WO2009008384A1 - Servo-valve and air actuator using same - Google Patents

Servo-valve and air actuator using same Download PDF

Info

Publication number
WO2009008384A1
WO2009008384A1 PCT/JP2008/062222 JP2008062222W WO2009008384A1 WO 2009008384 A1 WO2009008384 A1 WO 2009008384A1 JP 2008062222 W JP2008062222 W JP 2008062222W WO 2009008384 A1 WO2009008384 A1 WO 2009008384A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve element
valve
servo
air
same
Prior art date
Application number
PCT/JP2008/062222
Other languages
French (fr)
Japanese (ja)
Inventor
Tomohiro Ogawa
Original Assignee
Sumitomo Heavy Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries, Ltd. filed Critical Sumitomo Heavy Industries, Ltd.
Publication of WO2009008384A1 publication Critical patent/WO2009008384A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F15B13/0446—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors with moving coil, e.g. voice coil
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0603—Multiple-way valves
    • F16K31/061—Sliding valves
    • F16K31/0613—Sliding valves with cylindrical slides

Abstract

A servo-valve comprises a spool having a first valve element and a second valve element, and a sleeve housing the spool movably in the axial direction and having an air supply port for supplying air between the first valve element and the second valve element. The servo-valve is characterized in that each of the first valve element and the second valve element has a pressure receiving surface for receiving the pressure produced by the air supplied from the air supply port, the area of the pressure receiving surface of the first valve element is larger than that of the second valve element, and the spool is moved in the direction toward the first valve element by the supply of air.
PCT/JP2008/062222 2007-07-11 2008-07-04 Servo-valve and air actuator using same WO2009008384A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007182432A JP4963446B2 (en) 2007-07-11 2007-07-11 Servo valve and air actuator using the same
JP2007-182432 2007-07-11

Publications (1)

Publication Number Publication Date
WO2009008384A1 true WO2009008384A1 (en) 2009-01-15

Family

ID=40228555

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062222 WO2009008384A1 (en) 2007-07-11 2008-07-04 Servo-valve and air actuator using same

Country Status (2)

Country Link
JP (1) JP4963446B2 (en)
WO (1) WO2009008384A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112460089A (en) * 2019-09-09 2021-03-09 Smc 株式会社 Servo valve

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5904639B2 (en) 2012-04-27 2016-04-13 国立大学法人東京工業大学 3 port valve
JP6203605B2 (en) * 2013-11-07 2017-09-27 三菱重工業株式会社 Spool valve assembly, hydraulic machine and power generator
US11803047B2 (en) * 2019-02-04 2023-10-31 Thorlabs Measurement Systems Inc. Actuator and beam steering mechanism using an actuator
JP2022092363A (en) * 2020-12-10 2022-06-22 住友重機械工業株式会社 Spool type flow control valve and manufacturing method of the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277377U (en) * 1985-10-31 1987-05-18
JPH0246384A (en) * 1988-08-04 1990-02-15 Toyoda Mach Works Ltd Solenoid valve
JPH11210919A (en) * 1998-01-27 1999-08-06 Denso Corp Spool valve type hydraulic control valve
JP3109097U (en) * 2004-11-30 2005-05-12 金子産業株式会社 Switching valve device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03109097U (en) * 1990-02-17 1991-11-08

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277377U (en) * 1985-10-31 1987-05-18
JPH0246384A (en) * 1988-08-04 1990-02-15 Toyoda Mach Works Ltd Solenoid valve
JPH11210919A (en) * 1998-01-27 1999-08-06 Denso Corp Spool valve type hydraulic control valve
JP3109097U (en) * 2004-11-30 2005-05-12 金子産業株式会社 Switching valve device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112460089A (en) * 2019-09-09 2021-03-09 Smc 株式会社 Servo valve
CN112460089B (en) * 2019-09-09 2024-03-29 Smc株式会社 Servo valve

Also Published As

Publication number Publication date
JP4963446B2 (en) 2012-06-27
JP2009019684A (en) 2009-01-29

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