WO2008153364A3 - Method for forming multi layer film using laser - Google Patents
Method for forming multi layer film using laser Download PDFInfo
- Publication number
- WO2008153364A3 WO2008153364A3 PCT/KR2008/003369 KR2008003369W WO2008153364A3 WO 2008153364 A3 WO2008153364 A3 WO 2008153364A3 KR 2008003369 W KR2008003369 W KR 2008003369W WO 2008153364 A3 WO2008153364 A3 WO 2008153364A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- thin film
- metal thin
- forming
- irradiating
- multi layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
- G02F1/136263—Line defects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/50—Protective arrangements
Abstract
Disclosed is a method of forming a multi layer thin film, including forming first and second contact holes by irradiating a laser beam on a metal pattern having an open defect; filling the first and second contact holes with a metal thin film by irradiating a laser beam; forming a metal thin film between the first and second contact holes by irradiating a laser beam; and forming a passivation film made of SixNy or SiO2 to protect the metal thin film. The method further includes pre-cleaning the surface of a region of the metal pattern, on which the metal thin film is formed, before the formation of the metal thin film, thus increasing the adhesive force of the metal thin film and remarkably reducing a possibility that the metal thin film is arbitrarily removed.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2007-0058340 | 2007-06-14 | ||
KR1020070058340A KR20080110053A (en) | 2007-06-14 | 2007-06-14 | Method for forming multi layer film using laser |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008153364A2 WO2008153364A2 (en) | 2008-12-18 |
WO2008153364A3 true WO2008153364A3 (en) | 2009-02-19 |
Family
ID=40130330
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2008/003369 WO2008153364A2 (en) | 2007-06-14 | 2008-06-16 | Method for forming multi layer film using laser |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20080110053A (en) |
TW (1) | TW200914922A (en) |
WO (1) | WO2008153364A2 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0756181A (en) * | 1993-08-19 | 1995-03-03 | Fujitsu Ltd | Liquid crystal display panel and method for repairing wiring pattern |
US5600460A (en) * | 1993-11-08 | 1997-02-04 | Hitachi, Ltd. | Method of repairing a signal line open circuit by connecting each side of the signal line to an adjacent pixel electrode |
US20020027729A1 (en) * | 2000-08-15 | 2002-03-07 | Siew Liangsin | Servo test method |
KR20020091693A (en) * | 2001-05-31 | 2002-12-06 | 주식회사 현대 디스플레이 테크놀로지 | Method for manufacturing thin film transistor lcd |
US20050110736A1 (en) * | 2003-09-30 | 2005-05-26 | Yushi Jinno | Display device |
-
2007
- 2007-06-14 KR KR1020070058340A patent/KR20080110053A/en active Search and Examination
-
2008
- 2008-06-16 WO PCT/KR2008/003369 patent/WO2008153364A2/en active Application Filing
- 2008-06-16 TW TW097122440A patent/TW200914922A/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0756181A (en) * | 1993-08-19 | 1995-03-03 | Fujitsu Ltd | Liquid crystal display panel and method for repairing wiring pattern |
US5600460A (en) * | 1993-11-08 | 1997-02-04 | Hitachi, Ltd. | Method of repairing a signal line open circuit by connecting each side of the signal line to an adjacent pixel electrode |
US20020027729A1 (en) * | 2000-08-15 | 2002-03-07 | Siew Liangsin | Servo test method |
KR20020091693A (en) * | 2001-05-31 | 2002-12-06 | 주식회사 현대 디스플레이 테크놀로지 | Method for manufacturing thin film transistor lcd |
US20050110736A1 (en) * | 2003-09-30 | 2005-05-26 | Yushi Jinno | Display device |
Also Published As
Publication number | Publication date |
---|---|
WO2008153364A2 (en) | 2008-12-18 |
KR20080110053A (en) | 2008-12-18 |
TW200914922A (en) | 2009-04-01 |
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