WO2009003826A1 - Capteur de pression - Google Patents

Capteur de pression Download PDF

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Publication number
WO2009003826A1
WO2009003826A1 PCT/EP2008/057490 EP2008057490W WO2009003826A1 WO 2009003826 A1 WO2009003826 A1 WO 2009003826A1 EP 2008057490 W EP2008057490 W EP 2008057490W WO 2009003826 A1 WO2009003826 A1 WO 2009003826A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure sensor
pressure
sensor according
joint
measuring
Prior art date
Application number
PCT/EP2008/057490
Other languages
German (de)
English (en)
Inventor
Ulfert Drewes
Frank Hegner
Andreas Rossberg
Elke Schmidt
Original Assignee
Endress+Hauser Gmbh+Co.Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co.Kg filed Critical Endress+Hauser Gmbh+Co.Kg
Publication of WO2009003826A1 publication Critical patent/WO2009003826A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing

Definitions

  • the present invention relates to a pressure sensor, in particular a pressure sensor with a ceramic base body and a ceramic measuring membrane.
  • Pressure sensors in the sense used here include absolute pressure sensors and relative pressure sensors, which measure the absolute pressure of a medium against vacuum or the difference between the pressure in a medium and the current atmospheric pressure. Furthermore, the pressure sensors according to the invention comprise differential pressure sensors, which detect the pressure difference between a first and second media pressure.
  • a generic pressure sensor comprises a base body and at least one measuring diaphragm which is pressure-tightly connected to the main body by means of an active brazing to form a measuring chamber, and a transducer for converting a pressure-dependent deformation of the measuring diaphragm into an electrical primary signal, and a primary signal path extending itself extends through the body.
  • the converter may be, for example, a capacitive or a resistive converter.
  • the primary signal path usually comprises at least one electrical feedthrough through the main body.
  • Such pressure sensors are manufactured by the applicant under the name Cerabar and placed on the market.
  • Implementation may be, for example, a metal pin which extends through the base body, wherein an annular gap between the metal pin and the ceramic material is sealed by means of an active solder.
  • an active solder is used, which is compatible with a subsequent soldering process.
  • an Ag-Cu active solder is suitable.
  • such an active solder has a melting point that is more than 100K lower than the preferred active hard solder for joining the measuring membrane to the ceramic body.
  • the components of the active solder may evaporate to different extents due to their different vapor pressure values, whereby on the one hand the composition of the active solder can adversely change, and on the other hand a contamination of the active brazing material or the surfaces to be soldered can take place ,
  • the pressure sensor comprises a base body and at least one measuring diaphragm, which is pressure-tightly connected to form a measuring chamber with the base body by means of a first joint, which has an active brazing, and a transducer for converting a pressure-dependent deformation of the measuring diaphragm into a primary electrical signal, and a primary signal path; extending from the transducer through the body, the primary signal path comprising at least one electrical conductor passing through the body in a portion through an aperture, characterized in that the aperture is closed by a metallic body having a substantially planar surface has, which faces the measuring chamber, and which is joined by means of an opening enclosing the second joint by means of an active brazing pressure-tight with the body, wherein the active braze of the second joint has a melting point of not more than 50 ° C, preferably not more than 25 ° C lower than that of the Aktivhartlots the first joint.
  • the base body and / or the measuring membrane preferably have a ceramic material, in particular corundum.
  • the second joint on the same active brazing on the first joint.
  • ternary active hard solders which have a Zr / Ni alloy and Ti and are described in EP 0 490 807 B1.
  • the metallic body has a surface facing away from the measuring chamber, which is contactable by means of a soft solder.
  • the surface of the metallic body facing away from the measuring chamber may optionally have a metallic coating, for example a Ni layer, which may be gold plated for protection against oxidation.
  • the metallic coating or the Ni layer has, for example, a thickness of not less than 0.5 ⁇ m, preferably not less than 1 ⁇ m.
  • the layer thickness is about 2 microns.
  • the gold layer may have some 10 nm, for example 20 nm.
  • the metal body may comprise, for example, tungsten or an alloy containing molybdenum and copper or molybdenum, titanium and zirconium.
  • tungsten or an alloy containing molybdenum and copper or molybdenum, titanium and zirconium.
