WO2009010043A3 - Phase shifting device, and laser resonator for generating radially or azimuthally polarized laser radiation - Google Patents

Phase shifting device, and laser resonator for generating radially or azimuthally polarized laser radiation Download PDF

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Publication number
WO2009010043A3
WO2009010043A3 PCT/DE2008/001136 DE2008001136W WO2009010043A3 WO 2009010043 A3 WO2009010043 A3 WO 2009010043A3 DE 2008001136 W DE2008001136 W DE 2008001136W WO 2009010043 A3 WO2009010043 A3 WO 2009010043A3
Authority
WO
WIPO (PCT)
Prior art keywords
shifting device
phase shifting
azimuthally polarized
laser resonator
laser radiation
Prior art date
Application number
PCT/DE2008/001136
Other languages
German (de)
French (fr)
Other versions
WO2009010043A2 (en
WO2009010043A8 (en
Inventor
Joachim Schulz
Andreas Voss
Abdou Ahmed Marwan
Original Assignee
Trumpf Laser & Systemtechnik
Univ Stuttgart
Joachim Schulz
Andreas Voss
Abdou Ahmed Marwan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser & Systemtechnik, Univ Stuttgart, Joachim Schulz, Andreas Voss, Abdou Ahmed Marwan filed Critical Trumpf Laser & Systemtechnik
Publication of WO2009010043A2 publication Critical patent/WO2009010043A2/en
Publication of WO2009010043A3 publication Critical patent/WO2009010043A3/en
Publication of WO2009010043A8 publication Critical patent/WO2009010043A8/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1308—Stabilisation of the polarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H01S3/08068—Holes; Stepped surface; Special cross-section
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0811—Construction or shape of optical resonators or components thereof comprising three or more reflectors incorporating a dispersive element, e.g. a prism for wavelength selection
    • H01S3/0812—Construction or shape of optical resonators or components thereof comprising three or more reflectors incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
    • H01S3/076—Folded-path lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H01S3/08009—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1307—Stabilisation of the phase

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

The invention relates to a phase shifting device (42') for stabilizing radially or azimuthally polarized laser radiation within a laser resonator (40') that comprises a polarizer device (42') for generating radially or azimuthally polarized laser radiation (3a, 3b). The phase shifting device (42') is designed to generate a phase difference (Δφ) ranging from about 30° to about 330°, preferably from about 70° to about 290°, especially preferably from about 160° to about 200°, particularly a phase difference (Δφ) of about 180° per revolution in the laser resonator (40') while having an axial symmetry. The invention further relates to a laser resonator (40') comprising such a phase shifting device (42').
PCT/DE2008/001136 2007-07-19 2008-07-14 Phase shifting device, and laser resonator for generating radially or azimuthally polarized laser radiation WO2009010043A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007033567A DE102007033567A1 (en) 2007-07-19 2007-07-19 Phase shift device and laser resonator for generating radially or azimuthally polarized laser radiation
DE102007033567.0 2007-07-19

Publications (3)

Publication Number Publication Date
WO2009010043A2 WO2009010043A2 (en) 2009-01-22
WO2009010043A3 true WO2009010043A3 (en) 2009-05-22
WO2009010043A8 WO2009010043A8 (en) 2009-10-01

Family

ID=39929801

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/001136 WO2009010043A2 (en) 2007-07-19 2008-07-14 Phase shifting device, and laser resonator for generating radially or azimuthally polarized laser radiation

Country Status (2)

Country Link
DE (1) DE102007033567A1 (en)
WO (1) WO2009010043A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008030374B4 (en) 2008-06-26 2014-09-11 Trumpf Laser- Und Systemtechnik Gmbh Method of laser cutting and CO2 laser cutting machine
JP5419770B2 (en) * 2010-03-26 2014-02-19 三菱電機株式会社 Laser oscillator
EP2913137A1 (en) 2014-02-26 2015-09-02 Bystronic Laser AG Laser machining device and method
CN105024263B (en) * 2014-04-17 2019-02-19 大族激光科技产业集团股份有限公司 Laser resonant cavity
CN105006728B (en) * 2014-04-17 2019-02-19 大族激光科技产业集团股份有限公司 Radial polarisation laser system
WO2017063686A1 (en) 2015-10-14 2017-04-20 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Polarizer assembly, euv radiation generating device comprising said polarizer assembly, and method for linearly polarizing a laser beam
US11347069B2 (en) 2016-11-22 2022-05-31 Lumentum Operations Llc Rotary optical beam generator
US10690855B2 (en) 2016-11-22 2020-06-23 Lumentum Operations Llc Tapered non-concentric core fibers
US10656334B2 (en) 2016-11-22 2020-05-19 Lumentum Operations Llc Rotary optical beam generator
US10429584B2 (en) 2016-11-22 2019-10-01 Lumentum Operations Llc Rotary optical beam generator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936770A (en) * 1973-12-28 1976-02-03 International Business Machines Corporation Single laser cavity for generating TE or TM modes
US5627847A (en) * 1995-05-04 1997-05-06 Regents Of The University Of Minnesota Distortion-compensated phase grating and mode-selecting mirror for a laser
US6680799B1 (en) * 1999-08-02 2004-01-20 Universite Jean Monnet Optical polarizing device and laser polarization device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1010069A6 (en) 1996-03-29 1997-12-02 Imec Inter Uni Micro Electr Optical system with high reflectivity grid
AU7309400A (en) * 1999-09-15 2001-04-17 Yeda Research And Development Co. Ltd. Optical resonators with orthogonally polarized modes
DE10312003B4 (en) * 2003-03-19 2006-04-20 Carl Zeiss Smt Ag Process for producing a transmissive birefringent optical element and transmissive birefringent optical element
DE102004042748B4 (en) 2004-09-03 2007-06-06 Trumpf Laser- Und Systemtechnik Gmbh Concentric or spiral diffraction grating for a laser resonator
DE102006018962A1 (en) * 2005-05-04 2006-11-09 Carl Zeiss Smt Ag Optical unit e.g. wave-front delay unit, manufacturing method for microlithographic device, involves irradiating partial region of amorphous material, from which optical unit is made, with e.g. laser light, that is linearly polarized

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936770A (en) * 1973-12-28 1976-02-03 International Business Machines Corporation Single laser cavity for generating TE or TM modes
US5627847A (en) * 1995-05-04 1997-05-06 Regents Of The University Of Minnesota Distortion-compensated phase grating and mode-selecting mirror for a laser
US6680799B1 (en) * 1999-08-02 2004-01-20 Universite Jean Monnet Optical polarizing device and laser polarization device

Also Published As

Publication number Publication date
DE102007033567A1 (en) 2009-04-09
WO2009010043A2 (en) 2009-01-22
WO2009010043A8 (en) 2009-10-01

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