WO2009014078A1 - Generator of fluorine-containing gas and hydrogen gas - Google Patents

Generator of fluorine-containing gas and hydrogen gas Download PDF

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Publication number
WO2009014078A1
WO2009014078A1 PCT/JP2008/062990 JP2008062990W WO2009014078A1 WO 2009014078 A1 WO2009014078 A1 WO 2009014078A1 JP 2008062990 W JP2008062990 W JP 2008062990W WO 2009014078 A1 WO2009014078 A1 WO 2009014078A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluorine
supply pipe
electrode compartment
hydrogen gas
gas supply
Prior art date
Application number
PCT/JP2008/062990
Other languages
French (fr)
Japanese (ja)
Inventor
Jiro Hiraiwa
Udai Tanaka
Tetsuro Tojo
Original Assignee
Toyo Tanso Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co., Ltd. filed Critical Toyo Tanso Co., Ltd.
Publication of WO2009014078A1 publication Critical patent/WO2009014078A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/24—Halogens or compounds thereof
    • C25B1/245—Fluorine; Compounds thereof
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/02—Hydrogen or oxygen
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes

Abstract

Disclosed is an apparatus for generating a fluorine-containing gas and a hydrogen gas by the electrolysis of an electrolytic bath contained in an electrolytic vessel (1) having a positive electrode compartment (3) and a negative electrode compartment (4). The apparatus comprises: a hydrogen gas supply pipe (61) for supplying a hydrogen gas generated in the negative electrode compartment (4), which is connected so as to be communicated with a gas phase part in the negative electrode compartment (4); a first automatically operated valve (41) arranged at the middle of the hydrogen gas supply pipe (61); a first pressurizer arranged at the middle of the hydrogen gas supply pipe (61) and downstream from the first automatically operated valve (41); a fluorine-containing gas supply pipe (62) for supplying a fluorine-containing gas generated in the positive electrode compartment (3), which is connected so as to be communicated with a gas phase part in the positive electrode compartment (3); a second automatically operated valve (42) arranged at the middle of the fluorine-containing gas supply pipe (62); and a second pressurizer arranged at the middle of the fluorine-containing gas supply pipe (62) and downstream from the second automatically operated valve (42).
PCT/JP2008/062990 2007-07-20 2008-07-18 Generator of fluorine-containing gas and hydrogen gas WO2009014078A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007189038A JP2009024222A (en) 2007-07-20 2007-07-20 Apparatus for generating fluorine-based gas and hydrogen gas
JP2007-189038 2007-07-20

Publications (1)

Publication Number Publication Date
WO2009014078A1 true WO2009014078A1 (en) 2009-01-29

Family

ID=40281332

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062990 WO2009014078A1 (en) 2007-07-20 2008-07-18 Generator of fluorine-containing gas and hydrogen gas

Country Status (3)

Country Link
JP (1) JP2009024222A (en)
TW (1) TW200918688A (en)
WO (1) WO2009014078A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010087236A1 (en) * 2009-01-30 2010-08-05 セントラル硝子株式会社 Semiconductor production equipment including fluorine gas generator
US8864960B2 (en) 2009-12-02 2014-10-21 Central Glass Company, Limited Fluorine gas generating apparatus
CN115747833A (en) * 2022-11-01 2023-03-07 福建德尔科技股份有限公司 Highly integrated high purity fluorine gas supply system

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4018726B2 (en) * 2006-02-07 2007-12-05 東洋炭素株式会社 Semiconductor manufacturing plant
JP5556047B2 (en) * 2009-04-01 2014-07-23 セントラル硝子株式会社 Fluorine gas generator
JP5332829B2 (en) 2009-04-01 2013-11-06 セントラル硝子株式会社 Fluorine gas generator
BR112012024035A2 (en) * 2010-03-26 2016-08-30 Solvay Fluoride supply method
JP5569116B2 (en) * 2010-04-16 2014-08-13 セントラル硝子株式会社 Fluorine gas generator
TWI586842B (en) * 2010-09-15 2017-06-11 首威公司 Plant for fluorine production and a process using it
TW201219686A (en) * 2010-09-16 2012-05-16 Solvay Fluorine gas plant with seismic protection
JP5869518B2 (en) 2013-05-10 2016-02-24 トヨタ自動車株式会社 Reactor and manufacturing method thereof
CN110965078A (en) * 2019-12-10 2020-04-07 中核二七二铀业有限责任公司 Automatic control device for hydrogen fluoride feeding

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002339090A (en) * 2000-04-07 2002-11-27 Toyo Tanso Kk Gaseous fluorine generator
JP2005179709A (en) * 2003-12-17 2005-07-07 Toyo Tanso Kk Gas generator
WO2007023615A1 (en) * 2005-08-25 2007-03-01 Toyo Tanso Co., Ltd. Fluorogas generator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4083672B2 (en) * 2003-12-11 2008-04-30 東洋炭素株式会社 Insulating support member and electrolytic cell

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002339090A (en) * 2000-04-07 2002-11-27 Toyo Tanso Kk Gaseous fluorine generator
JP2005179709A (en) * 2003-12-17 2005-07-07 Toyo Tanso Kk Gas generator
WO2007023615A1 (en) * 2005-08-25 2007-03-01 Toyo Tanso Co., Ltd. Fluorogas generator

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010087236A1 (en) * 2009-01-30 2010-08-05 セントラル硝子株式会社 Semiconductor production equipment including fluorine gas generator
JP2011026694A (en) * 2009-01-30 2011-02-10 Central Glass Co Ltd Semiconductor production equipment including fluorine gas generator
CN102257181A (en) * 2009-01-30 2011-11-23 中央硝子株式会社 Semiconductor production equipment including fluorine gas generator
KR101318849B1 (en) * 2009-01-30 2013-10-17 샌트랄 글래스 컴퍼니 리미티드 Semiconductor production equipment including fluorine gas generator
CN102257181B (en) * 2009-01-30 2014-01-08 中央硝子株式会社 Semiconductor production equipment including fluorine gas generator
US8864960B2 (en) 2009-12-02 2014-10-21 Central Glass Company, Limited Fluorine gas generating apparatus
CN115747833A (en) * 2022-11-01 2023-03-07 福建德尔科技股份有限公司 Highly integrated high purity fluorine gas supply system
CN115747833B (en) * 2022-11-01 2023-09-22 福建德尔科技股份有限公司 High-integration-level high-purity fluorine gas supply system

Also Published As

Publication number Publication date
TW200918688A (en) 2009-05-01
JP2009024222A (en) 2009-02-05

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