  • the thermal expansion coefficient matches that of the main body material or active brazing material, whereby a complete correspondence of the thermal expansion coefficients is not absolutely necessary. It is sufficient if the different thermal expansion does not lead to failure of the solder joint.
  • a Mo-Ti-Zr alloy available under the name TZM from Goodfellow and Plansee.
  • the metal body may be formed, for example, circular disk-shaped, and are inserted into a matching recess in a surface of the base body, wherein the opening opens into the recess.
  • the electrical conductor can be for example a metal pin, in particular a Ta pin, which extends from the transducer through the opening to the second joint.
  • the electrical conductor comprises a coating of the opening wall containing glass and at least one noble metal element. Notwithstanding the Choice of material of the electrical conductor is to ensure sufficient contact with the second joint, since the primary signal path extends over the second joint and the metallic body.
  • a line is connected to a circuit for signal preprocessing by means of a soft solder connection.
  • FIG. 1 shows a longitudinal section through a pressure sensor according to the invention.
  • the pressure sensor 1 shown in Fig. 1 comprises a cylindrical
  • Base body 2 and a circular disk-shaped measuring diaphragm 3, both having corundum as a material.
  • the main body 2 and the measuring diaphragm 3 are pressure-tightly joined together by means of a circumferential joint 4, wherein the gap between the measuring diaphragm and the base body is defined by the joint 4, which comprises an active brazing material.
  • a measuring chamber is formed, in which, depending on the objective of the pressure sensor, a different back pressure prevails to a force acting on the outside of the measuring diaphragm pressure.
  • the back pressure is the atmospheric pressure in the vicinity of the sensor, which is introduced into the measuring chamber via a channel, not shown here.
  • the back pressure should be negligible, the measuring chamber is evacuated accordingly.
  • the pressure sensor 1 comprises a capacitive transducer.
  • the capacitive transducer comprises a measuring electrode 5 on the measuring chamber side surface of the measuring membrane 3, which is contacted via the joint 4, and at least one counter electrode 6 on the measuring chamber side end face of the base body 2, which is contacted via an electrical conductor which extends through an opening 7 by the Measuring chamber extends substantially in the axial direction through the base body 2.
  • the electrical conductor comprises a conductive layer containing glass and at least one noble metal element, for example gold and / or platinum.
  • the layer material has been introduced as a paste in the opening 7 and baked in.
  • the measuring electrode and the counter electrode may have substantially the same material as the electrical conductor.
  • the opening 7 is closed with a means of a Aktivhartlotplättchens 8, circular disc-shaped metal plate 9, which has a thickness of about 200 microns and a diameter of about 4 mm.
  • the metal plate 9 comprises a Mo-Ti-Zr alloy.
  • a recess 10 is provided in the rear end face 11 of the base body 2, in which the opening 7 opens.
  • the metal plate 9 has as Weichlot. anyway on his
  • the pressure sensor according to the invention allows a simplified production, since the joints between the measuring membrane and the base body on the one hand and between the metal body to close the opening for the primary signal path and the main body on the other hand have similar or identical material properties. Furthermore, the pressure sensor according to the invention allows improved contacting of the primary signal path.

Abstract

L'invention concerne un capteur de pression (1) comprenant un corps de base (2) ; une membrane de mesure (3) qui est reliée de manière étanche à la pression avec le corps de base (2) en formant une chambre de mesure au moyen d'un premier point de jonction (4) qui présente une brasure forte active ; un convertisseur (5, 6) pour convertir une déformation dépendante de la pression de la membrane de mesure en un signal électrique primaire ; ainsi qu'un trajet de signal primaire qui s'étend depuis le convertisseur à travers le corps de base. Selon l'invention, le trajet de signal primaire comprend au moins un conducteur électrique qui s'étend dans une section à travers une ouverture (7) à travers le corps de base. Toujours selon l'invention, l'ouverture est fermée au moyen d'un corps métallique (9) qui présente une surface plane faisant face à la chambre de mesure et attachée de manière étanche à la pression avec le corps de base (2) au moyen d'un deuxième point de jonction (8) qui entoure l'ouverture (7) et qui présente une brasure forte active. Selon l'invention, la brasure forte active du deuxième point de jonction (8) présente un point de fusion qui est inférieur au maximum de 50 °C ou de 25 °C à celui de la brasure forte active du premier point de jonction.
PCT/EP2008/057490 2007-07-03 2008-06-13 Capteur de pression WO2009003826A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007030910.6 2007-07-03
DE102007030910A DE102007030910A1 (de) 2007-07-03 2007-07-03 Drucksensor

