicone Materials |
JP2003345006A (en) * | 2002-05-29 | 2003-12-03 | Nippon Synthetic Chem Ind Co Ltd:The | Photosensitive resin composition |
Also Published As
Publication number | Publication date |
---|---|
WO2009017320A2 (en) | 2009-02-05 |
CN101711375A (en) | 2010-05-19 |
TW200925781A (en) | 2009-06-16 |
KR20090012823A (en) | 2009-02-04 |
KR100902550B1 (en) | 2009-06-15 |
TWI382278B (en) | 2013-01-11 |
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