Publications (1)

Publication Number Publication Date
WO2009003826A1 true WO2009003826A1 (fr) 2009-01-08

Family

ID=39731582

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/057490 WO2009003826A1 (fr) 2007-07-03 2008-06-13 Capteur de pression

Country Status (2)

Country Link
DE (1) DE102007030910A1 (fr)
WO (1) WO2009003826A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011117014A2 (fr) 2010-03-23 2011-09-29 Endress+Hauser Gmbh+Co.Kg Capteur de pression
DE102012213572A1 (de) * 2012-08-01 2014-02-06 Ifm Electronic Gmbh Kapazitiver Drucksensor

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008043567A1 (de) 2008-11-07 2010-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102009003178A1 (de) * 2009-05-18 2010-11-25 Endress + Hauser Gmbh + Co. Kg Keramisches Bauteil mit mindestens einer elektrischen Durchführung, Verfahren zu dessen Herstellung und Drucksensor mit einem solchen Bauteil
EP2455737A1 (fr) * 2010-11-17 2012-05-23 Baumer Innotec AG Capteur doté d'une cellule en céramique
DE102011084612A1 (de) * 2011-10-17 2013-04-18 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle mit kapazitivem Wandler
DE102014102717B4 (de) 2014-02-28 2022-10-06 Endress+Hauser SE+Co. KG Bauteilanordnung mit mindestens zwei Bauteilen und Verfahren zum Herstellen einer Bauteilanordnung
DE102017114298A1 (de) * 2017-06-28 2019-01-03 Endress+Hauser SE+Co. KG Druckmesseinrichtung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095759A (en) * 1990-06-01 1992-03-17 Gte Products Corporation Platinum electrode bonded to ceramic
US5189591A (en) * 1992-06-12 1993-02-23 Allied-Signal Inc. Aluminosilicate glass pressure transducer
EP0516579B1 (fr) * 1991-05-26 1994-06-22 Endress + Hauser Gmbh + Co. Contact à travers une pièce isolante
EP0490807B1 (fr) * 1990-11-13 1995-12-27 Endress U. Hauser Gmbh U. Co. Brasure active à trois composants à base d'un alliage Zirconium/Nickel
EP0654174B1 (fr) * 1992-08-04 2000-10-04 The Morgan Crucible Company Plc Traversees etanches en alliage actif conducteur

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095759A (en) * 1990-06-01 1992-03-17 Gte Products Corporation Platinum electrode bonded to ceramic
EP0490807B1 (fr) * 1990-11-13 1995-12-27 Endress U. Hauser Gmbh U. Co. Brasure active à trois composants à base d'un alliage Zirconium/Nickel
EP0516579B1 (fr) * 1991-05-26 1994-06-22 Endress + Hauser Gmbh + Co. Contact à travers une pièce isolante
US5189591A (en) * 1992-06-12 1993-02-23 Allied-Signal Inc. Aluminosilicate glass pressure transducer
EP0654174B1 (fr) * 1992-08-04 2000-10-04 The Morgan Crucible Company Plc Traversees etanches en alliage actif conducteur

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011117014A2 (fr) 2010-03-23 2011-09-29 Endress+Hauser Gmbh+Co.Kg Capteur de pression
DE102010003145A1 (de) 2010-03-23 2011-09-29 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102012213572A1 (de) * 2012-08-01 2014-02-06 Ifm Electronic Gmbh Kapazitiver Drucksensor

Also Published As

Publication number Publication date
DE102007030910A1 (de) 2009-01-08

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